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    • 1. 发明授权
    • Oxide films, a method of producing the same and structures having the same
    • 氧化物膜,其制造方法和具有该氧化物膜的结构
    • US07517557B2
    • 2009-04-14
    • US10792852
    • 2004-03-05
    • Makoto IwaiMakoto OhmoriTakashi YoshinoMinoru Imaeda
    • Makoto IwaiMakoto OhmoriTakashi YoshinoMinoru Imaeda
    • C23C16/00B01F3/02
    • C30B25/14C23C16/40C30B25/02C30B29/30
    • An object of the present invention is to produce an oxide film having good surface morphology and crystal quality, by a metal organic chemical vapor deposition using two or more raw material gases of metal organic compounds and oxygen gas. It is used a film forming system having a first supply hole 11A, a second supply hole 11B, a third supply hole 11C and a film forming chamber 7. A first raw material gas “A” containing a first metal organic compound is supplied through the first supply hole 11A into the chamber 7. A second raw material gas “B” containing the second metal organic compound is supplied through the second supply hole 11B into the chamber 7, and oxygen gas “C” is supplied through the third supply hole 11C into the chamber 7. The oxygen gas “D” contacts the first raw material gas “E” before the oxygen gas is mixed with the second raw material gas “F” in the chamber 7.
    • 本发明的目的是通过使用两种或更多种金属有机化合物和氧气的原料气体的金属有机化学气相沉积来制造具有良好的表面形态和晶体质量的氧化膜。 使用具有第一供给孔11A,第二供给孔11B,第三供给孔11C和成膜室7的成膜体系。通过第一供给孔11A,第二供给孔11B,第三供给孔11C和成膜室7配置含有第一金属有机化合物的第一原料气体“A” 第一供给孔11A插入到室7.包含第二金属有机化合物的第二原料气体“B”通过第二供给孔11B供给到室7中,并且通过第三供给孔11C供给氧气“C” 在氧气与第二原料气体“F”在室7中混合之前,氧气“D”接触第一原料气体“E”。
    • 2. 发明申请
    • OXIDE FILMS, A METHOD OF PRODUCING THE SAME AND STRUCTURES HAVING THE SAME
    • 氧化膜,其制造方法和具有该氧化膜的结构
    • US20090074963A1
    • 2009-03-19
    • US10792852
    • 2004-03-05
    • Makoto IwaiMakoto OhmoriTakashi YoshinoMinoru Imaeda
    • Makoto IwaiMakoto OhmoriTakashi YoshinoMinoru Imaeda
    • C23C16/06
    • C30B25/14C23C16/40C30B25/02C30B29/30
    • An object of the present invention is to produce an oxide film having good surface morphology and crystal quality, by a metal organic chemical vapor deposition using two or more raw material gases of metal organic compounds and oxygen gas. It is used a film forming system having a first supply hole 11A, a second supply hole 11B, a third supply hole 11C and a film forming chamber 7. A first raw material gas “A” containing al first metal organic compound is supplied through the first supply hole 11A into the chamber 7. A second raw material gas “B” containing the second metal organic compound is supplied through the second supply hole 11B into the chamber 7, and oxygen gas “C” is supplied through the third supply hole 11C into the chamber 7. The oxygen gas “D” contacts the first raw material gas “E” before the oxygen gas is mixed with the second raw material gas “F” in the chamber 7.
