专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明授权

US08569937B1 Piezoelectric resonator with capacitive sense and/or force rebalance electrodes to control an amplitude of vibration 有权
标题翻译：具有电容感应和/或力重新平衡电极的压电谐振器来控制振动的振幅
公开(公告)号：US08569937B1
公开(公告)日：2013-10-29
申请号：US12835610
申请日：2010-07-13
申请人： Randall L. Kubena , Yook-Kong Yong
发明人： Randall L. Kubena , Yook-Kong Yong
IPC分类号： H03H9/125
CPC分类号： H03H9/1021 , H03H9/13 , H03H9/17
摘要： In an embodiment, a piezoelectric resonator configured for parametric amplification is disclosed. The piezoelectric resonator may include or comprise a piezoelectric member, and first and second resonator electrodes associated with the piezoelectric member and positioned to enable a first electric field to be generated in a first direction. The piezoelectric resonator may also include or comprise a parametric drive electrode associated with the piezoelectric member and positioned to enable a second electric field to be generated in a second direction.
摘要翻译：在一个实施例中，公开了一种配置用于参数放大的压电谐振器。压电谐振器可以包括或包括压电元件，以及与压电元件相关联并被定位成能够在第一方向上产生第一电场的第一和第二谐振器电极。压电谐振器还可以包括或包括与压电元件相关联的参数驱动电极，并被定位成能够在第二方向上产生第二电场。

12. 发明授权

US08476990B2 MEMS resonator devices 有权
标题翻译： MEMS谐振器装置
公开(公告)号：US08476990B2
公开(公告)日：2013-07-02
申请号：US13241638
申请日：2011-09-23
申请人： Bernhard Winkler , Mohsin Nawaz , Florian Schoen
发明人： Bernhard Winkler , Mohsin Nawaz , Florian Schoen
IPC分类号： H03H9/24 , H03H9/125
CPC分类号： H03H9/02244 , G04C3/12 , G04F5/063 , H03B5/30 , H03H3/0072 , H03H9/02433 , H03H9/02448 , H03H9/2431
摘要： Embodiments are related to micro-electromechanical system (MEMS) devices, systems and methods. In one embodiment, a MEMS resonating device comprises a resonator element configured to provide timing; and at least one passive temperature compensation structure arranged on the resonator element.
摘要翻译：实施例涉及微机电系统（MEMS）装置，系统和方法。在一个实施例中，MEMS谐振装置包括被配置为提供定时的谐振元件; 以及布置在谐振器元件上的至少一个被动温度补偿结构。

13. 发明授权

US08258893B2 Out-of-plane MEMS resonator with static out-of-plane deflection 有权
标题翻译：具有静态超平面偏转的平面外的MEMS谐振器
公开(公告)号：US08258893B2
公开(公告)日：2012-09-04
申请号：US13173432
申请日：2011-06-30
申请人： Emmanuel P. Quevy , David H. Bernstein , Mehrnaz Motiee
发明人： Emmanuel P. Quevy , David H. Bernstein , Mehrnaz Motiee
IPC分类号： H03H9/24 , H03H9/125 , H03H9/46
CPC分类号： H03H9/2457 , H03H3/0072 , H03H3/0076 , H03H9/02409 , H03H9/2463 , H03H2009/02299 , H03H2009/02307 , H03H2009/0233 , H03H2009/02472 , H03H2009/02511 , H03H2009/02519
摘要： A microelectromechanical systems (MEMS) device includes a tuning electrode, a drive electrode, and a resonator. The resonator is anchored to a substrate and is configured to resonate in response to a signal on the drive electrode. The MEMS device includes a tuning plate coupled to the resonator and positioned above the tuning electrode. The tuning plate is configured to adjust a resonant frequency of the resonator in response to a voltage difference between the resonator and the tuning electrode. In at least one embodiment of the MEMS device, the tuning plate and the tuning electrode are configured to adjust the resonant frequency of the resonator substantially independent of the signal on the drive electrode.
摘要翻译：微机电系统（MEMS）装置包括调谐电极，驱动电极和谐振器。谐振器被锚固到衬底并且被配置为响应于驱动电极上的信号而谐振。 MEMS器件包括耦合到谐振器并且定位在调谐电极上方的调谐板。调谐板被配置为响应谐振器和调谐电极之间的电压差来调节谐振器的谐振频率。在MEMS器件的至少一个实施例中，调谐板和调谐电极被配置为基本上独立于驱动电极上的信号来调节谐振器的谐振频率。

