专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US11891721B2 Spool-balanced seed lift 有权
公开(公告)号：US11891721B2
公开(公告)日：2024-02-06
申请号：US17338152
申请日：2021-06-03
申请人： Linton Kayex Technology Co., Ltd
发明人： Jiaqi Yin , John A. Reese , Joel C. Stefl
IPC分类号： C30B35/00 , C30B15/32 , C30B15/14 , C30B15/24 , C30B15/10 , C30B15/30
CPC分类号： C30B35/002 , C30B15/10 , C30B15/14 , C30B15/24 , C30B15/30 , C30B15/32
摘要： A crystal growing system can include a spool-balanced seed lift assembly for rotating and lifting a seed crystal supported by a cable. The seed crystal is supported along and rotated about a lift axis. The spool-balanced seed lift assembly includes a spool that rotates on, and has a center of gravity along, an axis that intersects the lift axis. As the spool rotates, it moves axially along its axis to avoid displacing the cable from the lift axis. A guide pulley positioned below the spool is used to direct the cable between the lift axis and a spool-tangent axis to minimize displacement of the cable as it is raised and rotated.

2. 发明申请

US20190211469A1 SYSTEMS FOR SELECTIVELY FEEDING CHUNK POLYSILICON OR GRANULAR POLYSILICON IN A CRYSTAL GROWTH CHAMBER 审中-公开
公开(公告)号：US20190211469A1
公开(公告)日：2019-07-11
申请号：US16352033
申请日：2019-03-13
申请人： GlobalWafers Co., Ltd.
发明人： Seok Min Yun , Seong Su Park , Jun Hwan Ji , Won-Jin Choi , UiSung Jung , Young Jung Lee , Tae Su Koo , Sung-Jin Kim
IPC分类号： C30B15/02 , B64G1/64 , C30B35/00 , C30B30/04 , C30B15/32 , C30B15/20 , G01S19/13 , C30B29/06 , B64G1/58 , G01S11/02 , B66D1/12
CPC分类号： C30B15/02 , B64G1/10 , B64G1/58 , B64G1/648 , B64G2001/1092 , B66D1/12 , C30B15/20 , C30B15/32 , C30B29/06 , C30B30/04 , C30B35/005 , G01P15/18 , G01S11/02 , G01S19/13
摘要： A feed assembly supplies polysilicon to a growth chamber for growing a crystal ingot from a melt. An example system includes a housing having support rails for receiving one of a granular tray and a chunk tray and a feed material reservoir positioned above the support rails to selectively feed one of either the granular tray or the chunk tray. A valve mechanism and pulse vibrator are also disclosed.

3. 发明申请

US20180237948A1 SYSTEMS FOR SELECTIVELY FEEDING CHUNK POLYSILICON OR GRANULAR POLYSILICON IN A CRYSTAL GROWTH CHAMBER 审中-公开
公开(公告)号：US20180237948A1
公开(公告)日：2018-08-23
申请号：US15753428
申请日：2016-08-18
申请人： SunEdison Semiconductor Limited (UEN201334164H) , DAEVAC International Co., Ltd.
发明人： Seok Min Yun , Seong Su Park , Jun Hwan Ji , Won-Jin Choi , UiSung Jung , Young Jung Lee , Tae Su Koo , Sung-Jin Kim
IPC分类号： C30B35/00 , C30B29/06 , C30B15/20 , C30B15/32 , C30B30/04
CPC分类号： B64G1/648 , B64G1/10 , B64G1/58 , B64G2001/1092 , B66D1/12 , C30B15/02 , C30B15/20 , C30B15/32 , C30B29/06 , C30B30/04 , C30B35/005 , G01P15/18 , G01S11/02 , G01S19/13
摘要： A feed assembly supplies polysilicon to a growth chamber for growing a crystal ingot from a melt. An example system includes a housing having support rails for receiving one of a granular tray and a chunk tray and a feed material reservoir positioned above the support rails to selectively feed one of either the granular tray or the chunk tray. A valve mechanism and pulse vibrator are also disclosed.

