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21. 发明申请

US20150141666A1 Low Cost Synthesis of Single Material Bifunctional Nonprecious Catalyst for Electrochemical Devices 审中-公开
标题翻译：低成本合成单材料双功能非贵重催化剂用于电化学设备
公开(公告)号：US20150141666A1
公开(公告)日：2015-05-21
申请号：US14609966
申请日：2015-01-30
申请人： Zhongwei CHEN , Aiping YU , Fathy Mohamed HASSAN
发明人： Zhongwei CHEN , Aiping Yu , Fathy Mohamed HASSAN
IPC分类号： H01M4/96
CPC分类号： H01M4/96 , C01B32/182 , C01B32/194 , C01B32/23 , H01M4/8615 , H01M12/06
摘要： A bifunctional catalyst for catalyzing both an oxygen reduction reaction and an oxygen evolution reaction is provided, wherein the catalyst comprises a doped graphene backbone having thiol functional groups. A method for producing a bifunctional catalyst is also provided.
摘要翻译：提供了用于催化氧还原反应和析氧反应两者的双功能催化剂，其中催化剂包含具有硫醇官能团的掺杂石墨烯骨架。还提供了制备双功能催化剂的方法。

22. 发明授权

US09000394B2 Multi-axis magnetic lens for focusing a plurality of charged particle beams 有权
标题翻译：用于聚焦多个带电粒子束的多轴磁性透镜
公开(公告)号：US09000394B2
公开(公告)日：2015-04-07
申请号：US13464261
申请日：2012-05-04
申请人： Weiming Ren , Zhongwei Chen
发明人： Weiming Ren , Zhongwei Chen
IPC分类号： H01J37/14
CPC分类号： H01J37/14 , B82Y10/00 , B82Y40/00 , H01J3/20 , H01J37/141 , H01J37/145 , H01J37/3177 , H01J2237/1035 , H01J2237/1415 , H01J2237/31774
摘要： The present invention provides two ways to form a special permeability-discontinuity unit inside every sub-lens of a multi-axis magnetic lens, which either has a simpler configuration or has more flexibility in manufacturing such as material selection and mechanical structure. Accordingly several types of multi-axis magnetic lens are proposed for various applications. One type is for general application such as a multi-axis magnetic condenser lens or a multi-axis magnetic transfer lens, another type is a multi-axis magnetic non-immersion objective which can require a lower magnetomotive force, and one more type is a multi-axis magnetic immersion objective lens which can generate smaller aberrations. Due to using permeability-discontinuity units, every multi-axis magnetic lens in this invention can also be electrically excited to function as a multi-axis electromagnetic compound lens so as to further reduce aberrations thereof and/or realize electron beam retarding for low-voltage irradiation on specimen.
摘要翻译：本发明提供了在多轴磁性透镜的每个子透镜内部形成特殊的渗透率不连续单元的两种方式，其具有更简单的构造或者在诸如材料选择和机械结构的制造中具有更大的灵活性。因此，针对各种应用提出了几种类型的多轴磁性透镜。一种用于一般应用，例如多轴磁聚焦透镜或多轴磁转移透镜，另一种类型是可以要求较低磁动势的多轴磁性非浸没物镜，另一种类型是可以产生较小像差的多轴磁浸物镜。由于使用导磁率不连续单位，本发明中的每个多轴磁性透镜也可以被电激励以用作多轴电磁复合透镜，以便进一步降低其像差和/或实现低电压的电子束延迟对样品照射

