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    • 1. 发明授权
    • Mask exchanging method and exposure apparatus
    • 面膜交换方法和曝光装置
    • US06885437B2
    • 2005-04-26
    • US10781661
    • 2004-02-20
    • Kenji NishiKatsunobu OguraHidekazu Kikuchi
    • Kenji NishiKatsunobu OguraHidekazu Kikuchi
    • G03F7/20G03B27/62G03B27/32G03B27/42
    • G03F7/70733G03F7/70741
    • When a reticle stage capable of moving while holding a reticle is at a predetermined unloading position, an unloading arm performs unloading of a reticle. Also, the instant or immediately after the reticle is separated from the reticle stage by the unloading arm, the reticle stage is moved to a predetermined loading position where a reticle is loaded onto the reticle stage by a loading arm. This allows the reticle to be loaded onto the reticle stage before the unloading arm completely withdraws from the unloading position, which reduces the downtime between the retile unloading and the reticle loading. Accordingly, the throughput of the exposure apparatus can be improved, since the time required for reticle exchange is reduced.
    • 当保持掩模版时能够移动的标线片台处于预定的卸载位置时,卸载臂执行掩模版的卸载。 此外,在通过卸载臂将掩模版与刻划台分隔开之后或之后,通过装载臂将标线片载物台移动到预定的装载位置,在该装载位置将掩模版装载到标线片台上。 这样就可以在卸载臂从卸载位置完全退出之前,将掩模版加载到标线片台上,从而减少了沉淀物卸载与掩模版加载之间的停机时间。 因此,由于减少了掩模版交换所需的时间,因此可以提高曝光装置的生产量。
    • 5. 发明授权
    • Output circuit for a bus
    • 总线输出电路
    • US08779808B2
    • 2014-07-15
    • US11984714
    • 2007-11-21
    • Isao MatsumotoHidekazu Kikuchi
    • Isao MatsumotoHidekazu Kikuchi
    • H03B1/00H03K3/00
    • G06F13/4072
    • An output circuit for a bus whose output node is connected to a bus, including a first current source connected to a first reference potential, a first semiconductor switching element connected between the first current source and the output node, a current control circuit for controlling the first semiconductor switching element such that the first current source and the output node are connected when a voltage of the output node is lower than a reference voltage, and the first current source and the output node are disconnected when a voltage of the output node is higher than the reference voltage, and a voltage generating circuit which is connected between the output node and a second reference potential, and includes a second semiconductor switching element turned on/off based on an output control signal.
    • 一种用于总线的输出电路,其输出节点连接到总线,包括连接到第一参考电位的第一电流源,连接在第一电流源和输出节点之间的第一半导体开关元件,用于控制 第一半导体开关元件,使得当输出节点的电压低于参考电压时,第一电流源和输出节点连接,并且当输出节点的电压较高时,第一电流源和输出节点断开 以及连接在输出节点和第二参考电位之间的电压产生电路,并且包括基于输出控制信号导通/截止的第二半导体开关元件。
    • 10. 发明授权
    • Communication system, transmitter, receiver, communication method, program, and communication cable
    • 通信系统,发射机,接收机,通信方式,程序和通信电缆
    • US08243204B2
    • 2012-08-14
    • US12794115
    • 2010-06-04
    • Yasuhisa NakajimaHidekazu Kikuchi
    • Yasuhisa NakajimaHidekazu Kikuchi
    • H04N5/38H04N5/44
    • H04N21/43615H04N5/775H04N7/163H04N21/234309H04N21/4122H04N21/4135H04N21/43632H04N21/43635
    • The present invention relates to a communication system, a transmitter, a receiver, a communication method, a program, and a communication cable for providing high-speed bidirectional communication while maintaining compatibility. When an HDMI (R) source performs bidirectional IP communication with an HDMI (R) sink using a CEC line and a signal line, a switching control unit controls a switch so that, when data is transmitted, the switch selects a constituent signal forming a differential signal output from a converting unit and, when data is transmitted, the switch selects a constituent signal forming a differential signal output from a receiver. When bidirectional communication is performed using only the CEC line, the switching control unit controls the switch so that the CEC signal output from the HDMI (R) source or the receiver is selected. The present invention is applicable to, for example, HDMI (R).
    • 本发明涉及用于在保持兼容性的同时提供高速双向通信的通信系统,发射机,接收机,通信方法,程序和通信电缆。 当HDMI(R)源使用CEC线和信号线与HDMI(R)接收器进行双向IP通信时,切换控制单元控制开关,使得当数据被发送时,开关选择构成信号 从转换单元输出的差分信号,并且当发送数据时,开关选择形成从接收器输出的差分信号的构成信号。 当仅使用CEC线进行双向通信时,开关控制单元控制开关,使得从HDMI(R)源或接收器输出的CEC信号被选择。 本发明可应用于例如HDMI(R)。