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    • 10. 发明授权
    • Apparatus and method for manufacturing monocrystals
    • 用于制造单晶的装置和方法
    • US06402834B1
    • 2002-06-11
    • US09485049
    • 2000-01-31
    • Kunihiko NagaiKohei KodairaHiroyuki TanakaHideki Sakamoto
    • Kunihiko NagaiKohei KodairaHiroyuki TanakaHideki Sakamoto
    • C30B1518
    • C30B15/14C30B15/00C30B15/02C30B15/08C30B29/30Y10S117/91
    • In a monocrystal producing device using a pulling-down method, a raw material melt 5m is continuously supplied into a crucible 2 to grow a crystal 18 by supplying a powdery raw material 5p onto a premelt plate 3 inside an electric furnace 10 with a powdery raw material supplying device 20 and melting the powdery raw material 5p on the premelt plate 3 to generate the raw material melt 5m, and causing this raw material melt 5m to drop out inside the crucible 2. A dry air is introduced into the powdery raw material 5p inside the powdery raw material tank 6 to prevent moisture of the raw material powder 5p. A transferring tube 9 for transferring the raw material 5m is cooled to prevent the filling in the transferring tube 9 based on melting of the powdery raw material 5p. This makes it possible to produce a monocrystal having a stable chemical composition, a large diameter, and a long size at a low price.
    • 在使用下拉法的单晶体制造装置中,将原料熔体5m连续地供给到坩埚2中,通过将粉末状原料5p供给到具有粉末状原料的电炉10内的预熔融板3上, 材料供给装置20,将预制熔融板3上的粉末状原料5p熔融而生成原料熔融物5m,使该原料熔融物5m从坩埚2的内部脱落。将干燥空气导入粉末状原料5p 在粉状原料罐6内部,以防止原料粉末5p的水分。 用于转移原料5m的转移管9被冷却,以防止粉状原料5p熔化的填充在转移管9中。 这使得可以以低价格生产具有稳定的化学组成,大直径和长尺寸的单晶。