    • 本发明的目的是通过使用两种或更多种金属有机化合物和氧气的原料气体的金属有机化学气相沉积来制造具有良好的表面形态和晶体质量的氧化膜。 使用具有第一供给孔11A,第二供给孔11B,第三供给孔11C和成膜室7的成膜系统。含有第一金属有机化合物的第一原料气体“A”通过 第一供给孔11A插入到室7.包含第二金属有机化合物的第二原料气体“B”通过第二供给孔11B供给到室7中,并且通过第三供给孔11C供给氧气“C” 在氧气与第二原料气体“F”在室7中混合之前,氧气“D”接触第一原料气体“E”。
    • 3. 发明授权
    • Systems and a method for generating blue laser beam
    • 用于产生蓝色激光束的系统和方法
    • US06807210B2
    • 2004-10-19
    • US10396370
    • 2003-03-26
    • Makoto IwaiTakashi YoshinoMinoru Imaeda
    • Makoto IwaiTakashi YoshinoMinoru Imaeda
    • H01S314
    • G02F1/3775H01S3/0604H01S3/08H01S3/0941H01S3/1611H01S3/1673
    • An object of the present invention is to provide a practical device for generating blue laser beam having a wavelength of 457 nm. The present invention provides a device for generating blue laser beam. The device has a solid-state laser oscillator 3 composed of Nd-doped YVO4 crystal and having a length of not smaller than 0.1 mm and not larger than 1.0 mm, a reflecting means 6A, 6B provided in the oscillator 3, an illuminating means 1 for illuminating pump light beam to the oscillator 3, and a waveguide-type device 5 for generating harmonic wave. The oscillator 3 and reflecting means 1 constitute a resonator 7. The waveguide-type device 5 is provided outside of the resonator 7. The oscillator 3 oscillates laser beam having a wavelength of 914±1 nm, and the waveguide-type device 5 oscillates blue laser “E” having a wavelength of 457±1 nm.
    • 本发明的目的是提供一种用于产生波长为457nm的蓝色激光束的实用装置。 本发明提供一种用于产生蓝色激光束的装置。 该器件具有由Nd掺杂的YVO4晶体组成的长度不小于0.1mm且不大于1.0mm的固态激光振荡器3,设置在振荡器3中的反射装置6A,6B,照明装置1 用于将泵浦光束照射到振荡器3,以及用于产生谐波的波导型装置5。 振荡器3和反射装置1构成谐振器7.波导型装置5设置在谐振器7的外部。振荡器3振荡波长为914±1nm的激光束,并且波导型装置5振荡蓝色 具有波长为457±1nm的激光“E”。
    • 9. 发明授权
    • Process and an apparatus for producing a composite oxide single crystal
body
    • 复合氧化物单晶体的制造方法和装置
    • US6074477A
    • 2000-06-13
    • US41479
    • 1998-03-12
    • Minoru ImaedaTsuguo FukudaKiyoshi ShimamuraTatsuo Kawaguchi
    • Minoru ImaedaTsuguo FukudaKiyoshi ShimamuraTatsuo Kawaguchi
    • G02B6/00C30B15/00C30B15/08C30B29/28C30B29/30G02B6/02G02F1/35G02F1/355H01S3/06H01S3/16C30B15/34
    • C30B15/08C30B15/00C30B29/28C30B29/30C30B29/32G02B6/02Y10S117/91Y10T117/1032
    • A process is disclosed for producing an integrated composite oxide single crystal body composed of a core portion made of an oxide single crystal and a clad portion integrated with the core portion and made of another oxide single crystal having a composition different from that of the oxide single crystal constituting the core portion, the process comprising the steps of: (1) preparing a first melt in a first crucible by melting a first material for a first oxide single crystal to constitute the core portion inside the first crucible, (2) preparing a second melt inside a second crucible by melting a second material for a second oxide single crystal to constitute the clad portion inside the second crucible, (3) contacting a seed crystal to the first and second melts, (4) pulling down the first melt through a pull-out opening of the first crucible, (5) pulling down the second melt through a pull-out opening of the second crucible and contacting the pulled-down second melt with a pulled-down portion of the first melt, and (6) integrally pulling down the first and second melts.
    • 公开了一种制造由由氧化物单晶构成的芯部和与芯部形成一体的包层部组成的集成复合氧化物单晶体的方法,该复合氧化物单晶体由具有不同于氧化物单体的组成的另一氧化物单晶制成 构成芯部的晶体,该方法包括以下步骤:(1)通过熔化第一氧化物单晶的第一材料在第一坩埚中制备第一熔体以构成第一坩埚内的芯部,(2)制备 通过熔化用于第二氧化物单晶的第二材料以在第二坩埚内部构成包层部分,在第二坩埚内熔化第二坩埚,(3)将晶种接触第一和第二熔体,(4)将第一熔体通过 第一坩埚的拉出开口,(5)通过第二坩埚的拉出口拉下第二熔体并将下拉的第二熔体与拉出的第二熔体接触, 第一熔体的下降部分,以及(6)一体地拉下第一和第二熔体。