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1. 发明授权

US08786166B2 Micromechanical resonator array and method for manufacturing thereof 有权
标题翻译：微机械谐振器阵列及其制造方法
公开(公告)号：US08786166B2
公开(公告)日：2014-07-22
申请号：US13209099
申请日：2011-08-12
申请人： Antti Jaakkola , Tuomas Pensala , Jyrki Kiihamäki
发明人： Antti Jaakkola , Tuomas Pensala , Jyrki Kiihamäki
IPC分类号： H01L41/09
CPC分类号： H03H3/0072 , H03H3/0076 , H03H9/02448 , H03H9/2463 , H03H9/505 , H03H2009/02385 , H03H2009/02503 , H03H2009/2442
摘要： The invention relates to a microelectromechanical resonators and a method of manufacturing thereof. The resonator comprises at least two resonator elements made from semiconductor material, the resonator elements being arranged laterally with respect to each other as an array, at least one transducer element coupled to said resonator elements and capable of exciting a resonance mode to the resonator elements. According to the invention, said at least one transducer element is a piezoelectric transducer element arranged laterally with respect to the at least two resonator elements between the at least two resonator elements and adapted to excite to the resonator elements as said resonance mode a resonance mode whose resonance frequency is dependent essentially only on the c44 elastic parameter of the elastic modulus of the material of the resonator elements. By means of the invention, electrostatic actuation and problems associated therewith can be avoided and accurate resonators can be manufactured.
摘要翻译：本发明涉及一种微机电谐振器及其制造方法。谐振器包括由半导体材料制成的至少两个谐振器元件，谐振器元件相对于彼此横向地布置为阵列，耦合到所述谐振器元件并能够激励谐振元件的谐振模式的至少一个换能器元件。根据本发明，所述至少一个换能器元件是在所述至少两个谐振元件之间相对于所述至少两个谐振器元件横向布置的压电换能器元件，并且适于作为所述谐振模式激励谐振元件，谐振频率基本上仅取决于谐振器元件的材料的弹性模量的c44弹性参数。通过本发明，可以避免静电致动和与之相关的问题，并且可以制造精确的谐振器。

2. 发明申请

US20120280758A1 Bulk acoustic wave resonator and method of manufacturing thereof 审中-公开
标题翻译：体声波谐振器及其制造方法
公开(公告)号：US20120280758A1
公开(公告)日：2012-11-08
申请号：US13508997
申请日：2010-11-19
申请人： Antti Jaakkola , Heikki Kuisma
发明人： Antti Jaakkola , Heikki Kuisma
IPC分类号： H03B5/30 , H05K13/00
CPC分类号： H01P11/008 , H01P7/082 , H03H3/0076 , H03H9/172 , H03H9/2436 , H03H2009/0233 , H03H2009/241 , H03H2009/2442
摘要： The invention concerns a novel bulk acoustic wave (BAW) resonator design and method of manufacturing thereof The bulk acoustic wave resonator comprises a resonator portion, which is provided with at least one void having the form of a trench which forms a continuous closed path on the resonator portion. By manufacturing the void in the same processing step as the outer dimensions of the resonator portion, the effect of processing variations on the resonant frequency of the resonator can be reduced. By means of the invention, the accuracy of BAW resonators can be increased.
摘要翻译：本发明涉及一种新颖的体声波（BAW）谐振器设计及其制造方法。本体声波谐振器包括谐振器部分，该谐振器部分设置有至少一个具有沟槽形式的空隙，该空隙形成在谐振器部分。通过在与谐振器部分的外部尺寸相同的处理步骤中制造空隙，可以减小对谐振器的谐振频率的处理变化的影响。通过本发明，可以提高BAW谐振器的精度。

