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1. 发明申请

US20160126017A1 STRESS CONTROL DURING PROCESSING OF A MEMS DIGITAL VARIABLE CAPACITOR (DVC) 有权
标题翻译： MEMS数字可变电容器（DVC）处理过程中的应力控制
公开(公告)号：US20160126017A1
公开(公告)日：2016-05-05
申请号：US14898678
申请日：2014-06-04
申请人： CAVENDISH KINETICS, INC.
发明人： Robertus Petrus VAN KAMPEN , Richard L. KNIPE
IPC分类号： H01G5/16 , H01L49/02
CPC分类号： H01G5/16 , H01G5/18 , H01L28/60
摘要： The present invention generally relates to a MEMS digital variable capacitor (DVC) (900) and a method for manufacture thereof. The movable plate (938) within a MEMS DVC should have the same stress level to ensure proper operation of the MEMS DVC. To obtain the same stress level, the movable plate is decoupled from CMOS ground during fabrication. The movable plate is only electrically coupled to CMOS ground after the plate has been completely formed. The coupling occurs by using the same layer (948) that forms the pull-up electrode as the layer that electrically couples the movable plate to CMOS ground. As the same layer couples the movable plate to CMOS ground and also provides the pull-up electrode for the MEMS DVC, the deposition occurs in the same processing step. By electrically coupling the movable plate to CMOS ground after formation, the stress in each of the layers of the movable plate can be substantially identical.
摘要翻译：本发明一般涉及一种MEMS数字可变电容器（DVC）（900）及其制造方法。 MEMS DVC内的可移动板（938）应具有相同的应力水平，以确保MEMS DVC的正常工作。为了获得相同的应力水平，在制造过程中可移动板与CMOS接地分离。在板已经完全形成之后，可移动板仅电连接到CMOS接地。通过使用形成上拉电极的相同层（948）作为将可移动板电耦合到CMOS地的层而发生耦合。由于相同的层将可移动板耦合到CMOS地，并且还为MEMS DVC提供上拉电极，所以沉积在相同的处理步骤中发生。通过在形成后将可动板电耦合到CMOS地，可移动板的每个层中的应力可以是基本相同的。

2. 发明授权

US11462835B2 Method for tuning an antenna with a DVC 有权
公开(公告)号：US11462835B2
公开(公告)日：2022-10-04
申请号：US16316311
申请日：2017-07-19
申请人： CAVENDISH KINETICS, INC.
发明人： Chenhui Niu , Ray Parkhurst , Paul Anthony Tornatta, Jr. , Lars Ernst Johnsson
IPC分类号： H01Q15/14 , H04B1/04 , G01R27/02 , G01R27/26
摘要： The present disclosure generally relates to any device capable of wireless communication, such as a mobile telephone or wearable device, having one or more antennas. After measuring reflection coefficients of a device at three different DVC states, the reflection coefficient for all other DVC states can be calculated. Thus, based solely upon three reflection coefficient measurements, the antenna can be tuned to adjust for any changes in impedance at the antenna.

3. 发明授权

US10029914B2 Internally generated DFT stepped hysteresis sweep for electrostatic MEMS 有权
公开(公告)号：US10029914B2
公开(公告)日：2018-07-24
申请号：US14916884
申请日：2015-04-23
申请人： CAVENDISH KINETICS, INC.
发明人： James Douglas Huffman , Cong Quoc Khieu , Robertus Petrus Van Kampen , Karl F. Smayling , Vikram Joshi
IPC分类号： H01L29/93 , B81C99/00 , H01G5/16 , H01L23/522 , G01R27/26
摘要： The present invention generally relates to a mechanism for testing a MEMS hysteresis. A power management circuit may be coupled to the electrodes that cause the movable plate that is disposed between the electrodes in a MEMS device to move. The power management circuit may utilize a charge pump, a comparator and a resistor ladder.

