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1. 发明授权

US09012967B2 1T MIM memory for embedded RAM application in soc 有权
标题翻译： 1T MIM存储器，用于soc中的嵌入式RAM应用
公开(公告)号：US09012967B2
公开(公告)日：2015-04-21
申请号：US13369894
申请日：2012-02-09
申请人： Yi-Ching Lin , Chun-Yao Chen , Chen-Jong Wang , Shou-Gwo Wuu , Chung S. Wang , Chien-Hua Huang , Kun-Lung Chen , Ping Yang
发明人： Yi-Ching Lin , Chun-Yao Chen , Chen-Jong Wang , Shou-Gwo Wuu , Chung S. Wang , Chien-Hua Huang , Kun-Lung Chen , Ping Yang
IPC分类号： H01L27/108 , H01L29/94 , H01L27/02
CPC分类号： H01L27/10897 , H01L27/0207 , H01L27/10852 , H01L27/10894
摘要： Embedded memories. The devices include a substrate, a first dielectric layer, a second dielectric layer, a third dielectric layer, and a plurality of capacitors. The substrate comprises transistors. The first dielectric layer, embedding first and second conductive plugs electrically connecting the transistors therein, overlies the substrate. The second dielectric layer, comprising a plurality of capacitor openings exposing the first conductive plugs, overlies the first dielectric layer. The capacitors comprise a plurality of bottom plates, respectively disposed in the capacitor openings, electrically connecting the first conductive plugs, a plurality of capacitor dielectric layers respectively overlying the bottom plates, and a top plate, comprising a top plate opening, overlying the capacitor dielectric layers. The top plate opening exposes the second dielectric layer, and the top plate is shared by the capacitors.
摘要翻译：嵌入式记忆这些器件包括衬底，第一介电层，第二电介质层，第三电介质层和多个电容器。衬底包括晶体管。第一介电层，嵌入电连接其中的晶体管的第一和第二导电插塞覆盖在基板上。包括暴露第一导电插塞的多个电容器开口的第二电介质层覆盖在第一电介质层上。电容器包括分别设置在电容器开口中的多个底板，电连接第一导电插塞，分别覆盖在底板上的多个电容器电介质层，以及顶板，包括覆盖电容器电介质的顶板开口层。顶板开口暴露第二电介质层，并且顶板由电容器共享。

2. 发明申请

US20120139022A1 1T MIM MEMORY FOR EMBEDDED RAM APPLICATION IN SOC 审中-公开
标题翻译： 1T MIM存储器嵌入式RAM应用于SOC
公开(公告)号：US20120139022A1
公开(公告)日：2012-06-07
申请号：US13369894
申请日：2012-02-09
申请人： Yi-Ching Lin , Chun-Yao Chen , Chen-Jong Wang , Shou-Gwo Wuu , Chung S. Wang , Chien-Hua Huang , Kun-Lung Chen , Ping Yang
发明人： Yi-Ching Lin , Chun-Yao Chen , Chen-Jong Wang , Shou-Gwo Wuu , Chung S. Wang , Chien-Hua Huang , Kun-Lung Chen , Ping Yang
IPC分类号： H01L29/92 , H01L27/108
CPC分类号： H01L27/10897 , H01L27/0207 , H01L27/10852 , H01L27/10894
摘要： Embedded memories. The devices include a substrate, a first dielectric layer, a second dielectric layer, a third dielectric layer, and a plurality of capacitors. The substrate comprises transistors. The first dielectric layer, embedding first and second conductive plugs electrically connecting the transistors therein, overlies the substrate. The second dielectric layer, comprising a plurality of capacitor openings exposing the first conductive plugs, overlies the first dielectric layer. The capacitors comprise a plurality of bottom plates, respectively disposed in the capacitor openings, electrically connecting the first conductive plugs, a plurality of capacitor dielectric layers respectively overlying the bottom plates, and a top plate, comprising a top plate opening, overlying the capacitor dielectric layers. The top plate opening exposes the second dielectric layer, and the top plate is shared by the capacitors.
摘要翻译：嵌入式记忆这些器件包括衬底，第一介电层，第二电介质层，第三电介质层和多个电容器。衬底包括晶体管。第一介电层，嵌入电连接其中的晶体管的第一和第二导电插塞覆盖在基板上。包括暴露第一导电插塞的多个电容器开口的第二电介质层覆盖在第一电介质层上。电容器包括分别设置在电容器开口中的多个底板，电连接第一导电插塞，分别覆盖在底板上的多个电容器电介质层，以及顶板，包括覆盖电容器电介质的顶板开口层。顶板开口暴露第二电介质层，并且顶板由电容器共享。

