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81. 发明授权

US4829179A Surface analyzer 失效
标题翻译：表面分析仪
公开(公告)号：US4829179A
公开(公告)日：1989-05-09
申请号：US70252
申请日：1987-07-06
申请人： Masahiko Aoki , Masashi Konishi , Yasuhiro Matsuda , Naoto Okazaki
发明人： Masahiko Aoki , Masashi Konishi , Yasuhiro Matsuda , Naoto Okazaki
IPC分类号： G01N23/20 , G01Q30/04 , G21K1/093 , H01J49/02 , H01J49/14 , H01J49/30
CPC分类号： H01J49/30 , G01N23/20 , G21K1/093 , H01J49/025 , H01J49/142
摘要： A surface analyzer for analyzing physical properties of the surface of a sample by means of PELS (Proton energy loss spectroscopy) in which accelerated ion beams such as proton beams impinge on the sample in the vertical direction to the surface of the sample and ion beams scattered from the sample are decelerated and then detected by an analyzer to analyze the energy loss of the ion beams. The surface analyzer comprises an ion beam source for generating ion beams, deflecting means for deflecting the ion beams from the ion beam source, irradiating the surface of the sample with the ion beams from the ion beam source in the vertical direction to the surface of the sample, and deflecting scattered ion beams from the sample, accelerating and decelerating means for accelerating the ion beams before the ion beams impinge on the sample and decelerating the scattered ion beams, and analyzing means for detecting the scattered beams and analyzing energy loss of the ion beams.
摘要翻译：用于通过PELS（质子能量损失光谱法）分析样品表面的物理性质的表面分析仪，其中质子束等加速离子束在垂直方向上撞击在样品的表面上并且离子束散射从样品减速，然后由分析仪检测，以分析离子束的能量损失。表面分析仪包括用于产生离子束的离子束源，用于偏转来自离子束源的离子束的偏转装置，用垂直方向的离子束源的离子束照射样品的表面采样和偏转来自样品的散射离子束，加速和减速装置，用于在离子束照射在样品上并加速散射的离子束之前加速离子束，以及分析装置，用于检测散射光束并分析离子的能量损失梁。

82. 发明授权

US4780669A Method and arrangement for evaluating a test voltage by means of a bandwidth-limited evaluation circuit 失效
标题翻译：通过带宽限制评估电路评估测试电压的方法和装置
公开(公告)号：US4780669A
公开(公告)日：1988-10-25
申请号：US842172
申请日：1986-03-21
申请人： Hans D. Brust , Johann Otto
发明人： Hans D. Brust , Johann Otto
IPC分类号： G01N23/22 , G01Q30/04 , G01R23/173 , G01R31/28 , H01J37/28 , G01R31/02
CPC分类号： G01R31/2837 , G01R23/173
摘要： Evaluating method and apparatus for a test voltage by use of a bandwidth-limited evaluation circuits. For evaluation of a measured signal dependent on a variable parameter, an identification is first undertaken with a broad-band evaluation circuit to determine whether an interesting sub-region of the overall variation region of the parameter has been reached. When this is the case, then a reduction of the bandwidth of the evaluation circuit and a reduction of the variation rate of the parameter occurs in order to be able to evaluate with high sensitivity in the interesting sub-region.
摘要翻译：通过使用带宽限制评估电路评估测试电压的方法和装置。为了评估取决于可变参数的测量信号，首先使用宽带评估电路进行识别，以确定是否已经达到了参数的整体变化区域的感兴趣的子区域。在这种情况下，为了能够在感兴趣的子区域中以高灵敏度进行评估，发生评估电路的带宽的减小和参数的变化率的降低。

83. 发明授权

US4739399A TV system for transmission electron microscopes 失效
标题翻译：电视系统用于透射电子显微镜
公开(公告)号：US4739399A
公开(公告)日：1988-04-19
申请号：US82273
申请日：1987-08-06
申请人： Peter R. Swann , Bernd Kraus
发明人： Peter R. Swann , Bernd Kraus
IPC分类号： G01Q30/02 , G01Q30/04 , H01J37/22 , H04N7/18
CPC分类号： H01J37/224
摘要： A device comprising a television camera mounted inside the projection chamber of a transmission electron microscope with the imaging surface perpendicular to the optical axis of the microscope. The electron image is converted to a light image by high efficiency YAG transmission scintillator and transferred by a low loss fiber optic plate to a CCD imaging device. The camera is moved by a pneumatic piston between the operating position where it intercepts the electron beam and a position where the electron beam can pass unobstructed to the main microscope viewing screen.
摘要翻译：一种装置，包括安装在透射电子显微镜的投影室内的成像表面垂直于显微镜的光轴的电视摄像机。电子图像通过高效YAG透射闪烁体转换成光图像，并通过低损耗光纤板转移到CCD成像装置。摄像机通过气动活塞在其拦截电子束的操作位置和电子束能够通过到主显微镜观察屏幕的位置之间移动。

