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    • 8. 发明授权
    • Method of fluoridation and directions for use of a unit of fluoridation
    • 氟化方法和使用氟化单位的方向
    • US08758856B2
    • 2014-06-24
    • US13062271
    • 2009-09-10
    • Takanori WatanabeHideaki IwamuraKatsuji Minami
    • Takanori WatanabeHideaki IwamuraKatsuji Minami
    • C23C16/28
    • C23C8/08
    • A method of fluoridation that can maintain a stable treatment quality is provided. The method of the fluoridation treatment performs the fluoridation treatment by heating and keeping a workpiece in a fluoridation treatment space filled with a predetermined fluoride atmosphere. By exposing an interior space structure that is reactive against fluorine within the fluoridation treatment space, forming a fluoride layer in advance on a surface of the interior space structure exposed within the fluoridation treatment space, and performing the fluoridation treatment, a fluoridation source gas supplied for the fluoridation treatment of the workpiece is not significantly consumed for fluoridating the surface of the interior space structure during the fluoridation treatment. Further, even when a fluoridation potential of the supplied fluoridation source gas is insufficient, the fluoride layer on the surface of the interior space structure discharges the fluoridation gas. Thereby, the fluoride atmosphere in the fluoridation treatment space during the fluoridation treatment can be appropriately maintained.
    • 提供了可以保持稳定的处理质量的氟化方法。 氟化处理方法通过在填充有预定氟化物气氛的氟化处理空间中加热并保持工件进行氟化处理。 通过暴露在氟化处理空间内与氟反应的内部空间结构,预先在暴露在氟化处理空间内的内部空间结构的表面上形成氟化物层,进行氟化处理,提供氟化源气体 在氟化处理期间,对于内部空间结构的表面进行氟化,工件的氟化处理不被显着消耗。 此外,即使所提供的氟化源气体的氟化电位不足,内部空间结构的表面上的氟化物层排出氟化气体。 由此,能够适当地维持氟化处理时的氟化处理空间的氟化物气氛。