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1. 发明授权

US09977049B2 Scanning probe microscope and control method thereof 有权
公开(公告)号：US09977049B2
公开(公告)日：2018-05-22
申请号：US15092027
申请日：2016-04-06
申请人： OLYMPUS CORPORATION
发明人： Nobuaki Sakai
IPC分类号： G01Q10/00 , G01Q10/06 , G01Q60/32 , B82Y35/00
CPC分类号： G01Q10/00 , B82Y35/00 , G01Q10/065 , G01Q60/32
摘要： A scanning probe microscope includes a cantilever having a probe at a free end thereof; a scanner to three-dimensionally relatively move the probe and a sample; a vibrator to vibrate the cantilever based on a vibrating signal; a displacement detector to detect a displacement of the cantilever and to output a displacement signal indicating the displacement; and a phase difference information detecting section to generate a phase signal including information of a phase difference between the vibrating signal and the displacement signal. The phase difference information detecting section includes a phase regulating portion to provide, to the phase difference, a phase offset to cancel an initial phase difference present in a state in which the probe is not in contact with the sample.

2. 发明申请

US20170315091A1 METHOD FOR EVALUATING STRUCTURAL CHANGE DURING PRODUCTION PROCESS, AND ANALYSIS PROGRAM 审中-公开
公开(公告)号：US20170315091A1
公开(公告)日：2017-11-02
申请号：US15526231
申请日：2014-12-08
申请人： HITACHI, LTD.
发明人： Takeshi NAKAYAMA , Masanari KOGUCHI
IPC分类号： G01N27/62 , G01N33/20 , G01N1/44
CPC分类号： G01N27/62 , G01N1/286 , G01N1/44 , G01N33/20 , G01N2001/282 , G01N2001/2873 , G01N2001/2893 , G01Q10/00 , H01J37/285
摘要： Areas having different isotopic ratios are artificially introduced into a metal material before sintering, a heat treatment, or Grain boundary diffusion, and atom probe analysis results before and after sintering, a heat treatment, or grain boundary diffusion are compared to evaluate a change in isotopic distribution over time.

3. 发明申请

US20170199220A1 Systems and Devices for Non-Destructive Surface Chemical Analysis of Samples 有权
公开(公告)号：US20170199220A1
公开(公告)日：2017-07-13
申请号：US15428552
申请日：2017-02-09
申请人： AIST-NT, Inc.
发明人： Sergey A. Saunin , Andrey V. Krayev , Vladimir V. Zhishimontov , Vasily V. Gavrilyuk , Leonid N. Grigorov , Alexey V. Belyaev , Dmitry A. Evplov
IPC分类号： G01Q30/02 , G01Q20/00 , G01Q10/00
CPC分类号： G01Q30/02 , G01Q10/00 , G01Q20/00 , G01Q30/025 , G01Q60/06
摘要： Aspects of the present invention include systems and devices useful for surface chemical analysis of solid samples by Tip Enhanced Raman Spectrometry (“TERS”), and particularly it relates to devices useful for chemical analysis of molecular compounds located either on or within thin surface layer of solid samples. Even more particularly, aspects of the present invention relate to systems, and devices for non-destructive analysis combining both high sensitivity and high spatial resolution of analysis of chemical compounds located or distributed on the surface of solid samples with obtaining important information regarding vibration spectra of atoms and molecular groups contained in a thin surface layer of solid samples. These objectives are realized by implementation of computer-assisted systems that use sensors to carefully regulate the motion of, and force applied to, probes of atomic force microscopes.

4. 发明授权

US09645182B2 Method and apparatus for detecting an energized E-field 有权
公开(公告)号：US09645182B2
公开(公告)日：2017-05-09
申请号：US14055195
申请日：2013-10-16
申请人： Whirlpool Corporation
发明人： Mark L. Herman , Garry L. Peterman , Daniel M. Putnam
IPC分类号： G01R31/00 , G01R29/12 , H05B6/62 , G01R1/00 , G05F1/00 , G01Q10/00
CPC分类号： G01R29/0857 , D06F58/02 , D06F58/266 , G01Q10/00 , G01R1/00 , G01R29/12 , G05F1/00 , G08B7/06 , G08B21/18 , H05B6/62
摘要： A method for detecting the presence of an energized e-field in a space, wherein the space includes at least one electrically conductive element disposed in the space and coupled with a controller, the method including receiving in the controller a signal from the at least one electrically conductive element, comparing the value to a threshold, and if the value exceeds the threshold, determining that an energized e-field occupies the space, and sending a signal from the controller indicative of the presence of the energized e-field in the space.