4. 发明授权

US09948212B2 Method and technique to control MEMS DVC control waveform for lifetime enhancement 有权
公开(公告)号：US09948212B2
公开(公告)日：2018-04-17
申请号：US14889118
申请日：2014-05-16
申请人： CAVENDISH KINETICS, INC.
发明人： Cong Quoc Khieu , James Douglas Huffman , Richard L. Knipe , Vikram Joshi , Robertus Petrus Van Kampen
IPC分类号： H02N1/00 , B81B7/00 , H01G5/18 , H01H59/00 , B81B7/02 , H01G5/011
CPC分类号： H02N1/006 , B81B7/008 , B81B7/02 , B81B2201/0221 , H01G5/011 , H01G5/18 , H01H59/0009 , H03J2200/39
摘要： The present invention generally relates to a method of operating a MEMS DVC while minimizing impact of the MEMS device on contact surfaces. By reducing the drive voltage upon the pull-in movement of the MEMS device, the acceleration of the MEMS device towards the contact surface is reduced and thus, the impact velocity is reduced and less damage of the MEMS DVC device occurs.

5. 发明授权

US09908774B2 Method for achieving good adhesion between dielectric and organic material 有权
公开(公告)号：US09908774B2
公开(公告)日：2018-03-06
申请号：US15024942
申请日：2014-09-15
申请人： CAVENDISH KINETICS, INC.
发明人： Mickael Renault
IPC分类号： B81C1/00
CPC分类号： B81C1/0038 , B81C1/00801 , B81C2201/0108 , B81C2201/0176 , B81C2201/053
摘要： The present invention generally relates to a method for forming a MEMS device and a MEMS device formed by the method. When forming the MEMS device, sacrificial material is deposited around the switching element within the cavity body. The sacrificial material is eventually removed to free the switching element in the cavity. The switching element has a thin dielectric layer thereover to prevent etchant interaction with the conductive material of the switching element. During fabrication, the dielectric layer is deposited over the sacrificial material. To ensure good adhesion between the dielectric layer and the sacrificial material, a silicon rich silicon oxide layer is deposited onto the sacrificial material before depositing the dielectric layer thereon.

6. 发明授权

US09711289B2 Control-electrode shielding for improved linearity of a MEMS DVC device 有权
公开(公告)号：US09711289B2
公开(公告)日：2017-07-18
申请号：US14779564
申请日：2014-04-02
申请人： CAVENDISH KINETICS, INC.
发明人： Robertus Petrus Van Kampen , Ramadan A. Alhalabi
IPC分类号： H01G5/18 , B81B3/00 , H01G5/16 , H01G5/011 , H01G5/013 , H01H59/00
CPC分类号： H01G5/011 , H01G5/013 , H01G5/16 , H01G5/18 , H01H59/0009
摘要： The present invention generally relates to a MEMS DVC having a shielding electrode structure between the RF electrode and one or more other electrodes that cause a plate to move. The shielding electrode structure may be grounded and, in essence, block or shield the RF electrode from the one or more electrodes that cause the plate to move. By shielding the RF electrode, coupling of the RF electrode to the one or more electrodes that cause the plate to move is reduced and capacitance modulation is reduced or even eliminated.

7. 发明授权

US09385594B2 Two-state charge-pump control-loop for MEMS DVC control 有权
标题翻译：用于MEMS DVC控制的双态电荷泵控制回路
公开(公告)号：US09385594B2
公开(公告)日：2016-07-05
申请号：US14783281
申请日：2014-04-02
申请人： CAVENDISH KINETICS, INC.
发明人： Robertus Petrus Van Kampen , Cong Quoc Khieu , James Douglas Huffman , Richard L. Knipe
IPC分类号： H02M3/07 , B81B7/00
CPC分类号： H02M3/07 , B81B7/00 , B81B7/008 , B81B2201/014 , B81B2203/0109
摘要： The present invention generally relates to a DVC having a charge-pump coupled to a MEMS device. The charge-pump is designed to control the output voltage delivered to the electrodes, such as the pull-in electrode or the pull-off electrode, that move the switching element within the MEMS device between locations spaced far from and disposed closely to the RF electrode.
摘要翻译：本发明一般涉及具有耦合到MEMS器件的电荷泵的DVC。电荷泵被设计成控制传递到电极的输出电压，例如拉入电极或拉出电极，其将MEMS器件内的开关元件移动到与RF紧密相邻的位置处电极。

