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    • 42. 发明申请
    • Novel Method to Enhance Channel Stress in CMOS Processes
    • 在CMOS工艺中增强沟道应力的新方法
    • US20090227084A1
    • 2009-09-10
    • US12357712
    • 2009-01-22
    • Zhiqiang WuXin Wang
    • Zhiqiang WuXin Wang
    • H01L21/336
    • H01L29/7833H01L21/26506H01L29/165H01L29/6656H01L29/6659H01L29/7845H01L29/7847H01L29/7848
    • The invention provides a method of fabricating a semiconductor device that enhances the amount of stress that is transmitted to the channel region for carrier mobility enhancement. In one embodiment an amorphous region is formed at or near the gate dielectric interface prior to source/drain anneal. In a second embodiment the gate material is amorphous as deposited and processing temperatures are kept below the gate material crystallization temperature until stress enhancement processing has been completed. The amorphous gate material deforms during high temperature anneal and converts from an amorphous to a polycrystalline phase allowing more stress to be transmitted into the channel region. This enhances carrier mobility and improves transistor drive current.
    • 本发明提供了一种制造半导体器件的方法,该半导体器件增强了传输到沟道区的载流子迁移率增强的应力量。 在一个实施例中,在源极/漏极退火之前,在栅极电介质界面处或附近形成非晶区域。 在第二实施例中,栅极材料是非晶态的,并且处理温度保持低于栅极材料结晶温度,直到应力增强处理完成。 非晶栅极材料在高温退火期间变形,并从非晶态转变为多晶相,允许更多的应力传输到沟道区。 这增强了载流子迁移率并改善了晶体管驱动电流。
    • 43. 发明申请
    • Novel Method to Form Memory Cells to Improve Programming Performance of Embedded Memory Technology
    • 用于形成记忆单元以提高嵌入式存储器技术编程性能的新方法
    • US20090181506A1
    • 2009-07-16
    • US12407624
    • 2009-03-19
    • Jihong ChenEddie Hearl BreashearsXin WangJohn Howard Macpeak
    • Jihong ChenEddie Hearl BreashearsXin WangJohn Howard Macpeak
    • H01L21/8239H01L21/426
    • H01L29/7881H01L21/26586H01L27/115H01L27/11521H01L29/40114
    • An embedded memory device and method of forming MOS transistors having reduced masking requirements and defects using a single drain sided halo implant in the NMOS FLASH or EEPROM memory regions is discussed. The memory device comprises a memory region and a logic region. Logic transistors within the logic region have halos implanted at an angle underlying the channel from both drain and source region sides. Asymmetric memory cell transistors within the memory region receive a selective halo implant only from the drain side of the channel and not from the source side to form a larger halo on the drain side and leave a higher dopant concentration more deeply into the source side. One method of asymmetrically forming memory cell transistors comprises masking over the memory region; halo implanting a first conductivity dopant in NMOS regions of the logic region in first and second implant directions; masking over the logic region; halo implanting the first conductivity dopant in NMOS regions of the memory region in the second implant direction only, thereby reducing the number of masks required; masking over the memory region; halo implanting a second conductivity dopant in PMOS regions of the logic region in the first and second implant directions.
    • 讨论了在NMOS闪存或EEPROM存储器区域中使用单个漏极侧卤素注入形成具有减小的掩模要求和缺陷的MOS晶体管的嵌入式存储器件和方法。 存储器件包括存储器区域和逻辑区域。 逻辑区域内的逻辑晶体管具有从沟道和源极区两侧的通道下方的角度注入的光晕。 存储器区域内的不对称存储单元晶体管仅从沟道的漏极侧接收选择性晕圈注入而不从源极接收,以在漏极侧形成较大的卤素,并且在源极侧更高的掺杂浓度。 一种不对称形成存储单元晶体管的方法包括:对存储区进行掩蔽; 在第一和第二植入方向上在所述逻辑区域的NMOS区域中注入第一电导率掺杂剂; 屏蔽逻辑区域; 在第二注入方向仅在存储区域的NMOS区域中注入第一电导率掺杂剂,从而减少所需的掩模数量; 掩蔽内存区域; 在所述第一和第二植入方向上在所述逻辑区域的PMOS区域中注入第二电导率掺杂剂。
    • 45. 发明申请
    • TRENCH MOSFET AND METHOD OF MANUFACTURE UTILIZING TWO MASKS
    • TRENCH MOSFET和使用两个掩模的制造方法
    • US20090085105A1
    • 2009-04-02
    • US11866365
    • 2007-10-02
    • Shih Tzung SuJun ZengPoi SunKao Way TuTai Chiang ChenLong LvXin Wang
    • Shih Tzung SuJun ZengPoi SunKao Way TuTai Chiang ChenLong LvXin Wang
    • H01L29/78H01L21/336
    • H01L29/7813H01L29/0661H01L29/407H01L29/41766H01L29/4236H01L29/42372H01L29/4238H01L29/456H01L29/4925H01L29/66719H01L29/66727H01L29/66734H01L29/7811
    • A method for manufacturing a trench MOSFET semiconductor device comprises: providing a heavily doped N+ silicon substrate; forming an N type epitaxial layer; forming a thick SiO2 layer; creating P body and source area formations by ion implantation without any masks; utilizing a first mask to define openings for a trench gate and a termination; thermally growing a gate oxide layer followed by formation of a thick poly-Silicon refill layer without a mask to define a gate bus area; forming sidewall spacers; forming P+ areas; removing the sidewall spacers; depositing tungsten to fill contacts and vias; depositing a first thin barrier metal layer; depositing a first thick metal layer; utilizing a second metal mask to open a gate bus area; forming second sidewall spacers; depositing a second thin barrier metal layer; depositing a second thick metal layer; and planarizing at least the second thick metal layer and the second thin metal layer to isolate the source metal portions from gate metal portions, whereby the trench MOSFET semiconductor device is manufactured utilizing only first and second masks.
