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1. 发明申请

US20120242189A1 MICRO-MECHANICAL COMPONENT WITH CANTILEVER INTEGRATED ELECTRICAL FUNCTIONAL ELEMENT 有权
标题翻译：具有CANTILEVER集成电气功能元件的微机电组件
公开(公告)号：US20120242189A1
公开(公告)日：2012-09-27
申请号：US13418839
申请日：2012-03-13
申请人： Thomas Sulzbach , Wolfgang Engl , Christoph Richter
发明人： Thomas Sulzbach , Wolfgang Engl , Christoph Richter
IPC分类号： H02N2/00
CPC分类号： G01Q20/04 , B81B7/0006 , B82Y35/00 , G01N29/022 , G01N29/036 , G01N2291/0256 , G01N2291/0427 , G01Q10/045
摘要： A micro-mechanical component including a support element and a cantilever with integrated electrical functional element to which at least two electrical supply lines implemented as printed conductors on the cantilever are routed. The invention proposes to arrange at least one each of the supply lines on the two opposite flat surfaces of the cantilever and/or the support element. The functional element is supplied by the first supply line on a first flat surface, with the second supply line on the opposite flat surface serving as return line.
摘要翻译：一种微机械部件，包括支撑元件和具有集成电功能元件的悬臂，至少两条电源线实现为悬臂上的印刷导体。本发明提出在悬臂和/或支撑元件的两个相对的平坦表面上布置至少一个供应管线。功能元件由第一供电线在第一平面上供给，第二供电线位于相对的平面上作为回流线。

2. 发明授权

US08810110B2 Micro-mechanical component with cantilever integrated electrical functional element 有权
标题翻译：微机械组件与悬臂集成电功能元件
公开(公告)号：US08810110B2
公开(公告)日：2014-08-19
申请号：US13418839
申请日：2012-03-13
申请人： Thomas Sulzbach , Wolfgang Engl , Christoph Richter
发明人： Thomas Sulzbach , Wolfgang Engl , Christoph Richter
IPC分类号： H01L41/04 , H02N2/00 , G01N29/036 , G01N29/02 , G01Q10/04 , G01Q20/04 , B81B7/00 , B82Y35/00
CPC分类号： G01Q20/04 , B81B7/0006 , B82Y35/00 , G01N29/022 , G01N29/036 , G01N2291/0256 , G01N2291/0427 , G01Q10/045
摘要： A micro-mechanical component including a support element and a cantilever with integrated electrical functional element to which at least two electrical supply lines implemented as printed conductors on the cantilever are routed. The invention proposes to arrange at least one each of the supply lines on the two opposite flat surfaces of the cantilever and/or the support element. The functional element is supplied by the first supply line on a first flat surface, with the second supply line on the opposite flat surface serving as return line.
摘要翻译：一种微机械部件，包括支撑元件和具有集成电功能元件的悬臂，至少两条电源线实现为悬臂上的印刷导体。本发明提出在悬臂和/或支撑元件的两个相对的平坦表面上布置至少一个供应管线。功能元件由第一供电线在第一平面上供给，第二供电线位于相对的平面上作为回流线。

3. 发明授权

US06979407B2 Process for producing an SPM sensor 失效
标题翻译：生产SPM传感器的方法
公开(公告)号：US06979407B2
公开(公告)日：2005-12-27
申请号：US10385088
申请日：2003-03-10
申请人： Stefan Lutter
发明人： Stefan Lutter
IPC分类号： B81B3/00 , B81C1/00 , G01Q70/10 , G01Q70/16 , H01L21/00
CPC分类号： G01Q70/16 , G01Q70/10
摘要： Process for producing an SPM sensor having a holding element, a cantilever and a sensor tip which projects out of the surface of the cantilever and is delimited by three surfaces. According to the process, the starting material used is a (100)-silicon wafer. The main patterning process steps are carried out on the wafer back surface, so that an SPM sensor can be produced at low cost in a single batch run.
摘要翻译：用于生产具有保持元件，悬臂和突出于悬臂表面并由三个表面限定的传感器尖端的SPM传感器的方法。根据该方法，使用的起始材料是（100）硅晶片。主要的图案化工艺步骤在晶片背面进行，从而可以在单批次运行中以低成本生产SPM传感器。

