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1. 发明授权

US11022786B2 Handling device for handling a measuring probe 有权
公开(公告)号：US11022786B2
公开(公告)日：2021-06-01
申请号：US16646844
申请日：2018-09-13
申请人： Anton Paar GmbH
发明人： Norbert Pinno-Rath , Gernot Leuprecht , Daniel Koller
IPC分类号： G02B21/00 , G01Q60/16 , G01Q60/38 , G01Q70/02
摘要： A handling apparatus for handling a measuring probe of a scanning probe microscope is disclosed. The measuring probe has a probe body and a probe tip which is coupled with the probe body by a cantilever. The handling apparatus includes a receiving device for receiving the measuring probe at a receiving area, a guide structure, in which the measuring probe is guidable while at the same time the probe body is at least partially limited and the cantilever and the probe tip are supported without contact, and a transport device for transporting the measuring probe from the receiving area along the guide structure to a target area.

2. 发明授权

US10890427B2 Nozzle inspection method and apparatus 有权
公开(公告)号：US10890427B2
公开(公告)日：2021-01-12
申请号：US16116835
申请日：2018-08-29
申请人： SUGINO MACHINE LIMITED
发明人： Hiroki Haremaki
IPC分类号： G01B5/008 , B05B15/555 , B08B3/04 , B08B9/049 , G01Q10/04 , G01Q70/02 , B08B5/02 , G01B5/20 , B08B3/02 , G01N35/10
摘要： A method for inspecting a nozzle includes producing a jet from the nozzle, moving the nozzle to cause the jet to approach a stylus of a touch probe, generating a contact signal under a force acting on the stylus, and determining that the jet is appropriate in response to a contact signal received first after the jet has an axis at a distance from the stylus that is equal to or less than a first normal distance calculated from a normal jet shape.

3. 发明申请

US20200326518A1 Handling Device for Handling a Measuring Probe 审中-公开
公开(公告)号：US20200326518A1
公开(公告)日：2020-10-15
申请号：US16646844
申请日：2018-09-13
申请人： Anton Paar GmbH
发明人： Norbert Pinno-Rath , Gernot Leuprecht , Daniel Koller
IPC分类号： G02B21/00 , G01Q70/02 , G01Q60/38 , G01Q60/16
摘要： A handling apparatus for handling a measuring probe of a scanning probe microscope is disclosed. The measuring probe has a probe body and a probe tip which is coupled with the probe body by a cantilever. The handling apparatus includes a receiving device for receiving the measuring probe at a receiving area, a guide structure, in which the measuring probe is guidable while at the same time the probe body is at least partially limited and the cantilever and the probe tip are supported without contact, and a transport device for transporting the measuring probe from the receiving area along the guide structure to a target area.

4. 发明授权

US10288643B2 Scanning probe microscopy system for mapping high aspect ratio nanostructures on a surface of a sample 有权
公开(公告)号：US10288643B2
公开(公告)日：2019-05-14
申请号：US15744160
申请日：2016-07-14
申请人： Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
发明人： Stefan Kuiper , William Edward Crowcombe
IPC分类号： G01Q70/02 , G01Q20/00
摘要： A scanning probe microscopy system for mapping nanostructures on a surface of a sample is described. The nanostructures include at least one face having a slope with a slope angle that exceeds a threshold. The system includes a metrology frame, a sample support structure, a sensor head including a probe which includes a cantilever and a probe tip, and an actuator for scanning the probe tip relative to the substrate surface. For sensing the nanostructures, the probe tip is arranged under a fixed offset angle with respect to the sensor head such as to be angled relative to the sample surface. The system further includes a sensor head carrier for receiving the sensor head, the sensor head carrier and the sensor head being provided with a mutually cooperating mounting structure for forming a kinematic mount having at least three contact points for detachable mounting of the sensor head on the sensor head carrier.

5. 发明申请

US20180299480A1 SCANNING PROBE MICROSCOPE 审中-公开
公开(公告)号：US20180299480A1
公开(公告)日：2018-10-18
申请号：US15938185
申请日：2018-03-28
申请人： Shimadzu Corporation
发明人： Masahiro OHTA
IPC分类号： G01Q10/06 , G01Q20/02 , G01Q70/02
CPC分类号： G01Q10/065 , G01Q20/02 , G01Q70/02
摘要： A scanning probe microscope includes a position change unit that relatively changes positions of a fixed end of a cantilever and a surface of a sample S in a Z direction, a deflection amount measurement unit that measures a deflection amount of the cantilever, a Z direction movement distance detector that detects a movement distance in the Z direction while the fixed end is relatively moved with respect to the surface of the sample S from a predetermined initial position until a tip of a probe comes into contact with the surface of the sample S and the deflection amount becomes a predetermined value, and an initial position change unit that changes the initial position to a position further away from the surface of the sample S when the movement distance is below a predetermined lower limit.