3. 发明授权

US09288744B2 Method and apparatus for sharing connectivity settings via social networks 有权
标题翻译：通过社交网络共享连接设置的方法和设备
公开(公告)号：US09288744B2
公开(公告)日：2016-03-15
申请号：US14122728
申请日：2011-05-27
申请人： Mikko Lauri Antti Jaakkola
发明人： Mikko Lauri Antti Jaakkola
IPC分类号： H04W48/10 , H04W48/16 , H04L12/58 , H04W12/04 , H04W88/08 , H04W84/12
CPC分类号： H04W48/10 , H04L51/32 , H04W12/04 , H04W48/16 , H04W84/12 , H04W88/08
摘要： An apparatus for enabling sharing of one or more connectivity parameters with one or more friends may include a processor and memory storing executable computer code causing the apparatus to at least perform operations including detecting one or more connection parameters and associated data of at least one access point. The computer program code may further cause the apparatus to facilitate provision of the connection parameters and associated data for inclusion within at least one profile of a user. The profile may be associated with a social network service identifying one or more relationships among one or more determined friends of the user. The computer program code may further cause the apparatus to enable provision of the connection parameters and associated data to at least one device of the user or one or more devices of the friends. Corresponding methods and computer program products are also provided.
摘要翻译：一种用于使得能够与一个或多个朋友共享一个或多个连接参数的装置可以包括处理器和存储可执行计算机代码的存储器，其使所述装置至少执行操作，包括检测至少一个接入点的一个或多个连接参数和相关联的数据。计算机程序代码还可以使得设备有助于提供连接参数和相关联的数据以包含在用户的至少一个简档内。简档可以与识别用户的一个或多个确定的朋友之间的一个或多个关系的社交网络服务相关联。计算机程序代码还可以使得设备能够将连接参数和相关联的数据提供给用户的至少一个设备或朋友的一个或多个设备。还提供了相应的方法和计算机程序产品。

4. 发明申请

US20120038431A1 MICROMECHANICAL RESONATOR ARRAY AND METHOD FOR MANUFACTURING THEREOF 有权
标题翻译：微机电谐振器阵列及其制造方法
公开(公告)号：US20120038431A1
公开(公告)日：2012-02-16
申请号：US13209099
申请日：2011-08-12
申请人： Antti JAAKKOLA , Tuomas PENSALA , Jyrki KIIHAMÄKI
发明人： Antti JAAKKOLA , Tuomas PENSALA , Jyrki KIIHAMÄKI
IPC分类号： H03B5/30 , H01L21/77
CPC分类号： H03H3/0072 , H03H3/0076 , H03H9/02448 , H03H9/2463 , H03H9/505 , H03H2009/02385 , H03H2009/02503 , H03H2009/2442
摘要： The invention relates to a microelectromechanical resonators and a method of manufacturing thereof. The resonator comprises at least two resonator elements made from semiconductor material, the resonator elements being arranged laterally with respect to each other as an array, at least one transducer element coupled to said resonator elements and capable of exciting a resonance mode to the resonator elements. According to the invention, said at least one transducer element is a piezoelectric transducer element arranged laterally with respect to the at least two resonator elements between the at least two resonator elements and adapted to excite to the resonator elements as said resonance mode a resonance mode whose resonance frequency is dependent essentially only on the c44 elastic parameter of the elastic modulus of the material of the resonator elements. By means of the invention, electrostatic actuation and problems associated therewith can be avoided and accurate resonators can be manufactured.
摘要翻译：本发明涉及一种微机电谐振器及其制造方法。谐振器包括由半导体材料制成的至少两个谐振器元件，谐振器元件相对于彼此横向地布置为阵列，耦合到所述谐振器元件并能够激励谐振元件的谐振模式的至少一个换能器元件。根据本发明，所述至少一个换能器元件是在所述至少两个谐振元件之间相对于所述至少两个谐振器元件横向布置的压电换能器元件，并且适于作为所述谐振模式激励谐振元件，谐振频率基本上仅取决于谐振器元件的材料的弹性模量的c44弹性参数。通过本发明，可以避免静电致动和与之相关的问题，并且可以制造精确的谐振器。

5. 发明申请

US20200173719A1 Method and system for cold storage health and content monitoring 审中-公开
公开(公告)号：US20200173719A1
公开(公告)日：2020-06-04
申请号：US16208503
申请日：2018-12-03
申请人： Mikko Lauri Antti Jaakkola
发明人： Mikko Lauri Antti Jaakkola
IPC分类号： F25D29/00 , G01M13/00 , G01N33/00 , G08B21/18
摘要： A method and device for monitor health and content of cold storage units are disclosed herein. In the embodiments, one or more cold storage health and content monitor devices 100 per cold storage unit are connected into an existing power- and communication-infrastructure communicating with a server computer system 110 that communicates with applications 120 sending notifications and receiving their inputs. The monitoring device includes capacitor energy storage for wide operation range and fast charging as well as plurality of sensors. Further, for some embodiments, the device may further comprise LED lights, a speaker and one or more microphones. The notifications are send when at least one of the previously set conditions meet the threshold. These conditions include, but are not limited to, monitoring cold storage unit equipment, monitoring content changes and detecting harmful biological processes inside the unit. The notifications are delivered through natural voice interface and using digital communications.

