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1. 发明授权

US09123501B2 Device for correcting diffraction aberration of electron beam 有权
$Device for correcting diffraction aberration of electron beam$
标题翻译：用于校正电子束衍射像差的装置
公开(公告)号：US09123501B2
公开(公告)日：2015-09-01
申请号：US13977139
申请日：2011-12-26
申请人： Muneyuki Fukuda , Yoichi Ose , Mitsugu Sato , Hiroyuki Ito , Hiroshi Suzuki , Naomasa Suzuki
发明人： Muneyuki Fukuda , Yoichi Ose , Mitsugu Sato , Hiroyuki Ito , Hiroshi Suzuki , Naomasa Suzuki
IPC分类号： H01J37/14 , H01J37/26 , H01J37/10 , H01J37/153 , H01J37/147
CPC分类号： H01J37/10 , H01J37/147 , H01J37/153 , H01J37/26 , H01J2237/1534 , H01J2237/2614
摘要： A diffraction aberration corrector formed by the multipole of the solenoid coil ring and having a function of adjusting the degree of orthogonality or axial shift of the vector potential with respect to the beam axis. In order to cause a phase difference, the diffraction aberration corrector that induces a vector potential, which is perpendicular to the beam axis and has a symmetrical distribution within the orthogonal plane with respect to the beam axis, is provided near the objective aperture and the objective lens. A diffracted wave traveling in a state of being inclined from the beam axis passes through the ring of the magnetic flux. Since the phase difference within the beam diameter is increased by the Aharonov-Bohm effect due to the vector potential, the intensity of the electron beam on the sample is suppressed.
摘要翻译：由电磁线圈环的多极形成的衍射像差校正器，具有调整矢量电势相对于光束轴线的正交性或轴向移动的功能的功能。为了产生相位差，在物镜孔附近设置衍射像差校正器，该衍射像差校正器垂直于光束轴并且在相对于光束轴线的正交平面内具有对称分布的矢量电位，镜片。在从光束轴倾斜的状态下行进的衍射波通过磁通的环。由于由于向量电位而使光束直径内的相位差增加了Aharonov-Bohm效应，所以抑制了样品上电子束的强度。

2. 发明申请

US20140124664A1 DEVICE FOR CORRECTING DIFFRACTION ABERRATION OF ELECTRON BEAM 有权
标题翻译：用于校正电子束的衍射脱落的装置
公开(公告)号：US20140124664A1
公开(公告)日：2014-05-08
申请号：US13977139
申请日：2011-12-26
申请人： Muneyuki Fukuda , Yoichi Ose , Mitsugu Sato , Hiroyuki Ito , Hiroshi Suzuki , Naomasa Suzuki
发明人： Muneyuki Fukuda , Yoichi Ose , Mitsugu Sato , Hiroyuki Ito , Hiroshi Suzuki , Naomasa Suzuki
IPC分类号： H01J37/10 , H01J37/26 , H01J37/147
CPC分类号： H01J37/10 , H01J37/147 , H01J37/153 , H01J37/26 , H01J2237/1534 , H01J2237/2614
摘要： A diffraction aberration corrector formed by the multipole of the solenoid coil ring and having a function of adjusting the degree of orthogonality or axial shift of the vector potential with respect to the beam axis. In order to cause a phase difference, the diffraction aberration corrector that induces a vector potential, which is perpendicular to the beam axis and has a symmetrical distribution within the orthogonal plane with respect to the beam axis, is provided near the objective aperture and the objective lens. A diffracted wave traveling in a state of being inclined from the beam axis passes through the ring of the magnetic flux. Since the phase difference within the beam diameter is increased by the Aharonov-Bohm effect due to the vector potential, the intensity of the electron beam on the sample is suppressed.
摘要翻译：由电磁线圈环的多极形成的衍射像差校正器，具有调整矢量电势相对于光束轴线的正交性或轴向移动的功能的功能。为了产生相位差，在物镜孔附近设置衍射像差校正器，该衍射像差校正器垂直于光束轴并且在相对于光束轴线的正交平面内具有对称分布的矢量电位，镜片。在从光束轴倾斜的状态下行进的衍射波通过磁通的环。由于由于向量电位而使光束直径内的相位差增加了Aharonov-Bohm效应，所以抑制了样品上电子束的强度。

