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    • 93. 发明授权
    • Detector for scanning electron microscopy apparatus
    • 扫描电子显微镜检测仪
    • US4958079A
    • 1990-09-18
    • US313022
    • 1989-02-21
    • John W. Gray
    • John W. Gray
    • H01J37/26G01Q30/02H01J37/244
    • H01J37/244H01J2237/24435H01J2237/24475H01J2237/2448H01J2237/2449H01J2237/24507
    • Scanning electron microscopy apparatus employing a detector to detect emission of electrons resulting from the impingement of electrons of an electron beam on an object being viewed, the apparatus including an electron beam source providing the electron beam, a magnet providing a magnetic field to direct the electron beam to the object, a first microchannel plate having a first hole through it aligned with the electron beam, a first surface directed toward the electron beam source for receiving low energy electrons that have been emitted from the object and directed through the hole by the magnetic field, a second surface on the opposite side of side first microchannel plate for discharge of multiplied electrons, and a first anode facing the second surface, the first anode being positioned to collect electrons discharged from the second surface.
    • 扫描电子显微镜装置采用检测器来检测由被观察的物体上的电子束的电子的撞击产生的电子的发射,该装置包括提供电子束的电子束源,提供磁场以引导电子的磁体 射束到物体,具有通过其与电子束对准的第一孔的第一微通道板,指向电子束源的第一表面,用于接收已经从物体发射的低能电子,并通过磁性引导通过孔 场,第二表面位于侧面第一微通道板的相反侧,用于放电倍增电子;以及第一阳极,面对第二表面,第一阳极被定位成收集从第二表面排出的电子。
    • 94. 发明授权
    • Specimen retaining ring system for an electron microscope
    • 用于电子显微镜的样品保持环系统
    • US4954712A
    • 1990-09-04
    • US421827
    • 1989-10-16
    • Harry P. Wilcox
    • Harry P. Wilcox
    • G01Q30/02G01Q30/20H01J37/20
    • H01J37/20
    • A movable specimen holder for an electron microscope has a pivotal support block defining a cylindrical counterbore extending from an annular internal shoulder which supports a circular specimen grid. The grid is retained in the counterbore by a resilient split band or ring having an outer cylindrical surface for engaging the counterbore with a friction fit. The ring has a cylindrical inner surface interrupted by an annular recess or groove which is adapted to receive the outwardly projecting feet on the spring legs of a tweezers-like tool. The tool is used to insert the retaining ring into the counterbore adjacent the specimen grid and to remove the ring from the counterbore without losing the ring.
    • 用于电子显微镜的可移动的样品架具有枢转的支撑块,其限定了从支撑圆形样品网格的环形内部肩部延伸的圆柱形沉孔。 格栅通过具有外圆柱形表面的弹性分裂带或环保持在沉孔中,用于与摩擦配合的沉孔接合。 环具有由环形凹槽或凹槽中断的圆柱形内表面,该环形凹槽或槽适于将镊子状工具的弹簧腿上的向外突出的脚接收。 该工具用于将保持环插入邻近样品网格的沉孔中,并从沉孔中取出环,而不会丢失环。
    • 100. 发明授权
    • Detector objective for scanning microscopes
    • 扫描显微镜检测器的目的
    • US4896036A
    • 1990-01-23
    • US150245
    • 1988-01-29
    • Harald RoseJoachim Zach
    • Harald RoseJoachim Zach
    • H01J37/12G01Q30/02H01J37/141H01J37/147H01J37/244H01J37/28
    • H01J37/28H01J37/141
    • In a high resolution imaging system for close inspection of sub-micrometer structures, a scanning electron microscope includes a detector objective essentially composed of an immersion lens and an annular detector which is arranged between a source side electrode lying at a positive potential and a middle electrode of the immersion lens which likewise lies at a variable positive potential and is arranged concentrically relative to a beam axis of a scanning microscope. The middle electrode and the source side electrode are preferrably formed as truncated cones. The two-stage deflection element for positioning the primary electron beam on the specimen is preferrably integrated into the source side electrode of the immersion lens, the source side electrode being composed of an annular diaphragm and a hollow cylinder.
    • 在用于仔细检查亚微米结构的高分辨率成像系统中,扫描电子显微镜包括基本上由浸没透镜组成的检测器物镜和布置在位于正电位的源极电极和中间电极之间的环形检测器 的浸没透镜同样位于可变的正电位并且相对于扫描显微镜的光束轴线同心地布置。 中间电极和源极电极优选地形成为截锥体。 用于将一次电子束定位在试样上的两级偏转元件优选地集成到浸没透镜的源极侧电极中,源极电极由环形隔膜和中空圆筒构成。