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1. 发明申请

US20210215737A1 SYSTEMS, METHOD AND COMPUTER-ACCESSIBLE MEDIUM FOR PROVIDING BALANCED ASYMMETRIC INTERFEROMETRY FOR VIBRATIONALLY ISOLATED OPTICAL SCANNING PROBE(S) 有权
公开(公告)号：US20210215737A1
公开(公告)日：2021-07-15
申请号：US17149236
申请日：2021-01-14
申请人： The Trustees of Columbia University in the City of New York
发明人： ALEXANDER SWINTON MCLEOD , LIN XIONG , SHUAI ZHANG , DIMITRI N. BASOV
IPC分类号： G01Q20/02 , G01Q30/18 , G02B21/00
摘要： An exemplary apparatus can provide radiation to a sample(s), which can include, for example, a radiation source arrangement configured to provide radiation, a beam splitter configured to split the radiation into (i) a first radiation, and (ii) a second radiation. An optical element can also be provided which, in operation, can, e.g., (a) receive the first radiation and the second radiation, (b) reflect the first radiation as a reference radiation, (c) provide the second radiation as illumination for the sample(s), (d) receive a resultant radiation from the sample(s) that can be based on the illumination from the second radiation, and (e) provide the reference radiation and the resultant radiation to be detected and used for interferometric imaging or spectroscopy.

2. 发明申请

US20190331711A1 SCANNING PROBE MICROSCOPE AND LIGHT INTENSITY ADJUSTING METHOD 审中-公开
公开(公告)号：US20190331711A1
公开(公告)日：2019-10-31
申请号：US16290391
申请日：2019-03-01
申请人： Shimadzu Corporation
发明人： Kazuma WATANABE , Keita FUJINO , Eiji IIDA , Masato HIRADE , Kenji YAMASAKI , Hideo NAKAJIMA , Yuichiro IKEDA , Hiroshi ARAI
IPC分类号： G01Q20/02 , G01Q10/06 , G01Q30/04 , G01Q30/18
摘要： A scanning probe microscope includes a light source, a detector, a housing, an opening and closing door, an opening and closing sensor, a control unit, and the like. The opening and closing door is provided in the housing. The control unit 16 also functions as the light intensity change processing unit 164. In the scanning probe microscope, when the opening and closing sensor detects opening and closing of the opening and closing door, the light intensity change processing unit automatically changes the intensity of light irradiated from the light source based on a detection result of the opening and closing sensor. Therefore, it is possible to omit light intensity adjustment work performed manually by the user. As a result, the workability of the user when using the scanning probe microscope 1 can be improved.

3. 发明申请

US20190025339A1 HIGH MAGNETIC FIELD SCANNING PROBE MICROSCOPE EMPLOYING LIQUID HELIUM-FREE ROOM-TEMPERATURE BORE SUPERCONDUCTING MAGNET 审中-公开
公开(公告)号：US20190025339A1
公开(公告)日：2019-01-24
申请号：US16070909
申请日：2016-12-16
申请人： FUDAN UNIVERSITY
发明人： Shiwei WU , Zeyuan SUN , Shuai ZHANG , Di HUANG , Shengyu ZHOU , Lifeng YIN , Chunlei GAO , Jian SHEN
IPC分类号： G01Q30/18 , G01Q60/16 , G01Q30/16 , F17C3/08 , H01F6/04
CPC分类号： G01Q30/18 , F17C3/085 , F17C2203/0687 , F17C2221/017 , F17C2223/0161 , G01Q30/16 , G01Q60/16 , H01F6/04
摘要： A scanning probe microscope of the present disclosure includes: a room-temperature bore superconducting magnet including a liquid helium-consumption free closed-cycle cooling system, a superconducting magnet, and a chamber having a room-temperature bore; and a scanning probe microscope including a scanning head, a vacuum chamber, and a vibration isolation platform; and a computer control system. The room-temperature bore superconducting magnet is cooled by the cryogen-free closed-cycle cooling system which eliminates the dependence on liquid helium for high magnetic field operation. There is no physical contact between the scanning probe microscope and the superconducting magnet connected to the closed-cycle cooling system. The scanning probe microscope can achieve atomic-scale spatial resolution. The temperature of the scanning probe microscope is not restricted by the low temperature conditions for operation of the superconducting magnet. The scanning probe microscope and the vacuum chamber can achieve high-temperature baking independent of the superconducting magnet for ultra-high vacuum conditions.