3. 发明申请

US20070267674A1 1T MIM memory for embedded ram application in soc 有权
标题翻译： 1T MIM存储器，用于嵌入式RAM应用
公开(公告)号：US20070267674A1
公开(公告)日：2007-11-22
申请号：US11437673
申请日：2006-05-22
申请人： Yi-Ching Lin , Chun-Yao Chen , Chen-Jong Wang , Shou-Gwo Wuu , Chung S. Wang , Chien-Hua Huang , Kun-Lung Chen , Ping Yang
发明人： Yi-Ching Lin , Chun-Yao Chen , Chen-Jong Wang , Shou-Gwo Wuu , Chung S. Wang , Chien-Hua Huang , Kun-Lung Chen , Ping Yang
IPC分类号： H01L29/94
CPC分类号： H01L27/10897 , H01L27/0207 , H01L27/10852 , H01L27/10894
摘要： Embedded memories. The devices include a substrate, a first dielectric layer, a second dielectric layer, a third dielectric layer, and a plurality of capacitors. The substrate comprises transistors. The first dielectric layer, embedding first and second conductive plugs electrically connecting the transistors therein, overlies the substrate. The second dielectric layer, comprising a plurality of capacitor openings exposing the first conductive plugs, overlies the first dielectric layer. The capacitors comprise a plurality of bottom plates, respectively disposed in the capacitor openings, electrically connecting the first conductive plugs, a plurality of capacitor dielectric layers respectively overlying the bottom plates, and a top plate, comprising a top plate opening, overlying the capacitor dielectric layers. The top plate opening exposes the second dielectric layer, and the top plate is shared by the capacitors.
摘要翻译：嵌入式记忆这些器件包括衬底，第一介电层，第二电介质层，第三电介质层和多个电容器。衬底包括晶体管。第一介电层，嵌入电连接其中的晶体管的第一和第二导电插塞覆盖在基板上。包括暴露第一导电插塞的多个电容器开口的第二电介质层覆盖在第一电介质层上。电容器包括分别设置在电容器开口中的多个底板，电连接第一导电插塞，分别覆盖在底板上的多个电容器电介质层，以及顶板，包括覆盖电容器电介质的顶板开口层。顶板开口暴露第二电介质层，并且顶板由电容器共享。

4. 发明授权

US08148223B2 1T MIM memory for embedded ram application in soc 有权
标题翻译： 1T MIM存储器，用于嵌入式RAM应用
公开(公告)号：US08148223B2
公开(公告)日：2012-04-03
申请号：US11437673
申请日：2006-05-22
申请人： Yi-Ching Lin , Chun-Yao Chen , Chen-Jong Wang , Shou-Gwo Wuu , Chung S. Wang , Chien-Hua Huang , Kun-Lung Chen , Ping Yang
发明人： Yi-Ching Lin , Chun-Yao Chen , Chen-Jong Wang , Shou-Gwo Wuu , Chung S. Wang , Chien-Hua Huang , Kun-Lung Chen , Ping Yang
IPC分类号： H01L21/8242
CPC分类号： H01L27/10897 , H01L27/0207 , H01L27/10852 , H01L27/10894
摘要： Embedded memories. The devices include a substrate, a first dielectric layer, a second dielectric layer, a third dielectric layer, and a plurality of capacitors. The substrate comprises transistors. The first dielectric layer, embedding first and second conductive plugs electrically connecting the transistors therein, overlies the substrate. The second dielectric layer, comprising a plurality of capacitor openings exposing the first conductive plugs, overlies the first dielectric layer. The capacitors comprise a plurality of bottom plates, respectively disposed in the capacitor openings, electrically connecting the first conductive plugs, a plurality of capacitor dielectric layers respectively overlying the bottom plates, and a top plate, comprising a top plate opening, overlying the capacitor dielectric layers. The top plate opening exposes the second dielectric layer, and the top plate is shared by the capacitors.
摘要翻译：嵌入式记忆这些器件包括衬底，第一介电层，第二电介质层，第三电介质层和多个电容器。衬底包括晶体管。第一介电层，嵌入电连接其中的晶体管的第一和第二导电插塞覆盖在基板上。包括暴露第一导电插塞的多个电容器开口的第二电介质层覆盖在第一电介质层上。电容器包括分别设置在电容器开口中的多个底板，电连接第一导电插塞，分别覆盖在底板上的多个电容器电介质层，以及顶板，包括覆盖电容器电介质的顶板开口层。顶板开口暴露第二电介质层，并且顶板由电容器共享。

