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    • 24. 发明申请
    • Line scan sequential lateral solidification of thin films
    • 线扫描顺序横向固化薄膜
    • US20060254500A1
    • 2006-11-16
    • US11293655
    • 2005-12-02
    • James ImPaul Van Der Wilt
    • James ImPaul Van Der Wilt
    • C30B21/04C30B13/00C30B28/08
    • H01L21/02686B23K26/0738C30B13/00C30B13/24C30B29/06H01L21/02532H01L21/02678H01L21/2026H01L27/1285H01L27/1296Y10T117/10Y10T117/1004Y10T117/1008
    • A polycrystalline film is prepared by (a) providing a substrate having a thin film disposed thereon, said film capable of laser-induced melting, (b) generating a sequence of laser pulses having a fluence that is sufficient to melt the film throughout its thickness in an irradiated region, each pulse forming a line beam having a predetermined length and width, said width sufficient to prevent nucleation of solids in a portion of the thin film that is irradiated by the laser pulse, (c) irradiating a first region of the film with a first laser pulse to form a first molten zone, said first molten zone demonstrating a variation in width along its length to thereby define a maximum width (Wmax) and a minimum width (Wmin), wherein the first molten zone crystallizes upon cooling to form one or more laterally grown crystals, (d) laterally moving the film in the direction of lateral growth a distance that is greater than about one-half Wmax and less than Wmin; and (e) irradiating a second region of the film with a second laser pulse to form a second molten zone having a shape that is substantially the same as the shape of the first molten zone, wherein the second molten zone crystallizes upon cooling to form one or more laterally grown crystals that are elongations of the one or more crystals in the first region.
    • 通过(a)提供具有设置在其上的薄膜的基板,所述膜能够进行激光诱导熔化,(b)产生具有足以使膜在整个厚度上熔化的能量密度的激光脉冲序列来制备多晶膜 在照射区域中,每个脉冲形成具有预定长度和宽度的线束,所述宽度足以防止由激光脉冲照射的薄膜部分中的固体成核,(c)照射第一区域 薄膜具有第一激光脉冲以形成第一熔融区,所述第一熔融区表现出沿其长度的宽度变化,从而限定最大宽度(W max)和最小宽度(W max 且小于W mi n
    • 26. 发明申请
    • Device for the production of crystal rods having a defined cross-section and column-shaped polycrystallization structure by means of floating-zone continuous crystallization
    • 用于通过浮区连续结晶生产具有限定横截面和柱状多结晶结构的晶棒的装置
    • US20050188918A1
    • 2005-09-01
    • US10513320
    • 2003-05-06
    • Nikolai AbrosimovHelge Riemann
    • Nikolai AbrosimovHelge Riemann
    • B22D11/00B22D11/01C01B33/02C30B13/00C30B13/20C30B15/00C30B15/08H01L21/208C30B1/00
    • C30B13/20C30B15/08C30B29/06Y10T117/10Y10T117/1052Y10T117/1056
    • The invention relates to a device for the production of crystal rods having a defined cross-section and a column-shaped polycrystalline structure by means of floating-zone continuous crystallization, comprising at least one crucible filled with crystalline material, provided with a central deviation for transporting the contents of the crucible to a growing crystal rod arranged below the crucible, whereby the central deviation plunges into the melt meniscus, also comprising means for continuously adjustable provision of crystalline material to the crucible, and means for simultaneously feeding the melt energy and adjusting the crystallization front. In order to produce crystal rods having a defined diameter and a column-shaped polycrystalline structure using heating means which are technically less complex, while at the same time guaranteeing high crystallization rates and stable phase definition, the means for simultaneously feeding the melt energy and adjusting the crystallization front on the growing crystal rod (8) is a flat induction coil (5) which has an opening, said induction coil (5) being arranged at a distance from the crucible (4) and/or being vertically moveable in relation to the crystallization front.
    • 本发明涉及一种用于通过浮区连续结晶生产具有限定横截面的晶棒和柱状多晶结构的装置,包括至少一个填充有结晶材料的坩埚,该坩埚具有中心偏差 将坩埚的内容物输送到布置在坩埚下方的生长晶体杆上,由此中心偏离进入熔体弯月面,还包括用于连续调节地向坩埚提供结晶材料的装置,以及用于同时进料熔体能量和调节 结晶前沿。 为了制造具有规定直径的晶棒和使用技术上较不复杂的加热装置的柱状多晶结构,同时保证高结晶速率和稳定的相位定义,同时供给熔体能量并调节 生长晶棒(8)上的结晶前沿是具有开口的平坦感应线圈(5),所述感应线圈(5)布置在与坩埚(4)相距一定距离处和/或可相对于 结晶前沿。