4. 发明授权

US10073116B2 Scanning probe microscope and its sample holder 有权
公开(公告)号：US10073116B2
公开(公告)日：2018-09-11
申请号：US15533535
申请日：2014-12-24
申请人： HITACHI, LTD.
发明人： Sanato Nagata , Tomihiro Hashizume , Akira Nambu , Hideaki Koizumi
IPC分类号： G01Q30/14 , G01Q30/18 , G01Q30/20 , G01Q60/18 , G01Q60/24
CPC分类号： G01Q30/20 , G01Q30/14 , G01Q60/18 , G01Q60/24
摘要： This sample holder for a scanning probe microscope is constituted of (1) a container that retains a liquid and (2) a flat-plate-shaped upper cover that covers an upper opening of the container and that has a narrow slit above the position where a sample is placed. In the upper cover, the slit has a slit width with which a thin film of the liquid is formed over the upper surface of the sample when the liquid fills the space between the container and the upper cover. The thin film of the liquid has a film thickness smaller than the distance between the upper surface of the sample and the upper cover.

5. 发明授权

US09897626B2 Scanning probe microscope with a reduced Q-factor 有权
公开(公告)号：US09897626B2
公开(公告)日：2018-02-20
申请号：US15517063
申请日：2015-10-05
申请人： Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
发明人： Femke Chantal Tabak , Hamed Sadeghian Marnani , Maarten Hubertus van Es
IPC分类号： G01Q10/06 , G01Q70/04 , G01Q30/18
CPC分类号： G01Q70/04 , G01Q30/12 , G01Q30/18 , G01Q60/32
摘要： A scanning probe microscope is provided comprising a scanning probe (10), a holder (5) for holding a sample (SMP) in an environment free from liquid. A scanning arrangement (20) is provided therein for inducing a relative motion of the scanning probe (10) with respect to said sample (SMP) along a surface of the sample (SMP). A driver (30) generates a drive signal (Sd) to induce an oscillating motion of the scanning probe (10) relative to the surface of the sample to be scanned. A measuring unit (40) measure a deflection of the scanning probe (10), and provides a deflection signal (Sδ) indicative for said deflection. An amplitude detector (50) detects an amplitude of the oscillating motion as indicated by the deflection signal (Sδ) and provides an amplitude signal (Sa) indicative for the amplitude. The scanning probe (10) is at least partly arranged in a liquid (L) to dampen motion of said scanning probe, and therewith has a quality factor Q which is less than or equal than 5. The scanning probe (10) is accommodated in a casing (90) comprising said liquid (L), the scanning probe (10) comprising a flexible carrier (11), the flexible carrier having a movable part provided with a tip (12), which tip (12) extends through an opening (91) in said casing.

6. 发明授权

US5760396A Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US5760396A
公开(公告)日：1998-06-02
申请号：US874440
申请日：1997-06-16
申请人： Stuart M. Lindsay , Tianwei Jing
发明人： Stuart M. Lindsay , Tianwei Jing
IPC分类号： G01B21/30 , G01N27/416 , G01Q10/00 , G01Q20/02 , G01Q30/18 , H01J37/20
CPC分类号： G01Q20/02 , B82Y10/00 , B82Y35/00 , G01Q30/14 , G01Q70/02 , Y10S977/869
摘要： Features for incorporation with scanning probe microscopes are provided which may be used separately or together. The features include constructing the microscope with a hinged top housing providing easy access to the heart of the microscope; a self-aligning and torque limiting magnetic clutch coupling a motor drive powering at least one vertical adjustment screw of the microscope; a removable microscope head for easy adjustment; an optical microscope, optionally mounted to an electronic camera and imaging system, installed adjacent to the head; operation on an inverted microscope stage; bowing error correction; a gas sparging system providing contaminant and noise reduction; a glove box type of loading system so that reactive materials may be safely loaded into the microscope; and a compact desk-top chamber which provides acoustic and vibration isolation.
摘要翻译：提供用于结合扫描探针显微镜的特征，其可以单独使用或一起使用。这些特征包括用铰链顶部外壳构建显微镜，可轻松访问显微镜的心脏; 耦合电动机驱动器的自对准和扭矩限制电磁离合器为显微镜的至少一个垂直调节螺钉供电; 一个可拆卸的显微镜头，便于调节; 光学显微镜，可选地安装在电子照相机和成像系统上，安装在头部附近; 在倒置显微镜阶段进行手术; 弯曲误差校正; 提供污染和降噪的气体喷射系统; 手套箱式加载系统，使反应性材料可以安全地载入显微镜; 和一个紧凑的桌面室，提供隔音和隔音。