3. 发明授权

US07847249B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US07847249B2
公开(公告)日：2010-12-07
申请号：US12068417
申请日：2008-02-06
申请人： Noritsugu Takahashi , Muneyuki Fukuda , Hiroyuki Ito , Atsuko Fukada , Masashi Sakamoto , Satoshi Takada
发明人： Noritsugu Takahashi , Muneyuki Fukuda , Hiroyuki Ito , Atsuko Fukada , Masashi Sakamoto , Satoshi Takada
IPC分类号： H01J3/14
CPC分类号： G01N23/225 , H01J37/09 , H01J37/265 , H01J37/28 , H01J2237/14 , H01J2237/2817
摘要： A technology whereby removal of magnetic hysteresis is enabled in short time in parallel with a process for stage transfer, and so forth. There is executed a magnetic hysteresis removal sequence whereby current for exciting an electromagnetic coil prior to acquisition of an image is always set to a predetermined variation value against a target value, thereby obtaining information on an image, and so forth, when a diameter of a primary electron beam, converged on the specimen, becomes smaller than dimensions displayed by one pixel of an image to be acquired.
摘要翻译：与阶段转移的过程并行地在短时间内实现磁滞的消除的技术等等。执行磁滞去除序列，其中在获取图像之前激励电磁线圈的电流总是被设置为相对于目标值的预定变化值，从而获得关于图像的信息，等等会聚在样本上的一次电子束变得小于要获取的图像的一个像素显示的尺寸。

4. 发明申请

US20080185519A1 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US20080185519A1
公开(公告)日：2008-08-07
申请号：US12068417
申请日：2008-02-06
申请人： Noritsugu Takahashi , Muneyuki Fukuda , Hiroyuki Ito , Atsuko Fukada , Masashi Sakamoto , Satoshi Takada
发明人： Noritsugu Takahashi , Muneyuki Fukuda , Hiroyuki Ito , Atsuko Fukada , Masashi Sakamoto , Satoshi Takada
IPC分类号： G01N23/04 , G21K5/08 , H01J1/50
CPC分类号： G01N23/225 , H01J37/09 , H01J37/265 , H01J37/28 , H01J2237/14 , H01J2237/2817
摘要： A technology whereby removal of magnetic hysteresis is enabled in short time in parallel with a process for stage transfer, and so forth. There is executed a magnetic hysteresis removal sequence whereby current for exciting an electromagnetic coil prior to acquisition of an image is always set to a predetermined variation value against a target value, thereby obtaining information on an image, and so forth, when a diameter of a primary electron beam, converged on the specimen, becomes smaller than dimensions displayed by one pixel of an image to be acquired.
摘要翻译：与阶段转移的过程并行地在短时间内实现磁滞的消除的技术等等。执行磁滞去除序列，其中在获取图像之前激励电磁线圈的电流总是被设置为相对于目标值的预定变化值，从而获得关于图像的信息，等等会聚在样本上的一次电子束变得小于要获取的图像的一个像素显示的尺寸。

5. 发明授权

US07619219B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US07619219B2
公开(公告)日：2009-11-17
申请号：US11953496
申请日：2007-12-10
申请人： Naomasa Suzuki , Hiroyuki Ito , Ichiro Tachibana
发明人： Naomasa Suzuki , Hiroyuki Ito , Ichiro Tachibana
IPC分类号： H01J37/28 , H01J37/256
CPC分类号： H01J37/141 , H01J37/28 , H01J2237/1405 , H01J2237/141 , H01J2237/244
摘要： The present invention was made in view of a problem of an electron microscope in which a reduction in detection efficiency of electrons detected by a detector should be prevented by eliminating any influence of a leakage magnetic field through a gap in an objective lens onto the electrons emitted from a specimen. To solve the problem, the present invention provides an electron microscope having a configuration with: a pole piece electrode for accelerating primary electrons emitted at an electrons source; and an objective lens including the pole piece electrode. In the objective lens, an electrically and magnetically insulated gap is formed between the pole piece electrode and other pole piece, and an auxiliary coil is concentrically disposed with the objective lens at a middle position between the gap and a detection surface of the electron detector, with an electric current flowing through the auxiliary coil in the opposite direction from that of an electric current flowing through the objective lens coil.
摘要翻译：本发明考虑到电子显微镜的问题，其中通过消除通过物镜中的间隙的泄漏磁场对发射的电子的任何影响来防止检测器检测到的电子的检测效率的降低从标本。为了解决该问题，本发明提供一种具有以下结构的电子显微镜：具有用于加速在电子源发射的一次电子的极片电极; 以及包括极片电极的物镜。在物镜中，在极片电极和其它极片之间形成电磁绝缘的间隙，并且辅助线圈与物镜同心地设置在间隙和电子检测器的检测表面之间的中间位置，电流以与流过物镜线圈的电流相反的方向流过辅助线圈。

