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1. 发明授权

US10541306B2 Using a carbon vacancy reduction material to increase average carrier lifetime in a silicon carbide semiconductor device 有权
公开(公告)号：US10541306B2
公开(公告)日：2020-01-21
申请号：US13610993
申请日：2012-09-12
申请人： Michael John O'Loughlin , Lin Cheng , Albert Augustus Burk, Jr. , Anant Kumar Agarwal , Alexander Suvorov
发明人： Michael John O'Loughlin , Lin Cheng , Albert Augustus Burk, Jr. , Anant Kumar Agarwal , Alexander Suvorov
IPC分类号： H01L29/16 , H01L21/02 , H01L21/322 , H01L21/265
摘要： A semiconductor die and a process for fabricating the semiconductor die are disclosed. The semiconductor die has a substrate and a silicon carbide (SiC) epitaxial structure on the substrate. The SiC epitaxial structure includes at least a first N-type SiC layer, at least a first P-type SiC layer, and carbon vacancy reduction material, which has been implanted into a surface of the SiC epitaxial structure. Further, the SiC epitaxial structure has been annealed to mobilize the carbon vacancy reduction material to diffuse carbon atoms substantially throughout the SiC epitaxial structure, thereby increasing an average carrier lifetime in the SiC epitaxial structure.

2. 发明申请

US20140070230A1 USING A CARBON VACANCY REDUCTION MATERIAL TO INCREASE AVERAGE CARRIER LIFETIME IN A SILICON CARBIDE SEMICONDUCTOR DEVICE 审中-公开
标题翻译：使用碳减排材料在硅碳化硅半导体器件中增加平均载体寿命
公开(公告)号：US20140070230A1
公开(公告)日：2014-03-13
申请号：US13610993
申请日：2012-09-12
申请人： Michael John O'Loughlin , Lin Cheng , Albert Augustus Burk, JR. , Anant Kumar Agarwal
发明人： Michael John O'Loughlin , Lin Cheng , Albert Augustus Burk, JR. , Anant Kumar Agarwal
IPC分类号： H01L29/16 , H01L21/02
摘要： A semiconductor die and a process for fabricating the semiconductor die are disclosed. The semiconductor die has a substrate and a silicon carbide (SiC) epitaxial structure on the substrate. The SiC epitaxial structure includes at least a first N-type SiC layer, at least a first P-type SiC layer, and carbon vacancy reduction material, which has been implanted into a surface of the SiC epitaxial structure. Further, the SiC epitaxial structure has been annealed to mobilize the carbon vacancy reduction material to diffuse carbon atoms substantially throughout the SiC epitaxial structure, thereby increasing an average carrier lifetime in the SiC epitaxial structure.
摘要翻译：公开了半导体管芯和半导体管芯的制造工艺。半导体管芯在衬底上具有衬底和碳化硅（SiC）外延结构。 SiC外延结构至少包括已经注入到SiC外延结构的表面中的第一N型SiC层，至少第一P型SiC层和碳空位还原材料。此外，SiC外延结构已经被退火以动员碳空位还原材料以弥散基本上贯穿整个SiC外延结构的碳原子，从而增加了SiC外延结构中的平均载流子寿命。

3. 发明授权

US10403722B2 Using a carbon vacancy reduction material to increase average carrier lifetime in a silicon carbide semiconductor device 有权
公开(公告)号：US10403722B2
公开(公告)日：2019-09-03
申请号：US13610993
申请日：2012-09-12
申请人： Michael John O'Loughlin , Lin Cheng , Albert Augustus Burk, Jr. , Anant Kumar Agarwal
发明人： Michael John O'Loughlin , Lin Cheng , Albert Augustus Burk, Jr. , Anant Kumar Agarwal
IPC分类号： H01L29/16 , H01L21/02 , H01L21/322 , H01L21/265
摘要： A semiconductor die and a process for fabricating the semiconductor die are disclosed. The semiconductor die has a substrate and a silicon carbide (SiC) epitaxial structure on the substrate. The SiC epitaxial structure includes at least a first N-type SiC layer, at least a first P-type SiC layer, and carbon vacancy reduction material, which has been implanted into a surface of the SiC epitaxial structure. Further, the SiC epitaxial structure has been annealed to mobilize the carbon vacancy reduction material to diffuse carbon atoms substantially throughout the SiC epitaxial structure, thereby increasing an average carrier lifetime in the SiC epitaxial structure.