4. 发明授权

US08209768B2 Method of manufacturing an SPM probe with a scanning tip and with an alignment aid located opposite the scanning tip 有权
标题翻译：制造具有扫描尖端的SPM探针和位于扫描尖端相对的对准辅助装置的方法
公开(公告)号：US08209768B2
公开(公告)日：2012-06-26
申请号：US12576326
申请日：2009-10-09
申请人： Thomas Sulzbach , Oliver Krause , Mathieu Burri , Manfred Detterbeck , Bernd Irmer , Christian Penzkofer
发明人： Thomas Sulzbach , Oliver Krause , Mathieu Burri , Manfred Detterbeck , Bernd Irmer , Christian Penzkofer
IPC分类号： G01Q70/00
CPC分类号： G01Q70/16 , G01Q70/08
摘要： A method of manufacturing an SPM probe having a support element, a cantilever, and a scanning tip on an underside of the cantilever, and having a mark located on the top side of the cantilever opposite the scanning tip. The mark on the top side of the cantilever is located exactly opposite the scanning tip on the underside of the cantilever. This makes it possible to identify the exact position of the scanning tip in the scanning probe microscope from the upward-pointing top side of the cantilever, which significantly simplifies the alignment of the SPM probe. The support element with the cantilever may be prefabricated conventionally and the scanning tip and the mark are then produced on the cantilever in a self-aligning way by means of a particle-beam-induced material deposition based on a gas-induced process.
摘要翻译：一种制造具有在悬臂的下侧上的支撑元件，悬臂和扫描尖端的SPM探针的方法，并且具有位于与扫描尖端相对的悬臂的顶侧上的标记。悬臂顶部的标记位于悬臂底面的扫描尖端正好相对的位置。这使得可以从悬臂的向上的顶侧识别扫描探针显微镜中扫描尖端的确切位置，这显着简化了SPM探针的对准。具有悬臂的支撑元件可以是常规预制的，然后通过基于气体诱导过程的粒子束诱导材料沉积以自对准方式在悬臂上产生扫描尖端和标记。

5. 发明授权

US06953751B2 Micro device and process for producing it 失效
标题翻译：微型设备及其生产工艺
公开(公告)号：US06953751B2
公开(公告)日：2005-10-11
申请号：US10631421
申请日：2003-07-30
申请人： Manfred Detterbeck , Stefan Lutter , Mathieu Burri , Theo Hartmann , Terunobu Akiyama
发明人： Manfred Detterbeck , Stefan Lutter , Mathieu Burri , Theo Hartmann , Terunobu Akiyama
IPC分类号： B81C1/00 , B81B3/00 , C23F1/40 , G03F7/00 , G03F7/16 , G03F9/00
CPC分类号： G03F7/0035 , B81C99/0085 , G03F7/16
摘要： A micro device comprising a SU-8 photoresist layer adhered to a thin layer of, for example, silicon nitride, silicon oxide, metal, and diamond. The SU-8 layer is clamped on the thin layer by using an under-etching technique.
摘要翻译：一种微器件，包括粘附到例如氮化硅，氧化硅，金属和金刚石的薄层上的SU-8光致抗蚀剂层。通过使用底蚀刻技术将SU-8层夹在薄层上。

6. 发明授权

US08011016B2 SPM probe with shortened cantilever 有权
标题翻译：具有缩短悬臂的SPM探头
公开(公告)号：US08011016B2
公开(公告)日：2011-08-30
申请号：US12402576
申请日：2009-03-12
申请人： Thomas Sulzbach , Christoph Richter
发明人： Thomas Sulzbach , Christoph Richter
IPC分类号： G12B21/08
CPC分类号： G01Q70/10 , G01Q70/16
摘要： An SPM probe with an elongated support element and a cantilever projecting beyond the front face of the support element and carrying a scanning tip, with the cantilever arranged at a front face side of the support element of the probe, protruding there from a front face side flank, and with the support element having an essentially trapezoidal cross-section with a longer and a shorter transverse edge at the face side flank, and also with critical corners at one of the transverse edges of the face side flank that are closest to a sample during the scanning process, wherein the support element has an elongated raised portion extending in the longitudinal direction of the support element and of the cantilever, with the raised portion having an essentially trapezoidal cross-section, and with the cantilever arranged on the face side on a narrow transverse edge of the raised portion of the support element, and with the raised portion with the cantilever arranged preferably at the longer transverse edge of the face side flank of the support element, and with the plane extending between the scanning tip and a theoretical straight line passing through one of the critical corners, parallel to the lateral longitudinal edges of the underside of the support element, forming an angle of tilt of at least 5 degrees relative to the transverse edge.
摘要翻译： SPM探针具有细长的支撑元件和悬臂，突出超过支撑元件的前表面并且携带扫描尖端，悬臂布置在探针的支撑元件的前面侧，从前表面侧突出并且支撑元件具有基本上梯形的横截面，其在侧面侧面具有较长和较短的横向边缘，并且还具有最靠近样品的面侧翼侧的一个横向边缘处的临界拐角在扫描过程中，其中支撑元件具有在支撑元件和悬臂的纵向方向上延伸的细长的凸起部分，其中凸起部分具有基本上梯形的横截面，并且悬臂布置在正面侧支撑元件的凸起部分的窄的横向边缘，并且具有悬臂的凸起部分优选地布置在较长的横截面处支撑元件的正面侧面的横向的边缘，以及平行于支撑元件的下侧的横向纵向边缘的扫描尖端和穿过其中一个关键拐角的理论直线之间的平面，形成倾斜角相对于横向边缘至少5度。

