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    • 17. 发明授权
    • Method for spectral data classification and detection in diverse lighting conditions
    • 在不同照明条件下进行光谱数据分类和检测的方法
    • US07796833B2
    • 2010-09-14
    • US11676225
    • 2007-02-16
    • Leonid PolonskiyZhu Joe WangJasenka BenacJeffry Golden
    • Leonid PolonskiyZhu Joe WangJasenka BenacJeffry Golden
    • G06K9/40G06K9/46G06K9/62G06K9/00
    • G01J3/28G01J3/2823G01N21/25G01N21/274G01N2021/1793G06K9/0063
    • The invention is a method of spectral data classification that uses the decoupling of target chromaticity and lighting or illumination chromaticity in spectral data and the sorting and selection of spectral bands by values of a merit function to obtain an optimized set of combinations of spectral bands for classification of the data. The decoupling is performed in “delta-log” space. A rotation transform may be applied. For a broad range of parameters, correction of lighting chromaticity may be obtained by use of an equivalent “Planck distribution” temperature. Merit function sorting and band combination selection is performed by multiple selection criteria. The method achieves reliable pixel classification and target detection in diverse lighting or illumination, especially in circumstances where lighting is non-uniform across a scene, such as with sunlight and shadows on a partly cloudy day or in “artificial” lighting. Applications are found in homeland security, defense, environmental protection, biomedical diagnostics, industrial process and product monitoring, and other remote or standoff sensing by spectral characteristics.
    • 本发明是一种光谱数据分类的方法,其使用光谱数据中的目标色度和照明或照明色度的去耦,以及通过优值函数的值分类和选择光谱带,以获得用于分类的光谱带的组合的优化集合 的数据。 去耦在“delta-log”空间中执行。 可以应用旋转变换。 对于广泛的参数,可以通过使用等效的“普朗克分布”温度来获得照明色度的校正。 功能排序和乐队组合选择由多种选择标准进行。 该方法在不同的照明或照明中实现可靠的像素分类和目标检测,特别是在场景照明不均匀的情况下,例如在部分多云的日子或“人造”照明中的阳光和阴影的情况下。 应用于国土安全,防御,环境保护,生物医学诊断,工业过程和产品监控以及其他通过光谱特性的远程或间隔检测。
    • 18. 发明申请
    • E-BEAM DEFECT REVIEW SYSTEM
    • 电子束缺陷评估系统
    • US20100150429A1
    • 2010-06-17
    • US12335458
    • 2008-12-15
    • Jack JAUZhongwei CHENYi Xiang WANGChung-Shih PANJoe WANGXuedong LIUWeiming RENWei FANG
    • Jack JAUZhongwei CHENYi Xiang WANGChung-Shih PANJoe WANGXuedong LIUWeiming RENWei FANG
    • G06K9/00
    • G06T7/001G01N23/04G01N2223/102G01N2223/426G01N2223/611G06T2207/10061G06T2207/30148
    • The present invention relates to a defect review system, and/or particularly, to an apparatus and method of defect review sampling, review method and classification on a semiconductor wafer or a pattern lithography reticle during integrated circuit fabrication. These objects are achieved in comparing a reviewed image with a reference image pick-up through a smart sampling filter. A clustering computer system base on high speed network will provide data cache and save operation time and memory. A smart review sampling filter automatically relocate abnormal pattern or defects and classify the device location extracted from design database and/or from golden die image on the same substrate. The column of the present defect review system is comprised of the modified SORIL type objective lens. This column provides solution of improving throughput during sample review, material identification better image quality, and topography image of defect. One embodiment of the present invent adopts an optical auto focusing system to compromise micro height variation due wafer surface topography. And another embodiment adopts surface charge control system to regulate the charge accumulation due to electron irradiation during the review process.
    • 本发明涉及一种缺陷评估系统,和/或特别涉及在集成电路制造期间对半导体晶片或图案光刻掩模版进行缺陷评估抽样,评估方法和分类的装置和方法。 通过智能采样滤波器将经检查的图像与参考图像拾取进行比较,实现了这些目的。 基于高速网络的集群计算机系统将提供数据缓存,节省操作时间和内存。 智能检查采样过滤器自动重新定位异常模式或缺陷,并将从设计数据库中提取的设备位置和/或从相同基板上的金色模具图像分类。 本缺陷检查系统的列由改进的SORIL型物镜组成。 该栏提供了在样本审查期间提高吞吐量,材料识别更好的图像质量和缺陷的地形图像的解决方案。 本发明的一个实施例采用光学自动聚焦系统来破坏由晶片表面形貌引起的微高度变化。 另一个实施例采用表面电荷控制系统来调节在检查过程中由电子辐射引起的电荷累积。