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1. 发明授权

US10081536B2 Gasses for increasing yield and reliability of MEMS devices 有权
公开(公告)号：US10081536B2
公开(公告)日：2018-09-25
申请号：US15379401
申请日：2016-12-14
申请人： Texas Instruments Incorporated
发明人： Simon Joshua Jacobs , Molly Nelis Sing
IPC分类号： H01L29/12 , H01L29/84 , H01L23/10 , B81B7/00 , B81C1/00 , B81B7/02 , H01L23/20 , H01L21/56 , B29C65/48 , H01L21/67
CPC分类号： B81B7/0038 , B29C65/48 , B81B3/0016 , B81B7/02 , B81C1/00214 , H01L21/56 , H01L21/67 , H01L23/10 , H01L23/20 , H01L29/12 , H01L29/84
摘要： In described examples, a MEMS device is enclosed within a sealed package including nonmetal oxide gasses at levels greater than 1% by volume. In at least one example, the MEMS device is protected against premature failure from various causes, including charging, particle growth and stiction by moieties of the nonmetal oxide gasses reacting with various exposed surfaces within the package of the MEMS device and/or the adsorbed water layers on said surfaces.

2. 发明申请

US20150241466A1 FUNCTIONAL ELEMENT, ELECTRONIC APPARATUS, AND MOVING OBJECT 审中-公开
标题翻译：功能元件，电子设备和移动对象
公开(公告)号：US20150241466A1
公开(公告)日：2015-08-27
申请号：US14628587
申请日：2015-02-23
申请人： Seiko Epson Corporation
发明人： Satoru TANAKA
IPC分类号： G01P15/125 , B81B3/00
CPC分类号： G01P15/125 , B81B3/0016 , G01P2015/0874
摘要： A functional element includes: a substrate; a movable body that includes a movable electrode portion; a support portion that supports the movable body; a first fixed electrode portion that is disposed on the substrate and a portion of which faces a first portion as one of portions of the movable body; a second fixed electrode portion that is disposed on the substrate and a portion of which faces a second portion as the other portion of the movable body; and a third fixed electrode portion that is disposed on the substrate and a portion of which faces the first portion. An opening that faces a region of the substrate between the first fixed electrode portion and the third fixed electrode portion is provided in the movable body, and the width of the opening is equal to or more than the width of the region.
摘要翻译：功能元件包括：基底; 可移动体，包括可动电极部分; 支撑所述移动体的支撑部; 第一固定电极部，其设置在所述基板上，并且其一部分面向作为所述可动体的一部分的第一部分; 第二固定电极部，其设置在所述基板上，并且其一部分面向作为所述可动体的另一部分的第二部分; 以及第三固定电极部分，其设置在所述基板上并且其一部分面向所述第一部分。在第一固定电极部分和第三固定电极部分之间面向基板的区域的开口设置在可移动体中，并且开口的宽度等于或大于该区域的宽度。

3. 发明授权

US06859580B2 Systems and methods for overcoming stiction using a lever 失效
标题翻译：使用杠杆克服静摩擦的系统和方法
公开(公告)号：US06859580B2
公开(公告)日：2005-02-22
申请号：US10632662
申请日：2003-08-01
申请人： Bevan Staple , David Paul Anderson , Lilac Muller
发明人： Bevan Staple , David Paul Anderson , Lilac Muller
IPC分类号： G02B6/34 , G02B6/35 , G02B26/08
CPC分类号： G02B6/358 , B81B3/0016 , B81B2201/047 , B81B2203/0181 , G02B6/29307 , G02B6/2931 , G02B6/3518 , G02B6/352 , G02B6/3546 , G02B6/3548 , G02B6/3556 , G02B6/3558 , G02B6/356 , G02B6/3566 , G02B6/357 , G02B6/3584 , G02B6/3598 , G02B26/0841 , Y10T307/977
摘要： A microstructure is provided including a base layer underlying a first and second structural plates. Operation of the microstructure is capable of overcoming stiction. Methods of operation include providing an edge of the first structural plate in contact with a contact point. A second structural plate is deflected in a way that overcomes stiction between the first structural plate and the contact point. Such deflection can include providing a prying force to lift the first structural plate or a hammering force to disturb any stiction related forces at the contact point.
摘要翻译：提供了包括第一和第二结构板下面的基底层的微结构。微结构的操作能够克服粘性。操作方法包括提供与接触点接触的第一结构板的边缘。第二结构板以克服第一结构板和接触点之间的静摩擦的方式偏转。这种偏转可以包括提供用于提升第一结构板的撬力力或锤击力以扰乱接触点处的任何相关的力。

