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    • 3. 发明授权
    • Ion trap mass spectrometer
    • 离子阱质谱仪
    • US08022363B2
    • 2011-09-20
    • US12595393
    • 2008-03-28
    • Shinichi IwamotoKei KoderaSadanori Sekiya
    • Shinichi IwamotoKei KoderaSadanori Sekiya
    • H01J49/42H01J3/00
    • H01J49/424H01J49/164H01J49/4295
    • While applying a square wave voltage to the ion electrode (21) so that ions already captured in the ion trap (20) do not disperse, the frequency of the square wave voltage is temporarily increased at the timing when the ions generated in response to the short time irradiation of a laser light reach the ion inlet (25). This decreases the Mathieu parameter qz, and the potential well becomes shallow, which makes it easy for ions to enter the ion trap (20). Although the ions that have been already captured become more likely to disperse, the frequency of the square wave voltage is decreased before they deviate from the stable orbit. Thus, the dispersion of the ions can also be avoided. Accordingly, while the number of captured ions is not decreased, new ions are further added, and thereby the amount of ions can be increased. By performing a mass separation and detection after that, the signal intensity in one mass analysis can be increased. Thereby, the number of repetition of the mass analysis for summing up the mass profiles can be decreased, and the signal intensity can be increased while decreasing the measuring time.
    • 当向离子电极(21)施加方波电压时,已经捕获在离子阱(20)中的离子不分散,在响应于该离子阱产生的离子的时刻,方波电压的频率暂时增加 激光的短时间照射到达离子入口(25)。 这降低了Mathieu参数qz,势阱变浅,这使离子容易进入离子阱(20)。 虽然已经被捕获的离子更容易分散,但是在它们偏离稳定轨道之前,方波电压的频率被降低。 因此,也可以避免离子的分散。 因此,虽然捕获离子的数量没有减少,但是进一步添加新离子,从而可以提高离子的量。 通过进行质量分离和检测,可以提高一次质量分析中的信号强度。 因此,可以减少用于求出质量曲线的质量分析的重复次数,并且可以在减少测量时间的同时增加信号强度。
    • 4. 发明申请
    • Plasma as a Band Pass Filter for Photo Lithography
    • 等离子体作为照相平版印刷的带通滤光片
    • US20110149260A1
    • 2011-06-23
    • US12644591
    • 2009-12-22
    • Francis Goodwin
    • Francis Goodwin
    • G03B27/54H01J3/00
    • G03F7/70575
    • A band pass filter includes a first electrode, a second electrode, and a plasma generated by the first and second electrode. The plasma is confined to a region of space through which electromagnetic waves having a frequency above an intrinsic plasma frequency are transmitted, and electromagnetic waves having a frequency below the intrinsic plasma frequency are reflected. The band pass filter may be implemented in a photo lithography tool between a source module and an exposure module. The plasma of the band pass filter may be adapted to reduce IR radiation (or other out of band radiation) exposure to the exposure module by reflecting IR radiation back to the radiation source. In an extreme ultraviolet photo lithography tool, the plasma of the band pass filter may be adapted to transmit EUV radiation.
    • 带通滤波器包括第一电极,第二电极和由第一和第二电极产生的等离子体。 等离子体被限制在具有高于固有等离子体频率的频率的电磁波的空间区域,并且具有低于固有等离子体频率的频率的电磁波被反射。 带通滤波器可以在源模块和曝光模块之间的光刻工具中实现。 带通滤波器的等离子体可以适于通过将IR辐射反射回辐射源来减少暴露于曝光模块的IR辐射(或其它带外辐射)。 在极紫外光刻工具中,带通滤波器的等离子体可适于传输EUV辐射。
    • 7. 发明授权
    • Neutron chopper
    • 中子切碎机
    • US07820992B2
    • 2010-10-26
    • US12179900
    • 2008-07-25
    • Katsuhiko Yoshida
    • Katsuhiko Yoshida
    • G02B5/00G21K1/00H01J1/52H01J3/00H01J5/18H01J29/46
    • G21K1/04G21K1/043
    • A neutron chopper according to the present invention includes a housing which internally forms a sealed space, the housing having window portions through which neutrons pass, a fixed shaft which is fixed inside the housing, a rotor which is rotatably supported by the fixed shaft, the rotor provided with a blocking portion which can block neutrons passing through the housing, and a motor which is provided inside the housing for rotating the rotor of the neutron chopper, where a stator of the motor is fixed to the fixed shaft, and a rotor of the motor receives a rotating force from the stator around the fixed shaft, and is fixed to the rotor of the neutron chopper. The neutron chopper is formed with small size, and neutron guides are easily disposed closely, consequently vacuum leak is hardly occurred in the neutron chopper.
    • 根据本发明的中子切碎机包括内部形成密封空间的壳体,所述壳体具有中子通过的窗口部分,固定在壳体内部的固定轴,由固定轴可旋转地支撑的转子, 转子,其设置有阻挡穿过壳体的中子的阻挡部分;以及电动机,其设置在壳体内部,用于使中子切断器的转子旋转,其中电动机的定子固定到固定轴;转子, 电机从定子绕固定轴接收旋转力,并固定在中子切碎机的转子上。 中子斩波器形成为小尺寸,并且中子引导件容易紧密地设置,因此在中子斩波器中几乎不发生真空泄漏。
    • 9. 发明授权
    • Radiation attenuation corridor
    • 辐射衰减走廊
    • US07728315B2
    • 2010-06-01
    • US11868658
    • 2007-10-08
    • Tewfik J. Bichay
    • Tewfik J. Bichay
    • G02B5/00G21K1/00H01J1/52H01J3/00H01J5/18H01J29/46G21C11/00G21F3/02
    • G21F7/00A61N2005/1094G21Y2002/201G21Y2002/301G21Y2002/501G21Y2004/30
    • A radiation attenuation corridor couples a radiation therapy room and a control room. The radiation attenuation corridor is made of a material that substantially absorbs ionizing radiation and substantially blocks the transmission of the ionizing radiation. Specific wall portions at the entrance of the corridor are covered with borated polyethylene (BPE). Specific wall portions diverge from an axis defined by the corridor by from about 10 degrees to about 45 degrees. The corridor thus leads out of the room and angles laterally across the wall of the therapy room, before angling again and opening to a safe room. The added angles in the radiation corridor increase the distance of radiation travel, and make the path more indirect, thereby increasing the contact of the radiation emissions with the radiation shielding and further attenuating the radiation.
    • 辐射衰减走廊耦合放射治疗室和控制室。 辐射衰减走廊由基本上吸收电离辐射并且基本上阻挡电离辐射的透射的材料制成。 在走廊入口处的特定壁部分用硼酸化聚乙烯(BPE)覆盖。 具体的壁部分从走廊限定的轴线偏离约10度至约45度。 因此,走廊从房间转过来,并横向穿过治疗室的墙壁,然后再次前进并开放到安全的房间。 辐射走廊中增加的角度增加了辐射行进的距离,并使路径更间接,从而增加辐射辐射与辐射屏蔽的接触,并进一步衰减辐射。