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    • 5. 发明授权
    • Cap metal forming method
    • 盖金属成型方法
    • US08206785B2
    • 2012-06-26
    • US12405597
    • 2009-03-17
    • Takayuki ToshimaMitsuaki IwashitaTakashi TanakaYusuke Saito
    • Takayuki ToshimaMitsuaki IwashitaTakashi TanakaYusuke Saito
    • B05D1/36B05D5/00B05D1/12
    • H01L21/288C23C18/1628C23C18/1669H01L21/6715H01L21/76849
    • A cap metal forming method capable of obtaining a uniform film thickness on the entire surface of a substrate is provided. The method for forming a cap metal on a copper wiring formed on a processing target surface of a substrate includes: holding the substrate so as to be rotatable; rotating the substrate in a processing target surface direction of the substrate; locating an end portion of an agitation member so as to face the processing target surface of a periphery portion of the substrate with a preset gap maintained therebetween; supplying a plating processing solution onto the processing target surface; and stopping the supply of the plating processing solution and moving the agitation member such that the end portion of the agitation member is separated away from the processing target surface of the substrate.
    • 提供能够在基板的整个表面上获得均匀的膜厚度的盖金属成形方法。 在形成在基板的加工对象面上的铜布线上形成盖金属的方法包括:保持基板以可旋转; 在所述基板的处理对象面方向上旋转所述基板; 将搅拌构件的端部定位成面对保持在其间的预设间隙的基板的周边部分的处理目标表面; 将电镀处理液供给到所述加工对象面上; 停止电镀处理液的供给,使搅拌部件移动,使搅拌部件的端部与基板的加工对象面分离。
    • 8. 发明授权
    • Process for producing 4-substituted benzopyran derivatives
    • 制备4-取代苯并吡喃衍生物的方法
    • US06608217B2
    • 2003-08-19
    • US10255099
    • 2002-09-26
    • Takeo KomataMasaki FujiwaraTakanao TaruiYusuke SaitoHiroshi Minesaki
    • Takeo KomataMasaki FujiwaraTakanao TaruiYusuke SaitoHiroshi Minesaki
    • C07D31104
    • C07D311/58C07C45/46C07C45/673C07C49/84C07C49/825
    • The present invention relates to a first process for producing a 2,2-bis(fluoromethyl)-6-(perfluoroalkyl)-2H-1-benzopyran-4-carboxylic acid. The first process includes the steps of (a) reacting a 2,2-bis(fluoromethyl)-6-(perfluoroalkyl)-2H-1-benzopyran-4-one with a perfluoroalkanesulfonic acid anhydride in the presence of a base, thereby obtaining a perfluoroalkanesulfonic 2,2-bis(fluoromethyl)-6-(perfluoroalkyl)-2H- 1-benzopyran-4-yl ester; and (b) reacting the benzopyranyl ester with carbon monoxide in the presence of a palladium complex compound and a base, thereby obtaining the carboxylic acid. The present invention further relates to a second process for producing a 2-hydroxy-5-(perfluoroalkyl) acetophenone, which can be a raw material for producing the carboxylic acid. The second process includes the steps of (c) reacting a 4-(perfluoroalkyl)alkoxybenzene with acetic anhydride or an acyl halide in the presence of a Lewis acid, thereby obtaining a 2-alkoxy-5-(perfluoroalkyl)acetophenone; and (d) dealkylating the 2-alkoxy-5-(perfluoroalkyl) acetophenone by a dealkylating agent.
    • 本发明涉及生产2,2-双(氟甲基)-6-(全氟烷基)-2H-1-苯并吡喃-4-羧酸的第一种方法。 第一种方法包括以下步骤:(a)在碱的存在下使2,2-双(氟甲基)-6-(全氟烷基)-2H-1-苯并吡喃-4-酮与全氟烷基磺酸酐反应,从而得到 全氟烷基磺酸2,2-双(氟甲基)-6-(全氟烷基)-2H-苯并吡喃-4-基酯; 和(b)在钯络合物和碱的存在下使苯并吡喃基酯与一氧化碳反应,由此得到羧酸。 本发明还涉及可用作生产羧酸的原料的2-羟基-5-(全氟烷基)苯乙酮的制备方法。 第二种方法包括以下步骤:(c)在路易斯酸存在下使4-(全氟烷基)烷氧基苯与乙酸酐或酰卤反应,由此得到2-烷氧基-5-(全氟烷基)苯乙酮; 和(d)通过脱烷基化剂使2-烷氧基-5-(全氟烷基)苯乙酮脱烷基化。