14. 发明授权

US08063720B2 MEMS resonators having resonator bodies therein with concave-shaped sides that support high quality factor and low temperature coefficient of resonant frequency 有权
标题翻译：其具有谐振器体的MEMS谐振器，其具有支撑高品质因数和谐振频率的低温度系数的凹形侧
公开(公告)号：US08063720B2
公开(公告)日：2011-11-22
申请号：US12570610
申请日：2009-09-30
申请人： Farrokh Ayazi , Ashwin Samarao
发明人： Farrokh Ayazi , Ashwin Samarao
IPC分类号： H03H9/24 , H03H9/125 , H03H9/46
CPC分类号： H03H9/02448 , H03H9/02259 , H03H9/2405 , H03H9/2463 , H03H2009/0244 , H03H2009/02496 , H03H2009/2415
摘要： A microelectromechanical (MEMs) resonator includes a concave bulk acoustic resonator (CBAR). One embodiment of a CBAR includes a substrate and a resonator body suspended over the substrate by a pair of fixed supports that attach to first and second opposing ends of the resonator body. The resonator body has a first concave-shaped side extending between the first and second ends of the resonator body and a second concave-shaped side extending opposite the first concave-shaped side. The resonator body may be configured to have a minimum spacing of λ/2 between the first and second concave-shaped sides, where λ is a wavelength associated with a resonant frequency of said resonator body.
摘要翻译：微机电（MEMs）谐振器包括凹体积声共振器（CBAR）。 CBAR的一个实施例包括通过附接到谐振器本体的第一和第二相对端的一对固定支撑件悬挂在衬底上的衬底和谐振器体。谐振器本体具有在谐振器本体的第一端和第二端之间延伸的第一凹形侧和与第一凹入侧相对延伸的第二凹入侧。谐振器体可以被配置为在第一和第二凹入侧之间具有λ/ 2的最小间隔，其中λ是与所述谐振器本体的谐振频率相关联的波长。

15. 发明授权

US08040207B2 MEMS resonator devices with a plurality of mass elements formed thereon 有权
标题翻译：具有形成在其上的多个质量元件的MEMS谐振器装置
公开(公告)号：US08040207B2
公开(公告)日：2011-10-18
申请号：US12354029
申请日：2009-01-15
申请人： Bernhard Winkler , Mohsin Nawaz , Florian Schoen
发明人： Bernhard Winkler , Mohsin Nawaz , Florian Schoen
IPC分类号： H03H9/24 , H03H9/125
CPC分类号： H03H9/02244 , G04C3/12 , G04F5/063 , H03B5/30 , H03H3/0072 , H03H9/02433 , H03H9/02448 , H03H9/2431
摘要： The invention relates to MEMS devices. In one embodiment, a micro-electromechanical system (MEMS) device comprises a resonator element having a circumference, an anchor region, and a plurality of beam elements coupling the anchor region and the resonator element. Further embodiments comprise additional devices, systems and methods.
摘要翻译：本发明涉及MEMS装置。在一个实施例中，微机电系统（MEMS）装置包括具有圆周，锚定区域和耦合锚定区域和谐振器元件的多个梁元件的谐振元件。另外的实施例包括附加的装置，系统和方法。