5. 发明授权

US07282757B2 MIM capacitor structure and method of manufacture 有权
标题翻译： MIM电容器结构及制造方法
公开(公告)号：US07282757B2
公开(公告)日：2007-10-16
申请号：US10689294
申请日：2003-10-20
申请人： Kuo-Chi Tu , Chun-Yao Chen , Shou-Gwo Wuu , Chen-Jong Wang
发明人： Kuo-Chi Tu , Chun-Yao Chen , Shou-Gwo Wuu , Chen-Jong Wang
IPC分类号： H01L27/105
CPC分类号： H01L27/10894 , H01L27/10852 , H01L27/10855 , H01L28/60 , H01L28/91
摘要： A metal-insulator-metal (MIM) capacitor structure and method of manufacturing thereof. A plurality of MIM capacitor patterns is formed in two or more insulating layers. The insulating layers may comprise a via layer and a metallization layer of a semiconductor device. A top portion of the top insulating layer is recessed in a region between at least two adjacent MIM capacitor patterns. When the top plate material of the MIM capacitors is deposited, the top plate material fills the recessed area of the top insulating layer between the adjacent MIM capacitor pattern, forming a connecting region that couples together the top plates of the adjacent MIM capacitors. A portion of the MIM capacitor bottom electrode may be formed in a first metallization layer of the semiconductor device.
摘要翻译：金属绝缘体金属（MIM）电容器结构及其制造方法。多个MIM电容器图案形成在两个或更多个绝缘层中。绝缘层可以包括半导体器件的通孔层和金属化层。顶部绝缘层的顶部凹陷在至少两个相邻的MIM电容器图案之间的区域中。当MIM电容器的顶板材料沉积时，顶板材料填充相邻MIM电容器图案之间的顶部绝缘层的凹陷区域，形成将相邻的MIM电容器的顶板耦合在一起的连接区域。 MIM电容器底部电极的一部分可以形成在半导体器件的第一金属化层中。

6. 发明申请

US20050082586A1 MIM capacitor structure and method of manufacture 有权
标题翻译： MIM电容器结构及制造方法
公开(公告)号：US20050082586A1
公开(公告)日：2005-04-21
申请号：US10689294
申请日：2003-10-20
申请人： Kuo-Chi Tu , Chun-Yao Chen , Shou-Gwo Wuu , Chen-Jong Wang
发明人： Kuo-Chi Tu , Chun-Yao Chen , Shou-Gwo Wuu , Chen-Jong Wang
IPC分类号： H01L21/02 , H01L21/8242 , H01L29/76 , H01L21/20
CPC分类号： H01L27/10894 , H01L27/10852 , H01L27/10855 , H01L28/60 , H01L28/91
摘要： A metal-insulator-metal (MIM) capacitor structure and method of manufacturing thereof. A plurality of MIM capacitor patterns is formed in two or more insulating layers. The insulating layers may comprise a via layer and a metallization layer of a semiconductor device. A top portion of the top insulating layer is recessed in a region between at least two adjacent MIM capacitor patterns. When the top plate material of the MIM capacitors is deposited, the top plate material fills the recessed area of the top insulating layer between the adjacent MIM capacitor pattern, forming a connecting region that couples together the top plates of the adjacent MIM capacitors. A portion of the MIM capacitor bottom electrode may be formed in a first metallization layer of the semiconductor device.
摘要翻译：金属绝缘体金属（MIM）电容器结构及其制造方法。多个MIM电容器图案形成在两个或更多个绝缘层中。绝缘层可以包括半导体器件的通孔层和金属化层。顶部绝缘层的顶部凹陷在至少两个相邻的MIM电容器图案之间的区域中。当MIM电容器的顶板材料沉积时，顶板材料填充相邻MIM电容器图案之间的顶部绝缘层的凹陷区域，形成将相邻的MIM电容器的顶板耦合在一起的连接区域。 MIM电容器底部电极的一部分可以形成在半导体器件的第一金属化层中。

7. 发明申请

US20070200162A1 Reducing dielectric constant for MIM capacitor 有权
标题翻译：降低MIM电容的介电常数
公开(公告)号：US20070200162A1
公开(公告)日：2007-08-30
申请号：US11361330
申请日：2006-02-24
申请人： Kuo-Chi Tu , Chun-Yao Chen , Yi-Ching Lin
发明人： Kuo-Chi Tu , Chun-Yao Chen , Yi-Ching Lin
IPC分类号： H01L29/76
CPC分类号： H01L28/40 , H01L27/10852 , H01L27/10894 , H01L28/56
摘要： A memory device having improved sensing speed and reliability and a method of forming the same are provided. The memory device includes a first dielectric layer having a low k value over a semiconductor substrate, a second dielectric layer having a second k value over the first dielectric layer, and a capacitor formed in the second dielectric layer wherein the capacitor comprises a cup region at least partially filled by the third dielectric layer. The memory device further includes a third dielectric layer over the second dielectric layer and a bitline over the third dielectric layer. The bitline is electrically coupled to the capacitor. A void having great dimensions is preferably formed in the cup region of the capacitor.
摘要翻译：提供了具有改进的感测速度和可靠性的记忆装置及其形成方法。存储器件包括在半导体衬底上具有低k值的第一电介质层，在第一介电层上具有第二k值的第二电介质层和形成在第二电介质层中的电容器，其中电容器包括位于最少部分地被第三介电层填充。存储器件还包括第二电介质层上的第三电介质层和第三电介质层上的位线。位线电耦合到电容器。优选地，在电容器的杯区域中形成具有大尺寸的空隙。

