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61. 发明授权

US08334736B2 Micromechanical resonator 有权
标题翻译：微机械谐振器
公开(公告)号：US08334736B2
公开(公告)日：2012-12-18
申请号：US13284196
申请日：2011-10-28
申请人： Ville Kaajakari
发明人： Ville Kaajakari
IPC分类号： H03H9/00 , H03H9/05 , H03H9/125 , H03H9/24
CPC分类号： H03H9/2463 , H02N1/008 , H03H3/0076 , H03H9/02275 , H03H9/02338 , H03H9/2478 , H03H9/2484 , H03H2009/02299
摘要： The invention relates to design of micromechanical resonators and, more precisely, to the design of microelectromechanical systems (MEMS) resonators. The invention provides an improved design structure for a microelectromechanical systems (MEMS) resonator including a movable mass structure and a spring structure. The spring structure includes a spring element. The spring element is anchored from one end and connected to a plurality of electrode fingers on another end. The plurality of electrode fingers are operatively connected together at the other end of the spring element. The improved structure is frequency robust to manufacturing variations and enables reliable frequency referencing with good performance, particularly in small size solutions.
摘要翻译：本发明涉及微机械谐振器的设计，更确切地说，涉及微机电系统（MEMS）谐振器的设计。本发明提供了一种用于包括可移动质量结构和弹簧结构的微机电系统（MEMS）谐振器的改进的设计结构。弹簧结构包括弹簧元件。弹簧元件从一端锚定并在另一端连接到多个电极指。多个电极指在弹簧元件的另一端可操作地连接在一起。改进的结构对于制造变化是稳定的，并且具有良好性能的可靠的频率参考，特别是在小尺寸解决方案中。

62. 发明授权

US08058952B2 MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator 有权
标题翻译： MEMS谐振器，其制造方法和MEMS振荡器
公开(公告)号：US08058952B2
公开(公告)日：2011-11-15
申请号：US12158986
申请日：2006-12-18
申请人： Jozef T. M. Van Beek , Bart Van Velzen
发明人： Jozef T. M. Van Beek , Bart Van Velzen
IPC分类号： H03H9/24 , H03H9/125 , H03H3/007 , H03B5/30
CPC分类号： H03H9/02448 , H03H3/0072 , H03H9/2447 , H03H2009/02496 , Y10T29/42
摘要： The invention relates to a MEMS resonator comprising a first electrode, a movable element (48) comprising a second electrode, the movable element (48) at least being movable towards the first electrode, the first electrode and the movable element (48) being separated by a gap (46, 47) having sidewalls. According to the invention, the MEMS resonator is characterized in that the gap (46, 47) has been provided with a dielectric layer (60) on at least one of the sidewalls.
摘要翻译：本发明涉及一种MEMS谐振器，其包括第一电极，包括第二电极的可移动元件（48），所述可移动元件（48）至少可朝向所述第一电极移动，所述第一电极和所述可移动元件（48）被分离通过具有侧壁的间隙（46,47）。根据本发明，MEMS谐振器的特征在于间隙（46,47）在至少一个侧壁上设置有介电层（60）。

63. 发明授权

US08035462B2 Resonant circuit, method of producing same, and electronic device 有权
标题翻译：共振电路，制造方法和电子设备
公开(公告)号：US08035462B2
公开(公告)日：2011-10-11
申请号：US12486669
申请日：2009-06-17
申请人： Toru Watanabe
发明人： Toru Watanabe
IPC分类号： H03H9/125 , H03H9/24 , H03H3/007 , H03B7/06
CPC分类号： H03H3/0073 , H03H3/0076 , H03H9/02409 , H03H9/02433 , H03H9/2426 , H03H9/2457 , H03H2009/02511
摘要： A resonant circuit includes a substrate; a MEMS resonator including a fixed electrode and a movable electrode formed above the substrate and having a first terminal and a second terminal, the movable electrode having a movable portion opposing at least a part of the fixed electrode; and a voltage applying unit applying a bias voltage to the MEMS resonator, the voltage applying unit including a voltage divider circuit that includes a compensation resistance formed of a same layer as that of the movable portion to allow a resistance value to be changed by a thickness of the layer and a reference resistance formed of a layer different from that of the movable portion and connected to the compensation resistance to output a junction potential between the compensation resistance and the reference resistance to at least one of the first and the second terminals of the MEMS resonator.
摘要翻译：谐振电路包括基板; MEMS谐振器，包括固定电极和可动电极，其形成在所述基板上并具有第一端子和第二端子，所述可动电极具有与所述固定电极的至少一部分相对的可动部分; 以及向所述MEMS谐振器施加偏置电压的施加电压单元，所述电压施加单元包括分压电路，所述分压电路包括由与所述可动部分相同的层形成的补偿电阻，以允许电阻值改变厚度以及由与可动部分不同的层形成的参考电阻并连接到补偿电阻，以将补偿电阻和参考电阻之间的结电位输出到第一和第二端子中的至少一个 MEMS谐振器。

