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    • 9. 发明申请
    • Integrated Circuit with Metal Heat Flow Path Coupled to Transistor and Method for Manufacturing Such Circuit
    • 具有耦合到晶体管的金属热流路的集成电路及其制造方法
    • US20080032467A1
    • 2008-02-07
    • US11869857
    • 2007-10-10
    • Vladislav VashchenkoPeter HopperYuri Mirgorodski
    • Vladislav VashchenkoPeter HopperYuri Mirgorodski
    • H01L21/86
    • H01L23/367H01L21/84H01L27/0211H01L27/12H01L27/1203H01L27/1207H01L2924/0002H01L2924/00
    • In some embodiments, a chip with a metal heat flow path extending between a terminal of a transistor thereof and bulk semiconductor material of the chip (e.g., from the terminal to a substrate over which the transistor is formed or to the body of a semiconductor device adjacent to the transistor) and methods for manufacturing such a chip. The chip can be implemented by a semiconductor on insulator (SOI) process and can include at least one bipolar or MOS transistor, an insulator underlying the transistor, a semiconductor substrate underlying the insulator, and a metal heat flow path extending between a terminal of the transistor through the insulator to the substrate. Preferably, the metal heat flow path is a metal interconnect formed by a process step (or steps) of the same type performed to produce other metal interconnects of the chip. The chip can be an SOI chip including output circuitry and low-power circuitry, with at least one power transistor of the output circuitry, but no transistor of the low-power circuitry, having a terminal coupled to a metal heat flow path. Other embodiments are a chip including transistors and a feedback control loop coupled to at least one of the transistors for sensing temperature of the transistor and controlling at least one operating parameter of the transistor in response to the sensed temperature, and a method for manufacturing such chip.
    • 在一些实施例中,具有在其晶体管的端子和芯片的体半导体材料之间延伸的金属热流路的芯片(例如,从端子到其上形成晶体管的衬底或半导体器件的主体) 与晶体管相邻)以及用于制造这种芯片的方法。 该芯片可以通过半导体绝缘体(SOI)工艺来实现,并且可以包括至少一个双极或MOS晶体管,晶体管下面的绝缘体,绝缘体下面的半导体衬底,以及在绝缘体的端子之间延伸的金属热流路径 晶体管通过绝缘体到基板。 优选地,金属热流路径是通过对芯片的其他金属互连进行的相同类型的工艺步骤(或步骤)形成的金属互连。 该芯片可以是包括输出电路和低功率电路的SOI芯片,其中至少一个输出电路的功率晶体管,但是没有低功率电路的晶体管具有耦合到金属热流路径的端子。 其他实施例是包括晶体管和耦合到晶体管中的至少一个的反馈控制环路的芯片,用于感测晶体管的温度并且响应于感测到的温度控制晶体管的至少一个操作参数,以及用于制造这种芯片的方法 。