4. 发明授权

US09349797B2 SiC devices with high blocking voltage terminated by a negative bevel 有权
标题翻译：具有高阻断电压的SiC器件由负斜角端接
公开(公告)号：US09349797B2
公开(公告)日：2016-05-24
申请号：US13366658
申请日：2012-02-06
申请人： Lin Cheng , Anant K. Agarwal , Michael John O'Loughlin , Albert Augustus Burk, Jr. , John Williams Palmour
发明人： Lin Cheng , Anant K. Agarwal , Michael John O'Loughlin , Albert Augustus Burk, Jr. , John Williams Palmour
IPC分类号： H01L29/06 , H01L29/10 , H01L29/36 , H01L29/732 , H01L29/739 , H01L29/74 , H01L29/745 , H01L29/78 , H01L29/861 , H01L29/16
CPC分类号： H01L29/7813 , H01L29/0615 , H01L29/0661 , H01L29/1004 , H01L29/1016 , H01L29/1095 , H01L29/1608 , H01L29/36 , H01L29/732 , H01L29/7397 , H01L29/74 , H01L29/745 , H01L29/861
摘要： The present disclosure relates to a Silicon Carbide (SiC) semiconductor device having both a high blocking voltage and low on-resistance. In one embodiment, the semiconductor device has a blocking voltage of at least 10 kilovolts (kV) and an on-resistance of less than 10 milli-ohms centimeter squared (mΩ·cm2) and even more preferably less than 5 mΩ·cm2. In another embodiment, the semiconductor device has a blocking voltage of at least 15 kV and an on-resistance of less than 15 mΩ·cm2 and even more preferably less than 7 mΩ·cm2. In yet another embodiment, the semiconductor device has a blocking voltage of at least 20 kV and an on-resistance of less than 20 mΩ·cm2 and even more preferably less than 10 mΩ·cm2. The semiconductor device is preferably, but not necessarily, a thyristor such as a power thyristor, a Bipolar Junction Transistor (BJT), an Insulated Gate Bipolar Transistor (IGBT), or a PIN diode.
摘要翻译：本发明涉及具有高阻断电压和低导通电阻的碳化硅（SiC）半导体器件。在一个实施例中，半导体器件具有至少10千伏（kV）的阻断电压和小于10毫欧平方厘米（mΩ·cm 2·cm 2）的导通电阻，甚至更优选小于5mΩ 。在另一个实施例中，半导体器件具有至少15kV的阻断电压和小于15mΩ/ cm 2，甚至更优选小于7mΩ的导通电阻。在另一个实施例中，半导体器件具有至少20kV的阻断电压和小于20mΩ的导通电阻，并且甚至更优选地小于10mΩ·cm 2。半导体器件优选但不一定是晶闸管，例如功率晶闸管，双极结晶体管（BJT），绝缘栅双极晶体管（IGBT）或PIN二极管。

5. 发明申请

US20130026493A1 SIC DEVICES WITH HIGH BLOCKING VOLTAGE TERMINATED BY A NEGATIVE BEVEL 有权
标题翻译：具有高阻塞电压的SIC器件由负极水平端接
公开(公告)号：US20130026493A1
公开(公告)日：2013-01-31
申请号：US13366658
申请日：2012-02-06
申请人： Lin Cheng , Anant K. Agarwal , Michael John O'Loughlin , Albert Augustus Burk, JR. , John Williams Palmour
发明人： Lin Cheng , Anant K. Agarwal , Michael John O'Loughlin , Albert Augustus Burk, JR. , John Williams Palmour
IPC分类号： H01L29/24
CPC分类号： H01L29/7813 , H01L29/0615 , H01L29/0661 , H01L29/1004 , H01L29/1016 , H01L29/1095 , H01L29/1608 , H01L29/36 , H01L29/732 , H01L29/7397 , H01L29/74 , H01L29/745 , H01L29/861
摘要： The present disclosure relates to a Silicon Carbide (SiC) semiconductor device having both a high blocking voltage and low on-resistance. In one embodiment, the semiconductor device has a blocking voltage of at least 10 kilovolts (kV) and an on-resistance of less than 10 milli-ohms centimeter squared (mΩ·cm2) and even more preferably less than 5 mΩ·cm2. In another embodiment, the semiconductor device has a blocking voltage of at least 15 kV and an on-resistance of less than 15 mΩ·cm2 and even more preferably less than 7 mΩ·cm2. In yet another embodiment, the semiconductor device has a blocking voltage of at least 20 kV and an on-resistance of less than 20 mΩ·cm2 and even more preferably less than 10 mΩ·cm2. The semiconductor device is preferably, but not necessarily, a thyristor such as a power thyristor, a Bipolar Junction Transistor (BJT), an Insulated Gate Bipolar Transistor (IGBT), or a PIN diode.
摘要翻译：本发明涉及具有高阻断电压和低导通电阻的碳化硅（SiC）半导体器件。在一个实施例中，半导体器件具有至少10千伏（kV）的阻断电压和小于10毫欧平方厘米（mΩ·cm 2·cm 2）的导通电阻，甚至更优选小于5mΩ 。在另一个实施例中，半导体器件具有至少15kV的阻断电压和小于15mΩ/ cm 2，甚至更优选小于7mΩ的导通电阻。在另一个实施例中，半导体器件具有至少20kV的阻断电压和小于20mΩ的导通电阻，并且甚至更优选地小于10mΩ·cm 2。半导体器件优选但不一定是晶闸管，例如功率晶闸管，双极结晶体管（BJT），绝缘栅双极晶体管（IGBT）或PIN二极管。

