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    • 1. 发明授权
    • Chemical micromachined microsensors
    • 化学显微加工微传感器
    • US07305883B2
    • 2007-12-11
    • US11543550
    • 2006-10-04
    • Butrus T. Khuri-YakubCalvin F. QuateJames K. Gimzewski
    • Butrus T. Khuri-YakubCalvin F. QuateJames K. Gimzewski
    • G01N29/036
    • G01N27/221G01N1/26G01N2001/022G01N2291/02863G01N2291/0427
    • The present invention provides sensors based on micromachined ultrasonic transducer technology. The sensors preferably include a plurality of sensor elements, but may include only one sensor element. Arrays of sensors are also provided. Sensor elements include a functionalized membrane supported over a substrate by a support frame. The functionalized membrane, support frame and substrate together form a vacuum gap. The sensor element is connected to an electrical circuit, which is configured to operate the sensor element at or near an open circuit resonance condition. The mechanical resonance frequency of the functionalized membrane is responsive to binding of an agent to the membrane. Thus, the sensor element also includes a detector, where the detector provides a sensor output responsive to the mechanical resonance frequency of the sensor element.
    • 本发明提供了基于微加工超声换能器技术的传感器。 传感器优选地包括多个传感器元件,但是可以仅包括一个传感器元件。 还提供了传感器阵列。 传感器元件包括通过支撑框架支撑在衬底上的功能化膜。 功能化膜,支撑框架和基板一起形成真空间隙。 传感器元件连接到电路,该电路构造成在开路谐振状态或接近开路谐振条件下操作传感器元件。 功能化膜的机械共振频率响应于试剂与膜的结合。 因此,传感器元件还包括检测器,其中检测器响应于传感器元件的机械共振频率提供传感器输出。