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    • 4. 发明申请
    • ELECTRIC-QUANTITY MEASURING APPARATUS AND ELECTRIC-QUANTITY MEASURING METHOD
    • 电量测量装置和电量测量方法
    • US20150204920A1
    • 2015-07-23
    • US14411063
    • 2012-08-17
    • Kempei Seki
    • Kempei Seki
    • G01R19/25G01R19/00G01R23/06G01R19/252
    • G01R19/2513G01R19/0007G01R19/2509G01R19/252G01R23/06G01R23/12
    • A frequency-coefficient calculating unit calculates, as a frequency coefficient (fc), a value ((v21+v23)/(2v22)) obtained by normalizing, with a differential voltage instantaneous value (v22) at intermediate time, an average ((v21+v23)/2) of a sum (v21+v23) of differential voltage instantaneous values at time other than the intermediate time among differential voltage instantaneous value data (v21, v22, and v23) at three points representing an inter-distal end distance between voltage instantaneous value data at adjacent two points in voltage instantaneous value data at continuous at least four points extracted, out of voltage instantaneous value data obtained by sampling a measurement target alternating-current voltage at a predetermined data collection sampling frequency, at a gauge sampling frequency lower than the data collection sampling frequency and equal to or higher than a frequency of the alternating-current voltage.
    • 频率系数计算单元通过使用中间时间的差分电压瞬时值(v22)通过归一化而获得的值((v21 + v23)/(2v22))作为频率系数(fc),计算平均(( v21 + v23)/ 2)在代表远端的三个点处的差分电压瞬时值数据(v21,v22和v23)之间的中间时间之外的时刻的差分电压瞬时值的和(v21 + v23) 在连续提取的至少四点的电压瞬时值数据中的相邻两点处的电压瞬时值数据之间的距离,通过以预定数据采集采样频率采样测量目标交流电压获得的电压瞬时值数据, 采样频率低于数据采集频率,等于或高于交流电压的频率。
    • 7. 发明申请
    • FILM-THICKNESS MEASURING DEVICE USING PLL CIRCUIT
    • 使用PLL电路的薄膜厚度测量装置
    • US20110115467A1
    • 2011-05-19
    • US13002865
    • 2008-09-22
    • Hiroaki Sato
    • Hiroaki Sato
    • G01R23/00
    • G01B7/066G01R23/12H03B5/362H03L7/093H03L7/0994H03L7/235H03L7/24
    • A phase comparator (4) for detecting a phase difference between a first signal and a second signal, a first oscillating circuit (1) for supplying the phase comparator with a reference signal as the first signal, and a DDS (8) as a second oscillating circuit for outputting a signal according to an output of the above-mentioned phase comparator are provided.As for a filter-thickness measuring device using the PLL circuit as a frequency measurement circuit, a crystal oscillator (11) which is made of quartz etc. and connected to the first oscillating circuit is accommodated in a vacuum chamber (C). It is arranged that the frequency measurement circuit which constitutes the PLL circuit measures a film thickness of the film forming material based on a change of a natural frequency of a piezoelectric crystal, the change being caused by the film forming material deposited on the piezoelectric element in the vacuum chamber.
    • 用于检测第一信号和第二信号之间的相位差的相位比较器(4),用于向相位比较器提供参考信号作为第一信号的第一振荡电路(1)和作为第二信号的DDS(8) 提供了用于根据上述相位比较器的输出输出信号的振荡电路。 对于使用PLL电路作为频率测量电路的滤波器厚度测量装置,将由石英等制成并连接到第一振荡电路的晶体振荡器(11)容纳在真空室(C)中。 布置了构成PLL电路的频率测量电路基于压电晶体的固有频率的变化来测量成膜材料的膜厚度,该变化是由沉积在压电元件上的成膜材料引起的 真空室。