8. 发明授权

US07382012B2 Reducing parasitic capacitance of MIM capacitor in integrated circuits by reducing effective dielectric constant of dielectric layer 有权
标题翻译：通过降低介电层的有效介电常数，降低集成电路中MIM电容的寄生电容
公开(公告)号：US07382012B2
公开(公告)日：2008-06-03
申请号：US11361330
申请日：2006-02-24
申请人： Kuo-Chi Tu , Chun-Yao Chen , Yi-Ching Lin
发明人： Kuo-Chi Tu , Chun-Yao Chen , Yi-Ching Lin
IPC分类号： H01L27/108 , H01L21/20 , G11C11/00
CPC分类号： H01L28/40 , H01L27/10852 , H01L27/10894 , H01L28/56
摘要： A memory device having improved sensing speed and reliability and a method of forming the same are provided. The memory device includes a first dielectric layer having a low k value over a semiconductor substrate, a second dielectric layer having a second k value over the first dielectric layer, and a capacitor formed in the second dielectric layer wherein the capacitor comprises a cup region at least partially filled by the third dielectric layer. The memory device further includes a third dielectric layer over the second dielectric layer and a bitline over the third dielectric layer. The bitline is electrically coupled to the capacitor. A void having great dimensions is preferably formed in the cup region of the capacitor.
摘要翻译：提供了具有改进的感测速度和可靠性的记忆装置及其形成方法。存储器件包括在半导体衬底上具有低k值的第一电介质层，在第一介电层上具有第二k值的第二电介质层和形成在第二电介质层中的电容器，其中电容器包括位于最少部分地被第三介电层填充。存储器件还包括第二电介质层上的第三电介质层和第三电介质层上的位线。位线电耦合到电容器。优选地，在电容器的杯区域中形成具有大尺寸的空隙。

9. 发明申请

US20050280981A1 Modularized rotatable signal control box 审中-公开
标题翻译：模块化可旋转信号控制箱
公开(公告)号：US20050280981A1
公开(公告)日：2005-12-22
申请号：US11154753
申请日：2005-06-16
申请人： Chun-Yao Chen
发明人： Chun-Yao Chen
IPC分类号： G06F1/16 , H04N5/64 , H04N5/74
CPC分类号： H04N9/3141 , H04N5/64
摘要： The invention provides a modularized rotatable signal control box which is assembled in a housing of an electronic appliance. The signal control box comprises a module base and a rotatable module. The module base is assembled in the housing of the electronic appliance. The rotatable module comprises a hidden panel and at least one rotating element. The hidden panel comprises at least one signal input/output connector, and the rotating element is used for rotatably connecting the rotatable module to the module base.
摘要翻译：本发明提供一种组装在电子设备的壳体中的模块化的可旋转信号控制箱。信号控制箱包括模块基座和可旋转模块。模块底座组装在电子设备的外壳中。可旋转模块包括隐藏的面板和至少一个旋转元件。隐藏的面板包括至少一个信号输入/输出连接器，并且旋转元件用于将可旋转模块可旋转地连接到模块基座。

10. 发明授权

US06773115B2 Adjusting apparatus for projection 失效
公开(公告)号：US06773115B2
公开(公告)日：2004-08-10
申请号：US10731138
申请日：2003-12-10
申请人： Yung-Chuan Tseng , Chun-Yao Chen , Kuan-Chou Ko
发明人： Yung-Chuan Tseng , Chun-Yao Chen , Kuan-Chou Ko
IPC分类号： G03B2128
CPC分类号： G03B21/10 , G03B21/28
摘要： An adjusting apparatus for projection comprises a carrier having a central screw hole and three rounded indentations around central screw hole, an adjusting frame having a plane section and a base section, and a holder. The center of the plane section has a circular concave dug a hole with a smaller aperture. A ball bearing is accommodated in the circular concave. The plane section of the adjusting frame has three screw holes corresponding to the rounded indentations. Three angle-adjusting bolts respectively insert through the screw holes to abut against the rounded indentations. Rotating the angle-adjusting bolts relative to each other varies the length of the angle-adjusting bolts calculated from the plane section of the adjusting frame to the carrier. Thereby, an angle adjustment of a mirror is achieved.

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