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1. 发明授权

US09645029B2 Force feedback loop for pressure sensors 有权
公开(公告)号：US09645029B2
公开(公告)日：2017-05-09
申请号：US14246244
申请日：2014-04-07
申请人： lnfineon Technologies AG
发明人： Dirk Hammerschmidt
IPC分类号： G01L9/00 , B81B3/00 , G01L1/14 , G01L1/08
CPC分类号： G01L9/0072 , B81B3/0059 , G01L1/086 , G01L1/144
摘要： A pressure sensor system comprises a force feedback loop. The force feedback loop is configured to receive a measured pressure sensor signal and generate a feedback signal based on the measured pressure and an electrostatic force. The electrostatic force is generated based on the feedback signal and combined with the measured force keeping the resultant sensor signal stable.

2. 发明授权

US09352953B2 Mechanisms for forming micro-electro mechanical system device 有权
标题翻译：微机电系统装置的形成机理
公开(公告)号：US09352953B2
公开(公告)日：2016-05-31
申请号：US14638228
申请日：2015-03-04
申请人： Taiwan Semiconductor Manufacturing Co., Ltd.
发明人： Chun-Ren Cheng
IPC分类号： B81B3/00 , B81C3/00 , B81C1/00 , B81B7/00
CPC分类号： B81B3/0059 , B81B3/0021 , B81B7/0029 , B81B2203/0127 , B81C1/00142 , B81C1/00833 , B81C3/001
摘要： Structures and formation methods of a micro-electro mechanical system (MEMS) device are provided. The MEMS device includes a substrate and a MEMS structure over the substrate, and the MEMS structure has a movable element. The movable element is surrounded by a cavity. The MEMS device also includes a fuse layer on the movable element.
摘要翻译：提供了微机电系统（MEMS）装置的结构和形成方法。 MEMS器件包括衬底上的衬底和MEMS结构，并且MEMS结构具有可移动元件。可移动元件被空腔包围。 MEMS器件还包括可移动元件上的熔丝层。

3. 发明申请

US20150091153A1 WAFER LEVEL SEALING METHODS WITH DIFFERENT VACUUM LEVELS FOR MEMS SENSORS 有权
标题翻译：用于MEMS传感器的不同真空度的水平密封方法
公开(公告)号：US20150091153A1
公开(公告)日：2015-04-02
申请号：US14041298
申请日：2013-09-30
申请人： Taiwan Semiconductor Manufacturing Co., Ltd.
发明人： Yu-Chia Liu , Chia-Hua Chu , Kuei-Sung Chang , Chun-Wen Cheng
IPC分类号： B81C1/00 , B81B7/00
CPC分类号： B81C1/00293 , B81B3/0018 , B81B3/0059 , B81B3/0067 , B81B7/0032 , B81B7/0041 , B81B7/02 , B81C1/00158 , B81C2203/0145 , H01L29/84
摘要： The present disclosure relates to a method of forming a plurality of MEMs device having a plurality of cavities with different pressures on a wafer package system, and an associated apparatus. In some embodiments, the method is performed by providing a work-piece having a plurality of microelectromechanical system (MEMs) devices. A cap wafer is bonded onto the work-piece in a first ambient environment having a first pressure. The bonding forms a plurality of cavities abutting the plurality of MEMs devices, which are held at the first pressure. One or more openings are formed in one or more of the plurality of cavities leading to a gas flow path that could be held at a pressure level different from the first pressure. The one or more openings in the one or more of the plurality of cavities are then sealed in a different ambient environment having a different pressure, thereby causing the one or more of the plurality of cavities to be held at the different pressure.
摘要翻译：本公开涉及一种在晶片封装系统上形成具有多个具有不同压力的空腔的多个MEM器件的方法，以及相关联的装置。在一些实施例中，该方法通过提供具有多个微机电系统（MEM）装置的工件来执行。帽盖晶片在具有第一压力的第一周围环境中结合到工件上。接合形成与多个保持在第一压力下的多个MEM装置邻接的多个空腔。一个或多个开口形成在多个空腔中的一个或多个空腔中，导致可以保持在不同于第一压力的压力水平的气体流动路径。然后将多个空腔中的一个或多个中的一个或多个开口密封在具有不同压力的不同周围环境中，从而使多个空腔中的一个或多个保持在不同的压力。