23. 发明授权

US08274046B1 Monochromator for charged particle beam apparatus 有权
标题翻译：带电粒子束装置的单色器
公开(公告)号：US08274046B1
公开(公告)日：2012-09-25
申请号：US13111851
申请日：2011-05-19
申请人： Weiming Ren , Zhongwei Chen
发明人： Weiming Ren , Zhongwei Chen
IPC分类号： G21K1/08 , H01J37/21 , H01J37/20
CPC分类号： H01J37/28 , G21K1/093 , H01J37/05 , H01J2237/049 , H01J2237/057 , H01J2237/153
摘要： This invention provides a monochromator for reducing energy spread of a primary charged particle beam in charged particle apparatus, which comprises a beam adjustment element, two Wien-filter type dispersion units and an energy-limit aperture. In the monochromator, a double symmetry in deflection dispersion and fundamental trajectory along a straight optical axis is formed, which not only fundamentally avoids incurring off-axis aberrations that actually cannot be compensated but also ensures the exit beam have a virtual crossover which is stigmatic, dispersion-free and inside the monochromator. Therefore, using the monochromator in SEM can reduce chromatic aberrations without additionally incurring adverse impacts, so as to improve the ultimate imaging resolution. The improvement of the ultimate imaging resolution will be more distinct for Low-Voltage SEM and the related apparatuses which are based on LVSEM principle, such as the defect inspection and defect review in semiconductor yield management. The present invention also provides two ways to build a monochromator into a SEM, one is to locate a monochromator between the electron source and the condenser, and another is to locate a monochromator between the beam-limit aperture and the objective. The former provides an additional energy-angle depending filtering, and obtains a smaller effective energy spread.
摘要翻译：本发明提供一种用于减少带电粒子装置中的初级带电粒子束的能量扩散的单色仪，其包括光束调节元件，两个维恩滤波器型色散单元和能量限制孔径。在单色仪中，形成沿着直线光轴的偏转色散和基本轨迹的双重对称性，其不仅从根本上避免了实际上不能被补偿的偏轴像差，而且还确保出射光束具有虚拟的虚拟交叉，无色分离和单色仪内部。因此，在SEM中使用单色仪可以减少色差，而不会产生不利影响，从而提高最终的成像分辨率。对于低电压SEM和基于LVSEM原理的相关设备，如半导体产量管理中的缺陷检查和缺陷检查，最终成像分辨率的提高将会更加明显。本发明还提供了在扫描电镜中构建单色仪的两种方法，一种是在电子源和电容器之间定位单色仪，另一种是在光束极限孔径和物镜之间定位单色仪。前者提供额外的能量角取决于滤波，并获得较小的有效能量扩展。

24. 发明申请

US20110260055A1 Dynamic Focus Adjustment with Optical Height Detection Apparatus in Electron Beam system 有权
标题翻译：电子束系统中光学高度检测装置的动态聚焦调整
公开(公告)号：US20110260055A1
公开(公告)日：2011-10-27
申请号：US12764902
申请日：2010-04-21
申请人： JOE WANG , VAN-DUC NGUYEN , YI-XIANG WANG , JACK JAU , ZHONGWEI CHEN
发明人： JOE WANG , VAN-DUC NGUYEN , YI-XIANG WANG , JACK JAU , ZHONGWEI CHEN
IPC分类号： H01J37/21 , G01N23/22 , G01B11/24 , H01J37/28
CPC分类号： G01B11/22 , G01N23/04 , G01N23/20058 , G01N2223/32 , G01N2223/3301 , G01N2223/3302 , G01N2223/646 , H01J37/21 , H01J37/28 , H01J2237/216 , H01J2237/2482 , H01J2237/2487
摘要： The present invention generally relates to dynamic focus adjustment for an image system. With the assistance of a height detection sub-system, present invention provides an apparatus and methods for micro adjusting an image focusing according the specimen surface height variation by altering the field strength of an electrostatic lens between objective lens and sample stage/or a bias voltage applied to the sample surface. Merely by way of example, the invention has been applied to a scanning electron inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as observation tool with a height detection apparatus.
摘要翻译：本发明一般涉及图像系统的动态聚焦调整。本发明借助于高度检测子系统，提供了一种用于通过改变物镜和样品台之间的静电透镜的场强/或偏置电压来根据样本表面高度变化来微调整图像聚焦的装置和方法应用于样品表面。仅作为示例，本发明已经应用于扫描电子检查系统。但是应当认识到，本发明可以应用于使用带有带电粒子束的其它系统作为具有高度检测装置的观察工具。