6. 发明申请

US20120286903A1 Micromechanical device and method of designing thereof 有权
标题翻译：微机械装置及其设计方法
公开(公告)号：US20120286903A1
公开(公告)日：2012-11-15
申请号：US13468052
申请日：2012-05-10
申请人： Mika Prunnila , Antti Jaakkola , Tuomas Pensala
发明人： Mika Prunnila , Antti Jaakkola , Tuomas Pensala
IPC分类号： H01P7/00 , G06F17/50
CPC分类号： B81B3/0072 , B81B2201/0235 , B81B2201/0242 , B81B2201/0271 , B81C2201/0164 , B81C2201/0167 , B81C2201/0177 , G06F17/5045 , H03H9/02448 , H03H9/2447 , H03H2009/2442
摘要： The invention relates to a micromechanical device comprising a semiconductor element capable of deflecting or resonating and comprising at least two regions having different material properties and drive or sense means functionally coupled to said semiconductor element. According to the invention, at least one of said regions comprises one or more n-type doping agents, and the relative volumes, doping concentrations, doping agents and/or crystal orientations of the regions being configured so that the temperature sensitivities of the generalized stiffness are opposite in sign at least at one temperature for the regions, and the overall temperature drift of the generalized stiffness of the semiconductor element is 50 ppm or less on a temperature range of 100° C. The device can be a resonator. Also a method of designing the device is disclosed.
摘要翻译：本发明涉及一种微机械装置，其包括能够偏转或谐振并且包括具有不同材料特性的至少两个区域的半导体元件和功能性耦合到所述半导体元件的驱动或感测装置。根据本发明，所述区域中的至少一个包括一种或多种n型掺杂剂，并且所述区域的相对体积，掺杂浓度，掺杂剂和/或晶体取向被构造成使得广义刚度的温度敏感度在区域的至少一个温度下符号相反，半导体元件的整体刚度的总体温度漂移在100℃的温度范围内为50ppm以下。该器件可以是谐振器。还公开了一种设计该设备的方法。

7. 发明申请

US20110279201A1 MICROELECTROMECHANICAL RESONATOR AND A METHOD FOR PRODUCING THE SAME 有权
标题翻译：微电子谐振器及其制造方法
公开(公告)号：US20110279201A1
公开(公告)日：2011-11-17
申请号：US12779104
申请日：2010-05-13
申请人： Tuomas PENSALA , Antti JAAKKOLA
发明人： Tuomas PENSALA , Antti JAAKKOLA
IPC分类号： H01P7/10 , H01L21/84
CPC分类号： H03H3/0076 , H03H9/1057 , H03H9/2436 , H03H2009/02503 , H03H2009/2442
摘要： The invention relates to temperature compensated micro-electro-mechanical (MEMS) resonators (300) preferably made of silicon. Prior art MEMS resonators have a significant temperature coefficient of resonance frequency, whereby it is difficult to achieve a sufficiently good frequency stability. The inventive MEMS resonator has a resonance plate (310) which resonates in Lamé mode. The resonance plate is p+ doped material, such as silicon doped with boron, and the concentration of the p+ doping is such that the plate has a temperature coefficient of resonance frequency near to zero. The tensile stress and the second order temperature coefficient can further be reduced by doping the plate with germanium.
摘要翻译：本发明涉及优选由硅制成的温度补偿微机电（MEMS）谐振器（300）。现有技术的MEMS谐振器具有显着的谐振频率温度系数，难以实现足够好的频率稳定性。本发明的MEMS谐振器具有以Lamé模式谐振的谐振板（310）。共振板是p +掺杂材料，例如掺杂硼的硅，并且p +掺杂的浓度使得板具有接近于零的共振频率的温度系数。通过用锗掺杂板可以进一步降低拉伸应力和二次温度系数。