6. 发明授权

US09709597B2 Miniaturized cantilever probe for scanning probe microscopy and fabrication thereof 有权
公开(公告)号：US09709597B2
公开(公告)日：2017-07-18
申请号：US14305588
申请日：2014-06-16
申请人： Bruker Nano, Inc.
发明人： Weijie Wang , Chanmin Su
IPC分类号： G01Q70/08 , G01Q70/16 , G01Q60/38 , G01Q70/14 , G01Q70/02 , G01Q70/00
CPC分类号： G01Q60/38 , G01Q70/00 , G01Q70/02 , G01Q70/08 , G01Q70/14 , G01Q70/16 , G01R1/06727
摘要： Cantilever probes are formed from a multilayer structure comprising an upper substrate, a lower substrate, an interior layer, a first separation layer, and a second separation layer, wherein the first separation layer is situated between the upper substrate and the interior layer, the second separation layer is situated between the lower substrate and the interior layer, and wherein the first and the second separation layers are differentially etchable with respect to the first and the second substrates, the interior layer. The upper substrate is a first device layer from which a probe tip is formed. The interior layer is a second device layer from which a cantilever arm is formed. The lower substrate is a handle layer from which a handle, or base portion, is formed. Patterning and etching processing of any layer is isolated from the other layers by the separation layers.

7. 发明申请

US20170131323A1 SYSTEM AND METHOD OF PERFORMING SCANNING PROBE MICROSCOPY ON A SUBSTRATE SURFACE 审中-公开
公开(公告)号：US20170131323A1
公开(公告)日：2017-05-11
申请号：US15322969
申请日：2015-07-03
申请人： Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
发明人： Hamed Sadeghian Marnani , Jasper Winters , William Edward Crowcombe , Teunis Cornelis van den Dool , Geerten Frans ljsbrand Kramer
IPC分类号： G01Q10/04 , G01Q70/02
CPC分类号： G01Q10/04 , B82Y35/00 , G01Q10/06 , G01Q70/02 , G01Q70/06
摘要： The invention is directed at a method of performing scanning probe microscopy on a substrate surface using a scanning probe microscopy system, the system including at least one probe head, the probe head comprising a probe tip arranged on a cantilever and a tip position detector for determining a position of the probe tip along a z-direction transverse to an image plane, the method comprising: positioning the at least one probe head relative to the substrate surface; moving the probe tip and the substrate surface relative to each other in one or more directions parallel to the image plane for scanning of the substrate surface with the probe tip; and determining the position of the probe tip with the tip position detector during said scanning for mapping nanostructures on the substrate surface; wherein said step of positioning is performed by placing the at least one probe head on a static carrier surface.

8. 发明授权

US09110094B2 Measurement of surface energy components and wettability of reservoir rock utilizing atomic force microscopy 有权
标题翻译：利用原子力显微镜测量储层岩石的表面能量成分和润湿性
公开(公告)号：US09110094B2
公开(公告)日：2015-08-18
申请号：US14158359
申请日：2014-01-17
申请人： SCHLUMBERGER TECHNOLOGY CORPORATION , SAUDI ARAMCO
发明人： Ahmed Gmira , Wael Abdallah , Mikhail Stukan , Johannes J. M. Buiting
IPC分类号： G01Q60/24 , G01Q60/38 , G01Q70/16 , G01Q70/08 , G01Q70/14 , G01Q70/02
CPC分类号： G01Q60/38 , G01Q30/04 , G01Q30/14 , G01Q60/24 , G01Q60/28 , G01Q70/02 , G01Q70/08 , G01Q70/14 , G01Q70/16
摘要： An instrument (and corresponding method) performs AFM techniques to characterize properties of a sample of reservoir rock. The AFM instrument is configured to have a probe with a tip realized from reservoir rock that corresponds to the reservoir rock of the sample. The AFM instrument is operated to derive and store data representing adhesion forces between the tip and the sample at one or more scan locations in the presence of a number of different fluids disposed between the tip and the sample. The AFM instrument is further configured to perform computational operations that process the data representing the adhesion forces for a given scan location in order to characterize at least one property of the rock sample at the given scan location. The properties can include total surface energy of the rock sample as well as wettability of the rock sample.
摘要翻译：仪器（和相应的方法）执行AFM技术来表征储层岩石样品的性质。 AFM仪器被配置为具有从储层岩石实现的具有对应于样品的储层岩石的尖端的探针。操作AFM仪器以在存在位于尖端和样品之间的许多不同流体的情况下在一个或多个扫描位置导出和存储表示尖端和样品之间的粘附力的数据。 AFM仪器还被配置为执行计算操作，其处理表示给定扫描位置的粘附力的数据，以便表征给定扫描位置处的岩石样品的至少一个性质。这些性质可以包括岩石样品的总表面能以及岩石样品的润湿性。