4. 发明授权

US06650527B1 Article comprising a casimir force modulator and methods therefor 失效
标题翻译：本文包括一个卡西米尔力调制器及其方法
公开(公告)号：US06650527B1
公开(公告)日：2003-11-18
申请号：US09903312
申请日：2001-07-11
申请人： Fabrizio Pinto
发明人： Fabrizio Pinto
IPC分类号： G01P1500
CPC分类号： B81B3/0016 , G21K1/00
摘要： Method and apparatus for modulating the direction and magnitude of the Casimir force between two bodies. In accordance with the illustrative embodiment, a repulsive Casimir force is generated by placing two bodies in near-proximity to one another. For one of the bodies, dielectric properties predominate; for the other, magnetic properties predominate. The arrangement further includes a device that alters the dielectric or magnetic properties of the bodies. By altering the dielectric or magnetic properties, the repulsive Casimir force can be made to decrease, then vanish, then reappear as an attractive force. Modulating the Casimir force in such a manner can be used to control stiction in MEMS devices and to accelerate particles, among many other applications.
摘要翻译：用于调制两个物体之间的卡西米尔力的方向和大小的方法和装置。根据说明性实施例，通过将两个物体彼此靠近地放置来产生排斥卡西米尔力。对于其中一种物质，介电性能占主导地位; 另一方面，磁性能占主导地位。该装置还包括改变物体的电介质或磁性的装置。通过改变电介质或磁性能，可以使排斥的卡西米尔力减小，然后消失，然后作为吸引力重新出现。以这种方式调制卡西米尔力可用于控制MEMS装置中的静摩擦和加速颗粒，以及许多其它应用。

5. 发明申请

US20030011863A1 Bistable micromirror with contactless stops 有权
公开(公告)号：US20030011863A1
公开(公告)日：2003-01-16
申请号：US09899004
申请日：2001-07-03
发明人： Lilac Muller
IPC分类号： G02B026/08
CPC分类号： B81B3/0016 , B81B2201/042 , G02B26/0841 , Y10S359/90 , Y10S359/904
摘要： A microstructure for steering light is provided that mitigates stiction. A substrate is provided on which a structural linkage is connected to support a structural film. The structural film includes a reflective coating. A hold electrode is connected with the substrate at a position laterally beyond an orthogonal projection of the structural film on the substrate. It is configured to hold the structural film electrostatically in a tilted position with respect to the substrate upon application of a potential difference between the structural film and the hold electrode. Because of its positioning with respect to the structural film, it is ensured that the structural film is not in contact with the substrate when the structural film is being held by the hold electrode.

6. 发明授权

US10840026B2 Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods 有权
公开(公告)号：US10840026B2
公开(公告)日：2020-11-17
申请号：US16511899
申请日：2019-07-15
申请人： wiSpry, Inc.
发明人： Arthur S. Morris, III , Dana DeReus , Norlito Baytan
IPC分类号： H01G5/16 , H01G7/00 , B81B3/00 , B81C1/00 , H01G5/18
CPC分类号： H01G5/16 , B81B3/0051 , B81C1/00166 , B81C1/00476 , H01G7/00 , B81B3/0016 , B81B2201/0221 , B81C2201/013 , H01G5/18
摘要： Systems, devices, and methods for micro-electro-mechanical system (MEMS) tunable capacitors can include a fixed actuation electrode attached to a substrate, a fixed capacitive electrode attached to the substrate, and a movable component positioned above the substrate and movable with respect to the fixed actuation electrode and the fixed capacitive electrode. The movable component can include a movable actuation electrode positioned above the fixed actuation electrode and a movable capacitive electrode positioned above the fixed capacitive electrode. At least a portion of the movable capacitive electrode can be spaced apart from the fixed capacitive electrode by a first gap, and the movable actuation electrode can be spaced apart from the fixed actuation electrode by a second gap that is larger than the first gap.

7. 发明申请

US20170369303A1 ELECTROSTATIC ACTUATOR AND SWITCH 审中-公开
公开(公告)号：US20170369303A1
公开(公告)日：2017-12-28
申请号：US15542779
申请日：2015-11-27
申请人： SONY CORPORATION
发明人： SHINYA MORITA , KOICHI IKEDA
IPC分类号： B81B3/00 , H02N1/00 , H01H59/00
CPC分类号： B81B3/0021 , B81B3/0013 , B81B3/0016 , B81B2201/018 , B81B2201/033 , B81B2203/04 , B81B2203/051 , H01H59/0009 , H02N1/00 , H02N1/008
摘要： An electrostatic actuator includes a base, a movable electrode including a semiconductor and supported to the base to be displaceable in a first direction, and a fixed electrode including the semiconductor and fixed to the base, in which the fixed electrode faces the movable electrode in a state of being separated therefrom in the first direction. The electrostatic actuator includes a high-resistance region formed in at least a portion of each of respective facing surfaces of the movable electrode and the fixed electrode, and lower in impurity concentration than a surrounding region thereof.

