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61. 发明授权

US5920068A Analysis of semiconductor surfaces by secondary ion mass spectrometry 失效
标题翻译：通过二次离子质谱分析半导体表面
公开(公告)号：US5920068A
公开(公告)日：1999-07-06
申请号：US35197
申请日：1998-03-05
申请人： Eugene P. Marsh
发明人： Eugene P. Marsh
IPC分类号： G01N23/225 , G01Q30/02 , G01Q60/44 , H01J37/252 , H01J37/26
CPC分类号： G01N23/2258 , H01J37/252 , H01J2237/2527
摘要： An apparatus and method for mass spectrometric determination of contaminant components of a thin oxide surface layer of a semiconductor wafer uses a movable mechanical stage to scan and raster a large area of the wafer in a continuous scanning motion. The mass of analyte is greatly increased, resulting in improved sensitivity to trace components in the surface layer by a factor of 10-100 or more. An light beam interferometer is used to determine non-planarity from e.g. warping of the wafer and provide a correction by maintaining a constant separation between the wafer and the extraction plate or adjusting the electrical bias of the wafer relative to the extraction bias.
摘要翻译：用于质量测定半导体晶片的薄氧化物表面层的污染物成分的装置和方法使用可移动的机械级以连续的扫描运动扫描和扫描大面积的晶片。分析物的质量大大增加，导致对表面层中的痕量组分的改善的灵敏度提高10-100倍。使用光束干涉仪来确定非平面性。晶片翘曲并通过保持晶片和提取板之间的恒定间隔或调整晶片相对于提取偏压的电偏压来提供校正。

62. 发明授权

US5866904A Scanning electron microscope and method for dimension measuring by using the same 失效
公开(公告)号：US5866904A
公开(公告)日：1999-02-02
申请号：US970201
申请日：1997-11-14
申请人： Hideo Todokoro , Kenji Takamoto , Tadashi Otaka , Fumio Mizuno , Satoru Yamada , Sadao Terakado , Katsuhiro Kuroda , Ken Ninomiya , Tokuo Kure
发明人： Hideo Todokoro , Kenji Takamoto , Tadashi Otaka , Fumio Mizuno , Satoru Yamada , Sadao Terakado , Katsuhiro Kuroda , Ken Ninomiya , Tokuo Kure
IPC分类号： G01Q30/02 , G01B15/00 , G01B15/04 , G01Q30/04 , H01J37/26
CPC分类号： G01B15/00 , G01B15/04 , H01J2237/2448 , H01J2237/24495 , H01J2237/281
摘要： An electron beam which can transmit through part of a specimen and can reach a portion not exposing to the electron beam is irradiated and a scanning image is obtained on the basis of a signal secondarily generated from a portion irradiated with the electron beam. Dimension-measuring start and end points are set on the scanning image and a dimension therebetween is measured. A cubic model is assumed, the cubic model is modified so as to match the scanning image, and dimension measurement is carried out on the basis of a modified cubic model.

63. 发明授权

US5854487A Scanning probe microscope providing unobstructed top down and bottom up views 失效
标题翻译：扫描探针显微镜提供畅通无阻的自顶向下和向下观察
公开(公告)号：US5854487A
公开(公告)日：1998-12-29
申请号：US808351
申请日：1997-02-28
申请人： David Braunstein , Michael Kirk , Quoc Ly , Thai Nguyen
发明人： David Braunstein , Michael Kirk , Quoc Ly , Thai Nguyen
IPC分类号： G01Q30/02 , G01B7/34 , G01N21/01 , G01N27/00 , G01Q10/02 , G01Q10/04 , G01Q30/14 , G01Q30/20 , G01Q60/02 , G01Q70/02 , G02B21/18 , H01J37/20 , H01J37/26
CPC分类号： G01Q10/04 , B82Y35/00 , G01Q30/025 , Y10S977/849 , Y10S977/86 , Y10S977/868 , Y10S977/869 , Y10S977/87 , Y10S977/872 , Y10S977/873
摘要： Scanning probe microscopes and scanning probe heads are provided having improved optical visualization and sample manipulation capabilities. The SPMs and SPM heads include at least one flexure stage for scanning in the x, y and/or z directions. In a preferred embodiment, the SPMs or SPM heads include flexure stages for scanning in the x, y and z directions. The z scanning stage is preferably positioned outside the lateral footprint of the x-y flexure stage so that a probe extending from the z scanning stage is outside the lateral footprint of the instrument. The SPMs and SPM heads are configured to provide top down and bottom up optical views of the sample and/or the probe and enable simultaneous scanning probe microscopy and optical imaging of a sample to be performed. The SPMs and SPM heads are designed to be readily combinable with existing upright and inverted optical microscopes currently available from various major manufacturers.
摘要翻译：提供扫描探针显微镜和扫描探头，具有改进的光学可视化和样品操作能力。 SPM和SPM头包括用于在x，y和/或z方向扫描的至少一个弯曲台。在优选实施例中，SPM或SPM头包括用于在x，y和z方向扫描的挠曲台。 z扫描台优选地定位在x-y弯曲台的横向覆盖区的外侧，使得从z扫描台延伸的探针位于仪器的横向覆盖区之外。 SPM和SPM头被配置为提供样品和/或探针的自顶向下和从底部的光学视图，并且能够执行样品的同时扫描探针显微镜和光学成像。 SPM和SPM头设计为可以与现有的各种主要制造商现有的直立和倒置光学显微镜组合。