6. 发明申请

US20080135755A1 Scanning Electron Microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US20080135755A1
公开(公告)日：2008-06-12
申请号：US11953496
申请日：2007-12-10
申请人： Naomasa SUZUKI , Hiroyuki Ito , Ichiro Tachibana
发明人： Naomasa SUZUKI , Hiroyuki Ito , Ichiro Tachibana
IPC分类号： H01J37/28
CPC分类号： H01J37/141 , H01J37/28 , H01J2237/1405 , H01J2237/141 , H01J2237/244
摘要： The present invention was made in view of a problem of an electron microscope in which a reduction in detection efficiency of electrons detected by a detector should be prevented by eliminating any influence of a leakage magnetic field through a gap in an objective lens onto the electrons emitted from a specimen. To solve the problem, the present invention provides an electron microscope having a configuration with: a pole piece electrode for accelerating primary electrons emitted at an electrons source; and an objective lens including the pole piece electrode. In the objective lens, an electrically and magnetically insulated gap is formed between the pole piece electrode and other pole piece, and an auxiliary coil is concentrically disposed with the objective lens at a middle position between the gap and a detection surface of the electron detector, with an electric current flowing through the auxiliary coil in the opposite direction from that of an electric current flowing through the objective lens coil.
摘要翻译：本发明考虑到电子显微镜的问题，其中通过消除通过物镜中的间隙的泄漏磁场对发射的电子的任何影响来防止检测器检测到的电子的检测效率的降低从标本。为了解决该问题，本发明提供一种具有以下结构的电子显微镜：具有用于加速在电子源发射的一次电子的极片电极; 以及包括极片电极的物镜。在物镜中，在极片电极和其它极片之间形成电气且磁绝缘的间隙，并且辅助线圈与物镜同心地设置在间隙和电子检测器的检测表面之间的中间位置，电流以与流过物镜线圈的电流相反的方向流过辅助线圈。

7. 发明授权

US11211082B1 Magnetic head including spin torque oscillator 有权
公开(公告)号：US11211082B1
公开(公告)日：2021-12-28
申请号：US17169995
申请日：2021-02-08
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Tetsuhito Shinohara , Shigeki Tanemura , Kazuki Sato , Yoji Nomura , Hironori Araki , Tetsuya Roppongi
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Tetsuhito Shinohara , Shigeki Tanemura , Kazuki Sato , Yoji Nomura , Hironori Araki , Tetsuya Roppongi
IPC分类号： G11B5/187 , G11B5/115
摘要： A magnetic head includes a medium facing surface, a main pole, a trailing shield, a spin torque oscillator, and a first insulating layer. The first insulating layer is interposed between a portion of the main pole and a portion of the spin torque oscillator. The first insulating layer has a first end closest to the medium facing surface. The spin torque oscillator has a rear end farthest from the medium facing surface. The first end of the first insulating layer is located closer to the medium facing surface than the rear end of the spin torque oscillator is.