4. 发明申请

US20140267443A1 ELECTROMECHANICAL SYSTEMS DEVICE WITH SEGMENTED ELECTRODES 审中-公开
标题翻译：具有分离电极的电子系统装置
公开(公告)号：US20140267443A1
公开(公告)日：2014-09-18
申请号：US13804261
申请日：2013-03-14
申请人： QUALCOMM MEMS TECHNOLOGIES, INC.
发明人： Edward K. Chan , John H. Hong , Chong U. Lee , Isak C. Reines
IPC分类号： G02B26/00 , G09G5/10
CPC分类号： G02B26/001 , B81B3/0059 , B81B2201/047 , B81B2203/0127 , B81B2203/04 , G09G5/10
摘要： This disclosure provides systems, methods and apparatus for increasing a range of stable travel positions of a movable layer within electromechanical systems (EMS) devices. In one aspect, an electrically isolated floating electrode can be disposed between a driving electrode within a movable layer and a fixed electrode in order to increase a stable travel range of the movable layer. By segmenting the electrically isolated floating electrode into multiple isolated electrode segments, unbalanced charge accumulation in response to tilting of the movable layer can be constrained to further increase the stable travel range of the movable layer.
摘要翻译：本公开提供了用于增加机电系统（EMS）装置内可移动层的稳定行进位置的范围的系统，方法和装置。在一个方面，为了增加可动层的稳定的行进范围，可以在可动层内的驱动电极和固定电极之间设置电隔离的浮置电极。通过将电隔离的浮置电极分段成多个隔离的电极段，可以限制响应于可移动层的倾斜的不平衡电荷积累，以进一步增加可移动层的稳定行进范围。

5. 发明申请

US20140252358A1 Methods and Apparatus for MEMS Devices with Increased Sensitivity 有权
标题翻译：具有增加灵敏度的MEMS器件的方法和装置
公开(公告)号：US20140252358A1
公开(公告)日：2014-09-11
申请号：US13790617
申请日：2013-03-08
申请人： Taiwan Semiconductor Manufacturing Company Ltd.
发明人： Chia-Hua Chu , Chun-Wen Cheng
IPC分类号： B81B3/00 , B81C1/00
CPC分类号： B81B3/0059 , B81B3/0056 , B81B2201/0235 , B81B2201/0242 , B81B2203/0118 , B81C1/00158 , B81C1/00714 , B81C2201/0112 , B81C2201/0132 , G01C19/5719 , G01P15/0802 , G01P15/125
摘要： Methods and apparatus for forming MEMS devices. An apparatus includes at least a portion of a semiconductor substrate having a first thickness and patterned to form a moveable mass; a moving sense electrode forming the first plate of a first capacitance; at least one anchor patterned from the semiconductor substrate and having a portion that forms the second plate of the first capacitance and spaced by a first gap from the first plate; a layer of semiconductor material of a second thickness patterned to form a first electrode forming a first plate of a second capacitance and further patterned to form a second electrode overlying the at least one anchor and forming a second plate spaced by a second gap that is less than the first gap; wherein a total capacitance is formed that is the sum of the first capacitance and the second capacitance. Methods are disclosed.
摘要翻译：用于形成MEMS器件的方法和装置。一种装置包括具有第一厚度的半导体衬底的至少一部分并被图案化以形成可移动质量块; 形成第一电容的第一板的移动感测电极; 所述至少一个锚定体从所述半导体衬底图案化并且具有形成所述第一电容的所述第二板的部分并与所述第一板间隔开第一间隙; 图案化的第二厚度的半导体材料层，以形成形成第二电容的第一板的第一电极，并进一步图案化以形成覆盖至少一个锚的第二电极，并形成间隔第二间隙的第二板，该第二间隔较小比第一个差距; 其中形成的总电容是第一电容和第二电容之和。公开了方法。

