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21. 发明授权

US06671446B1 Optical waveguide and method of manufacturing same 有权
标题翻译：光波导及其制造方法
公开(公告)号：US06671446B1
公开(公告)日：2003-12-30
申请号：US09533947
申请日：2000-03-23
申请人： Naoki Nishida
发明人： Naoki Nishida
IPC分类号： G02B610
CPC分类号： G02B6/13
摘要： A plurality of top waveguides and bottom waveguides are formed on a substrate. The pitch of the light exit end of the top waveguide and the light exit end of the bottom waveguide at the light exit side of the substrate is narrower than the pitch of the light entrance end of the top waveguide and the light entrance end of the bottom waveguide at the light entrance side of the substrate. The light exit end of the waveguide on the light exit side of the substrate and the light exit end of the waveguide indicated by the dashed line are arranged as single rows forming a core row in two layers in a staggered layout. This optical waveguide produces ideally overlapping laser beam spots on the surface of a photosensitive body.
摘要翻译：多个顶部波导和底部波导形成在基板上。顶部波导的光出射端的间距和底部波导的光出射侧的光出射端的距离比顶部波导的光入射端的间距和底部波导的光入射端窄波导在基板的光入射侧。基板的光出射侧的波导的光出射端和虚线所示的波导的光出射端排列为以交错布置形成两层的芯列的单列。该光波导在感光体的表面上产生理想的重叠的激光束斑点。

22. 发明授权

US06587629B1 Optical waveguide channel device 失效
标题翻译：光波导通道器件
公开(公告)号：US06587629B1
公开(公告)日：2003-07-01
申请号：US09576317
申请日：2000-05-22
申请人： Shinji Maruyama , Naoki Nishida
发明人： Shinji Maruyama , Naoki Nishida
IPC分类号： G02B610
CPC分类号： G02B6/12004 , G02B6/1228 , G02B6/132 , G02B6/136 , G02B2006/12119 , G02B2006/12195
摘要： In an optical waveguide channel device equipped with multiple cores, the distances between cores at the entry edge must be large in order to cause a laser beam to enter each core. On the other hand, the distances at the exit edge must be small. Therefore, the core must have a curved area at which the axis is curved. Further, in order to make it easier to match the spot of the entering beam and the core, the core diameter of the optical waveguide channel device and the beam spot diameter of the entering light are made large. However, in a core having a multi-mode curved area, high-order light is easily excited at the curved area. Therefore, the curved area from the entry edge to the exit edge of each core is made to have a single mode. Consequently, exit light having an essentially Gaussian profile may be obtained.
摘要翻译：在配备有多个芯的光波导通道装置中，入射边缘处的芯之间的距离必须大，以使激光束进入每个芯。另一方面，出口边缘处的距离必须很小。因此，芯必须具有弯曲的区域，在该区域轴线是弯曲的。此外，为了使入射光束和光纤的点更容易匹配，光波导通道器件的芯径和入射光的光束直径变大。然而，在具有多模弯曲区域的芯中，在弯曲区域容易激发高阶光。因此，从每个核心的进入边缘到出口边缘的弯曲区域被制成具有单一模式。因此，可以获得具有基本高斯分布的出射光。