7. 发明申请

US20060123894A1 SPM sensor 失效
标题翻译： SPM传感器
公开(公告)号：US20060123894A1
公开(公告)日：2006-06-15
申请号：US11283325
申请日：2005-11-18
申请人： Oliver Krause , Christoph Lehrer , Silke Petersen
发明人： Oliver Krause , Christoph Lehrer , Silke Petersen
IPC分类号： G01B5/28
CPC分类号： G01Q70/12
摘要： An SPM sensor (1) for a scanning probe microscope with a cantilever (3), a holding element (2) at one end of the cantilever (3) and a sensor tip (4) at the other end of the cantilever (3) and to a method for producing sensors of this type. The EBD structure (5) is anchored directly in the substrate of the sensor tip (4). The anchoring of the EBD structure (5) takes place with positive and nonpositive engagement in a hole (6) in the sensor tip (4), which is created by material removal in the substrate of the sensor tip (4). The method comprises the creation of the EBD structure by particle beam induced material deposition in the hole of the sensor tip.
摘要翻译：一种用于具有悬臂（3）的扫描探针显微镜的SPM传感器（1），在悬臂（3）的一端处的保持元件（2）和在悬臂（3）的另一端处的传感器尖端（4）以及这种类型的传感器的制造方法。 EBD结构（5）直接锚定在传感器尖端（4）的基板中。 EBD结构（5）的锚定在正向和非正向接合在传感器尖端（4）中的孔（6）中进行，其通过在传感器尖端（4）的基底中的材料去除而产生。该方法包括通过在传感器尖端的孔中的粒子束感应材料沉积来产生EBD结构。

8. 发明申请

US20100095409A1 METHOD OF MANUFACTURING AN SPM PROBE WITH A SCANNING TIP AND WITH AN ALIGNMENT AID LOCATED OPPOSITE THE SCANNING TIP 有权
标题翻译：使用扫描提示和对齐辅助位置对准的SPM探针的制造方法扫描提示
公开(公告)号：US20100095409A1
公开(公告)日：2010-04-15
申请号：US12576326
申请日：2009-10-09
申请人： Thomas SULZBACH , Oliver KRAUSE , Mathieu BURRI , Manfred DETTERBECK , Bernd IRMER , Christian PENZKOFER
发明人： Thomas SULZBACH , Oliver KRAUSE , Mathieu BURRI , Manfred DETTERBECK , Bernd IRMER , Christian PENZKOFER
IPC分类号： G01Q70/16
CPC分类号： G01Q70/16 , G01Q70/08
摘要： A method of manufacturing an SPM probe having a support element, a cantilever, and a scanning tip on an underside of the cantilever, and having a mark located on the top side of the cantilever opposite the scanning tip. The mark on the top side of the cantilever is located exactly opposite the scanning tip on the underside of the cantilever. This makes it possible to identify the exact position of the scanning tip in the scanning probe microscope from the upward-pointing top side of the cantilever, which significantly simplifies the alignment of the SPM probe. The support element with the cantilever may be prefabricated conventionally and the scanning tip and the mark are then produced on the cantilever in a self-aligning way by means of a particle-beam-induced material deposition based on a gas-induced process.
摘要翻译：一种制造具有在悬臂的下侧上的支撑元件，悬臂和扫描尖端的SPM探针的方法，并且具有位于与扫描尖端相对的悬臂的顶侧上的标记。悬臂顶部的标记位于悬臂底面的扫描尖端正好相对的位置。这使得可以从悬臂的向上的顶侧识别扫描探针显微镜中扫描尖端的确切位置，这显着简化了SPM探针的对准。具有悬臂的支撑元件可以是常规预制的，然后通过基于气体诱导过程的粒子束诱导材料沉积以自对准方式在悬臂上产生扫描尖端和标记。

