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1. 发明申请

US20210396784A1 Device, and Method of Manufacture, for use in Mechanically Cleaning Nanoscale Debris from a Sample Surface 有权
公开(公告)号：US20210396784A1
公开(公告)日：2021-12-23
申请号：US17352001
申请日：2021-06-18
申请人： Bruker Nano, Inc.
发明人： Weijie Wang , Shuiqing Hu , Jason Osborne , Chanmin Su
IPC分类号： G01Q80/00
摘要： A mechanical method of removing nanoscale debris from a sample surface using an atomic force microscope (AFM) probe. The probe is shaped to include an edge that provides shovel-type action on the debris as the probe is moved laterally to the sample surface. Advantageously, the probe is able to lift the debris without damaging the debris for more efficient cleaning of the surface. The edge is preferably made by focused ion beam (FIB) milling the diamond apex of the tip.

2. 发明授权

US10345337B2 Scanning probe microscopy utilizing separable components 有权
公开(公告)号：US10345337B2
公开(公告)日：2019-07-09
申请号：US15952368
申请日：2018-04-13
申请人： Bruker Nano, Inc.
发明人： Chanmin Su , Izhar Medalsy , Weijie Wang
IPC分类号： G01Q70/14 , G01Q10/06 , G01Q20/02 , G01Q70/02 , G01Q60/38
摘要： According to embodiments, a cantilever probe for use with an atomic force microscope (AFM) or scanning probe microscope (SPM) has a pad of conformable material that facilitates non-permanent adhesion through van der Waals interactions. Such removable probes and probe tips facilitate use of multiple tips or probes, while reducing the need for recalibration or repositioning.

3. 发明申请

US20140366230A1 MINIATURIZED CANTILEVER PROBE FOR SCANNING PROBE MICROSCOPY AND FABRICATION THEREOF 有权
标题翻译：微型扫描仪扫描探针显微镜及其制作方法
公开(公告)号：US20140366230A1
公开(公告)日：2014-12-11
申请号：US14305588
申请日：2014-06-16
申请人： Bruker-Nano, Inc.
发明人： Weijie Wang , Chanmin Su
IPC分类号： G01Q70/08 , G01Q70/16
CPC分类号： G01Q60/38 , G01Q70/00 , G01Q70/02 , G01Q70/08 , G01Q70/14 , G01Q70/16 , G01R1/06727
摘要： Cantilever probes are formed from a multilayer structure comprising an upper substrate, a lower substrate, an interior layer, a first separation layer, and a second separation layer, wherein the first separation layer is situated between the upper substrate and the interior layer, the second separation layer is situated between the lower substrate and the interior layer, and wherein the first and the second separation layers are differentially etchable with respect to the first and the second substrates, the interior layer. The upper substrate is a first device layer from which a probe tip is formed. The interior layer is a second device layer from which a cantilever arm is formed. The lower substrate is a handle layer from which a handle, or base portion, is formed. Patterning and etching processing of any layer is isolated from the other layers by the separation layers.
摘要翻译：悬臂探针由包括上基板，下基板，内层，第一分离层和第二分离层的多层结构形成，其中第一分离层位于上基板和内层之间，第二分离层分离层位于下基板和内层之间，并且其中第一和第二分离层相对于第一和第二基板（内层）可差分蚀刻。上基板是形成探针尖端的第一器件层。内层是形成悬臂的第二装置层。下基板是手柄层，从该手柄层形成手柄或基部。任何层的图案化和蚀刻处理通过分离层与其他层隔离。

4. 发明申请

US20160178659A1 Method and Apparatus of Electrical Property Measurement Using an AFM Operating in Peak Force Tapping Mode 有权
公开(公告)号：US20160178659A1
公开(公告)日：2016-06-23
申请号：US14970237
申请日：2015-12-15
申请人： Bruker Nano, Inc.
发明人： Chunzeng Li , Yan Hu , Ji Ma , Jianli He , Lin Huang , Stephen C. Minne , Henry Mittel , Weijie Wang , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q60/34
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.

