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    • 13. 发明授权
    • Reduced lens heating methods, apparatus, and systems
    • 减少透镜加热方法,装置和系统
    • US08916314B2
    • 2014-12-23
    • US13450358
    • 2012-04-18
    • Fei WangXinya Lei
    • Fei WangXinya Lei
    • G03F1/00G03F7/20G03F1/36
    • G03F7/70891G03F1/00G03F1/36
    • In one embodiment, a system is disclosed that includes an illuminator having a source that produces light waves having a first wavelength, and a mask. The mask includes at least one partly opaque area and at least one opening within the opaque area includes a slanted, sub-resolution feature that redistributes a portion of the light passing through the open area to an off-axis location. A method of forming a device by way of photolithography might include forming unresolvable features on a mask and projecting light through the mask. Other systems, methods, and apparatus are disclosed.
    • 在一个实施例中,公开了一种包括具有产生具有第一波长的光的源的照明器和掩模的系统。 掩模包括至少一个部分不透明区域,并且不透明区域内的至少一个开口包括将穿过开口区域的光的一部分重新分布到离轴位置的倾斜的分解度特征。 通过光刻法形成器件的方法可能包括在掩模上形成不可解析的特征并通过掩模投射光。 公开了其它系统,方法和装置。
    • 18. 发明授权
    • Product line management system and method thereof
    • 产品线管理系统及其方法
    • US08805566B2
    • 2014-08-12
    • US13040235
    • 2011-03-03
    • Shih-Fang WongXin LuFei WangPeng TangJia-Hong YangHui-Feng Liu
    • Shih-Fang WongXin LuFei WangPeng TangJia-Hong YangHui-Feng Liu
    • G06F19/00
    • G05B19/418G05B2219/32183G05B2219/32196Y02P90/02Y02P90/14Y02P90/22
    • A method testing the quality of products applied to a system is provided. Each product includes a unique identification number. The system includes a data storage device and test devices. The data storage device includes a first table recording identification numbers, test types, and test results, each test device stores a second table records the identification numbers and the test types. The method includes: obtaining the identification number; obtaining the test type; determining whether a test type previous to the test type exists; and generating first information to prompt the operator to return the to-be-tested product to the workstation of previous test type when the test result corresponding to the existed previous test type does not exist or the test result corresponding to the existed previous test type is a first value.
    • 提供了一种测试应用于系统的产品质量的方法。 每个产品都包含唯一的识别号码。 该系统包括一个数据存储设备和测试设备。 数据存储装置包括记录识别号,测试类型和测试结果的第一表,每个测试设备存储第二表记录标识号和测试类型。 该方法包括:获取识别号码; 获得测试类型; 确定是否存在测试类型之前的测试类型; 并且当不存在与现有的先前测试类型相对应的测试结果或者与现有的测试类型相对应的测试结果是生成第一信息以提示操作者将待测试产品返回到先前测试类型的工作站 第一个值。