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71. 发明授权

US5983712A Microscope for compliance measurement 失效
标题翻译：显微镜符合性测量
公开(公告)号：US5983712A
公开(公告)日：1999-11-16
申请号：US905815
申请日：1997-08-04
申请人： Stuart M. Lindsay , Tianwei Jing , Wenhai Han
发明人： Stuart M. Lindsay , Tianwei Jing , Wenhai Han
IPC分类号： G01B7/34 , B81B3/00 , G01B7/00 , G01B21/30 , G01Q10/06 , G01Q30/14 , G01Q60/24 , G01Q60/32 , G01Q60/38 , G01Q70/06 , G01B5/28
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q10/06 , G01Q30/14 , Y10S977/849 , Y10S977/851 , Y10S977/852 , Y10S977/863 , Y10S977/872 , Y10S977/875 , Y10S977/881 , Y10S977/934
摘要： An atomic force microscope and method of operation are provided and include a force sensing probe tip adapted to be brought into close proximity with a sample surface, a scanning element for generating relative movement between the probe tip and the sample surface, a device for generating a magnetic field to cause deflection of the probe tip, a driver for the device, the driver including a source of alternating current and a source of a second current of a controlled magnitude, and a detector for detecting the position of the probe tip. In a preferred mode of operation, two signals, one of alternating current and the other of a fixed, but variable, current, are applied to cause a displacement of the time-average position of the probe tip.
摘要翻译：提供了一种原子力显微镜和操作方法，其包括适于与样品表面紧密接近的力传感探针尖端，用于产生探针尖端和样品表面之间的相对运动的扫描元件，用于产生磁场以引起探针尖端的偏转，用于该装置的驱动器，该驱动器包括交流电流源和受控量级的第二电流源，以及用于检测探头尖端的位置的检测器。在优选的操作模式中，施加两个信号，一个交流电流，另一个是固定的但是可变的电流，以引起探头尖端的时间平均位置的位移。

72. 发明授权

US5955660A Method of controlling probe microscope 失效
标题翻译：控制探针显微镜的方法
公开(公告)号：US5955660A
公开(公告)日：1999-09-21
申请号：US763674
申请日：1996-12-06
申请人： Akihiko Honma
发明人： Akihiko Honma
IPC分类号： G01B21/30 , G01B11/30 , G01N37/00 , G01Q20/02 , G01Q60/24 , G01Q60/32 , G01Q60/38 , H01J37/28
CPC分类号： G01Q10/065 , B82Y35/00 , G01Q60/32 , Y10S977/851
摘要： An improved stable feedback control circuit for a scanning probe microscope has a vibrationally driven cantilever having a probe mounted at a distal end thereof at a frequency near the resonance frequency thereof and a light detector for measuring deflection of the cantilever in response to a repulsive force acting between the probe and a surface of a sample and producing a pair of output signals which vary depending upon deflection of the cantilever and a detected signal having the vibrating frequency of the cantilever as a fundamental frequency component thereof, a method for controlling the probe microscope comprising the steps of: producing a plurality of input signals for the feedback control circuit comprising a first input signal equivalent to the root-mean-square value of the detected signal and a second input signal equivalent to a difference between, or the sum of, the pair of output signals of the light detector, and adding the first and second input signals to produce a feedback control signal used for maintaining a constant distance between the probe and the sample surface.
摘要翻译：用于扫描探针显微镜的改进的稳定反馈控制电路具有振动驱动的悬臂，其具有以其接近谐振频率的频率安装在其远端处的探头和用于响应于作用的排斥力来测量悬臂的偏转的光检测器在探针和样品的表面之间产生一对根据悬臂的偏转而变化的输出信号和具有作为其基本频率分量的悬臂的振动频率的检测信号，用于控制探针显微镜的方法包括：步骤：产生反馈控制电路的多个输入信号，该输入信号包括与检测信号的均方根值相当的第一输入信号和等于或小于或等于光检测器的一对输出信号，并且添加第一和第二输入信号以产生费用 dback控制信号用于保持探头和样品表面之间的恒定距离。