64. 发明授权

US08035283B2 Resonant actuator 有权
标题翻译：谐振执行器
公开(公告)号：US08035283B2
公开(公告)日：2011-10-11
申请号：US12505631
申请日：2009-07-20
申请人： Hirozumi Ogawa , Shinichiro Kawada
发明人： Hirozumi Ogawa , Shinichiro Kawada
IPC分类号： H03H9/125
CPC分类号： H03H9/176 , H01L41/0475 , H01L41/0986 , H01L41/1878
摘要： A piezoelectric ceramic base member is formed of a bar shaped bismuth layer compound, and has main electrodes on two end surfaces in an oscillation direction, with connection electrodes at side-surface central portions of the piezoelectric ceramic base member electrically connected to the main electrodes through extraction conductors interposed therebetween, respectively. The oscillation and polarization directions are set in the same direction, and the piezoelectric ceramic base member is driven at a resonant frequency or at a frequency in the vicinity thereof. The crystal c axis is preferably oriented in a direction orthogonal to the polarization direction. The resonant actuator is able to obtain a high oscillation speed as it has a large mechanical quality factor Qm, and the oscillation is not disturbed by mechanical factors.
摘要翻译：压电陶瓷基体由条状铋层化合物形成，并且在振荡方向的两个端面上具有主电极，压电陶瓷基体的侧面中心部分的连接电极通过提取导体分别插入其间。将振荡和偏振方向设定在相同的方向，并且以谐振频率或其附近的频率驱动压电陶瓷基体。晶体c轴优选地在与偏振方向正交的方向上取向。谐振致动器能够获得高振荡速度，因为其具有大的机械品质因数Qm，并且振荡不受机械因素的干扰。

65. 发明申请

US20110128095A1 RESONANT FILTER BASED ON AN N/MEMS MATRIX 有权
标题翻译：基于N / MEMS矩阵的谐振滤波器
公开(公告)号：US20110128095A1
公开(公告)日：2011-06-02
申请号：US12936773
申请日：2009-04-06
申请人： Chady Kharrat , Eric Colinet
发明人： Chady Kharrat , Eric Colinet
IPC分类号： H03H9/52 , H03H9/24 , H03H9/125
CPC分类号： H03H9/02433 , H03H9/2447 , H03H9/525 , H03H2009/02456
摘要： A resonant filter including a matrix of n×m resonators of N/MEMS type, each resonator including an actuating mechanism and a detection mechanism. An input of the filter, configured to receive an electrical input signal, is electrically connected to the resonator actuating mechanism. The outputs of the resonator detecting mechanism are electrically connected together and to an output of the filter, such that the signal to be obtained as an output of the filter is an image of the sum of the mechanical responses of the resonators. The resonators are not mechanically coupled together.
摘要翻译：一种谐振滤波器，包括N / m m型谐振器的矩阵，每个谐振器包括致动机构和检测机构。被配置为接收电输入信号的滤波器的输入电连接到谐振器致动机构。谐振器检测机构的输出电连接到滤波器的输出端，使得作为滤波器的输出获得的信号是谐振器的机械响应之和的图像。谐振器不是机械耦合在一起的。

66. 发明授权

US07528685B2 Lamb wave type high frequency device 失效
标题翻译：兰波型高频装置
公开(公告)号：US07528685B2
公开(公告)日：2009-05-05
申请号：US11380509
申请日：2006-04-27
申请人： Satoru Tanaka
发明人： Satoru Tanaka
IPC分类号： H03H9/00 , H03H9/25 , H03H9/125
CPC分类号： H03H9/02842 , H03H9/02228 , H03H9/02551 , H03H9/14552 , H03H9/6426 , H03H9/643
摘要： A lamb wave type high frequency device includes: an interdigital transducer (IDT) electrode having an electrode finger interdigitated therein; a pair of reflectors having an electrode finger and being disposed at both sides of a propagation direction of a lamb wave excited by the IDT electrode; and a piezoelectric substrate on a surface of which the IDT electrode and the reflectors are disposed, wherein a pitch of the electrode finger of the IDT electrode and a pitch of the electrode finger of the reflectors are different from one another.
摘要翻译：兰姆波型高频器件包括：叉指式换能器（IDT）电极，其中具有互相指向的电极指; 一对反射器，具有电极指并设置在由IDT电极激发的兰姆波的传播方向的两侧; 以及其上设置有IDT电极和反射器的表面上的压电基板，其中IDT电极的电极指的间距和反射器的电极指的间距彼此不同。