4. 发明授权

US09469917B2 Dopant feeder of ignot growing apparatus 有权
标题翻译：无机生长装置的掺杂饲料
公开(公告)号：US09469917B2
公开(公告)日：2016-10-18
申请号：US13821004
申请日：2012-08-10
申请人： Jin-Woo Ahn , Bong-Woo Kim , II-Soo Choi , Do-Yeon Kim
发明人： Jin-Woo Ahn , Bong-Woo Kim , II-Soo Choi , Do-Yeon Kim
IPC分类号： C30B15/04 , C30B29/06 , C30B15/32
CPC分类号： C30B15/04 , C30B15/32 , C30B29/06 , Y10T117/1032
摘要： Provided is an ingot growing apparatus, which includes a crucible containing a silicon melt, a pulling device pulling a silicon single crystal ingot grown from the silicon melt, and a dopant supply unit disposed adjacent to the pulling device and for supplying a dopant during growing of the ingot. The neck portion may be doped at a concentration higher than that of the ingot through the dopant supply unit. Therefore, dislocation propagation velocity may be decreased and a propagation length may be shortened.
摘要翻译：提供一种锭生长装置，其包括含有硅熔体的坩埚，拉拔从硅熔体生长的硅单晶锭的牵引装置和与拉动装置相邻设置的掺杂剂供给部，并且在生长期间供给掺杂剂锭。可以通过掺杂剂供给单元将颈部的掺杂浓度高于锭的浓度。因此，可以降低位错传播速度，并且可以缩短传播长度。

5. 发明授权

US08691009B2 Crystal pulling apparatus and method for the production of heavy crystals 有权
标题翻译：水晶拉制装置及重晶体生产方法
公开(公告)号：US08691009B2
公开(公告)日：2014-04-08
申请号：US12420857
申请日：2009-04-09
申请人： Burkhard Altekrüger , Stefan Henkel , Axel Vonhoff , Erich Tomzig , Dieter Knerer
发明人： Burkhard Altekrüger , Stefan Henkel , Axel Vonhoff , Erich Tomzig , Dieter Knerer
IPC分类号： C30B15/32
CPC分类号： C30B15/32 , Y10S117/911 , Y10T117/10 , Y10T117/1032 , Y10T117/1068 , Y10T117/1072
摘要： A pulling apparatus and a method with which especially heavy crystals (5) can be pulled using the Czochralski method utilizing the pulling apparatus. For this purpose the neck (4) of the crystal (5) has an enlargement (10) beneath which extends the support device. This device includes latches (7), which are moved from a resting position into an operating position in which the latches (7) extend beneath the enlargement (10). Each latch (7) is supported on the base body such that it is swivellable about a pivot axis (8) and can assume two stable positions, namely the resting position and the operating position. Each of these positions is defined by a stop on the base body. When the latch rests on the one stop, its center of gravity, viewed from the neck (4), is located on the other side of the pivot axis (8). When the latch rests on the other stop, the center of gravity is located on this side of the pivot axis (8). The actuation of the latches (7) takes place with actuation means disposed stationarily in the apparatus.
摘要翻译：拉伸装置和使用拉伸装置的切克劳斯基法可以拉伸特别重的晶体（5）的方法。为此，晶体（5）的颈部（4）具有放大（10），在该放大部分（10）延伸支撑装置。该装置包括闩锁（7），其从静止位置移动到闩锁（7）在放大部分（10）下方延伸的操作位置。每个闩锁（7）被支撑在基体上，使得其可绕枢转轴线（8）旋转并且可以呈现两个稳定的位置，即静止位置和操作位置。这些位置中的每一个由基体上的止挡限定。当闩锁位于一个停止点上时，从颈部（4）观察的其重心位于枢转轴线（8）的另一侧。当闩锁位于另一个挡块上时，重心位于枢转轴线（8）的这一侧。闩锁（7）的致动通过固定地设置在该装置中的致动装置进行。

6. 发明授权

US08337617B2 Manufacturing method and manufacturing apparatus of a group III nitride crystal 有权
标题翻译： III族氮化物晶体的制造方法和制造装置
公开(公告)号：US08337617B2
公开(公告)日：2012-12-25
申请号：US11596250
申请日：2006-03-13
申请人： Hirokazu Iwata , Seiji Sarayama , Minoru Fukuda , Tetsuya Takahashi , Akira Takahashi
发明人： Hirokazu Iwata , Seiji Sarayama , Minoru Fukuda , Tetsuya Takahashi , Akira Takahashi
IPC分类号： C30B9/00
CPC分类号： C30B19/02 , C30B9/00 , C30B15/00 , C30B15/32 , C30B17/00 , C30B19/06 , C30B29/403 , C30B29/406 , Y10T117/1024 , Y10T117/1032
摘要： A method for manufacturing a group III nitride crystal on a seed crystal in a holding vessel holding therein a melt containing a group III metal, an alkali metal and nitrogen. The manufacturing method comprises the steps of causing the seed crystal to make a contact with the melt, setting an environment of the seed crystal to a first state offset from a crystal growth condition while in a state in which said seed crystal is in contact with the melt, increasing a nitrogen concentration in the melt, and setting the environment of the seed crystal to a second state suitable for crystal growth when the nitrogen concentration of the melt has reached a concentration suitable for growing the seed crystal.
摘要翻译：一种用于在保持容器中的晶种上制造III族氮化物晶体的方法，其中容纳含有III族金属，碱金属和氮的熔体。该制造方法包括以下步骤：使晶种与熔体接触，将晶种的环境设定为偏离晶体生长条件的第一状态，同时在所述晶种与所述晶种接触的状态下熔融，增加熔体中的氮浓度，并且当熔体的氮浓度达到适于种植晶种的浓度时，将晶种的环境设定为适合晶体生长的第二状态。