7. 发明授权

US5751686A Scanning probe tip covered with an electrical resistance to limit recording/reproducing current 失效
标题翻译：扫描探针尖端被电阻覆盖以限制记录/再现电流
公开(公告)号：US5751686A
公开(公告)日：1998-05-12
申请号：US665457
申请日：1996-06-18
申请人： Ryo Kuroda , Shunichi Shido
发明人： Ryo Kuroda , Shunichi Shido
IPC分类号： G02B21/00 , G01Q30/18 , G01Q60/14 , G01Q60/38 , G01Q60/42 , G01Q80/00 , G11B9/00 , G11B9/04 , G11B9/14 , G11B19/04
CPC分类号： G11B9/14 , G11B9/1409 , B82Y10/00 , G01Q60/16 , G01Q70/06 , G01Q80/00 , G11B19/04 , Y10S977/875
摘要： A probe for use in an information recording apparatus for recording information on a recording medium by applying a voltage between the recording medium and a tip of the probe includes a conductive tip, wiring provided on the probe for applying a voltage to the tip from a voltage application device, and an electrical resistance provided in the tip or in the wiring on the probe. The resistance may be composed of an oxide film on the surface of the tip. Instead of providing the electrical resistance, the tip or the wiring may be covered with an electromagnetic shield. As another alteractive, an electrical resistance layer may be provided between a substrate of the recording layer and the tip of the probe.
摘要翻译：一种用于信息记录装置的探针，用于通过在记录介质和探针的尖端之间施加电压将信息记录在记录介质上，包括导电末端，设置在探针上的布线，用于从电压施加电压至尖端应用装置，以及设置在探针的尖端或布线中的电阻。电阻可以由尖端表面上的氧化膜构成。代替提供电阻，尖端或布线可以用电磁屏蔽覆盖。作为另一种替代物，可以在记录层的基底和探针的尖端之间设置电阻层。

8. 发明授权

US5508517A Scanning probe type microscope apparatus 失效
标题翻译：扫描式显微镜装置
公开(公告)号：US5508517A
公开(公告)日：1996-04-16
申请号：US461142
申请日：1995-06-05
申请人： Tetsuji Onuki , Masatoshi Suzuki , Toru Fujii , Hiroyuki Matsushiro , Hideaki Ohkubo
发明人： Tetsuji Onuki , Masatoshi Suzuki , Toru Fujii , Hiroyuki Matsushiro , Hideaki Ohkubo
IPC分类号： G01Q20/02 , G01N27/00 , G01Q30/02 , G01Q30/18 , G01Q60/00 , G01Q70/02 , G02B21/00 , H01J37/26
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q30/025 , G01Q70/02 , G02B21/002 , Y10S977/869
摘要： A high resolution scanning probe type microscope capable for simultaneous observation of the optical images of a sample and the probe tip. The microscope has a construction in which the probe and the optical microscope are supported with separate supporting members and the probe is disposed inside the visual field of the optical microscope. The supporting members of the probe and the optical microscope are installed on a vibration-proof table, and the supporting member for the probe has a double-end-supported type beam construction.
摘要翻译：一种高分辨率扫描探针型显微镜，能够同时观察样品的光学图像和探针尖端。显微镜具有其中探针和光学显微镜由分开的支撑构件支撑的结构，并且探针设置在光学显微镜的视野内。探头的支撑构件和光学显微镜安装在防振台上，用于探针的支撑构件具有双端支撑梁结构。