67. 发明申请

US20080150651A1 Spectral Predictive Switching Device Activation 有权
标题翻译：光谱预测开关器件激活
公开(公告)号：US20080150651A1
公开(公告)日：2008-06-26
申请号：US11950253
申请日：2007-12-04
申请人： Kevin Wilson , John Baggs , Louis Couture
发明人： Kevin Wilson , John Baggs , Louis Couture
IPC分类号： H03H9/125
CPC分类号： H03K17/16 , H01H47/325
摘要： A method of driving an array of switches comprising supplying the same drive signal to a first drive terminal of a plurality of the switches of an array and supplying second drive signals to a second drive terminal of each of the plurality of switches, the second drive signal supplied to a first of the switches being of a form selected to close the first switch, the form of the second drive signal supplied to the remaining switches being selected to prevent false activation of those switches.
摘要翻译：一种驱动开关阵列的方法，包括向阵列的多个开关的第一驱动端提供相同的驱动信号，并将第二驱动信号提供给多个开关中的每一个的第二驱动端，第二驱动信号提供给被选择为关闭第一开关的形式的第一开关，提供给剩余开关的第二驱动信号的形式被选择以防止这些开关的错误启动。

68. 发明授权

US4553060A Electromechanical resonator apparatus 失效
标题翻译：机电谐振器装置
公开(公告)号：US4553060A
公开(公告)日：1985-11-12
申请号：US553614
申请日：1983-11-21
申请人： William J. Domino , Donald P. Havens , Robert A. Johnson
发明人： William J. Domino , Donald P. Havens , Robert A. Johnson
IPC分类号： H03H9/125 , H03H9/24 , H01L41/08
CPC分类号： H03H9/24 , H03H9/125
摘要： A torsional-mode resonator is produced by using an extensional mode transducer on a piece of material such as a metal bar where the transducer lies at an angle between the longitudinal axis of the material and the transverse axis. Placing the midpoint of the transducer at approximately the midpoint of the material such as the bar, optimizes the torsional effect. Further optimization may be obtained by making the transducer in the shape of a rhomboid.
摘要翻译：通过在一块材料（例如金属棒）上使用拉伸模式换能器来产生扭转模式谐振器，其中换能器位于材料的纵向轴线与横向轴线之间的角度处。将传感器的中点放置在材料（如棒）的大致中点处，可优化扭转效应。通过将换能器制成菱形的形状可以获得进一步的优化。

69. 发明授权

US4488128A Bifurcated electroacoustic delay line with diagonal coupling 失效
标题翻译：分叉电声延迟线与对角耦合
公开(公告)号：US4488128A
公开(公告)日：1984-12-11
申请号：US487676
申请日：1983-04-22
申请人： John A. Odozynski
发明人： John A. Odozynski
IPC分类号： H03H9/36 , H03H9/30 , H03H9/125 , H03H9/40
CPC分类号： H03H9/36
摘要： A bifurcated electroacoustic delay line includes first and second branches of a transmission medium, the branches being joined along respective common sides. Bonded to the common sides of the branches are respective first and second input and first and second output transducers, the transducers arranged so that the input transducers are positioned laterally adjacent each other and the output transducers are analogously positioned. An inductance diagonally couples the first output transducer to the second input transducer permits frequency tuning of the delay line.Diagonal coupling via an inductance operates to mitigate the effects of spurious responses derived from the divergence of electroacoustic waves between laterally adjacent tranducers and, collaterally, permits tuning of the delay line composite frequency response.
摘要翻译：分叉电声延迟线包括传输介质的第一和第二分支，所述分支沿相应的公共侧连接。固定到分支的公共侧的是相应的第一和第二输入以及第一和第二输出换能器，换能器被布置成使得输入换能器彼此横向相邻地定位，并且输出换能器类似地定位。将第一输出变换器对角地耦合到第二输入变换器的电感允许延迟线的频率调谐。通过电感的对角耦合用于减轻源于横向相邻传感器之间的电声波发散的寄生响应的影响，并且相互影响延迟线复合频率响应的调谐。

70. 发明授权

US4449234A Reverberation apparatus 失效
标题翻译：混响装置
公开(公告)号：US4449234A
公开(公告)日：1984-05-15
申请号：US346110
申请日：1982-02-05
申请人： Takashi Shibata , Masaaki Nishimura
发明人： Takashi Shibata , Masaaki Nishimura
IPC分类号： G10K15/10 , H03H9/125
CPC分类号： G10K15/10
摘要： A reverberation apparatus includes a signal input terminal to be supplied with an input signal, an operational amplifier having an inverted input terminal, a non-inverted input terminal, and an output terminal. The inverted input terminal is connected to the signal input terminal through an input impedance circuit. The non-inverted input terminal is connected to a reference point, and the output terminal is connected to the reference point through an inductance circuit as a load and a first impedance circuit. A second impedance circuit is connected between the inverted input terminal of the operational amplifier and the connection point between the inductance circuit and the first impedance circuit. In this circuit, the inductance circuit functions as a drive circuit of the reverberation apparatus.
摘要翻译：混响装置包括要输入输入信号的信号输入端子，具有反相输入端子的运算放大器，非反相输入端子和输出端子。反相输入端子通过输入阻抗电路连接到信号输入端子。非反相输入端子连接到参考点，并且输出端子通过作为负载的电感电路和第一阻抗电路连接到参考点。第二阻抗电路连接在运算放大器的反相输入端和电感电路与第一阻抗电路之间的连接点之间。在该电路中，电感电路用作混响装置的驱动电路。

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