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    • 19. 发明授权
    • Control system for scanning probe microscope
    • 扫描探针显微镜控制系统
    • US08296856B2
    • 2012-10-23
    • US13147864
    • 2010-02-04
    • Andrew HumphrisDavid Catto
    • Andrew HumphrisDavid Catto
    • G01N13/16G01Q10/06G01Q30/04
    • G01Q10/065G01Q30/04
    • A control system (32, 75) is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system (34) that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.
    • 控制系统(32,75)用于扫描探针显微镜,其中测量数据在被描述为探针和样品相对于彼此移动的扫描图案内的位置被收集。 控制系统与位置检测系统(34)一起使用,位置检测系统(34)测量探针和样本中的至少一个的位置,使得它们的相对空间位置(x,y)被确定。 然后,测量数据可以在构建图像时与经验确定的空间位置相关联。 使用经验位置数据意味着图像质量不受显微镜扫描系统机械控制探针和样品的相对位置的能力的限制。