9. 发明申请

US20150075264A1 MICROSCOPE OBJECTIVE MECHANICAL TESTING INSTRUMENT 审中-公开
标题翻译：显微镜目标机械测试仪器
公开(公告)号：US20150075264A1
公开(公告)日：2015-03-19
申请号：US14388744
申请日：2013-03-13
申请人： Hysitron, Inc.
发明人： Syed Amanulla Syed Asif , Rajiv Dama , Ryan Major
IPC分类号： G01N3/40 , G02B7/16 , G01Q70/02 , G01N3/56 , G01N3/04
CPC分类号： G01N3/40 , G01N3/04 , G01N3/068 , G01N3/42 , G01N3/56 , G01N2203/0078 , G01N2203/0647 , G01Q30/025 , G01Q60/366 , G01Q70/02 , G02B7/16 , G02B21/248
摘要： An objective testing module includes a module base configured for coupling with an objective turret of a microscope. The objective testing module includes a mechanical testing assembly. The mechanical testing assembly is configured to mechanically test a sample at macro scale or less, and quantitatively determine one or more properties of the sample based on the mechanical testing. The mechanical testing assembly optionally includes a probe and one or more transducers coupled with the probe. The transducer measures one or more of force applied to a sample by the probe or displacement of the probe within the sample. In operation, an optical instrument locates a test location on a sample and the objective testing module mechanically tests at the test location with the mechanical testing assembly at a macro scale or less. The mechanical testing assembly further determines one or more properties of the sample according to the mechanical test.
摘要翻译：客观测试模块包括被配置为与显微镜的目标转台耦合的模块基座。客观测试模块包括机械测试组件。机械测试组件被配置为以大规模或更小的尺寸机械测试样品，并且基于机械测试定量地确定样品的一个或多个特性。机械测试组件可选地包括探针和与探针耦合的一个或多个换能器。传感器测量通过探头施加到样品的力或样品内探针位移的一种或多种。在操作中，光学仪器将测试位置定位在样品上，并且客观测试模块在机械测试组件以大规模或更小的程度在测试位置进行机械测试。机械测试组件根据机械测试进一步确定样品的一个或多个特性。

10. 发明授权

US08898810B2 High throughout reproducible cantilever functionalization 有权
标题翻译：高度可重复的悬臂功能化
公开(公告)号：US08898810B2
公开(公告)日：2014-11-25
申请号：US14138305
申请日：2013-12-23
申请人： UT-Battelle, LLC
发明人： Barbara R. Evans , Ida Lee
IPC分类号： G01Q70/02 , G01Q70/18 , G01Q60/42 , G01Q70/06 , B82Y35/00
CPC分类号： G01Q60/42 , B82Y35/00 , G01Q70/02 , G01Q70/06 , G01Q70/18
摘要： A method for functionalizing cantilevers is provided that includes providing a holder having a plurality of channels each having a width for accepting a cantilever probe and a plurality of probes. A plurality of cantilever probes are fastened to the plurality of channels of the holder by the spring clips. The wells of a well plate are filled with a functionalization solution, wherein adjacent wells in the well plate are separated by a dimension that is substantially equal to a dimension separating adjacent channels of the plurality of channels. Each cantilever probe that is fastened within the plurality of channels of the holder is applied to the functionalization solution that is contained in the wells of the well plate.
摘要翻译：提供了一种用于功能化悬臂的方法，其包括提供具有多个通道的保持器，每个通道具有用于接收悬臂探头和多个探针的宽度。多个悬臂探针通过弹簧夹固定在保持器的多个通道上。孔板的孔填充有官能化溶液，其中孔板中的相邻孔被分开大致等于分离多个通道的相邻通道的尺寸的尺寸。固定在保持器的多个通道内的每个悬臂探头被施加到容纳在孔板的孔中的官能化溶液。

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