84. 发明授权

US4554455A Potential analyzer 失效
标题翻译：电位分析仪
公开(公告)号：US4554455A
公开(公告)日：1985-11-19
申请号：US518112
申请日：1983-07-28
申请人： Hideo Todokoro , Satoru Fukuhara
发明人： Hideo Todokoro , Satoru Fukuhara
IPC分类号： G01R31/26 , G01Q30/02 , G01Q30/04 , G01R31/302 , G01R31/305 , H01J37/28 , H01L21/66 , H01J37/26
CPC分类号： G01R31/305
摘要： A potential analyzer, suitable for use in measuring the potential of a specimen such as LSI by means of an electron beam probe, comprises a detector for detecting secondary electrons emitted from the specimen irradiated with a primary electron beam, a grid electrode disposed between the detector and the specimen, a power source for applying to the grid electrode a voltage which determines the lower limit of the energy of the secondary electrons detected by the detector, the voltage being changed within a predetermined range, and a filter circuit for averaging the output of the detector produced during a period of time in which the voltage applied to the grid electrode is changed.
摘要翻译：适用于通过电子束探测器测量诸如LSI的样本的电位的电位分析仪包括用于检测从一次电子束照射的样本发射的二次电子的检测器，设置在检测器之间的栅电极试样，用于向栅格电极施加电压，该电压决定由检测器检测到的二次电子的能量的下限，电压在预定范围内变化，以及滤波电路，用于对在施加到栅电极的电压发生变化的时间段期间产生的检测器。

85. 发明授权

US4546254A Charged particle energy analyzer 失效
标题翻译：带电粒子能量分析仪
公开(公告)号：US4546254A
公开(公告)日：1985-10-08
申请号：US478348
申请日：1983-03-24
申请人： Hiroshi Yamauchi
发明人： Hiroshi Yamauchi
IPC分类号： G01N23/22 , G01Q30/02 , G01Q30/04 , H01J37/252 , H01J49/48
CPC分类号： G01N23/22 , H01J37/252 , H01J49/488 , G01N2223/0816 , G01N2223/085 , G01N2223/313
摘要： A charged particle energy analyzer comprises a source for generating radiation to be incident on a sample so as to emit charged particles from the sample, a low energy pass reflection filter for selectively reflecting the charged particles having energy lower than a first value, a high energy pass transmission filter for selectively transmitting the charged particles having energy higher than a second value. The low energy pass reflecting filter comprises a reflector and a first grid. The reflector is a spheroid mirror having two complex focuses, disposed in a symmetrical manner, at which the sample and a detector are disposed. The detector detects the selected charged particles.
摘要翻译：带电粒子能量分析器包括用于产生入射到样品上的辐射源以从样品中发射带电粒子的源，用于选择性地反射具有低于第一值的能量的带电粒子的低能量反射滤光器，高能量通过透射滤光器，用于选择性地透射具有高于第二值的能量的带电粒子。低能量反射滤光器包括反射器和第一格栅。反射器是具有两个复杂焦点的球体镜，以对称的方式设置，样品和检测器设置在该对焦方向。检测器检测所选的带电粒子。

86. 发明授权

US4236178A Electron microscope with brightness/contrast indicator 失效
标题翻译：具有亮度/对比度指示器的电子显微镜
公开(公告)号：US4236178A
公开(公告)日：1980-11-25
申请号：US2419
申请日：1979-01-10
申请人： Johan C. Tiemeijer
发明人： Johan C. Tiemeijer
IPC分类号： G01D7/00 , G01Q30/02 , G01Q30/04 , G01R19/165 , H01J37/22 , H01J37/28 , H04N5/14
CPC分类号： H01J37/28 , G01R19/16595 , H01J37/22
摘要： A series of LED elements is included in a scanning electron microscope in order to indicate the brightness and the contrast of a video signal to be recorded. The brightness is indicated by the position of an illuminating LED element, and the contrast is indicated by the number of alternately illuminating LED elements. The use of different colors for the LED elements provides an indication as to how far the signal to be detected may be intensified. The number of the centrally arranged LED elements of the same color preferably corresponds to the number of grey levels of a grey scale generator included in the circuit.
摘要翻译：为了表示要记录的视频信号的亮度和对比度，扫描电子显微镜中包含一系列LED元件。亮度由照明LED元件的位置指示，对比度由交替照明的LED元件的数量表示。对于LED元件使用不同的颜色提供了可以加强待检测信号的距离的指示。相同颜色的中央布置的LED元件的数量优选地对应于包括在电路中的灰度发生器的灰度级数。