16. 发明授权

US07982364B2 Surface acoustic wave device and method for manufacturing the same 有权
标题翻译：表面声波装置及其制造方法
公开(公告)号：US07982364B2
公开(公告)日：2011-07-19
申请号：US11887589
申请日：2006-03-30
申请人： Ryouichi Takayama , Mitsuhiro Furukawa , Atsushi Takano
发明人： Ryouichi Takayama , Mitsuhiro Furukawa , Atsushi Takano
IPC分类号： H03H9/125
CPC分类号： H03H9/1092 , Y10T29/42
摘要： A surface acoustic wave device includes a piezoelectric substrate and a lid spaced apart from each other oppositely by a specific interval. A comb electrode and a pad electrode are provided to the piezoelectric substrate on a main surface on the lid side, and an external terminal is provided to the lid on a surface on the opposite side to the piezoelectric substrate. Further, the surface acoustic wave device includes a connection electrode that electrically connects the pad electrode and the external terminal, and an insulator interposed between at least one of the main surface of the piezoelectric substrate and the pad electrode and the lid.
摘要翻译：表面声波装置包括压电基板和彼此相对间隔一定间隔的盖。在盖侧的主表面上的压电基板上设置梳状电极和焊盘电极，在与压电基板相反的一侧的表面上设置有外部端子。此外，表面声波装置包括：电连接焊盘电极和外部端子的连接电极和插入在压电基板的主表面和焊盘电极和盖中的至少一个之间的绝缘体。

17. 发明授权

US07932792B2 Nanotube device 有权
标题翻译：纳米管设备
公开(公告)号：US07932792B2
公开(公告)日：2011-04-26
申请号：US12035866
申请日：2008-02-22
申请人： Risto Kaunisto , Jari Kinaret , Eleanor Campbell , Andreas Isacsson , SangWook Lee , Anders Eriksson
发明人： Risto Kaunisto , Jari Kinaret , Eleanor Campbell , Andreas Isacsson , SangWook Lee , Anders Eriksson
IPC分类号： H03H9/05 , H03H9/125 , H03H9/24 , H01L29/06 , H01L29/10 , H01L29/12
CPC分类号： H01L51/0545 , B82Y10/00 , H01L51/0048 , H01L51/0516 , Y10S977/732 , Y10S977/742 , Y10S977/932 , Y10S977/936
摘要： A device comprising a nanotube configured as a resonator, a source electrode, a gate electrode, a drain electrode and at least one impeding element, wherein the at least one impeding element is configured to minimize energy loss due to a contact resistance between at least the source electrode and the nanotube.
摘要翻译：一种包括构造为谐振器的纳米管，源电极，栅电极，漏电极和至少一个阻碍元件的器件，其中所述至少一个阻碍元件被配置为使由于至少源电极和纳米管。

18. 发明授权

US07859365B2 Low frequency process-variation-insensitive temperature-stable micromechanical resonators 有权
标题翻译：低频过程变化不敏感的温度稳定微机械谐振器
公开(公告)号：US07859365B2
公开(公告)日：2010-12-28
申请号：US12001946
申请日：2007-12-13
申请人： Gavin Kar-Fai Ho , Farrokh Ayazi
发明人： Gavin Kar-Fai Ho , Farrokh Ayazi
IPC分类号： H03H9/24 , H03H9/125 , H03H9/46 , H03H3/013 , H03B5/30
CPC分类号： H03H9/2463 , H03H3/0076 , H03H3/0077 , H03H9/02448 , H03H2009/02496
摘要： Disclosed are micromechanical resonators having features that compensate for process variations and provide improved inherent temperature stability. Exemplary resonators may comprise comb drive resonators or parallel-plate drive resonators. The resonators comprise a (silicon-on-insulator) substrate with resonator apparatus formed therein. The resonator apparatus has one or more anchors connected to the substrate, at least one excitation/sense port that is electrically insulated from the substrate, and a resonator. The resonator comprises one or more flexural members connected to the one or more anchors that are separated from the substrate and separated from the excitation/sense port by gaps. A mass is coupled to flexural members, is separated from the substrate, and comprises a grid. Process compensation is achieved using a resonator mass in the form of a grid of lines that form holes or lines through the mass, wherein widths of lines of the grid are approximately ⅓ the width of the flexural members. Temperature stability is provided using silicon dioxide on at least one of the surfaces of the flexural members.
摘要翻译：公开了具有补偿工艺变化并提供改进的固有温度稳定性的特征的微机械谐振器。示例性谐振器可以包括梳状驱动谐振器或平行板驱动谐振器。谐振器包括其上形成有谐振器装置的（绝缘体上硅）衬底。谐振器装置具有连接到衬底的一个或多个锚固件，与衬底电绝缘的至少一个激励/感测端口和谐振器。谐振器包括连接到一个或多个锚固件的一个或多个弯曲构件，所述锚固件与衬底分离并且通过间隙与激励/感测端口分离。质量联接到弯曲构件，与基底分离，并且包括网格。使用形成线形网格形式的谐振器质量来实现过程补偿，其中网格线的宽度大约是弯曲构件宽度的1/3。使用二氧化硅在弯曲构件的至少一个表面上提供温度稳定性。