7. 发明申请

US20110002819A1 Pulling Assemblies For Pulling A Multicrystalline Silicon Ingot From A Silicon Melt 有权
标题翻译：从硅熔体拉出多晶硅锭的拉拔组件
公开(公告)号：US20110002819A1
公开(公告)日：2011-01-06
申请号：US12646350
申请日：2009-12-23
申请人： Steven L. Kimbel
发明人： Steven L. Kimbel
IPC分类号： B01D9/00
CPC分类号： C30B15/32 , C30B29/06 , H01L31/182 , Y02E10/546 , Y02P70/521 , Y10T117/1052 , Y10T117/1056 , Y10T117/106
摘要： Methods for producing multicrystalline silicon ingots by use of a Czochralski-type crystal puller and pulling assemblies that include a plurality of seed crystals for pulling multicrystalline silicon ingots.
摘要翻译：通过使用Czochralski型晶体拉拔器制造多晶硅锭的方法和包括用于拉取多晶硅锭的多个晶种的拉组件。

8. 发明申请

US20090188425A1 CRYSTAL PULLING APPARATUS AND METHOD FOR THE PRODUCTION OF HEAVY CRYSTALS 有权
标题翻译：水晶拉丝装置及重晶石生产方法
公开(公告)号：US20090188425A1
公开(公告)日：2009-07-30
申请号：US12420857
申请日：2009-04-09
申请人： Burkhard ALTEKRUGER , Stefan Henkel , Axel Vonhoff , Erich Tomzig , Dieter Knerer
发明人： Burkhard ALTEKRUGER , Stefan Henkel , Axel Vonhoff , Erich Tomzig , Dieter Knerer
IPC分类号： C30B15/24 , C30B15/30
CPC分类号： C30B15/32 , Y10S117/911 , Y10T117/10 , Y10T117/1032 , Y10T117/1068 , Y10T117/1072
摘要： A pulling apparatus and a method with which especially heavy crystals (5) can be pulled using the Czochralski method utilizing the pulling apparatus. For this purpose the neck (4) of the crystal (5) has an enlargement (10) beneath which extends the support device. This device includes latches (7), which are moved from a resting position into an operating position in which the latches (7) extend beneath the enlargement (10). Each latch (7) is supported on the base body such that it is swivellable about a pivot axis (8) and can assume two stable positions, namely the resting position and the operating position. Each of these positions is defined by a stop on the base body. When the latch rests on the one stop, its center of gravity, viewed from the neck (4), is located on the other side of the pivot axis (8). When the latch rests on the other stop, the center of gravity is located on this side of the pivot axis (8). The actuation of the latches (7) takes place with actuation means disposed stationarily in the apparatus.
摘要翻译：拉伸装置和使用拉伸装置的切克劳斯基法可以拉伸特别重的晶体（5）的方法。为此，晶体（5）的颈部（4）具有放大（10），在该放大部分（10）延伸支撑装置。该装置包括闩锁（7），其从静止位置移动到闩锁（7）在放大部分（10）下方延伸的操作位置。每个闩锁（7）被支撑在基体上，使得其可绕枢转轴线（8）旋转并且可以呈现两个稳定的位置，即静止位置和操作位置。这些位置中的每一个由基体上的止挡限定。当闩锁位于一个停止点上时，从颈部（4）观察的其重心位于枢转轴线（8）的另一侧。当闩锁位于另一个挡块上时，重心位于枢转轴线（8）的这一侧。闩锁（7）的致动通过固定地设置在该装置中的致动装置进行。