64. 发明授权

US5821545A Heated stage for a scanning probe microscope 失效
标题翻译：加热阶段用于扫描探针显微镜
公开(公告)号：US5821545A
公开(公告)日：1998-10-13
申请号：US729395
申请日：1996-10-11
申请人： Stuart M. Lindsay , Tianwei Jing
发明人： Stuart M. Lindsay , Tianwei Jing
IPC分类号： G01Q30/02 , G01Q30/10 , G01Q30/14 , G01Q30/20 , H01J37/20 , H01L35/00
CPC分类号： G01Q30/10 , H01J2237/2001 , H01J2237/2818 , Y10S977/871
摘要： A heater for use in heating a sample stage of a microscope such as a scanning probe microscope is bonded to a sample stage which sits on a tube of a ceramic thermal insulator which is, in turn, mounted within or part of a tube of the same material. This re-entrant design provides an increased thermal path over straight line distances between the heater and the support structure for the sample stage and thus provides excellent thermal insulation, while also maximizing the thermal stability of the system.
摘要翻译：用于加热诸如扫描探针显微镜的显微镜的样品台的加热器被结合到位于陶瓷绝热体的管上的样品台上，陶瓷绝热体又安装在其中的管或其一部分中材料。这种重新设计的设计提供了加热器和样品台的支撑结构之间的直线距离上的增加的热路径，因此提供了优异的隔热性，同时也使系统的热稳定性最大化。

65. 发明授权

US5818042A Apparatus for creating three-dimensional physical models of characteristics of microscopic objects 失效
标题翻译：用于创建微观物体特征的三维物理模型的装置
公开(公告)号：US5818042A
公开(公告)日：1998-10-06
申请号：US898383
申请日：1997-07-22
申请人： Giorgio Riga , Richard D. Mundy , Mario A. Nobre
发明人： Giorgio Riga , Richard D. Mundy , Mario A. Nobre
IPC分类号： G01Q30/02 , G01Q60/00 , H01J37/00 , H01J37/26
CPC分类号： G01Q30/04 , B82Y35/00 , H01J37/00 , H01J2237/28 , H01J2237/3114
摘要： Apparatus for creating scaled three-dimensional physical models of characteristics of microscopic objects, includes a transducer apparatus including a transducer for creating first electrical signals representative of the magnitude of a physical characteristic of the microscopic object at a selected point within a selected area thereof, the first electrical signals having a first component defining said selected point and a second component related to the magnitude of the physical characteristic, a material shaping apparatus configured to create a physical model in a workspace, the workspace having an area related to the selected area of the microscopic object by a first selected scale factor, the material shaping apparatus including apparatus responsive to second electrical signals representing x, y, and z co-ordinates in the workspace for directing the formation of the physical model; and control apparatus, connected to the transducer apparatus and the material shaping apparatus, for converting the first electrical signals from the transducer to the second electrical signals and supplying the electrical signals to the material shaping apparatus, the control apparatus processing the first electrical signals according to the first and second selected scale factors.
摘要翻译：用于创建微观物体特征的缩放三维物理模型的装置包括换能器装置，其包括用于产生代表在其选定区域内的选定点处的微观物体的物理特性的大小的第一电信号的换能器，第一电信号具有限定所述选定点的第一分量和与所述物理特性的大小有关的第二分量;材料成形装置，被配置为在工作空间中创建物理模型，所述工作空间具有与所选择的区域的所选区域相关的区域所述材料成形设备包括响应于在工作空间中表示x，y和z坐标的第二电信号的装置，用于引导物理模型的形成; 以及连接到换能器装置和材料成型装置的控制装置，用于将来自换能器的第一电信号转换为第二电信号，并将电信号提供给材料成形装置，所述控制装置根据第一和第二选择的比例因子。

