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1. 发明授权

US11488729B2 Propellant grading for laser-driven multi-shell inertial confinement fusion target 有权
公开(公告)号：US11488729B2
公开(公告)日：2022-11-01
申请号：US17192748
申请日：2021-03-04
申请人： Robert O. Hunter, Jr. , Eric W. Cornell
发明人： Robert O. Hunter, Jr. , Eric W. Cornell
IPC分类号： G21B1/19 , G21B1/03 , G21B1/23
摘要： A confinement chamber for Inertial Confinement Fusion (ICF) may include a closed hohlraum and ICF target wherein the ICF target may comprise a central spherical fuel region, inner shell, outer fuel region, outer shell, and propellant region. A multitude of cylindrical beam channels may penetrate the entire thickness of the hohlraum. At the end of each cylindrical beam channel, where they exit the hohlraum, is a hemispherical cavity. Centered in the curvature of each cavity, and coaxial with each beam channel is a gold foam radiator. By layering materials or grading the density of a material in the propellant region of the closed hohlraum ICF target, the pressure profile on the outer shell may be tailored.

2. 发明申请

US20200028313A1 Arrangement of Expanding Optical Flows for Efficient Laser Extraction 审中-公开
公开(公告)号：US20200028313A1
公开(公告)日：2020-01-23
申请号：US16514153
申请日：2019-07-17
申请人： Robert O. Hunter, Jr. , Adlai H. Smith
发明人： Robert O. Hunter, Jr. , Adlai H. Smith
IPC分类号： H01S3/034 , H01S3/23 , H01S3/225 , H01S3/0959 , G21B1/23
摘要： A set of optical elements for optical extraction composed of packed expanding optical cross sections to efficiently extract from a large gain region. The elements are rectangular shaped concave small expansion lenses matched to rectangular convex collimating lenses. Absorbing sheets divide an overall large volume up into smaller volumes to minimize losses due to amplified spontaneous emission. This arrangement has various applications, particularly in inertial confinement technology, where it may be used to extract energy from KrF laser media energized by electron beams. For certain applications, this regime of the gain medium may have zones at the absorbing sheets where this is no gain.

3. 发明申请

US20190057780A1 Reflectivity Variation of ICF Target Surfaces 审中-公开
公开(公告)号：US20190057780A1
公开(公告)日：2019-02-21
申请号：US16003885
申请日：2018-06-08
申请人： Robert O. Hunter, JR. , Adlai H. Smith
发明人： Robert O. Hunter, JR. , Adlai H. Smith
IPC分类号： G21B1/03 , G21B1/19
摘要： In a system and method for controlling energy deposition on a surface of an Inertial Confinement Fusion (ICF) target when imploding. Providing one or more volume absorber/radiators to absorb the incident beam and reradiate x-ray radiation within the hohlraum containing the ICF target. Varying the reflectivity of the inner wall of the hohlraum wall or outer surface of the ICF target. Further suppressing non-uniformities in the x-ray radiation emitted from the one or more volume absorber/radiators upon one or more materials located on an outer surface of the ICF target or inner surface of said hohlraum.

4. 发明授权

US09074848B1 Precision geographic location system and method utilizing an image product 有权
标题翻译：精确的地理位置系统和利用图像产品的方法
公开(公告)号：US09074848B1
公开(公告)日：2015-07-07
申请号：US13443684
申请日：2012-04-10
申请人： Robert O. Hunter, Jr. , Adlai H. Smith
发明人： Robert O. Hunter, Jr. , Adlai H. Smith
IPC分类号： F41G7/22 , G01S13/90 , G01S7/40 , G01C21/00 , F41G7/00
CPC分类号： F41G7/2226 , F41G7/2246 , F41G7/2286 , F41G7/343 , G01C21/005 , G01S7/40 , G01S7/412 , G01S7/4802 , G01S13/86 , G01S13/90 , G01S17/023 , G01S17/895 , G06T7/337
摘要： A method of mapping a target region image to a referenced image includes steps of acquiring the target region image. The method also includes acquiring the referenced image overlapping the target region image. The method further includes determining a number of common subregions in an intersection of the referenced image and the target region image, determining offsets between the common subregions, computing a distortion map of the target region image over the intersection, and remapping the target region image to match the reference image. The method can be utilized in a Unmanned Aerial Vehicle (UAV) and the target image can be a SAR image.
摘要翻译：将目标区域图像映射到参考图像的方法包括获取目标区域图像的步骤。该方法还包括获取与目标区域图像重叠的参考图像。该方法还包括确定参考图像与目标区域图像的交点中的多个公共子区域，确定公共子区域之间的偏移量，计算该交叉路口上的目标区域图像的失真图，以及将目标区域图像重新映射到匹配参考图像。该方法可用于无人机（UAV），目标图像可以是SAR图像。