6. 发明授权

US10736969B2 Multi-arm polymeric prodrug conjugates of pemetrexed-based compounds 有权
公开(公告)号：US10736969B2
公开(公告)日：2020-08-11
申请号：US13995415
申请日：2011-12-21
申请人： Lin Cheng , Jennifer Riggs-Sauthier
发明人： Lin Cheng , Jennifer Riggs-Sauthier
IPC分类号： A61K47/60
摘要： Among other aspects, provided herein are multi-arm polymeric prodrug conjugates of pemetrexed-based compounds. Methods of preparing such conjugates as well as methods of administering the conjugates are also provided. Upon administration to a patient, release of the pemetrexed-based compound is achieved.

7. 发明授权

US08722732B2 Oligomer-calcimimetic conjugates and related compounds 有权
标题翻译：低聚物拟钙化偶联物和相关化合物
公开(公告)号：US08722732B2
公开(公告)日：2014-05-13
申请号：US13433100
申请日：2012-03-28
申请人： Jennifer Riggs-Sauthier , Lin Cheng , David Martin
发明人： Jennifer Riggs-Sauthier , Lin Cheng , David Martin
IPC分类号： A61P5/10 , A61K31/137 , A61K31/27 , C07C271/14
CPC分类号： A61K47/48215 , A61K47/60 , C07B2200/11 , C07C211/30 , C07C271/14
摘要： The invention relates to (among other things) oligomer-calcimimetic conjugates and related compounds. A conjugate of the invention, when administered by any of a number of administration routes, exhibits advantages over previously administered compounds.
摘要翻译：本发明涉及（尤其是）低聚物 - 拟拟共轭物和相关化合物。本发明的缀合物当通过任何多种施用途径施用时，显示出优于先前施用的化合物的优点。

8. 发明申请

US20120223330A1 SEMICONDUCTOR DEVICE HAVING HIGH PERFORMANCE CHANNEL 有权
标题翻译：具有高性能通道的半导体器件
公开(公告)号：US20120223330A1
公开(公告)日：2012-09-06
申请号：US13039441
申请日：2011-03-03
申请人： Sarit Dhar , Sei-Hyung Ryu , Lin Cheng , Anant Agarwal
发明人： Sarit Dhar , Sei-Hyung Ryu , Lin Cheng , Anant Agarwal
IPC分类号： H01L29/161 , H01L21/22
CPC分类号： H01L29/107 , H01L21/225 , H01L29/1608 , H01L29/66068 , H01L29/66477 , H01L29/66568
摘要： Semiconductor devices having a high performance channel and method of fabrication thereof are disclosed. Preferably, the semiconductor devices are Metal-Oxide-Semiconductor (MOS) devices, and even more preferably the semiconductor devices are Silicon Carbide (SiC) MOS devices. In one embodiment, a semiconductor device includes a SiC substrate of a first conductivity type, a first well of a second conductivity type, a second well of the second conductivity type, and a surface diffused channel of the second conductivity type formed at the surface of semiconductor device between the first and second wells. A depth and doping concentration of the surface diffused channel are controlled to provide increased carrier mobility for the semiconductor device as compared to the same semiconductor device without the surface diffused channel region when in the on-state while retaining a turn-on, or threshold, voltage that provides normally-off behavior.
摘要翻译：公开了具有高性能通道的半导体器件及其制造方法。优选地，半导体器件是金属氧化物半导体（MOS）器件，并且甚至更优选半导体器件是碳化硅（SiC）MOS器件。在一个实施例中，半导体器件包括第一导电类型的SiC衬底，第二导电类型的第一阱，第二导电类型的第二阱以及形成在第二导电类型的表面处的第二导电类型的表面扩散沟道半导体器件在第一和第二阱之间。控制表面扩散通道的深度和掺杂浓度，以便在处于导通状态同时保持导通状态或阈值时，与没有表面扩散沟道区的相同半导体器件相比，为半导体器件提供增加的载流子迁移率，电压提供常态动作。