66. 发明授权

US5808790A Integrated microscope providing near-field and light microscopy 失效
标题翻译：集成显微镜提供近场和光学显微镜
公开(公告)号：US5808790A
公开(公告)日：1998-09-15
申请号：US781659
申请日：1997-01-10
申请人： Tatsuro Otaki
发明人： Tatsuro Otaki
IPC分类号： G01B11/30 , G01N37/00 , G01Q30/02 , G01Q60/18 , G01Q60/22 , G02B21/06 , G02B21/10 , G02B21/18 , G02B27/56 , H01J3/14
CPC分类号： G01Q60/22 , B82Y20/00 , B82Y35/00
摘要： Apparatus are disclosed that perform, on demand, both near-field microscopy (NFM) and light-microscopy (e.g., bright-field microscopy or phase-contrast microscopy) of a specimen. The apparatus comprises an NFM microscope including an NFM probe, a first condenser lens system that converges a center portion of an illumination-light flux at a first terminus of the NFM probe, and a second condenser lens system that converges an annular portion of the illumination-light flux at a specimen to illuminate the specimen by Kohler illumination. Evanescent light from a distal terminus of the NFM probe passes to a locus on the specimen. Downstream optics capture light transmitted and/or scattered from the specimen from the NFM probe and from the Kohler illumination to produce both a light-microscope image of the specimen and an NFM image of the specimen.
摘要翻译：公开了根据需要执行样品的近场显微镜（NFM）和光学显微镜（例如，明视野显微镜或相差显微镜检查）的装置。该装置包括NFM显微镜，其包括NFM探针，会聚在NFM探针的第一末端处的照明光束的中心部分的第一聚光透镜系统和会聚该照明的环形部分的第二聚光透镜系统样品中的光通量用K + E，uml o + EE hler照明照射样品。来自NFM探针的远端的消逝光通过到样品上的位点。下游光学器件捕获来自NFM探针和K + E，uml o + EE hler照明的样品透射和/或散射的光，以产生样品的光学显微镜图像和样品的NFM图像。

67. 发明授权

US5750990A Method for measuring critical dimension of pattern on sample 失效
标题翻译：测量样品临界尺寸的方法
公开(公告)号：US5750990A
公开(公告)日：1998-05-12
申请号：US771325
申请日：1996-12-20
申请人： Fumio Mizuno , Osamu Satoh
发明人： Fumio Mizuno , Osamu Satoh
IPC分类号： G01B11/00 , G01B15/00 , G01N23/04 , G01Q30/02 , G01Q30/04 , G01Q60/24 , H01J37/28 , H01L21/027 , H01L21/66
CPC分类号： G01B15/00 , G01B11/00 , G01N23/04 , H01J37/28 , B82Y35/00 , H01J2237/2814 , H01J2237/2817
摘要： In a pattern dimension measuring method for scanning a sample at a predetermined scanning pitch by a scanning probe as in a scanning electron microscope, forming a sample image using a scanning signal obtained from the sample, scanning a predetermined portion of a pattern to be measured in a sample image by said probe, and measuring a dimension of said predetermined portion by processing obtained scanning signal according to a predetermined algorithm, said scanning pitch is varied according to the case for positioning the pattern to be measured and the case for measuring the pattern dimension when observing in a low magnification, and said scanning pitch for measuring the pattern dimension is adjusted to be small, about a diameter of the probe.
摘要翻译：在扫描型电子显微镜中，通过扫描探针以预定的扫描间隔扫描样品的图案尺寸测量方法中，使用从样品获得的扫描信号形成样本图像，将待测样式的预定部分扫描通过所述探针的样本图像，并且根据预定算法通过处理获得的扫描信号来测量所述预定部分的尺寸，所述扫描间距根据用于定位要测量的图案的情况和用于测量图案尺寸的情况而变化当以低放大倍数观察时，将用于测量图案尺寸的所述扫描间距调整为小于探针的直径。