25. 发明申请

US20110139996A1 MULTI-AXIS MAGNETIC LENS 有权
标题翻译：多轴磁性镜片
公开(公告)号：US20110139996A1
公开(公告)日：2011-06-16
申请号：US12636007
申请日：2009-12-11
申请人： ZHONGWEI CHEN , WEIMING REN , KENICHI KANAI , XUEDONG LIU
发明人： ZHONGWEI CHEN , WEIMING REN , KENICHI KANAI , XUEDONG LIU
IPC分类号： H01J1/50
CPC分类号： H01J37/141 , H01J2237/1405
摘要： The present invention relates to a multi-axis magnetic lens for a charged particle beam system. The apparatus eliminates the undesired non-axisymmetric transverse magnetic field components from the magnetic field generated by a common excitation coil and leaves the desired axisymmetric field for focusing each particle beam employed within the system.
摘要翻译：本发明涉及带电粒子束系统的多轴磁透镜。该装置从由公共的励磁线圈产生的磁场中消除不期望的非轴对称的横向磁场分量，并且留下用于聚焦在系统内采用的每个粒子束的期望的轴对称场。

26. 发明申请

US20100159305A1 Carbon based electrocatalysts for fuel cells 失效
标题翻译：用于燃料电池的碳基电催化剂
公开(公告)号：US20100159305A1
公开(公告)日：2010-06-24
申请号：US11376768
申请日：2006-03-15
申请人： Yushan Yan , Xin Wang , Wenzhen Li , Mahesh Waje , Zhongwei Chen , William Goddard , Wei-Qiao Deng
发明人： Yushan Yan , Xin Wang , Wenzhen Li , Mahesh Waje , Zhongwei Chen , William Goddard , Wei-Qiao Deng
IPC分类号： H01M4/92 , H01M4/88
CPC分类号： H01M4/881 , H01M4/8605 , H01M4/92 , H01M4/926 , H01M8/1004 , H01M8/1011 , Y02E60/523
摘要： Novel proton exchange membrane fuel cells and direct methanol fuel cells with nanostructured components are configured with higher precious metal utilization rate at the electrodes, higher power density, and lower cost. To form a catalyst, platinum or platinum-ruthenium nanoparticles are deposited onto carbon-based materials, for example, single-walled, dual-walled, multi-walled and cup-stacked carbon nanotubes. The deposition process includes an ethylene glycol reduction method. Aligned arrays of these carbon nanomaterials are prepared by filtering the nanomaterials with ethanol. A membrane electrode assembly is formed by sandwiching the catalyst between a proton exchange membrane and a diffusion layer that form a first electrode. The second electrode may be formed using a conventional catalyst. The several layers of the MEA are hot pressed to form an integrated unit. Proton exchange membrane fuel cells and direct methanol fuel cells are developed by stacking the membrane electrode assemblies in a conventional manner.
摘要翻译：新型质子交换膜燃料电池和具有纳米结构组分的直接甲醇燃料电池配置在电极上的贵金属利用率更高，功率密度更高，成本更低。为了形成催化剂，将铂或铂 - 钌纳米颗粒沉积在碳基材料上，例如单壁，双壁，多壁和杯堆叠碳纳米管。沉积工艺包括乙二醇还原法。通过用乙醇过滤纳米材料来制备这些碳纳米材料的对准阵列。通过将催化剂夹在质子交换膜和形成第一电极的扩散层之间形成膜电极组件。第二电极可以使用常规的催化剂形成。 MEA的几层被热压形成一个集成的单元。质子交换膜燃料电池和直接甲醇燃料电池通过以常规方式堆叠膜电极组件来开发。