5. 发明申请

US20170102407A1 SCANNING PROBE MICROSCOPE AND METHOD FOR EXAMINING A SURFACE WITH A HIGH ASPECT RATIO 审中-公开
公开(公告)号：US20170102407A1
公开(公告)日：2017-04-13
申请号：US15386203
申请日：2016-12-21
申请人： Carl Zeiss SMT GmbH
发明人： Christof Baur , Klaus Edinger
IPC分类号： G01Q10/04
CPC分类号： G01Q10/045 , G01Q10/00 , G01Q10/06 , G01Q10/065 , G01Q70/14
摘要： The invention relates to a scanning probe microscope, having: (a) a scanning device for scanning a measurement tip over a surface; (b) a cantilever for the measurement tip, wherein the cantilever has a torsion region; (c) wherein the torsion region is configured such that it undergoes torsion when a control signal is applied and thereby pivots the measurement tip; and (d) a control device for outputting the control signal when the measurement tip scans a region of the surface that can be examined more closely with a pivoted measurement tip than with-out pivoting the measurement tip.

6. 发明授权

US09519005B2 Scanning mechanism and scanning probe microscope 有权
公开(公告)号：US09519005B2
公开(公告)日：2016-12-13
申请号：US14862538
申请日：2015-09-23
申请人： OLYMPUS CORPORATION
发明人： Nobuaki Sakai
IPC分类号： G01Q10/00 , G01Q20/02 , G01Q10/04 , G01Q30/02
CPC分类号： G01Q10/00 , G01Q10/04 , G01Q20/02 , G01Q30/025
摘要： A scanning mechanism includes a cantilever, an XY movable portion movable in X and Y directions parallel to an X-Y plane, an XY actuator to scan the XY movable portion in the X and Y directions, a Z actuator to scan the cantilever in a Z direction perpendicular to the X-Y plane, and a light condensing portion to cause light for detecting a displacement of the cantilever to enter the cantilever. The Z actuator and the light condensing portion are held by the XY movable portion and arranged side by side in projection to the X-Y plane.

7. 发明授权

US09410984B2 Surface force measuring method and surface force measuring apparatus 有权
标题翻译：表面力测量方法和表面力测量仪
公开(公告)号：US09410984B2
公开(公告)日：2016-08-09
申请号：US14762261
申请日：2014-01-16
申请人： ELIONIX INC.
发明人： Hironao Amemiya , Hayato Kobayashi , Takahisa Kato
IPC分类号： G01Q60/24 , G01Q10/06 , G01Q60/38 , G01Q20/04 , G01Q10/00
CPC分类号： G01Q60/38 , G01N2203/0286 , G01Q10/00 , G01Q20/04
摘要： The present invention provides a method and an apparatus for measuring a force (which will be referred to as surface force) acting between two material surfaces. A surface force measuring method includes moving an object (1) toward a probe (4) until the probe (4) is adsorbed to the object (1), then applying a load from an electromagnetic-force generator (20) to a supporting member (6) in a direction as to separate the probe (4) from the object (1) while gradually increasing an electric current supplied to the electromagnetic-force generator (20), obtaining a value of the electric current supplied to the electromagnetic-force generator (20) when the probe (4) is separated from the object (1), and converting the value of the electric current into a surface force acting between the probe (4) and the object (1).
摘要翻译：本发明提供一种用于测量作用在两个材料表面之间的力（将被称为表面力）的方法和装置。表面力测量方法包括将物体（1）朝向探针（4）移动直到探针（4）被吸附到物体（1），然后将负载从电磁力发生器（20）施加到支撑构件（6）沿着使探针（4）与物体（1）分离的方向，同时逐渐增加供应到电磁力发生器（20）的电流，获得提供给电磁力的电流值发生器（20），当探头（4）与物体（1）分离时，将电流值转换成作用在探头（4）和物体（1）之间的表面力。