9. 发明授权

US07536901B2 SPM sensor 失效
标题翻译： SPM传感器
公开(公告)号：US07536901B2
公开(公告)日：2009-05-26
申请号：US11283325
申请日：2005-11-18
申请人： Oliver Krause , Christoph Lehrer , Silke Petersen
发明人： Oliver Krause , Christoph Lehrer , Silke Petersen
IPC分类号： G12B21/08
CPC分类号： G01Q70/12
摘要： An SPM sensor (1) for a scanning probe microscope with a cantilever (3), a holding element (2) at one end of the cantilever (3) and a sensor tip (4) at the other end of the cantilever (3) and to a method for producing sensors of this type. The electron beam induced deposition (EBID or, shorter, EBD) structure (5) is anchored directly in the substrate of the sensor tip (4). The anchoring of the EBD structure (5) takes place with positive and nonpositive engagement in a hole (6) in the sensor tip (4), which is created by material removal in the substrate of the sensor tip (4). The method comprises the creation of the EBD structure by particle beam induced material deposition in the hole of the sensor tip.
摘要翻译：一种用于具有悬臂（3）的扫描探针显微镜的SPM传感器（1），在悬臂（3）的一端处的保持元件（2）和在悬臂（3）的另一端处的传感器尖端（4）以及这种类型的传感器的制造方法。电子束感应沉积（EBID或更短的EBD）结构（5）被直接锚定在传感器尖端（4）的基底中。 EBD结构（5）的锚定在正向和非正向接合在传感器尖端（4）中的孔（6）中进行，其通过在传感器尖端（4）的基底中的材料去除而产生。该方法包括通过在传感器尖端的孔中的粒子束感应材料沉积来产生EBD结构。

10. 发明申请

US20060124768A1 Apparatus and process for the surface coating of workpieces 审中-公开
标题翻译：工件表面涂层的设备和工艺
公开(公告)号：US20060124768A1
公开(公告)日：2006-06-15
申请号：US11285097
申请日：2005-11-22
申请人： Theo Hartmann , Thomas Sulzbach , Christoph Richter , Hans-Jurgen Ludge , Oliver Krause
发明人： Theo Hartmann , Thomas Sulzbach , Christoph Richter , Hans-Jurgen Ludge , Oliver Krause
IPC分类号： B05B1/28 , B05B7/04 , A62C31/00
CPC分类号： B05B14/30 , B05B12/22 , B05B15/62
摘要： An apparatus (1) and a process for the surface coating of workpieces (3), having an applicator nozzle (2) for applying a coating agent to a surface of the workpiece (3) which is to be coated, and having a suction device for discharging the air laden with coating agent vapors and/or coating agent mists, wherein the applicator nozzle (2) and the workpiece (3) are movable relative to one another. A suction bell (4), which engages over an applicator nozzle opening (9) of the applicator nozzle (2) and is rigidly connected to an applicator nozzle wall (14) of the applicator nozzle (2), is arranged downstream of the applicator nozzle (2). The suction bell (4) is a short distance from the workpiece (3) and comprises an inner bell (5) and an outer bell (6), the inner bell (5) delimits a spraying space (7) and the outer bell (6) forms a suction space (8) with a suction intake opening (10) between itself and the inner bell (5).
摘要翻译：一种设备（1）和用于表面涂覆工件（3）的方法，具有用于将涂层剂涂覆到待涂覆的工件（3）的表面上并具有抽吸装置（3）的涂布器喷嘴（2）用于通过涂覆剂蒸气和/或涂层剂雾来排出负载的空气，其中施加喷嘴（2）和工件（3）可相对于彼此移动。在施涂喷嘴（2）的施用喷嘴开口（9）上接合并刚性地连接到施用喷嘴（2）的施用喷嘴壁（14）的吸入口（4）布置在施加器的下游喷嘴（2）。吸气钟（4）距工件（3）很短的距离，包括一个内钟（5）和一个外钟（6），内钟（5）限定一个喷洒空间（7）和外钟 6）在其与内钟（5）之间形成具有吸入口（10）的吸入空间（8）。

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