27. 发明申请

US20100150429A1 E-BEAM DEFECT REVIEW SYSTEM 有权
标题翻译：电子束缺陷评估系统
公开(公告)号：US20100150429A1
公开(公告)日：2010-06-17
申请号：US12335458
申请日：2008-12-15
申请人： Jack JAU , Zhongwei CHEN , Yi Xiang WANG , Chung-Shih PAN , Joe WANG , Xuedong LIU , Weiming REN , Wei FANG
发明人： Jack JAU , Zhongwei CHEN , Yi Xiang WANG , Chung-Shih PAN , Joe WANG , Xuedong LIU , Weiming REN , Wei FANG
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G01N23/04 , G01N2223/102 , G01N2223/426 , G01N2223/611 , G06T2207/10061 , G06T2207/30148
摘要： The present invention relates to a defect review system, and/or particularly, to an apparatus and method of defect review sampling, review method and classification on a semiconductor wafer or a pattern lithography reticle during integrated circuit fabrication. These objects are achieved in comparing a reviewed image with a reference image pick-up through a smart sampling filter. A clustering computer system base on high speed network will provide data cache and save operation time and memory. A smart review sampling filter automatically relocate abnormal pattern or defects and classify the device location extracted from design database and/or from golden die image on the same substrate. The column of the present defect review system is comprised of the modified SORIL type objective lens. This column provides solution of improving throughput during sample review, material identification better image quality, and topography image of defect. One embodiment of the present invent adopts an optical auto focusing system to compromise micro height variation due wafer surface topography. And another embodiment adopts surface charge control system to regulate the charge accumulation due to electron irradiation during the review process.
摘要翻译：本发明涉及一种缺陷评估系统，和/或特别涉及在集成电路制造期间对半导体晶片或图案光刻掩模版进行缺陷评估抽样，评估方法和分类的装置和方法。通过智能采样滤波器将经检查的图像与参考图像拾取进行比较，实现了这些目的。基于高速网络的集群计算机系统将提供数据缓存，节省操作时间和内存。智能检查采样过滤器自动重新定位异常模式或缺陷，并将从设计数据库中提取的设备位置和/或从相同基板上的金色模具图像分类。本缺陷检查系统的列由改进的SORIL型物镜组成。该栏提供了在样本审查期间提高吞吐量，材料识别更好的图像质量和缺陷的地形图像的解决方案。本发明的一个实施例采用光学自动聚焦系统来破坏由晶片表面形貌引起的微高度变化。另一个实施例采用表面电荷控制系统来调节在检查过程中由电子辐射引起的电荷累积。

28. 发明授权

US11257659B1 Electrode assembly, electronic apparatus/device using the same, and apparatus of charged-particle beam such as electron microscope using the same 有权
公开(公告)号：US11257659B1
公开(公告)日：2022-02-22
申请号：US17302820
申请日：2021-05-12
申请人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
发明人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
IPC分类号： H01J37/28 , H01J37/153 , H01J37/147 , H01J37/14
摘要： The present invention provides an electrode assembly comprising two or more electrodes arranged around a primary axis forming a non-cylindrical channel space. General electronic apparatus/device, particularly apparatus of charged-particle beam such as electron microscope, may use the electrode assembly to create an optimized pattern of electrical field within non-cylindrical channel space. When the electrode assembly is used as a beam deflector in a magnetic objective lens, the electrical field within the central channel space can be co-optimized with the magnetic field for reducing aberration(s) such as distortion, field curvature, astigmatism, and chromatic aberration, after the beam passes through the central channel space.

29. 发明授权

US11094499B1 Apparatus of charged-particle beam such as electron microscope comprising sliding specimen table within objective lens 有权
公开(公告)号：US11094499B1
公开(公告)日：2021-08-17
申请号：US17178249
申请日：2021-02-18
申请人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
发明人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
IPC分类号： H01J37/20 , H01J37/26
摘要： The present invention provides an apparatus of charged-particle beam such as an electron microscope including a specimen table that can slide on a planar surface around the lower pole piece of the objective lens. The specimen table is confined in a specimen stage having one elastic protrusion and one or more elastic force receiving parts (e.g three permanent protrusions) that contact and press the table. When the specimen is under microscopic examination, disturbing vibration cannot generate a force sufficient to overcome the limiting friction between the specimen table and the planar surface of the objective lens. The invention exhibits numerous technical merits such as minimal or zero vibration noise, and improved image quality, among others.

30. 发明授权

US10749171B2 Method for the preparation of anodes for lithium batteries 有权
公开(公告)号：US10749171B2
公开(公告)日：2020-08-18
申请号：US15548549
申请日：2016-02-05
申请人： Zhongwei Chen , Aiping Yu , Fathy Mohamed Hassan
发明人： Zhongwei Chen , Aiping Yu , Fathy Mohamed Hassan
IPC分类号： H01M4/36 , H01M4/04 , H01M4/133 , H01M4/1395 , H01M4/1393 , H01M4/62 , H01M4/134 , H01M10/052 , H01M4/136 , H01M4/1397 , H01M4/583 , H01M4/66 , H01M10/0525 , H01M4/02
摘要： A method for preparing an electrode for use in lithium batteries and the resulting electrodes are described The method comprises coating a slurry of silicon, sulfur doped graphene and polyacrylonitrile on a current collector followed by sluggish heat treatment.

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