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    • 8. 发明授权
    • Crystal manufacturing apparatus
    • 水晶制造装置
    • US09222199B2
    • 2015-12-29
    • US12748515
    • 2010-03-29
    • Seiji SarayamaHirokazu Iwata
    • Seiji SarayamaHirokazu Iwata
    • C30B35/00C30B29/40C30B9/10
    • C30B29/403C30B9/10C30B29/406Y10S117/90Y10T117/10Y10T117/1016Y10T117/1024Y10T117/1064
    • A crystal manufacturing apparatus for manufacturing a group III nitride crystal includes a crucible that holds a mixed molten liquid including an alkali metal and a group III metal; a reaction vessel accommodating the crucible in the reaction vessel; a heating device that heats the crucible with the reaction vessel; a holding vessel having a lid that is capable of opening and closing, accommodating the reaction vessel and the heating device in the holding vessel; a sealed vessel accommodating the holding vessel in the sealed vessel, having an operating device that enables opening the lid of the holding vessel for supplying source materials into the crucible and taking out a manufactured GaN crystal under a sealed condition, and closing the lid of the holding vessel that is sealed in the sealed vessel, the sealed vessel including an inert gas atmosphere or a nitrogen atmosphere; and a gas supplying device for supplying a nitrogen gas to the mixed molten liquid through each of the vessels.
    • 用于制造III族氮化物晶体的晶体制造装置包括:保持包含碱金属和III族金属的混合熔融液的坩埚; 将坩埚容纳在反应容器中的反应容器; 用反应容器加热坩埚的加热装置; 保持容器,其具有能够打开和关闭的盖子,将反应容器和加热装置容纳在容纳容器中; 容纳保持容器在密封容器中的密封容器,具有能够打开保持容器的盖以将源材料供应到坩埚中并在密封状态下取出制造的GaN晶体的操作装置,并且关闭盖 保持容器密封在密封容器中,密封容器包括惰性气体气氛或氮气氛; 以及用于通过每个容器向混合的熔融液体供给氮气的气体供给装置。