23. 发明授权

US6044850A Semiconductor device manufacturing method including ashing process 失效
标题翻译：包括灰化处理的半导体器件制造方法
公开(公告)号：US6044850A
公开(公告)日：2000-04-04
申请号：US961242
申请日：1997-10-30
申请人： Soichiro Ozawa , Satoru Mihara , Kunihiko Nagase , Masaaki Aoyama , Naoki Nishida
发明人： Soichiro Ozawa , Satoru Mihara , Kunihiko Nagase , Masaaki Aoyama , Naoki Nishida
IPC分类号： C23F4/00 , H01L21/02 , H01L21/027 , H01L21/302 , H01L21/3065 , H01L21/3205 , H01L21/3213 , H01L23/52 , B08B6/00
CPC分类号： H01L21/02071
摘要： Ashing process of a resist pattern used in a semiconductor device manufacturing method is conducted by exposing the resist, the wirings, and their peripheral regions to a first atmosphere which includes a first product obtained by plasmanizing a gas containing water at a rate of more than 30 flow rate %, and placing the resist in a second atmosphere which includes a second product obtained by plasmanizing an oxygen mixed gas which contains an oxygen gas as a principal component before or after or before and after the exposing step.
摘要翻译：在半导体器件制造方法中使用的抗蚀剂图案的灰化处理通过将抗蚀剂，布线及其周边区域暴露于第一气氛来进行，该第一气氛包括通过使含有水的气体以大于30的比例等离子化而获得的第一产物流量％，并将抗蚀剂置于第二气氛中，该第二气氛包括在暴露步骤之前或之后或之前或之后使包含氧气的氧气混合气体作为主要组分而得到的第二产物。

24. 发明授权

US08134893B2 Optical recording head and optical recording apparatus 有权
标题翻译：光记录头和光记录装置
公开(公告)号：US08134893B2
公开(公告)日：2012-03-13
申请号：US12297072
申请日：2007-04-02
申请人： Kenji Konno , Hiroaki Ueda , Manami Kuiseko , Naoki Nishida , Koujirou Sekine , Masahiro Okitsu , Hiroshi Hatano
发明人： Kenji Konno , Hiroaki Ueda , Manami Kuiseko , Naoki Nishida , Koujirou Sekine , Masahiro Okitsu , Hiroshi Hatano
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/4866 , G11B7/1384 , G11B11/1055 , G11B2005/001 , G11B2005/0021
摘要： Provided is an optical recording head in which a light beam from a light source is collected by an optical element and reflected on a reflecting surface to be formed into a spot light. Since a support portion for supporting the light source of the optical element at a predetermined position and the reflection surface for reflecting the light beam are formed integrally with each other, it is not required to perform the positioning thereof, and light can be collected to a very small spot with high efficiency, and an optical recording head and an optical recording apparatus having low heights can be provided.
摘要翻译：提供了一种光学记录头，其中来自光源的光束被光学元件收集并在反射表面上反射以形成点光。由于用于将光学元件的光源支撑在预定位置的支撑部分和用于反射光束的反射表面彼此一体地形成，因此不需要进行定位，并且可以将光收集到可以提供高效率的非常小的斑点，并且可以提供具有低高度的光学记录头和光学记录装置。

25. 发明申请

US20110134740A1 Optical Device, Optical Recording Head and Optical Recording Device 审中-公开
标题翻译：光学设备，光学记录头和光学记录装置
公开(公告)号：US20110134740A1
公开(公告)日：2011-06-09
申请号：US13057666
申请日：2009-07-13
申请人： Koujirou Sekine , Hiroaki Ueda , Manami Kuiseko , Naoki Nishida , Hiroshi Hatano , Kou Osawa
发明人： Koujirou Sekine , Hiroaki Ueda , Manami Kuiseko , Naoki Nishida , Hiroshi Hatano , Kou Osawa
IPC分类号： G11B7/00 , G02B27/44
CPC分类号： G11B5/314 , G11B2005/0005 , G11B2005/0021
摘要： Provided is an optical device configured to makes it possible to enhance use efficiency of light. An optical device is provided with an optical element to deflect incident light and a fixation member on which the optical element is fixed. The optical element includes a reflective surface and a diffraction grating surface that deflects the incident light. The optical element is fixed on the fixation member to restrain displacement in accordance with temperature changes at portions thereof other than the reflective surface and the diffracting grating surface in such a condition that displacement is caused without restraint be temperature changes at the reflective surface and the diffraction grating surface. A change of the incident light in the deflection angle due to an inclination change by the reflective surface and the diffracting grating surface is suppressed by a change in a diffraction angle due to a periodical change in the diffraction grating by the displacement of the diffraction grating surface.
摘要翻译：提供了一种配置成可以提高光的使用效率的光学装置。光学装置设置有用于偏转入射光的光学元件和固定有光学元件的固定构件。光学元件包括反射表面和使入射光偏转的衍射光栅表面。光学元件被固定在固定构件上，以便在反射面和衍射光栅表面以外的部分处的温度变化下抑制位移，使得在不受限制地产生位移的情况下，反射表面的温度变化和衍射光栅表面。通过衍射光栅表面的位移，由于衍射光栅的周期性变化引起的衍射角的变化来抑制由反射表面和衍射光栅表面的倾斜变化引起的偏转角中入射光的变化。