8. 发明授权

US09404855B2 Method to obtain absorption spectra from near-field infrared scattering using homo-dyne detection 有权
标题翻译：使用同态电位检测从近场红外散射获得吸收光谱的方法
公开(公告)号：US09404855B2
公开(公告)日：2016-08-02
申请号：US14647410
申请日：2013-11-27
申请人： Xiaoji Xu , Gilbert C Walker
发明人： Xiaoji Xu , Gilbert C Walker
IPC分类号： G01Q20/02 , G01Q30/00 , G01N21/359 , B82Y20/00 , G01Q30/02 , G01Q60/22 , G01B9/02 , G01Q10/00
CPC分类号： G01N21/359 , B82Y20/00 , G01B9/0203 , G01N2201/06113 , G01N2201/10 , G01Q10/00 , G01Q30/02 , G01Q60/06 , G01Q60/22
摘要： The present disclosure provides a procedure and an apparatus to obtain the absorption profiles of molecular resonance with ANSOM. The method includes setting a reference field phase to φ=0.5π relative to the near-field field, and reference amplitude A≧5|αeff|. The requirement on phase precision is found to be
摘要翻译：本公开提供了获得与ANSOM的分子共振的吸收曲线的方法和装置。该方法包括相对于近场场设定参考场相位φ=0.5π，参考振幅A≥5|αeff|。相位精度的要求为<0.3π。该装置包括除了ANSOM之外的相位稳定机制，以保持小于0.1rad的高相位精度零差相位条件。该方法使ANSOM能够以纳米级空间分辨率执行振动光谱。

9. 发明申请

US20160154022A1 PROBE MICROSCOPE 有权
标题翻译：探针显微镜
公开(公告)号：US20160154022A1
公开(公告)日：2016-06-02
申请号：US14905378
申请日：2014-07-18
申请人： INFINITESIMA LIMITED
发明人： Andrew HUMPHRIS
IPC分类号： G01Q10/00 , G01Q20/00
CPC分类号： G01Q10/00 , G01Q10/065 , G01Q20/00
摘要： A scanning probe microscope comprising: a signal generator providing a drive signal for an actuator to move a probe repeatedly towards and away from a sample. In response to the detection of an interaction of the probe with the sample the drive signal is modified to cause the probe to move away from the sample. The drive signal comprises an approach phase in which an intensity of the drive signal increases to a maximum value; and a retract phase in which the intensity of the drive signal reduces from the maximum value to a minimum value in response to the detection of the surface position. The intensity of the drive signal is held at the minimum value during the retract phase and then increased at the end of the retract phase. The duration of the retract phase is dependent on the maximum value in the approach phase.
摘要翻译：一种扫描探针显微镜，包括：信号发生器，用于为致动器提供驱动信号，以使样本重复地朝向和远离样品移动。响应于探测器与样品的相互作用的检测，驱动信号被修改以使探针远离样品。驱动信号包括其中驱动信号的强度增加到最大值的接近阶段; 以及回缩阶段，其中响应于表面位置的检测，驱动信号的强度从最大值减小到最小值。在退回阶段，驱动信号的强度保持在最小值，然后在收回阶段结束时增加。缩回阶段的持续时间取决于接近阶段的最大值。

10. 发明授权

US09222958B2 Beam scanning system 有权
标题翻译：光束扫描系统
公开(公告)号：US09222958B2
公开(公告)日：2015-12-29
申请号：US14375622
申请日：2013-01-29
申请人： INFINITESIMA LIMITED
发明人： Andrew Humphris , Bin Zhao
IPC分类号： G01Q20/02 , G01Q10/04 , G01Q10/00
CPC分类号： G01Q20/02 , G01Q10/00 , G01Q10/045
摘要： Apparatus for illuminating a probe of a probe microscope. A lens is arranged to receive a beam and focus it onto the probe. A scanning system varies over time the angle of incidence at which the beam enters the lens relative to its optical axis. The scanning system is typically arranged to move the beam so as to track movement of the probe, thereby maintaining the location on the probe at which the beam is focused. The scanning system may comprise a beam steering mirror which reflects the beam towards the lens; and a mirror actuator for rotating the beam steering mirror.
摘要翻译：用于照射探针显微镜的探针的装置。透镜被布置成接收光束并将其聚焦到探头上。随着时间的推移，扫描系统随着光束相对于其光轴进入透镜的入射角而变化。扫描系统通常被布置成移动光束以跟踪探针的移动，从而保持探针上的位置，在该位置上光束被聚焦。扫描系统可以包括将光束反射到透镜的光束转向镜; 以及用于旋转光束导向镜的反射镜致动器。

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