6. 发明申请

US20140246740A1 IMPLANTATION OF GASEOUS CHEMICALS INTO CAVITIES FORMED IN INTERMEDIATE DIELECTRICS LAYERS FOR SUBSEQUENT THERMAL DIFFUSION RELEASE 有权
标题翻译：将气体化学物质纳入用于后续热扩散释放的中间电介质层中的CAVI
公开(公告)号：US20140246740A1
公开(公告)日：2014-09-04
申请号：US14352057
申请日：2012-04-19
申请人： Willibrordus Gerardus Van Den Hoek , Robertus Petrus Van Kampen , Richard L. Knipe , Charles Gordon Smith
发明人： Willibrordus Gerardus Van Den Hoek , Robertus Petrus Van Kampen , Richard L. Knipe , Charles Gordon Smith
IPC分类号： B81B3/00 , B81B7/00 , B81C1/00
CPC分类号： H01L29/84 , B81B3/0059 , B81B7/0035 , B81B2203/0127 , B81C1/00285 , B81C1/00293 , B81C1/00682
摘要： The present invention generally relates to methods for increasing the lifetime of MEMS devices by reducing the landing velocity on switching by introducing gas into the cavity surrounding the switching element of the MEMS device. The gas is introduced using ion implantation into a cavity close to the cavity housing the switching element and connected to that cavity by a channel through which the gas can flow from one cavity to the other. The implantation energy is chosen to implant many of the atoms close to the inside roof and floor of the cavity so that on annealing those atoms diffuse into the cavity. The gas provides gas damping which reduces the kinetic energy of the switching MEMS device which then should have a longer lifetime.
摘要翻译：本发明一般涉及通过将气体引入到围绕MEMS器件的开关元件的空腔中来降低开关时降低着陆速度来增加MEMS器件寿命的方法。使用离子注入将气体引入到容纳开关元件的腔附近的空腔中，并且通过通道将气体连接到该空腔，气体可以通过该通道从一个空腔流到另一个空腔。选择植入能量以植入靠近腔室的内部屋顶和底部的许多原子，使得在退火时，这些原子扩散到空腔中。气体提供气体阻尼，其降低开关MEMS器件的动能，然后应该具有更长的寿命。

7. 发明申请

US20130044969A1 METHODS AND SYSTEMS FOR MICRO BEARINGS 有权
标题翻译：微型轴承的方法和系统
公开(公告)号：US20130044969A1
公开(公告)日：2013-02-21
申请号：US13647218
申请日：2012-10-08
申请人： Harold L. Stalford
发明人： Harold L. Stalford
IPC分类号： F16C32/00
CPC分类号： B81B3/0059 , B81B2201/037 , B81B2203/06 , Y10T29/49647 , Y10T29/49696
摘要： A micro drive assembly may comprise a substrate, a micro shaft oriented in-plane with the substrate and at least one micro bearing to support rotation of the micro shaft. The micro shaft and micro bearing may be in or less than the micrometer domain.
摘要翻译：微驱动组件可以包括基板，与基板成平面定向的微轴和至少一个微轴承以支撑微轴的旋转。微轴和微型轴承可以在微米范围内或更小。

8. 发明授权

US08313332B2 Oblique parts or surfaces 有权
标题翻译：倾斜的零件或表面
公开(公告)号：US08313332B2
公开(公告)日：2012-11-20
申请号：US12704604
申请日：2010-02-12
申请人： Jurgen Daniel , David K. Fork , Armin R. Völkel
发明人： Jurgen Daniel , David K. Fork , Armin R. Völkel
IPC分类号： B81B3/00 , B81C1/00 , G01R1/067
CPC分类号： F16F3/02 , B81B3/0059 , B81B2203/0118 , B81C1/0015 , F16F1/025 , F16H1/125 , G01R1/06716 , G01R1/06727 , G01R1/06744 , H01L24/72 , H01L24/90 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/12042 , H01L2924/15788 , Y10T29/49155 , Y10T29/49204 , Y10T29/49609 , H01L2924/00
摘要： Various structures, such as microstructures and wall-like structures, can include parts or surfaces that are oblique. In some implementations, a cantilevered element includes a spring-like portion with a uniformly oblique surface or with another artifact of an oblique radiation technique. In some implementations, when a deflecting force is applied, a spring-like portion can provide deflection and spring force within required ranges. Various oblique radiation techniques can be used, such as radiation of a layer through a prism, and structures having spring-like portions with oblique radiation artifacts can be used in various applications, such as with downward or upward deflecting forces.
摘要翻译：诸如微结构和壁状结构的各种结构可以包括倾斜的部分或表面。在一些实施方案中，悬臂元件包括具有均匀倾斜表面的弹簧状部分或具有倾斜辐射技术的另一伪像。在一些实施方案中，当施加偏转力时，弹簧状部分可以在所需范围内提供偏转和弹簧力。可以使用各种倾斜辐射技术，例如穿过棱镜的层的辐射，并且具有具有倾斜辐射伪影的弹簧状部分的结构可以用于各种应用中，例如具有向下或向上偏转力。