8. 发明申请

US20140238828A1 MERGED LEGS AND SEMI-FLEXIBLE ANCHORING FOR MEMS DEVICE 审中-公开
标题翻译：用于MEMS器件的合并电路和半灵活安装
公开(公告)号：US20140238828A1
公开(公告)日：2014-08-28
申请号：US14240670
申请日：2012-09-04
申请人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Roberto Gaddi , Rashed Mahameed
发明人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Roberto Gaddi , Rashed Mahameed
IPC分类号： H01H59/00 , B81B3/00
CPC分类号： H01H59/0009 , B81B3/0097 , B81B7/04 , B81B2201/018 , B81B2203/0109 , B81B2203/0118 , B81B2203/0172 , B81B2203/0307
摘要： The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.
摘要翻译：本发明一般涉及具有多个悬臂的MEMS装置，所述多个悬臂在锚定区域中耦合在一起，和/或通过腿连接在悬臂的中心区域中。腿部确保每个悬臂可以在相同电压下从RF电极上方移动/释放。锚定区域联接器匹配悬臂的所有部分中的机械刚度，使得所有悬臂移动在一起。

9. 发明授权

US08488230B2 Fabrication of a floating rocker MEMS device for light modulation 有权
标题翻译：用于光调制的浮动摇臂MEMS装置的制造
公开(公告)号：US08488230B2
公开(公告)日：2013-07-16
申请号：US12862036
申请日：2010-08-24
申请人： Charles Gordon Smith , Richard L. Knipe
发明人： Charles Gordon Smith , Richard L. Knipe
IPC分类号： G02B26/00
CPC分类号： G02B26/0833 , B81B2201/042 , B81C1/00317 , B81C2203/0136 , B81C2203/0145 , G02B26/0841
摘要： The current disclosure shows how to make a fast switching array of mirrors for projection displays. Because the mirror does not have a via in the middle connecting to the underlying spring support, there is an improved contrast ratio that results from not having light scatter off the legs or vias like existing technologies. Because there are no supporting contacts, the mirror can be made smaller making smaller pixels that can be used to make higher density displays. In addition, because there is not restoring force from any supporting spring support, the mirror stays in place facing one or other direction due to adhesion. This means there is no need to use a voltage to hold the mirror in position. This means that less power is required to run the display.
摘要翻译：目前的公开内容显示了如何制造用于投影显示器的反射镜的快速切换阵列。因为反射镜在连接到下面的弹簧支撑件的中间没有通孔，所以具有改善的对比度，这是由于不像现有技术那样从腿部或通孔没有光散射。因为没有支撑触点，镜子可以做得更小，从而可以用较小的像素来制作更高密度的显示器。另外，由于没有来自任何支撑弹簧支撑件的恢复力，因为粘附，反射镜保持在面向一个或另一个方向的位置。这意味着不需要使用电压将镜子保持在适当的位置。这意味着运行显示器需要较少的电力。

10. 发明申请

US20200274246A1 METHOD FOR TUNING AN ANTENNA WITH A DVC 审中-公开
公开(公告)号：US20200274246A1
公开(公告)日：2020-08-27
申请号：US16316311
申请日：2017-07-19
申请人： CAVENDISH KINETICS, INC.
发明人： Chenhui NIU , Ray PARKHURST , Paul Anthony TORNATTA, Jr. , Lars Ernst JOHNSSON
IPC分类号： H01Q15/14
摘要： The present disclosure generally relates to any device capable of wireless communication, such as a mobile telephone or wearable device, having one or more antennas. After measuring reflection coefficients of a device at three different DVC states, the reflection coefficient for all other DVC states can be calculated. Thus, based solely upon three reflection coefficient measurements, the antenna can be tuned to adjust for any changes in impedance at the antenna.

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