68. 发明授权

US5654546A Variable temperature scanning probe microscope based on a peltier device 失效
标题翻译：基于peltier装置的可变温度扫描探针显微镜
公开(公告)号：US5654546A
公开(公告)日：1997-08-05
申请号：US551836
申请日：1995-11-07
申请人： Stuart M. Lindsay
发明人： Stuart M. Lindsay
IPC分类号： G01Q30/02 , G01Q30/10 , G01Q30/14 , G01Q30/20 , H01J37/20 , H01L35/00 , H01J37/26
CPC分类号： G01Q30/10 , B82Y35/00 , H01J2237/2001 , H01J2237/2818 , Y10S977/871
摘要： A compact Peltier Device is used to heat or cool a small sample stage of a scanning probe (AFM or STM) microscope. The entire heating/cooling system may fit onto a small platen which may be suspended below the scanning probe where it may be held in place against magnetic balls. Alternatively, the sample stage may be supported by a Peltier Device, itself supported by a scanner such as a Piezoelectric scanner with a scanning probe tip held fixedly above the sample stage. The side of the Peltier Device in contact with the platen is cooled (or heated) by a small flow of water through a heat exchanger. The reservoir of water is held at ambient temperature, minimizing the temperature gradient generated between the sample platen and the main body of the microscope. The small mass of the sample stage results in rapid heating or cooling so that an equilibrium is attained rapidly. Heat transfer through the scanning tip is negligible. Condensation and contamination of the sample is prevented by operating the entire sample chamber in an inert gas environment. The inert gas is also at ambient temperature. Water and other contaminants are first removed from the gas by passing it over cold baffles. It is then equilibrated back up to ambient temperature in a heat exchanger.
摘要翻译：使用紧凑型珀尔帖装置来加热或冷却扫描探针（AFM或STM）显微镜的小样品台。整个加热/冷却系统可以装配在可以悬挂在扫描探针下方的小压板上，在该压板上可以将其保持在适当的位置以防止磁珠。或者，样品台可以由珀尔帖装置支撑，珀尔帖装置本身由诸如压电扫描仪的扫描仪支撑，扫描探针尖端固定在样品台上方。与压板接触的珀耳帖装置的侧面通过热交换器被小量的水冷却（或加热）。水的储存器保持在环境温度，使样品台板和显微镜主体之间产生的温度梯度最小化。样品台的小质量导致快速加热或冷却，从而快速获得平衡。通过扫描尖端的热传递可以忽略不计。通过在惰性气体环境中操作整个样品室来防止样品的冷凝和污染。惰性气体也处于环境温度。首先将水和其他污染物通过冷气挡板从气体中排出。然后将其在热交换器中平衡回到环境温度。

69. 发明授权

US5614833A Objective lens with large field deflection system and homogeneous large area secondary electron extraction field 失效
标题翻译：具有大场偏转系统和均匀大面积二次电子提取场的物镜
公开(公告)号：US5614833A
公开(公告)日：1997-03-25
申请号：US435330
申请日：1995-05-05
申请人： Steven D. Golladay
发明人： Steven D. Golladay
IPC分类号： G01Q30/02 , G01R31/307 , G21K1/093 , H01J37/26 , G01R31/305
CPC分类号： G21K1/093 , G01R31/307 , H01J37/268 , H01J2237/047 , H01J2237/2594
摘要： A method of noncontact testing and an electron optical system includes an electron source for producing a high energy electron beam, a retarding field objective lens system for receiving and focussing the high energy electron beam to produce a focussed low energy electron beam, and a magnetic deflector for deflecting the focussed low energy electron beam to the sample, thereby to expose the sample to the low energy electron beam, and simultaneously maintaining a predetermined spot size of the beam. The retarding field objective lens system includes a device for retarding electrons in the low energy electron beam directed to the sample and for accelerating electrons, emitted by the sample upon being irradiated by the low energy electron beam.
摘要翻译：非接触测试方法和电子光学系统包括用于产生高能电子束的电子源，用于接收和聚焦高能电子束以产生聚焦低能电子束的延迟场物镜系统，以及磁偏转器用于将聚焦的低能电子束偏转到样品，从而将样品暴露于低能电子束，同时保持光束的预定光斑尺寸。延迟场物镜系统包括用于延迟针对样品的低能电子束中的电子的装置，并用于加速被低能电子束照射时样品发射的电子。

70. 发明授权

US5563411A Scanning photoelectron microscope 失效
公开(公告)号：US5563411A
公开(公告)日：1996-10-08
申请号：US451052
申请日：1995-05-25
申请人： Shintaro Kawata , Keitaro Hara
发明人： Shintaro Kawata , Keitaro Hara
IPC分类号： G01N23/227 , G01Q30/02 , G01Q30/12 , H01J37/285 , H01J47/02 , G01N23/22
CPC分类号： H01J47/02 , G01N23/2273 , H01J37/285
摘要： A scanning photoelectron microscope comprises a stage on which a sample is placed in a state in which gas around the sample is present, a light source emitting light of a wavelength capable of causing photoelectrons to be emitted from the sample, an optical system for condensing the light from the light source on the sample, scanning means for scanning the sample and the light relative to each other, and detecting means capable of applying positive potential to the sample, and detecting the photoelectrons created from the sample by the condensing, through the gas.

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