19. 发明申请

US20090195330A1 VIBRATOR, RESONATOR USING THE SAME AND ELECTROMECHANICAL FILTER USING THE SAME 失效
标题翻译：振动器，使用它的谐振器和使用它的电动过滤器
公开(公告)号：US20090195330A1
公开(公告)日：2009-08-06
申请号：US12304602
申请日：2007-06-14
申请人： Kunihiko Nakamura , Michiaki Matsuo , Yoshito Nakanishi , Akinori Hashimura
发明人： Kunihiko Nakamura , Michiaki Matsuo , Yoshito Nakanishi , Akinori Hashimura
IPC分类号： H03H9/24 , H03H9/125
CPC分类号： H03H9/2463 , H03H3/0072 , H03H9/02244 , H03H9/1057 , H03H9/2405 , H03H9/2457 , H03H2009/02314 , H03H2009/02519
摘要： An object is to provide a resonator and a vibrator with a high Q value in which dissipation of vibration energy in vibration of the vibrator is small, and a thickness of a support part of the vibrator of a beam structure is made thicker than a thickness of the vibrator and the support part is formed in axisymmetry with respect to a length direction of a beam. By this configuration, brittleness of the support part is improved and loss of vibration energy from the support part is reduced and also loss of vibration energy resulting from surface roughness of a surface of the vibrator can be reduced, so that a resonator having a high Q value can be provided.
摘要翻译：本发明的目的是提供一种谐振器和具有高Q值的振动器，其中振动器的振动中的振动能量的耗散小，并且梁结构的振动器的支撑部分的厚度比厚度振动器和支撑部分相对于梁的长度方向以轴对称形成。通过这种构造，支撑部件的脆性得到改善，并且来自支撑部件的振动能量的损失减小，并且还可以减小由振动器的表面的表面粗糙度引起的振动能量的损失，使得具有高Q值的谐振器可以提供价值。

20. 发明授权

US07545238B2 Serrated MEMS resonators 有权
公开(公告)号：US07545238B2
公开(公告)日：2009-06-09
申请号：US11613886
申请日：2006-12-20
申请人： Paul Merritt Hagelin , David Raymond Pedersen
发明人： Paul Merritt Hagelin , David Raymond Pedersen
IPC分类号： H03H9/125 , H03H9/24 , H03B5/30 , H03H9/46
CPC分类号： H03H9/02259 , H03H9/02244 , H03H9/02433 , H03H9/2405 , H03H9/2484 , H03H2009/0248 , H03H2009/02496
摘要： One embodiment of the present invention sets forth a serrated tooth actuator for driving MEMS resonator structures. The actuator includes a fixed drive electrode having a serrated tooth surface opposing a MEMS resonator arm also having a serrated tooth surface, where the MEMS resonator arm is configured to rotate towards the drive electrode when an AC signal is applied to the drive electrode. Such a configuration permits higher amplitude signals to be applied to the drive electrode without the performance of the actuator being compromised by nonlinear effects. In addition, the serrated tooth configuration enables a sufficiently high actuating force to be maintained even though the distance traversed by the MEMS resonator arm during operation is quite small. Further, the serrated configuration allows a MEMS resonator system to withstand larger fluctuations in voltage and larger substrate stresses without experiencing a substantial shift in resonant frequency.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式