9. 发明申请

US20070051303A1 Semiconductor single crystal manufacturing apparatus 有权
标题翻译：半导体单晶制造装置
公开(公告)号：US20070051303A1
公开(公告)日：2007-03-08
申请号：US10575481
申请日：2004-10-13
申请人： Toshirou Umeki
发明人： Toshirou Umeki
IPC分类号： C30B35/00 , C30B15/00 , C30B21/06 , C30B27/02 , C30B28/10 , C30B30/04
CPC分类号： C30B29/06 , C30B15/32 , Y10S117/911 , Y10T117/1052 , Y10T117/1068 , Y10T117/1072 , Y10T117/1088
摘要： A semiconductor single crystal manufacturing apparatus capable of lowering the local deterioration of a wire under high temperature atmosphere in the furnace of a chamber, wherein a crucible (24) in which silicon melt (28) is filled is installed in the furnace of the chamber (22), a pull-chamber (23) is disposed above the chamber (22), and a seed holder (32) lifting between the inside of the pull-chamber (23) and the inside of the furnace is suspended by a wire (50) through a coupling member (31). A collar (52) is fitted to the wire (50) so that, when the seed holder (32) is positioned to touch the melt, the exposed portion of the wire (50) near the tip thereof becomes a specified temperature or below under the high temperature atmosphere in the furnace.
摘要翻译：一种半导体单晶体制造装置，其能够降低室内的高温气氛下的导线的局部劣化，其中，将填充有硅熔体（28）的坩埚（24）安装在室的炉中如图22所示，在室（22）上方设置有拉腔（23），并且在拉室（23）的内部和炉内部之间提升的种子保持器（32）通过线（ 50）通过联接构件（31）。将线圈（52）装配到线（50），使得当种子保持器（32）定位成接触熔体时，接近尖端的线（50）的暴露部分变为指定温度或更低炉中的高温气氛。

10. 发明授权

US06497765B1 Multi piece swivel chuck for holding conical shaped work 失效
标题翻译：用于保持圆锥形工作的多片旋转卡盘
公开(公告)号：US06497765B1
公开(公告)日：2002-12-24
申请号：US09589467
申请日：2000-06-07
申请人： Travis S. Nice
发明人： Travis S. Nice
IPC分类号： C30B1530
CPC分类号： C30B15/32 , Y10T117/10 , Y10T279/14 , Y10T279/17017 , Y10T279/17094 , Y10T279/17111 , Y10T279/275
摘要： An improved chuck for supporting elongated work pieces having conical end portions, such as single crystal ingots used to fabricate semiconductor wafers, while such. The chuck is typically used in a lathe for positioning and allowing rotation of the work piece during a grinding procedure that results in optimal work piece diameter. The chuck comprises a ring-shaped base, or socket, having a cavity defining a central axis therethrough and a series of fastener holes for securing the base to a headstock or tailstock of a lathe. The base receives within the cavity a portion of a chuck insert. The chuck insert defines a work piece support surface that is coaxial with the central axis when the chuck insert is disposed in a nominal position within the cavity of the base. The work piece support surface will typically define a continuous, arcuate, convex surface capable of supporting work pieces having conical end portions of varying diameters. The chuck also includes a retainer that is adapted to surround and support at least a portion of the chuck insert. The retainer allows the chuck insert to pivot from the nominal position to a predetermined angle relative to the central axis when the conical end of the work piece is loaded into the chuck so as to align the work piece within the lathe. The pivoting nature of the chuck of the present invention allows for proper alignment of the work piece in the lathe by overcoming the frictional forces that exist between the work piece and the support surface.
摘要翻译：用于支撑具有锥形端部的细长工件的改进的卡盘，例如用于制造半导体晶片的单晶锭。卡盘通常用于车床中，用于在磨削过程中定位和允许工件的旋转，从而获得最佳的工件直径。卡盘包括环形基座或插座，其具有限定穿过其中心轴线的空腔和用于将基座固定到车床的头架或尾座的一系列紧固件孔。基座在空腔内容纳卡盘插入件的一部分。卡盘插入件限定了当卡盘插入件设置在基座的空腔内的标称位置时与中心轴线同轴的工件支撑表面。工件支撑表面通常将限定能够支撑具有不同直径的锥形端部的工件的连续的弓形凸形表面。卡盘还包括适于围绕和支撑卡盘插入件的至少一部分的保持器。当工件的锥形端部装载到卡盘中时，保持器允许卡盘插入件从标称位置枢转到相对于中心轴线的预定角度，以便将工件对准车床内。本发明的卡盘的旋转特性允许通过克服存在于工件和支撑表面之间的摩擦力来使车床上的工件正确对准。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式