9. 发明授权

US07831097B2 System and method for image reconstruction 有权
标题翻译：图像重建系统和方法
公开(公告)号：US07831097B2
公开(公告)日：2010-11-09
申请号：US11682013
申请日：2007-03-05
申请人： Yunqiang Chen , Lin Cheng , Tong Fang , Jason Jenn-Kwei Tyan
发明人： Yunqiang Chen , Lin Cheng , Tong Fang , Jason Jenn-Kwei Tyan
IPC分类号： G06K9/46 , G06K9/00 , G06K9/36
CPC分类号： G01N23/046 , G01N2223/419 , G06T11/006 , G06T2211/421 , G06T2211/424
摘要： A system and method for image reconstruction is disclosed. The method divides iterative image reconstruction into two stages, in the image and Radon space, respectively. In the first stage, filtered back projection and adaptive filtering in the image space are combined to generate a refined reconstructed image of a sinogram residue. This reconstructed image represents an update direction in the image space. In the second stage, the update direction is transformed to the Radon space, and a step size is determined to minimize a difference between the sinogram residue and a Radon transform of the refined reconstructed image of the sinogram residue in the Radon space. These stages are repeated iteratively until the solution converges.
摘要翻译：公开了一种用于图像重建的系统和方法。该方法分别在图像和氡空间中将迭代图像重建分为两个阶段。在第一阶段，滤波反投影和图像空间中的自适应滤波被组合以产生正弦图残差的精细重建图像。该重建图像表示图像空间中的更新方向。在第二阶段中，将更新方向转换为Radon空间，并且确定步长以最小化Radon空间中的正弦图残差的精细重建图像的正弦图残差和Radon变换之间的差异。迭代重复这些阶段，直到解得到收敛。

10. 发明授权

US07638379B2 Vertical-channel junction field-effect transistors having buried gates and methods of making 有权
标题翻译：具有掩埋栅极的垂直沟道结场效应晶体管及其制造方法
公开(公告)号：US07638379B2
公开(公告)日：2009-12-29
申请号：US11935442
申请日：2007-11-06
申请人： Lin Cheng , Michael S. Mazzola
发明人： Lin Cheng , Michael S. Mazzola
IPC分类号： H01L21/337
CPC分类号： H01L29/8083 , H01L29/0619 , H01L29/1066 , H01L29/1608 , H01L29/66909
摘要： Semiconductor devices and methods of making the devices are described. The devices can be implemented in SiC and can include epitaxially grown n-type drift and p-type trenched gate regions, and an n-type epitaxially regrown channel region on top of the trenched p-gate regions. A source region can be epitaxially regrown on top of the channel region or selectively implanted into the channel region. Ohmic contacts to the source, gate and drain regions can then be formed. The devices can include edge termination structures such as guard rings, junction termination extensions (JTE), or other suitable p-n blocking structures. The devices can be fabricated with different threshold voltages, and can be implemented for both depletion and enhanced modes of operation for the same channel doping. The devices can be used as discrete power transistors and in digital, analog, and monolithic microwave integrated circuits.
摘要翻译：对半导体装置及其制造方法进行说明。器件可以在SiC中实现，并且可以包括外延生长的n型漂移和p型沟槽栅极区域，以及在沟槽p型栅极区域顶部的n型外延再生长沟道区域。源极区域可以在沟道区域的顶部外延再生长或选择性地植入沟道区域。然后可以形成到源极，栅极和漏极区域的欧姆接触。这些装置可以包括边缘终端结构，例如保护环，连接终止扩展（JTE）或其他合适的p-n阻塞结构。这些器件可以用不同的阈值电压制造，并且可以针对相同沟道掺杂的耗尽和增强的工作模式来实现。这些器件可用作分立功率晶体管和数字，模拟和单片微波集成电路。

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