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    • 18. 发明授权
    • Scanning probe microscope
    • US10088499B2
    • 2018-10-02
    • US15712760
    • 2017-09-22
    • Shimadzu Corporation
    • Kanji KobayashiMasato Hirade
    • G01Q30/02G01Q20/02
    • Provided is a scanning probe microscope capable of performing observation with high accuracy even when a beam splitter is configured to be movable.When checking positions of a sample and a cantilever in a scanning probe microscope, by disposing an optical microscope to face a first opening portion of a top surface of a housing, and by gripping and rotating an operating portion provided on a side surface of the housing, a user rotates and moves a beam splitter held by a holding portion in the housing, and retracts the beam splitter from the field of view of the optical microscope. Therefore, the beam splitter can always be disposed in the housing, and the user can be prevented from touching the beam splitter. As a result, it is possible to prevent the beam splitter from being damaged or stains from adhering to the beam splitter. Further, the moving distance of the bears splitter 6 can be shortened. Therefore, it is possible to suppress the occurrence of a deviation in the position of the beam splitter.