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1. 发明授权

US09869694B2 Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode 有权
公开(公告)号：US09869694B2
公开(公告)日：2018-01-16
申请号：US14970237
申请日：2015-12-15
申请人： Bruker Nano, Inc.
发明人： Chunzeng Li , Yan Hu , Ji Ma , Jianli He , Lin Huang , Stephen C. Minne , Henry Mittel , Weijie Wang , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q60/24 , G01Q20/00 , B82Y35/00 , G01Q10/06 , G01Q60/32 , G01Q20/02 , G01Q60/30 , G01Q60/34
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.

2. 发明申请

US20160178659A1 Method and Apparatus of Electrical Property Measurement Using an AFM Operating in Peak Force Tapping Mode 有权
公开(公告)号：US20160178659A1
公开(公告)日：2016-06-23
申请号：US14970237
申请日：2015-12-15
申请人： Bruker Nano, Inc.
发明人： Chunzeng Li , Yan Hu , Ji Ma , Jianli He , Lin Huang , Stephen C. Minne , Henry Mittel , Weijie Wang , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q60/34
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.

3. 发明申请

US20150074859A1 Low Drift Scanning Probe Microscope 有权
标题翻译：低漂移扫描探针显微镜
公开(公告)号：US20150074859A1
公开(公告)日：2015-03-12
申请号：US14520021
申请日：2014-10-21
申请人： Bruker Nano, Inc.
发明人： Anthonius G. Ruiter , Henry Mittel
IPC分类号： G01Q30/10
CPC分类号： G01Q30/10 , B82Y35/00 , G01Q70/04
摘要： A scanning probe microscope, such as an atomic force microscope, and method including z-stage and a bridge structure. A scanner containing a probe is mounted to the z-stage, which is movable in the z-axis to raise and lower the probe. The method reduces thermal drift of the z-stage and the bridge using a combination of heating elements thermally coupled to the z-stage and the bridge, ambient temperature sensors, and a controller to actively control the heating elements to maintain the bridge and the z-stage at an elevated temperature. Ideally, the temperatures in the system are selected so as to reduce drift between the probe and the sample during AFM scanning, wherein the drift is preferably maintained at less than about 1 nm for an ambient temperature change of about 1° C.
摘要翻译：扫描探针显微镜，例如原子力显微镜，以及包括z级和桥结构的方法。包含探头的扫描器安装在z阶段，z阶可在z轴上移动以升高和降低探针。该方法通过热耦合到z级和桥接器，环境温度传感器和控制器的加热元件的组合来减少z级和桥的热漂移，以主动地控制加热元件以维持桥和z 在高温下。理想地，选择系统中的温度，以便减少在AFM扫描期间探针和样品之间的漂移，其中漂移优选保持在小于约1nm，环境温度变化约为1℃。

4. 发明授权

US09116168B2 Low drift scanning probe microscope 有权
标题翻译：低漂移扫描探针显微镜
公开(公告)号：US09116168B2
公开(公告)日：2015-08-25
申请号：US14520021
申请日：2014-10-21
申请人： Bruker Nano, Inc.
发明人： Anthonius G. Ruiter , Henry Mittel
IPC分类号： G01Q30/10 , B82Y35/00 , G01Q70/04
CPC分类号： G01Q30/10 , B82Y35/00 , G01Q70/04
摘要： A scanning probe microscope, such as an atomic force microscope, and method including z-stage and a bridge structure. A scanner containing a probe is mounted to the z-stage, which is movable in the z-axis to raise and lower the probe. The method reduces thermal drift of the z-stage and the bridge using a combination of heating elements thermally coupled to the z-stage and the bridge, ambient temperature sensors, and a controller to actively control the heating elements to maintain the bridge and the z-stage at an elevated temperature. Ideally, the temperatures in the system are selected so as to reduce drift between the probe and the sample during AFM scanning, wherein the drift is preferably maintained at less than about 1 nm for an ambient temperature change of about 1° C.
摘要翻译：扫描探针显微镜，例如原子力显微镜，以及包括z级和桥结构的方法。包含探头的扫描器安装在z阶段，z阶可在z轴上移动以升高和降低探针。该方法通过热耦合到z级和桥接器，环境温度传感器和控制器的加热元件的组合来减少z级和桥的热漂移，以主动地控制加热元件以维持桥和z 在高温下。理想地，选择系统中的温度，以便减少在AFM扫描期间探针和样品之间的漂移，其中漂移优选保持在小于约1nm，环境温度变化约为1℃。

5. 发明申请

US20130276174A1 Method and Apparatus of Electrical Property Measurement Using an AFM Operating in Peak Force Tapping Mode 有权
标题翻译：使用在峰值力攻丝模式下运行的AFM进行电气性能测量的方法和装置
公开(公告)号：US20130276174A1
公开(公告)日：2013-10-17
申请号：US13925385
申请日：2013-06-24
申请人： Bruker Nano, Inc.
发明人： Chunzeng Li , Yan Hu , Ji Ma , Jianli He , Lin Huang , Stephen C. Minne , Henry Mittel , Weijie Wang , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q20/02 , G01Q20/00
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.
摘要翻译：一种利用原子力显微镜（AFM）在单程或双程操作中收集地形，力学性能数据和电性能数据的装置和方法。优选使用PFT模式，因此允许使用宽范围的探针，其一个优点是增强电性能测量的灵敏度。

6. 发明授权

US09213047B2 Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode 有权
标题翻译：使用在峰值力攻丝模式下工作的AFM进行电气性能测量的方法和装置
公开(公告)号：US09213047B2
公开(公告)日：2015-12-15
申请号：US13925385
申请日：2013-06-24
申请人： Bruker Nano, Inc.
发明人： Chunzeng Li , Yan Hu , Ji Ma , Jianli He , Lin Huang , Stephen C. Minne , Henry Mittel , Weijie Wang , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q60/24 , G01Q20/00 , B82Y35/00 , G01Q10/06 , G01Q60/32 , G01Q20/02 , G01Q60/30 , G01Q60/34
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.
摘要翻译：一种利用原子力显微镜（AFM）在单程或双程操作中收集地形，力学性能数据和电性能数据的装置和方法。优选使用PFT模式，因此允许使用宽范围的探针，其一个优点是增强电性能测量的灵敏度。

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