8. 发明授权

US09958769B1 Method of manufacturing a plasmon generator 有权
公开(公告)号：US09958769B1
公开(公告)日：2018-05-01
申请号：US15387066
申请日：2016-12-21
申请人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Seiichiro Tomita , Shigeki Tanemura , Yukinori Ikegawa
发明人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Seiichiro Tomita , Shigeki Tanemura , Yukinori Ikegawa
IPC分类号： G03F1/38 , G03F7/09 , G11B5/31 , G11B5/00
CPC分类号： G03F1/38 , G03F7/094 , G11B5/3169 , G11B2005/0021
摘要： A plasmon generator including a wide portion and a narrow portion is manufactured by etching an initial plasmon generator using an etching mask. The etching mask includes a first mask layer for defining the shape of one of the narrow portion and the wide portion, and a second mask layer for defining the shape of the other of the narrow portion and the wide portion. The etching mask is formed by forming a first hard mask, a second initial mask layer and a second hard mask in this order on a first initial mask layer, and etching the first and second initial mask layers by using the first and second hard masks.

9. 发明授权

US09659588B2 Thermally-assisted magnetic recording head including a main pole and a plasmon generator 有权
公开(公告)号：US09659588B2
公开(公告)日：2017-05-23
申请号：US14825020
申请日：2015-08-12
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Hironori Araki , Seiichiro Tomita , Hideo Mamiya
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Hironori Araki , Seiichiro Tomita , Hideo Mamiya
IPC分类号： G11B5/127 , G11B5/48 , G11B5/31 , G11B5/187 , G11B5/11 , G11B5/00 , G11B5/60 , G11B5/012
CPC分类号： G11B5/4866 , G11B5/012 , G11B5/11 , G11B5/127 , G11B5/1278 , G11B5/187 , G11B5/313 , G11B5/3133 , G11B5/314 , G11B5/3163 , G11B5/60 , G11B5/6088 , G11B2005/0021
摘要： A main pole has a front end face including a first end face portion and a second end face portion. A plasmon generator has a near-field light generating surface. A surrounding layer has a first surrounding layer end face and a second surrounding layer end face located on opposite sides of the first end face portion in the track width direction. A gap film has a first gap film end face and a second gap film end face located on opposite sides of the near-field light generating surface in the track width direction. Each of the first and second gap film end faces includes a portion located between the first and second surrounding layer end faces, but does not include any portion interposed between the first surrounding layer end face and the first end face portion or between the second surrounding layer end face and the first end face portion.

10. 发明授权

US09478241B1 Thermally-assisted magnetic recording head having inclined main magnetic pole and core 有权
标题翻译：具有倾斜主磁极和磁芯的热辅助磁记录头
公开(公告)号：US09478241B1
公开(公告)日：2016-10-25
申请号：US15019428
申请日：2016-02-09
申请人： Shigeki Tanemura , Yoshitaka Sasaki , Hiroyuki Ito , Xuhui Jin , Hideo Mamiya , Yukinori Ikegawa
发明人： Shigeki Tanemura , Yoshitaka Sasaki , Hiroyuki Ito , Xuhui Jin , Hideo Mamiya , Yukinori Ikegawa
IPC分类号： G11B11/00 , G11B5/48 , G11B5/31 , G11B5/60 , G11B5/00 , G11B11/105
CPC分类号： G11B5/6088 , G11B5/314 , G11B11/10543 , G11B11/10554 , G11B11/1058 , G11B2005/0021
摘要： A thermally-assisted magnetic recording head includes a main pole, a waveguide, and a plasmon generator. The waveguide includes a core and a cladding. The main pole and the core are located on the same side in the direction of travel of a recording medium relative to the plasmon generator. The main pole has a first end face located in the medium facing surface, and a second end face opposite to the first end face. The core has a front end face opposed to the second end face of the main pole. The cladding includes an interposition section interposed between the front end face of the core and the second end face of the main pole. The front end face of the core and the second end face of the main pole are inclined with respect to the medium facing surface.
摘要翻译：热辅助磁记录头包括主极，波导和等离子体发生器。波导包括芯和包层。主磁极和磁芯位于记录介质相对于等离子体发生器的行进方向的同一侧。主极具有位于介质面对表面中的第一端面和与第一端面相对的第二端面。芯具有与主极的第二端面相对的前端面。包层包括插入在芯的前端面和主极的第二端面之间的插入部分。芯的前端面和主极的第二端面相对于介质面向表面倾斜。

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