5. 发明申请

US20120002773A1 High-yield ICF containment chambers and power reactors 有权
标题翻译：高产ICF安全壳和动力反应堆
公开(公告)号：US20120002773A1
公开(公告)日：2012-01-05
申请号：US13068667
申请日：2011-05-17
申请人： Robert O. Hunter, JR. , David H. Sowle , Conner D. Galloway , Alexander V. Valys
发明人： Robert O. Hunter, JR. , David H. Sowle , Conner D. Galloway , Alexander V. Valys
IPC分类号： G21B1/03
CPC分类号： G21B1/03 , G21B1/17 , Y02E30/14
摘要： Cylindrical inertial confinement fusion reaction chambers are disclosed according to some embodiments of the invention. These chambers can include neutron moderating/absorbing material, radiation absorbing material, and debris collection material. These chambers can also include various injection ports, nozzles, beam ports, sacrificial layers, absorbers, coolant systems, etc. These chambers can be used with directional and/or omni-directional targets.
摘要翻译：根据本发明的一些实施例公开了圆柱惯性约束聚变反应室。这些室可以包括中子调节/吸收材料，辐射吸收材料和碎屑收集材料。这些腔室还可以包括各种注射口，喷嘴，射束端口，牺牲层，吸收器，冷却剂系统等。这些腔室可以与定向和/或全方位的靶标一起使用。

6. 发明申请

US20110007298A1 METHOD AND APPARATUS FOR MEASUREMENT OF EXIT PUPIL TRANSMITTANCE 失效
标题翻译：测量出口传感器的方法和装置
公开(公告)号：US20110007298A1
公开(公告)日：2011-01-13
申请号：US12703100
申请日：2010-02-09
申请人： Adlai H. Smith , Robert O. Hunter, JR.
发明人： Adlai H. Smith , Robert O. Hunter, JR.
IPC分类号： G03B27/32 , G02B13/00
CPC分类号： G03F7/70941 , G02B27/0927 , G02B27/0944 , G03F7/70091 , G03F7/70158 , G03F7/70566 , G03F7/70591
摘要： A method and apparatus for determining the state of the lens transmittance of an optical projection system are described. A lens or imaging objective transmission is determined as a function of exit pupil transverse direction cosine (nx,ny) at multiple field points thereby providing a more complete analysis and correction of a photolithographic exposure system. The entrance pupil of a projection imaging system is uniformly illuminated and the angular dependence of transmission through the imaging system as a function of exit pupil direction cosines is determined. The illumination source includes a light conditioner with an in-situ illumination structure (ISIS), which is an optical structure that can provide uniform illumination of the system's entrance pupil.
摘要翻译：描述了用于确定光学投影系统的透镜透射率的状态的方法和装置。作为多个场点处的出射光瞳横向余弦（nx，ny）的函数，确定透镜或成像物镜透射，从而提供对光刻曝光系统的更完整的分析和校正。投影成像系统的入射光瞳被均匀地照射，并且确定作为出射光瞳方向余弦的函数的通过成像系统的透射的角度依赖性。照明源包括具有原位照明结构（ISIS）的光调节器，其是可以提供系统的入射光瞳的均匀照明的光学结构。

7. 发明授权

US07697138B2 Method and apparatus for determination of source polarization matrix 失效
标题翻译：用于确定源极化矩阵的方法和装置
公开(公告)号：US07697138B2
公开(公告)日：2010-04-13
申请号：US11336532
申请日：2006-01-19
申请人： Adlai H. Smith , Robert O. Hunter, Jr.
发明人： Adlai H. Smith , Robert O. Hunter, Jr.
IPC分类号： G01J4/00
CPC分类号： G03F7/70566 , G01J4/04 , G01N21/21 , G03F7/70591
摘要： A method and apparatus for resolving both the angular (nx,ny) and spatial (x,y) dependence of the effective source coherence matrix for lithographic steppers and scanners is described. First an in-situ source metrology instrument is combined with in-situ polarization elements to create an in-situ source imaging polarizer or ISIP. The ISIP is loaded into a photolithographic exposure tool, aligned, and then exposed onto a suitable recording media or recording sensor. The recording sensor comprising either resist coated wafers or electronic sensors capture the image intensity at a multiplicity of different field points. The resulting measurements are entered into a computer program that reconstructs the source coherence matrix as a function of direction cosine at multiple field points. Alternative ISIP configurations are discussed in some detail. Applications of the ISIP include polarization source mapping for deep-UV and EUV lithography, process optimization, process monitoring, and chip manufacturing.
摘要翻译：描述了用于解决用于光刻步进机和扫描仪的有效源相干矩阵的角（nx，ny）和空间（x，y）依赖性的方法和装置。首先，原位测量仪器与原位偏振元件组合以创建原位成像偏振器或ISIP。将ISIP装载到光刻曝光工具中，对齐，然后暴露在合适的记录介质或记录传感器上。包括抗蚀剂涂覆的晶片或电子传感器的记录传感器在多个不同的场点捕获图像强度。所得到的测量值被输入到在多个场点上重建源相干矩阵作为方向余弦的函数的计算机程序。备选的ISIP配置将在一些细节中进行讨论。 ISIP的应用包括用于深UV和EUV光刻，工艺优化，过程监控和芯片制造的极化源映射。