26. 发明申请

US20110075526A1 Optical Element, Arm Mechanism, and Information Recording Device 审中-公开
标题翻译：光学元件，臂机构和信息记录装置
公开(公告)号：US20110075526A1
公开(公告)日：2011-03-31
申请号：US12992496
申请日：2009-04-15
申请人： Koujirou Sekine , Naoki Nishida , Manami Kuiseko , Kou Osawa , Hiroaki Ueda , Hiroshi Oshitani , Hiroshi Hatano
发明人： Koujirou Sekine , Naoki Nishida , Manami Kuiseko , Kou Osawa , Hiroaki Ueda , Hiroshi Oshitani , Hiroshi Hatano
IPC分类号： G11B11/00 , G02B5/18 , G02B5/04
CPC分类号： G11B5/314 , G11B5/4833 , G11B5/4866 , G11B2005/0002 , G11B2005/0021
摘要： Proposed is a technique of guiding light to a waveguide, by which the light use efficiency is increased. In order to achieve the above object, adopted is an optical element comprising, at an outer edge portion thereof, an incident surface on which light from a light source is incident, a diffraction grating surface, and an internal reflection surface which guides light incident from the incident surface to the diffraction grating surface.
摘要翻译：提出了将光引导到波导的技术，通过该技术增加了光的使用效率。为了实现上述目的，采用的是一种光学元件，在其外缘部分包括入射光，光入射的入射表面，衍射光栅表面和内反射表面，其引导从入射面到衍射光栅表面。

27. 发明申请

US20110019510A1 RECORDING HEAD AND RECORDER 审中-公开
标题翻译：记录头和记录
公开(公告)号：US20110019510A1
公开(公告)日：2011-01-27
申请号：US12792506
申请日：2010-06-02
申请人： Naoki Nishida , Hiroaki Ueda , Manami Kuiseko , Koujirou Sekine , Kenji Konno , Masahiro Okitsu , Hiroshi Hatano
发明人： Naoki Nishida , Hiroaki Ueda , Manami Kuiseko , Koujirou Sekine , Kenji Konno , Masahiro Okitsu , Hiroshi Hatano
IPC分类号： G11B7/135 , G11B11/105
CPC分类号： G11B5/314 , B82Y10/00 , G11B7/00454 , G11B7/124 , G11B7/1359 , G11B7/1378 , G11B7/1387 , G11B11/10532 , G11B11/10554 , G11B2005/0021 , G11B2007/13727
摘要： A recorder has a recording medium for information recording, a light source, an optical system, a slider, and an optical waveguide. To the optical system, light from the light source enters, and the slider moves relative to the recording medium while not in contact therewith. The optical waveguide is arranged at position facing the recording medium in the slider so that light entering from the optical system is irradiated on the recording medium. Where the mode field diameter of the optical waveguide on the light output side is d and the mode field diameter thereof on the light input side is D, the mode field diameter is converted by smoothly changing the diameter of the optical waveguide to satisfy D>d.
摘要翻译：记录器具有用于信息记录的记录介质，光源，光学系统，滑块和光波导。对于光学系统，来自光源的光进入，并且滑块相对于记录介质移动而不与其接触。光波导布置在滑块中面向记录介质的位置，使得从光学系统进入的光被照射在记录介质上。在光输出侧的光波导的模场直径为d，光输入侧的模场直径为D的情况下，通过平滑地改变光波导的直径来转换模场直径，满足D> d 。