9. 发明申请

US20120167377A1 METHODS AND SYSTEMS FOR POSITIONING MICRO ELEMENTS 有权
标题翻译：定位微元件的方法和系统
公开(公告)号：US20120167377A1
公开(公告)日：2012-07-05
申请号：US13417564
申请日：2012-03-12
申请人： Harold L. Stalford
发明人： Harold L. Stalford
IPC分类号： H02N99/00
CPC分类号： B81B3/0059 , B81B2201/037 , B81B2203/06 , Y10T29/49009 , Y10T29/49124 , Y10T29/49133
摘要： A micro device may comprise a substrate, a first micro structure coupled to the substrate, a second micro structure coupled to the substrate, and port configured to receive an input. The first micro structure is configured to move into engagement with the second micro structure in response to the input.
摘要翻译：微器件可以包括衬底，耦合到衬底的第一微结构，耦合到衬底的第二微结构和被配置为接收输入的端口。第一微结构被配置为响应于输入而移动成与第二微结构接合。

10. 发明授权

US07944113B2 Hysteretic MEMS thermal device and method of manufacture 有权
标题翻译：迟滞MEMS热装置及其制造方法
公开(公告)号：US07944113B2
公开(公告)日：2011-05-17
申请号：US12318634
申请日：2009-01-05
申请人： Paul J. Rubel
发明人： Paul J. Rubel
IPC分类号： H01L41/08
CPC分类号： F03G7/06 , B81B3/0059 , B81B2201/018 , B81B2201/032 , B81B2201/054 , H01H61/02 , H01H61/04 , H01H2001/0047 , H01H2001/0068 , H01H2061/006 , H01H2061/008 , H02N10/00 , Y10T29/49105
摘要： A MEMS hysteretic thermal actuator may have a plurality of beams disposed over a heating element formed on the surface of the substrate. The plurality of beams may be coupled to a passive beam which is not disposed over the heating element. One of the plurality of beams may be formed in a first plane parallel to the substrate, whereas another of the plurality of beams may be formed in a second plane closer to the surface of the substrate. When the heating element is activated, it heats the plurality of beams such that they move the passive beam in a trajectory that is neither parallel to nor perpendicular to the surface of the substrate. When the beams are cooled, they may move in a different trajectory, approaching the substrate before moving laterally across it to their initial positions. By providing one electrical contact on the distal end of the passive beam and another stationary electrical contact on the substrate surface, the MEMS hysteretic actuator may form a reliable electrical switch that is relatively simple to manufacture and operate.
摘要翻译： MEMS迟滞热致动器可以具有设置在形成在基板的表面上的加热元件上的多个光束。多个光束可以耦合到未设置在加热元件上方的无源光束。多个光束中的一个可以形成在平行于衬底的第一平面中，而多个光束中的另一个可以形成在靠近衬底表面的第二平面中。当加热元件被激活时，它加热多个光束，使得它们以不平行于或垂直于衬底表面的轨迹移动被动束。当梁被冷却时，它们可以以不同的轨迹移动，在横向移动到其初始位置之前接近基板。通过在被动束的远端上提供一个电接触，并在衬底表面上提供另一个固定的电触点，MEMS滞后致动器可形成可靠的电开关，其制造和操作相对简单。

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