8. 发明申请

US20150138617A1 DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME 有权
标题翻译：显示装置及其制造方法
公开(公告)号：US20150138617A1
公开(公告)日：2015-05-21
申请号：US14273142
申请日：2014-05-08
申请人： Pixtronix, Inc.
发明人： Masataka OKAMOTO , Hidekazu NITTA , Jun FUJIYOSHI
IPC分类号： G02B26/02 , B81C3/00 , B81C1/00 , B81B3/00
CPC分类号： G02B26/02 , B81B3/0016 , B81B7/0029 , B81B2201/047 , B81B2203/06 , B81B2207/053 , B81C1/00 , B81C3/008 , G02B26/023 , G02B26/0841 , Y10T29/49117
摘要： Provided is a display device, including: a sealing member including an opening and surrounding a space defined by a pair of light transmissive substrates; an end seal for closing the opening of the sealing member to form an encapsulation space; oil filled in the encapsulation space; a spacer for maintaining an interval between the pair of light transmissive substrates; a shutter; a drive portion arranged in the oil, for mechanically driving the shutter; and a wall portion formed on at least one of opposed surfaces of the pair of light transmissive substrates. The wall portion includes a part arranged at a position interrupting a shortest path between the opening of the sealing member and a display region. The wall portion is made of a material forming the spacer, the shutter, and the drive portion.
摘要翻译：提供一种显示装置，包括：密封构件，其包括开口并围绕由一对透光基板限定的空间; 用于封闭密封构件的开口以形成封装空间的端部密封件; 油填充在封装空间中; 间隔件，用于保持所述一对透光基板之间的间隔; 快门布置在油中的驱动部分，用于机械地驱动闸门; 以及形成在所述一对透光基板的至少一个相对表面上的壁部。壁部包括布置在中断密封构件的开口和显示区域之间的最短路径的位置处的部分。壁部分由形成间隔件，快门和驱动部分的材料制成。

9. 发明授权

US06778304B1 Bistable micromirror with contactless stops 失效
标题翻译：具有非接触式止动器的双稳态微镜
公开(公告)号：US06778304B1
公开(公告)日：2004-08-17
申请号：US10705390
申请日：2003-11-10
申请人： Lilac Muller
发明人： Lilac Muller
IPC分类号： G02B2608
CPC分类号： B81B3/0016 , B81B2201/042 , G02B26/0841 , Y10S359/90 , Y10S359/904
摘要： A microstructure for steering light is provided that mitigates stiction. A substrate is provided on which a structural linkage is connected to support a structural film. The structural film includes a reflective coating. A hold electrode is connected with the substrate at a position laterally beyond an orthogonal projection of the structural film on the substrate. It is configured to hold the structural film electrostatically in a tilted position with respect to the substrate upon application of a potential difference between the structural film and the hold electrode. Because of its positioning with respect to the structural film, it is ensured that the structural film is not in contact with the substrate when the structural film is being held by the hold electrode.
摘要翻译：提供了用于转向灯的微结构，其减轻了静电。提供了一个其上连接有结构连杆以支撑结构膜的基底。结构膜包括反射涂层。保持电极在横向超过结构膜在基板上的正交投影的位置处与基板连接。构造成在施加结构膜和保持电极之间的电位差时，将结构膜静电地保持在相对于基板的倾斜位置。由于其相对于结构膜的定位，当结构膜被保持电极保持时，确保结构膜不与基板接触。

10. 发明授权

US06657759B2 Bistable micromirror with contactless stops 有权
标题翻译：具有非接触式止动器的双稳态微镜
公开(公告)号：US06657759B2
公开(公告)日：2003-12-02
申请号：US09899004
申请日：2001-07-03
申请人： Lilac Muller
发明人： Lilac Muller
IPC分类号： G02B2608
CPC分类号： B81B3/0016 , B81B2201/042 , G02B26/0841 , Y10S359/90 , Y10S359/904
摘要： A microstructure for steering light is provided that mitigates stiction. A substrate is provided on which a structural linkage is connected to support a structural film. The structural film includes a reflective coating. A hold electrode is connected with the substrate at a position laterally beyond an orthogonal projection of the structural film on the substrate. It is configured to hold the structural film electrostatically in a tilted position with respect to the substrate upon application of a potential difference between the structural film and the hold electrode. Because of its positioning with respect to the structural film, it is ensured that the structural film is not in contact with the substrate when the structural film is being held by the hold electrode.
摘要翻译：提供了用于转向灯的微结构，其减轻了静电。提供了一个其上连接有结构连杆以支撑结构膜的基底。结构膜包括反射涂层。保持电极在横向超过结构膜在基板上的正交投影的位置处与基板连接。构造成在施加结构膜和保持电极之间的电位差时，将结构膜静电地保持在相对于基板的倾斜位置。由于其相对于结构膜的定位，当结构膜被保持电极保持时，确保结构膜不与基板接触。

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