87. 发明授权

US4086491A Direct measurement of the electron beam of a scanning electron microscope 失效
标题翻译：直接测量扫描电子显微镜的电子束
公开(公告)号：US4086491A
公开(公告)日：1978-04-25
申请号：US771715
申请日：1977-02-04
申请人： William H. Vaughan
发明人： William H. Vaughan
IPC分类号： G01Q20/04 , G01Q30/04 , G01T1/29 , H01J37/244 , H01J37/28 , G01N27/00
CPC分类号： H01J37/244 , G01T1/29 , H01J37/28 , H01J2237/24475 , H01J2237/24578
摘要： Apparatus for measuring the electron beam diameter of a scanning electron croscope includes: a transducer which supports a heated wire acting as a knife edge; an electron collector; and a display. The electron beam is scanned across the knife edge to obtain a change in current density which is received by the electron collector and shown as a trace on the display. This trace is a relative measurement of electron beam diameter. The electron beam is scanned a second time with the transducer moving the heated wire abruptly during the second scan to cause a shift in the current density trace on the display. The amount of shift between the traces of the initial and second scans is a reference distance against which the relative measurement of electron beam diameter may be measured.
摘要翻译：用于测量扫描电子显微镜的电子束直径的装置包括：支撑作为刀刃的加热线的换能器; 电子收集器和显示器。电子束被扫描穿过刀刃，以获得由电子收集器接收的电流密度的变化，并在显示器上显示为痕迹。该迹线是电子束直径的相对测量。第二次扫描电子束，换能器在第二次扫描期间突然移动加热的线，导致显示屏上的电流密度迹线发生偏移。初始扫描和第二扫描的迹线之间的偏移量是可以测量电子束直径的相对测量的参考距离。

88. 发明授权

US4064438A Nondestructive detection and measurement of hydrogen embrittlement 失效
标题翻译：氢脆的非破坏性检测和测量
公开(公告)号：US4064438A
公开(公告)日：1977-12-20
申请号：US653335
申请日：1976-01-29
申请人： Franklin Alex , Joseph Gerald Byrne
发明人： Franklin Alex , Joseph Gerald Byrne
IPC分类号： G01N23/221 , G01Q30/02 , G01Q30/04 , G01Q40/00 , G01N23/00
CPC分类号： G01N23/221
摘要： A nondestructive system and method for the determination of the presence and extent of hydrogen embrittlement in metals, alloys, and other crystalline structures subject thereto. Positron annihilation characteristics of the positron-electron annihilation within the tested material provide unique energy distribution curves for each type of material tested at each respective stage of hydrogen embrittlement. Gamma radiation resulting from such annihilation events is detected and statistically summarized by appropriate instrumentation to reveal the variations of electron activity within the tested material caused by hydrogen embrittlement therein. Such data from controlled tests provides a direct indication of the relative stages of hydrogen embrittlement in the form of unique energy distribution curves which may be utilized as calibration curves for future comparison with field tests to give on-site indication of progressive stages of hydrogen embrittlement.
摘要翻译：用于确定金属，合金以及受其影响的其他晶体结构中氢脆的存在和程度的非破坏性系统和方法。测试材料中正电子 - 电子湮灭的正电子湮灭特征为在每个相应的氢脆化阶段测试的每种类型的材料提供独特的能量分布曲线。通过适当的仪器检测和统计总结了由这种湮灭事件产生的伽马辐射，以揭示由其中的氢脆化引起的测试材料内电子活性的变化。来自受控测试的这些数据提供了以独特的能量分布曲线形式的氢脆化的相对阶段的直接指示，其可以用作将来与现场测试进行比较的校准曲线，以给出氢脆性进行阶段的现场指示。

89. 发明授权

US3812288A Television display system 失效
标题翻译：电视显示系统
公开(公告)号：US3812288A
公开(公告)日：1974-05-21
申请号：US30852272
申请日：1972-11-21
申请人： EDAX INT INC
发明人： WALSH C , BARNHART M
IPC分类号： G01Q30/04 , H01J37/28 , H04N9/43 , H04N7/18
CPC分类号： H04N9/43 , H01J37/28 , H01J2237/2807
摘要： A television display system for a scanning electron microscope provides a spatially correlated area map display of X-ray events emitted from a specimen within one or more predetermined energy ranges as the specimen is scanned at standard television scanning rates by an electron beam. The X-ray area map display can be presented alone, or in combination with a conventional micrograph magnified image of the specimen. Provision is made for displaying X-ray events falling within different energy ranges in different colors on the area map television display to facilitate determining the distribution of selected elements within the specimen, and for color coding the distribution peaks on an associated X-ray energy distribution television display to facilitate correlation with the elements displayed in the area map display.

90. 发明授权

US3129353A Multiple radiation source microscope 失效
标题翻译：多重放射源显微镜
公开(公告)号：US3129353A
公开(公告)日：1964-04-14
申请号：US2964160
申请日：1960-05-17
申请人： MRS JENNINGS
发明人： PIERRE NEMES ELMER
IPC分类号： G01N21/00 , G01N23/04 , G01N23/225 , G01Q30/04 , G02B21/00 , G21K7/00 , H01J37/26
CPC分类号： H01J37/26 , G01N21/00 , G01N23/043 , G01N23/225 , G02B21/00 , G21K7/00

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