5. 发明申请

US20220404392A1 Metrology Probe with Built-In Angle and Method of Fabrication Thereof 有权
公开(公告)号：US20220404392A1
公开(公告)日：2022-12-22
申请号：US17348877
申请日：2021-06-16
申请人： Bruker Nano, Inc.
发明人： Jeffrey Wong , Joseph Fragala , Weijie Wang , Deepkishore Mukhopadhyay , Xing Zhao , Rakesh Poddar
IPC分类号： G01Q60/38
摘要： A method of batch-fabricating an array of probe devices for a surface analysis instrument, such as an atomic force microscope (AFM), includes providing a wafer, and photolithographically forming a base and a cantilever for each probe. The cantilever includes a built-in angle, θ, relative to the base, and the base is substantially parallel to a sample holder when the probe device is mounted in a probe holder of the surface analysis instrument.

6. 发明申请

US20180299481A1 SCANNING PROBE MICROSCOPY UTILIZING SEPARABLE COMPONENTS 审中-公开
公开(公告)号：US20180299481A1
公开(公告)日：2018-10-18
申请号：US15952368
申请日：2018-04-13
申请人： Bruker Nano, Inc.
发明人： Chanmin Su , Izhar Medalsy , Weijie Wang
IPC分类号： G01Q70/14 , G01Q60/38 , G01Q20/02 , G01Q10/06
CPC分类号： G01Q70/14 , G01Q10/06 , G01Q20/02 , G01Q60/38 , G01Q70/02
摘要： According to embodiments, a cantilever probe for use with an atomic force microscope (AFM) or scanning probe microscope (SPM) has a pad of conformable material that facilitates non-permanent adhesion through van der Waals interactions. Such removable probes and probe tips facilitate use of multiple tips or probes, while reducing the need for recalibration or repositioning.

7. 发明授权

US09869694B2 Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode 有权
公开(公告)号：US09869694B2
公开(公告)日：2018-01-16
申请号：US14970237
申请日：2015-12-15
申请人： Bruker Nano, Inc.
发明人： Chunzeng Li , Yan Hu , Ji Ma , Jianli He , Lin Huang , Stephen C. Minne , Henry Mittel , Weijie Wang , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q60/24 , G01Q20/00 , B82Y35/00 , G01Q10/06 , G01Q60/32 , G01Q20/02 , G01Q60/30 , G01Q60/34
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.

8. 发明授权

US11555827B2 Torsion wing probe assembly 有权
公开(公告)号：US11555827B2
公开(公告)日：2023-01-17
申请号：US17473577
申请日：2021-09-13
申请人： Bruker Nano, Inc.
发明人： Shuiqing Hu , Martin Wagner , Weijie Wang , Chanmin Su
IPC分类号： G01Q20/02 , G01Q60/38
摘要： A torsional probe for a metrology instrument includes a cantilever coupled to a support structure via a torsion bar. The cantilever, support structure, and arms of torsion bar have substantially the same thickness. A method of manufacture of the torsion probe, as well as a method of using the torsion probe to measure photothermal induced surface displacement of a sample are also described.

9. 发明申请

US20130276174A1 Method and Apparatus of Electrical Property Measurement Using an AFM Operating in Peak Force Tapping Mode 有权
标题翻译：使用在峰值力攻丝模式下运行的AFM进行电气性能测量的方法和装置
公开(公告)号：US20130276174A1
公开(公告)日：2013-10-17
申请号：US13925385
申请日：2013-06-24
申请人： Bruker Nano, Inc.
发明人： Chunzeng Li , Yan Hu , Ji Ma , Jianli He , Lin Huang , Stephen C. Minne , Henry Mittel , Weijie Wang , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q20/02 , G01Q20/00
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.
摘要翻译：一种利用原子力显微镜（AFM）在单程或双程操作中收集地形，力学性能数据和电性能数据的装置和方法。优选使用PFT模式，因此允许使用宽范围的探针，其一个优点是增强电性能测量的灵敏度。

10. 发明申请

US20220107339A1 Torsion Wing Probe Assembly 有权
公开(公告)号：US20220107339A1
公开(公告)日：2022-04-07
申请号：US17473577
申请日：2021-09-13
申请人： Bruker Nano, Inc.
发明人： Shuiqing Hu , Martin Wanger , Weijie Wang , Chanmin Su
IPC分类号： G01Q20/02 , G01Q60/38
摘要： A torsional probe for a metrology instrument includes a cantilever coupled to a support structure via a torsion bar. The cantilever, support structure, and arms of torsion bar have substantially the same thickness. A method of manufacture of the torsion probe, as well as a method of using the torsion probe to measure photothermal induced surface displacement of a sample are also described.

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