9. 发明授权

US5455420A Scanning probe microscope apparatus for use in a scanning electron 失效
标题翻译：用于扫描电子显微镜的扫描探针显微镜装置
公开(公告)号：US5455420A
公开(公告)日：1995-10-03
申请号：US273740
申请日：1994-07-12
申请人： Huddee Ho , Paul E. West
发明人： Huddee Ho , Paul E. West
IPC分类号： G01Q10/04 , G01Q30/02 , G01Q30/16 , G01Q30/18 , G01Q70/02 , H01J37/28 , H01J37/067
CPC分类号： G01Q30/02 , B82Y35/00 , G01Q30/18 , G01Q70/02 , H01J37/28 , H01J2237/2818 , Y10S977/86
摘要： The scanning probe microscope translation apparatus includes a scanning probe microscope for examining a specimen, with a specimen stage for mounting the specimen for examination by the scanning probe microscope, and a first translator mounted to the scanning probe microscope for translating the specimen stage relative to the scanning probe microscope. A support frame is dimensioned and adapted to be mounted in a specimen chamber of a scanning electron microscope, and a second translator is provided for scanning the scanning probe microscope relative to the support frame. The second translator is mounted on dual mass plates provided for isolating the scanning probe microscope from external vibrations, and suspension O-rings are provided for suspending the mass plates from the support frame. A vacuum load lock system permits moving the scanning probe microscope, specimen stage, first translator, and mounting assembly into and out of the vacuum of the scanning electron microscope vacuum chamber.
摘要翻译：扫描探针显微镜转印装置包括用于检查样本的扫描探针显微镜，具有用于通过扫描探针显微镜安装用于检查的样本的样本台和安装到扫描探针显微镜上的第一平移器，用于将样本台相对于扫描探针显微镜。支撑框架尺寸适于安装在扫描电子显微镜的样本室中，并且提供第二平移器用于相对于支撑框架扫描扫描探针显微镜。第二个翻译器安装在双重质量板上，用于将扫描探针显微镜与外部振动隔离，并提供悬挂O形环用于将质量块悬挂在支撑框架上。真空负载锁定系统允许将扫描探针显微镜，样品台，第一平移器和安装组件移入和移出扫描电子显微镜真空室的真空。

10. 发明授权

US5404349A Position displacement detecting apparatus 失效
标题翻译：位置位移检测装置
公开(公告)号：US5404349A
公开(公告)日：1995-04-04
申请号：US129030
申请日：1993-09-30
申请人： Hiroyasu Nose , Toshihiko Miyazaki , Takahiro Oguchi , Kunihiro Sakai , Toshimitsu Kawase
发明人： Hiroyasu Nose , Toshihiko Miyazaki , Takahiro Oguchi , Kunihiro Sakai , Toshimitsu Kawase
IPC分类号： G01Q20/04 , G01Q30/18 , G11B9/00 , G11B9/14 , G01N23/00
CPC分类号： B82Y10/00 , G11B9/1454 , Y10S977/851
摘要： An apparatus capable of detecting a displacement of a probe from a track of a recording medium caused by track fluctuations and vibrations at a recording/reproducing period. For example, a probe is maintained to vibrate at a frequency and in the direction perpendicular to a data train at a amplitude smaller than the width of the data train. In this case, the amplitude of a reproduced signal of the data train changes with the displacement between the probe and the data train. An envelope signal of the reproduced signal is phase detected using as a reference signal the vibration waveform (standard signal) at frequency f.sub.o of the probe, to obtain a signal proportional to the displacement from the data train. Using this signal, it becomes possible to feedback control the probe so as to make it trace the data train.
摘要翻译：一种能够检测由记录/再现周期的轨迹波动和振动引起的探测器从记录介质的轨迹的位移的装置。例如，保持探头以比数据列的宽度小的振幅以与数据序列垂直的方向振动。在这种情况下，数据串的再现信号的幅度随着探针与数据列之间的位移而变化。使用探头频率fo处的振动波形（标准信号）作为参考信号来相位检测再现信号的包络信号，以获得与数据序列的位移成比例的信号。使用该信号，可以对探头进行反馈控制，使其跟踪数据列。

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