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    • 6. 发明授权
    • Method for controlling the diameter of a single crystal to a set point diameter
    • 用于将单晶体的直径控制到设定点直径的方法
    • US09340897B2
    • 2016-05-17
    • US14285752
    • 2014-05-23
    • SILTRONIC AG
    • Thomas Schroeck
    • C30B15/22C30B29/00C30B29/06C30B15/26
    • C30B15/22C30B15/26C30B29/00C30B29/06
    • The diameter of a single crystal is controlled to a set point diameter during pulling of the single crystal from a melt contained in a crucible and which forms a meniscus at a phase boundary on the edge of the single crystal, the meniscus having a height which corresponds to the distance between the phase boundary and a level of the surface of the melt outside the meniscus, comprising repeatedly: determining the diameter of a bright ring on the meniscus; calculating a diameter of the single crystal while taking into account the diameter of the bright ring and the dependency of the diameter of the bright ring on the height of the meniscus and on the diameter of the single crystal itself; and calculating at least one manipulated variable for controlling the diameter of the single crystal on the basis of the difference between the calculated diameter of the single crystal and the set point diameter of the single crystal.
    • 在单晶体从包含在坩埚中的熔体中拉出单晶并且在单晶边缘处的相边界处形成弯液面时,单晶的直径被控制到设定点直径,弯液面的高度对应于 相对于弯液面以外的相边界和熔体表面的水平之间的距离,包括重复:确定弯月面上的亮环的直径; 计算单晶的直径,同时考虑到亮环的直径和亮环的直径对弯液面的高度和单晶本身的直径的依赖性; 并且基于计算的单晶体的直径和单晶的设定点直径之间的差来计算用于控制单晶直径的至少一个操作变量。