    • 一种用于制造沟槽MOSFET半导体器件的方法包括:提供重掺杂的N +硅衬底; 形成N型外延层; 形成厚的SiO 2层; 通过离子注入创建P体和源区形成,而不需要任何掩模; 利用第一掩模来限定沟槽栅极和终端的开口; 热生长栅极氧化层,随后形成厚度不含掩模的多晶硅替代层,以限定栅极总线面积; 形成侧壁间隔物; 形成P +区域; 去除侧壁间隔物; 沉积钨以填充触点和通孔; 沉积第一薄的阻挡金属层; 沉积第一厚金属层; 利用第二金属掩模打开闸总线区域; 形成第二侧壁间隔物; 沉积第二薄的阻挡金属层; 沉积第二厚金属层; 并且至少平面化第二厚金属层和第二薄金属层以将源极金属部分与栅极金属部分隔离,由此仅利用第一和第二掩模制造沟槽MOSFET半导体器件。
    • 47. 发明授权
    • Generating a base curve database to reduce storage cost
    • 生成基线曲线数据库以降低存储成本
    • US07444605B2
    • 2008-10-28
    • US11245550
    • 2005-10-06
    • Xin WangHarold J. LevyMichael N. Misheloff
    • Xin WangHarold J. LevyMichael N. Misheloff
    • G06F17/50
    • G06F17/5045
    • An enhanced library accessible by an EDA tool can include a base curve database and a plurality of curve data sets. Each curve data set refers to a standard cell having certain timing characteristics. To determine those timing characteristics, each curve data set identifies at least one base curve (in the base curve database) as well as a starting current, a peak current, a peak voltage, and a peak time. In one embodiment, each base curve can be normalized. The base curve(s), the starting current, peak current, peak voltage, and peak time can accurately model the functioning of the IC device, e.g. represented by an I(V) curve.
    • 由EDA工具可访问的增强库可以包括基线曲线数据库和多个曲线数据集。 每个曲线数据集是指具有某些定时特性的标准单元。 为了确定这些时序特性,每个曲线数据集识别至少一个基本曲线(在基线曲线数据库中)以及启动电流,峰值电流,峰值电压和峰值时间。 在一个实施例中,每个基本曲线可以被归一化。 基本曲线,起始电流,峰值电流,峰值电压和峰值时间可以精确地模拟IC器件的功能,例如, 由I(V)曲线表示。
    • 48. 发明申请
    • APPARATUS AND METHOD FOR PREAMBLE DETECTION AND INTEGER CARRIER FREQUENCY OFFSET ESTIMATION
    • 预先检测和整体载波频偏估计的装置和方法
    • US20080232513A1
    • 2008-09-25
    • US12044120
    • 2008-03-07
    • Xin WangYuuta NakayaSyuusaku SuzukiMichiharu NakamuraHiroyuki Hayashi
    • Xin WangYuuta NakayaSyuusaku SuzukiMichiharu NakamuraHiroyuki Hayashi
    • H04L27/06H03D1/00
    • H04L27/2675H04L27/2659
    • This invention provides an apparatus and method for preamble detection and integer carrier frequency offset estimation, which method comprises the steps of: determining the window of useful subcarriers in preamble transformed to frequency domain based on pre-determined possible integer carrier frequency offset and the length of the preamble, so as to select the useful subcarriers; extracting a plurality of subcarrier sequences having a length equal to that of the preamble from the useful subcarriers; calculating conjugative multiplications of each subcarrier and its neighboring subcarriers in the subcarrier sequences extracted; acquiring the real part of the conjugative multiplications; calculating the cross correlations between the real part of the conjugative multiplications and known preambles modulated by DBPSK, and outputting the calculated correlation values; and detecting preamble index of a target base station with the calculated correlation values to select a target cell, and estimating integer carrier frequency offset with respect to the target base station.
    • 本发明提供了一种用于前导码检测和整数载波频偏估计的装置和方法,该方法包括以下步骤:基于预定可能的整数载波频率偏移量确定前导码转换到频域的有用子载波的窗口, 前导码,以便选择有用的子载波; 从有用的子载波中提取长度等于前导码长度的多个子载波序列; 计算提取的子载波序列中每个子载波及其相邻子载波的共轭乘法; 获取共轭乘法的实部; 计算共轭乘法的实部与由DBPSK调制的已知前同步之间的互相关,并输出所计算的相关值; 以及使用所计算的相关值检测目标基站的前导码索引,以选择目标小区,并且针对目标基站估计整数载波频率偏移。