8. 发明授权

US07544449B1 Method and apparatus for measurement of crossfield chromatic response of projection imaging systems 失效
标题翻译：用于测量投影成像系统的横场色度响应的方法和装置
公开(公告)号：US07544449B1
公开(公告)日：2009-06-09
申请号：US11280531
申请日：2005-11-14
申请人： Adlai H. Smith , Robert O. Hunter, Jr. , Joseph Bendik
发明人： Adlai H. Smith , Robert O. Hunter, Jr. , Joseph Bendik
IPC分类号： G03C5/00 , G03F9/00
CPC分类号： G03F7/706
摘要： A method and apparatus for measuring the chromatic response of lithographic projection imaging systems is described. An apparatus for determining the lens aberrations for a lithographic projection lens is provided. A substrate coated with a suitable recording media is provided. A series of lithographic exposures are performed using an exposure source with variable spectral settings. The exposures are measured, and the measurements are used to determine a chromatic response of the projection imaging system.
摘要翻译：描述了用于测量光刻投影成像系统的色度响应的方法和装置。提供了一种用于确定光刻投影透镜的透镜像差的装置。提供了涂有合适记录介质的基材。使用具有可变光谱设置的曝光源执行一系列光刻曝光。测量曝光，并且使用测量来确定投影成像系统的色度响应。

9. 发明授权

US07295291B2 Apparatus and process for the determination of static lens field curvature 有权
标题翻译：用于确定静态透镜视场曲率的装置和过程
公开(公告)号：US07295291B2
公开(公告)日：2007-11-13
申请号：US10844939
申请日：2004-05-12
申请人： Adlai H. Smith , Robert O. Hunter, Jr.
发明人： Adlai H. Smith , Robert O. Hunter, Jr.
IPC分类号： G01B9/00 , G03B27/32 , G03B27/42 , G03B27/52 , G03F9/00 , G03C5/00
CPC分类号： G03F7/70641 , G03F7/706
摘要： A process for the determination of focal plane deviation uniquely due to the lens field curvature associated with a photolithographic projection tool is described. A series of lithographic exposures is performed on a resist coated silicon wafer using a stepper or scanner running in static mode. The lithographic exposures produce an array of focusing fiducials that are displaced relative to each other in a unique way. The resulting measurements are fed into a computer algorithm that calculates the lens field curvature in an absolute sense in the presence of wafer height variation and varying stage performance.
摘要翻译：描述了由于与光刻投影工具相关联的透镜场曲率而唯一地确定焦平面偏差的处理。使用在静态模式下运行的步进机或扫描仪在抗蚀剂涂覆的硅晶片上进行一系列光刻曝光。光刻曝光产生了以独特的方式相对于彼此移位的聚焦基准阵列。所得到的测量值被馈送到计算机算法中，该计算机算法在存在晶片高度变化和变化阶段性能的情况下以绝对意义计算透镜视场曲率。

10. 发明授权

US07136144B2 Method and apparatus for self-referenced dynamic step and scan intra-field lens distortion 有权
公开(公告)号：US07136144B2
公开(公告)日：2006-11-14
申请号：US11289112
申请日：2005-11-28
申请人： Adlai H. Smith , Robert O. Hunter, Jr. , Bruce B. McArthur
发明人： Adlai H. Smith , Robert O. Hunter, Jr. , Bruce B. McArthur
IPC分类号： G03B27/68 , G03B27/42
CPC分类号： G03F7/70633 , G03F7/70725
摘要： A reticle stage grid and yaw in a projection imaging tool is determined by exposing a first portion of a reticle pattern onto a substrate with a recording media thereby producing a first exposure. The first portion of the reticle pattern includes at least two arrays of alignment attribute that have features complementary to each other. The reticle stage is then shifted and a second portion of the reticle pattern is exposed. The first and second exposures overlap and interlock to create completed alignment attributes. Measurements of positional offsets of the completed alignment attributes are used to determine the reticle stage grid and yaw.

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