28. 发明授权

US07166392B2 Halftone type phase shift mask blank and halftone type phase shift mask 有权
标题翻译：半色调型相移掩模和半色调型相移掩模
公开(公告)号：US07166392B2
公开(公告)日：2007-01-23
申请号：US10375063
申请日：2003-02-28
申请人： Masao Ushida , Minoru Sakamoto , Naoki Nishida
发明人： Masao Ushida , Minoru Sakamoto , Naoki Nishida
IPC分类号： G03F1/00
CPC分类号： G03F1/32 , G03F1/84
摘要： A halftone type phase shift mask having a semitranslucent film pattern and a shielding film pattern provided on a transparent substrate in this order is constituted in such a manner that each of the reflectances of the transparent substrate, the semitranslucent film pattern and the shielding film pattern for an inspecting light represents a difference which can detect the semitranslucent film pattern and the shielding film pattern based on a reflected light generated when the inspecting light is irradiated on the mask.
摘要翻译：以透明基板，半透明膜图案和半透明膜图案和屏蔽膜图案中的每一个反射的方式构成具有半透明膜图案和设置在透明基板上的屏蔽膜图案的半色调型相移掩模检查光表示可以基于在检查光照射在掩模上时产生的反射光来检测半透明膜图案和屏蔽膜图案的差异。

29. 发明申请

US20060081842A1 Monitor pattern of semiconductor device and method of manufacturing semiconductor device 审中-公开
公开(公告)号：US20060081842A1
公开(公告)日：2006-04-20
申请号：US11273294
申请日：2005-11-15
申请人： Sachie Tone , Hiroyuki Uno , Naoki Tanahashi , Naoki Nishida
发明人： Sachie Tone , Hiroyuki Uno , Naoki Tanahashi , Naoki Nishida
IPC分类号： H01L23/58
CPC分类号： H01L22/34 , H01L2924/0002 , H01L2924/00
摘要： A plurality of diffused resistors and a plurality of wirings (resistive elements) are alternately disposed along a virtual line, and those diffused resistors and wirings are connected in series by contact vias. In the same wiring layer as that of the wirings, a dummy pattern is formed so as to surround a formation region of the wirings and the diffused resistors. A space between the dummy pattern and the wirings is set in accordance with, for example, a minimum space between wirings in a chip formation portion.

30. 发明授权

US06807330B2 Optical switch using an optical waveguide 失效
标题翻译：使用光波导的光开关
公开(公告)号：US06807330B2
公开(公告)日：2004-10-19
申请号：US10037976
申请日：2002-01-03
申请人： Naoki Nishida , Takuji Hatano , Koji Takahara , Shinji Maruyama , Miyuki Teramoto , Koujirou Sekine
发明人： Naoki Nishida , Takuji Hatano , Koji Takahara , Shinji Maruyama , Miyuki Teramoto , Koujirou Sekine
IPC分类号： G02B635
CPC分类号： G02B6/3538 , G02B6/12007 , G02B6/125 , G02B6/29368 , G02B6/355 , G02B6/3578
摘要： Disclosed herein is an optical switch for changing over a running direction of a light passing through an optical waveguide between a first direction and a second direction by moving a switching member disposed on an optical path of an optical waveguide. The switching member has a plurality of switching positions for selectively guiding each of lights of at least two different wavelengths into the first direction or second direction.
摘要翻译：这里公开了一种光开关，用于通过移动设置在光波导的光路上的切换构件来改变通过光波导的光在第一方向和第二方向之间的行进方向。切换构件具有多个切换位置，用于选择性地将至少两个不同波长的每一个光导向第一方向或第二方向。

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