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    • 64. 发明授权
    • Scanning probe microscope and method for measuring surfaces by using
this microscope
    • 扫描探针显微镜和使用该显微镜测量表面的方法
    • US5468959A
    • 1995-11-21
    • US210397
    • 1994-03-18
    • Takao TohdaHiroyuki KadoShinichi Yamamoto
    • Takao TohdaHiroyuki KadoShinichi Yamamoto
    • G01B5/28G01B7/34G01B21/30G01N27/00G01N37/00G01Q10/04G01Q20/02G01Q30/02G01Q30/04G01Q60/04G01Q60/10G01Q60/24G11B9/14H01J37/28
    • G01Q10/06B82Y35/00G01Q60/04Y10S977/851
    • A microscope comprises a cantilever having a distal end equipped with an electrically conductive probe allowing current to flow and having a fine tip whose voltage is controllable, a position control mechanism for controlling position of a sample with respect to a base end of the cantilever, a small displacement measuring mechanism for measuring a deflection amount of the cantilever, and a deflection control mechanism for controlling deflection of the cantilever so as to adjust a distance between the fine tip of the probe and the sample. A method for measuring surfaces using this novel microscope comprises steps of: maintaining deflection of the cantilever at a constant value by using the small displacement measuring mechanism and the deflection control mechanism; applying a constant voltage between the electrically conductive probe and the sample; scanning the sample along surface of the sample with the probe, while a tunneling current is maintained at a constant value by using the position control mechanism; and measuring a control amount of the position control mechanism in a direction vertical to the sample and a control amount of the deflection control mechanism.
    • 显微镜包括具有远端的悬臂,其具有允许电流流动并具有可控电压的细尖端的导电探针,用于控制样品相对于悬臂的基端的位置的位置控制机构, 用于测量悬臂的偏转量的小位移测量机构,以及用于控制悬臂的偏转的偏转控制机构,以调节探针的细尖端与样品之间的距离。 使用这种新型显微镜测量表面的方法包括以下步骤:通过使用小位移测量机构和偏转控制机构来将悬臂的偏转维持在恒定值; 在导电探针和样品之间施加恒定电压; 用探头沿着样品的表面扫描样品,同时通过使用位置控制机构将隧道电流维持在恒定值; 并且在垂直于样品的方向和偏转控制机构的控制量中测量位置控制机构的控制量。
    • 67. 发明授权
    • Scanning tunneling potentio-spectroscopic microscope and a data
detecting method
    • 扫描隧道电位显微镜和数据检测方法
    • US5378983A
    • 1995-01-03
    • US977572
    • 1992-11-17
    • Akira YagiTakao OkadaSeizo MoritaNobuo Mikoshiba
    • Akira YagiTakao OkadaSeizo MoritaNobuo Mikoshiba
    • G01Q60/12G01B7/34G01Q30/04G01Q60/14G01K1/16
    • G01Q60/12B82Y35/00G01B7/34G01Q30/04G01Q60/14Y10S977/852
    • A scanning tunneling potentio-spectroscopic microscope, includes a conductive probe and a circuit for selectively applying one of first, second and third bias voltages to a sample. A tunnel current flowing between the probe and sample is detected, and a tunnel current signal is produced upon detection thereof. A servo circuit controls a distance between the probe and sample on the basis of the tunnel current signal by producing a servo signal as a feedback signal. A hold circuit switches the servo circuit between operating and non-operating states. Configuration data on a surface of the sample is obtained, on the basis of the servo signal, with the first bias voltage applied to the sample and with the servo circuit in the operating state. A first dependence of the tunnel current on the bias voltage is obtained, from the tunnel current signal and the second bias voltage, with the second bias voltage applied to the sample and with the servo circuit in the non-operating state. A second dependence of the tunnel current on the bias voltage is obtained from the tunnel current signal and the third bias voltage, with the third bias voltage applied to the sample and with the servo circuit in the non-operating state. Electron state data is obtained on the basis of the first dependence, and potential data is obtained on the basis of the first and second dependencies.
    • 扫描隧道电位分光显微镜包括导电探针和用于选择性地将一个第一,第二和第三偏置电压施加到样品的电路。 检测在探针和样品之间流动的隧道电流,并且在检测到隧道电流信号时产生隧道电流信号。 伺服电路通过产生伺服信号作为反馈信号,根据隧道电流信号来控制探头和样品之间的距离。 保持电路在操作状态和非工作状态之间切换伺服电路。 基于伺服信号获得样品表面上的配置数据,其中施加到样品的第一偏置电压和处于操作状态的伺服电路。 从隧道电流信号和第二偏置电压获得隧道电流对偏置电压的第一依赖性,其中第二偏置电压施加到样品并且伺服电路处于非操作状态。 从隧道电流信号和第三偏置电压获得隧道电流对偏置电压的第二依赖性,其中第三偏压施加到样品并且伺服电路处于非操作状态。 基于第一依赖性获得电子状态数据,并且基于第一和第二依赖性获得潜在数据。