8. 发明授权

US08558643B2 Micromechanical device including N-type doping for providing temperature compensation and method of designing thereof 有权
标题翻译：包括用于提供温度补偿的N型掺杂的微机械装置及其设计方法
公开(公告)号：US08558643B2
公开(公告)日：2013-10-15
申请号：US13468052
申请日：2012-05-10
申请人： Mika Prunnila , Antti Jaakkola , Tuomas Pensala
发明人： Mika Prunnila , Antti Jaakkola , Tuomas Pensala
IPC分类号： H03H9/24 , H03H3/013 , H01L29/06 , H01L21/00
CPC分类号： B81B3/0072 , B81B2201/0235 , B81B2201/0242 , B81B2201/0271 , B81C2201/0164 , B81C2201/0167 , B81C2201/0177 , G06F17/5045 , H03H9/02448 , H03H9/2447 , H03H2009/2442
摘要： The invention relates to a micromechanical device comprising a semiconductor element capable of deflecting or resonating and comprising at least two regions having different material properties and drive or sense means functionally coupled to said semiconductor element. According to the invention, at least one of said regions comprises one or more n-type doping agents, and the relative volumes, doping concentrations, doping agents and/or crystal orientations of the regions being configured so that the temperature sensitivities of the generalized stiffness are opposite in sign at least at one temperature for the regions, and the overall temperature drift of the generalized stiffness of the semiconductor element is 50 ppm or less on a temperature range of 100° C. The device can be a resonator. Also a method of designing the device is disclosed.
摘要翻译：本发明涉及一种微机械装置，其包括能够偏转或谐振并且包括具有不同材料特性的至少两个区域的半导体元件和功能性耦合到所述半导体元件的驱动或感测装置。根据本发明，所述区域中的至少一个包括一种或多种n型掺杂剂，并且所述区域的相对体积，掺杂浓度，掺杂剂和/或晶体取向被构造成使得广义刚度的温度敏感度在区域的至少一个温度下符号相反，半导体元件的整体刚度的总体温度漂移在100℃的温度范围内为50ppm以下。该器件可以是谐振器。还公开了一种设计该设备的方法。

9. 发明授权

US09559660B2 Micromechanical devices comprising n-type doping agents 有权
标题翻译：包括n型掺杂剂的微机械装置
公开(公告)号：US09559660B2
公开(公告)日：2017-01-31
申请号：US13985876
申请日：2012-02-17
申请人： Tuomas Pensala , Antti Jaakkola , Maria Ganchenkova , Mika Prunnila , Jyrki Kiihamaki
发明人： Tuomas Pensala , Antti Jaakkola , Maria Ganchenkova , Mika Prunnila , Jyrki Kiihamaki
IPC分类号： H03H9/24 , H03H3/013 , H03H9/02 , H03H3/007 , B81B3/00 , H01L41/18
CPC分类号： H03H9/02448 , B81B3/0078 , B81B2201/0271 , H01L41/18 , H03H3/0072 , H03H3/0076 , H03H9/2405 , H03H9/2447 , H03H2009/02503 , H03H2009/02519 , H03H2009/241 , H03H2009/2442 , Y10T29/42
摘要： The invention concerns a micromechanical device and method of manufacturing thereof. The device comprises an oscillating or deflecting element made of semiconductor material comprising n-type doping agent and excitation or sensing means functionally connected to said oscillating or deflecting element. According to the invention, the oscillating or deflecting element is essentially homogeneously doped with said n-type doping agent. The invention allows for designing a variety of practical resonators having a low temperature drift.
摘要翻译：本发明涉及一种微机械装置及其制造方法。该装置包括由半导体材料制成的振荡或偏转元件，其包括n型掺杂剂和功能性地连接到所述振荡或偏转元件的激励或感测装置。根据本发明，振荡或偏转元件基本均匀地掺杂有所述n型掺杂剂。本发明允许设计具有低温度漂移的各种实用谐振器。

10. 发明授权

US09071226B2 Micromechanical resonator and method for manufacturing thereof 有权
标题翻译：微机械谐振器及其制造方法
公开(公告)号：US09071226B2
公开(公告)日：2015-06-30
申请号：US13816493
申请日：2011-08-11
申请人： Antti Jaakkola , Tuomas Pensala
发明人： Antti Jaakkola , Tuomas Pensala
IPC分类号： H03H3/013 , H03H9/19 , H03H9/02 , H03H9/24
CPC分类号： H03H9/19 , H03H3/013 , H03H9/02448 , H03H2009/02496 , H03H2009/02511 , H03H2009/02519 , H03H2009/2442 , Y10T29/41
摘要： The invention relates to a temperature compensated micromechanical resonator and method of manufacturing thereof. The resonator comprises a resonator element comprising a semiconductor crystal structure, which is doped so as to reduce its temperature coefficient of frequency, transducer means for exciting to the resonator element a vibrational mode. According to the invention the crystal orientation and shape of the resonator element are chosen to allow for a shear mode having a saddle point to be excited to the resonator element, and said transducer means are adapted to excite said shear mode to the resonator element. Accurate micromechanical resonators with now temperature drift can be achieved by means of the invention.
摘要翻译：本发明涉及一种温度补偿微机械谐振器及其制造方法。谐振器包括谐振元件，其包括被掺杂以便降低其频率的温度系数的半导体晶体结构，用于激励谐振器元件的振动模式的振动器装置。根据本发明，谐振器元件的晶体取向和形状被选择为允许具有鞍点的剪切模式被激励到谐振器元件，并且所述换能器装置适于将谐振器元件的所述剪切模式激发。具有现在温度漂移的精确的微机械谐振器可以通过本发明实现。

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