73. 发明授权

US5925465A Carbon material originating from graphite and method of producing same 失效
标题翻译：来自石墨的碳材料及其制造方法
公开(公告)号：US5925465A
公开(公告)日：1999-07-20
申请号：US784523
申请日：1997-01-17
申请人： Thomas Ebbesen , Hidefumi Hiura , Katsumi Tanigaki
发明人： Thomas Ebbesen , Hidefumi Hiura , Katsumi Tanigaki
IPC分类号： B82B3/00 , C01B31/04 , D01F9/12 , G01N27/00 , G01N37/00 , G01Q30/10 , G01Q60/00 , G01Q60/24 , G01Q80/00 , G11B9/00 , H01L29/16 , H01L51/00 , H01L51/30 , H01S5/10 , H01S5/34 , B32B9/00
CPC分类号： H01S5/341 , B82B3/00 , B82Y10/00 , B82Y20/00 , B82Y30/00 , B82Y40/00 , C01B31/04 , C01B31/0484 , D01F9/12 , G11B9/1463 , H01L29/16 , H01L29/1602 , H01L51/0046 , C01B2204/00 , C01B2204/02 , G01Q80/00 , G11B9/149 , H01L51/0048 , H01L51/0052 , H01S5/1042 , H01S5/3027 , Y10S977/70 , Y10S977/855 , Y10S977/858 , Y10T428/30
摘要： A novel carbon material is obtained by bending at least one carbon atom layer of graphite in at least one selected region along either, or both, of lines I and II in FIG. 1. The bending can be accomplished by scanningly picking the carbon atom layer(s) with a probe of an atomic force microscope or another scanning microscope. The obtained carbon material has at least one round bend having a width of 0.1-10 nm and at least one flap region having a triangular, rectangular or still differently polygonal shape in plan view. When the carbon atom layer(s) is bent with very small radii of curvature, a finely striped ridge-and-groove structure appears in the round bend. The physical properties of the obtained carbon material are uniquely determined by the direction(s) of bending, width of each bend, shape and size of each flap region and the stripe pitch of the ridge-and-groove structure.
摘要翻译：通过在图1中的I和II线中的至少一个选择区域中弯曲至少一个石墨碳原子层获得新的碳材料。弯曲可以通过用原子力显微镜或另一扫描显微镜的探针扫描地挑选碳原子层来实现。所获得的碳材料具有至少一个具有0.1-10nm的宽度的圆形弯曲部，并且在平面图中具有至少一个具有三角形，矩形或仍然不同的多边形形状的折翼区域。当碳原子层以非常小的曲率半径弯曲时，在圆形弯曲部中出现细微的条状的脊 - 沟结构。所获得的碳材料的物理性质由弯曲方向，每个弯曲的宽度，每个翼片区域的形状和尺寸以及脊 - 沟结构的条间距唯一地确定。

74. 发明授权

US5877035A Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same 失效
标题翻译：分析微小异物的方法和装置，以及使用其制造半导体器件的制造方法和液晶显示装置
公开(公告)号：US5877035A
公开(公告)日：1999-03-02
申请号：US600141
申请日：1996-02-12
申请人： Naohiko Fujino , Isamu Karino , Masashi Ohmori , Masatoshi Yasutake , Shigeru Wakiyama
发明人： Naohiko Fujino , Isamu Karino , Masashi Ohmori , Masatoshi Yasutake , Shigeru Wakiyama
IPC分类号： G01B11/30 , G01N15/00 , G01N21/88 , G01N21/94 , G01N21/95 , G01N21/956 , G01Q30/02 , G01Q60/10 , G01Q60/24 , G01Q60/50 , H01L21/66 , G01R31/26
CPC分类号： G01N21/94 , G01N21/9501 , H01L22/20 , G01N21/9503 , H01L22/12 , H01L2223/54453 , H01L2924/0002
摘要： To enable observation, analysis and evaluation of minute foreign substances by adopting a method for enabling performance of linkage between equipment coordinates of a particle examination equipment and apparatus coordinates of an analyzing apparatus such as SEM which is not a particle examination equipment with a precision higher than that with which coordinate linkage is performed between conventional equipment and apparatus coordinates. An analyzing method for analyzing minute foreign substances includes the steps of determining the position of a minute foreign substance on the surface of a sample in a particle examination equipment, transferring the sample to a coordinate stage of an analyzing apparatus and inputting the position of the minute foreign substance determined by the particle examination equipment to thereby analyze the contents of this minute foreign substance. It is characterized by linking the equipment coordinates adopted by the particle examination equipment with the apparatus coordinates adopted by the analyzing apparatus by use of the same coordinate system based on the configurations of the sample.
摘要翻译：为了能够观察，分析和评估微小的异物，通过采用能够实现粒子检查设备的设备坐标与不是具有高于在常规设备和设备坐标之间进行哪个坐标连接。用于分析微小异物的分析方法包括以下步骤：在颗粒检查设备中确定样品表面上的微小异物的位置，将样品转移到分析设备的坐标台并输入分钟的位置外来物质由颗粒检测设备确定，从而分析该微量异物的含量。其特征在于，基于样本的构造，通过使用相同的坐标系将粒子检查装置采用的设备坐标与分析装置采用的装置坐标相连接。

75. 发明授权

US5866805A Cantilevers for a magnetically driven atomic force microscope 失效
标题翻译：用于磁驱动原子力显微镜的悬臂
公开(公告)号：US5866805A
公开(公告)日：1999-02-02
申请号：US710191
申请日：1996-09-12
申请人： Wenhai Han , Stuart M. Lindsay , Tianwei Jing
发明人： Wenhai Han , Stuart M. Lindsay , Tianwei Jing
IPC分类号： B81B3/00 , G01Q10/06 , G01Q30/14 , G01Q60/24 , G01Q60/32 , G01Q60/38 , G01Q70/06 , G01B5/28
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q30/14 , G01Q60/32 , G01Q60/38 , Y10S977/849 , Y10S977/86 , Y10S977/865 , Y10S977/871 , Y10S977/872 , Y10S977/873 , Y10S977/875
摘要： A force sensing cantilever for use in a scanning probe microscope has both a top side and a bottom side. From the bottom side extends a probe tip. The bottom side is coated with a thin film of a first material and the top side is coated with a thin film of a second material. The first and second materials may be the same or they may be different. The materials and thicknesses of the respective films are selected so as to create opposing forces to counter the tendency of such cantilevers to bend when a thin film is applied to only one side thereof.
摘要翻译：用于扫描探针显微镜的力传感悬臂具有顶侧和底侧。从底部延伸探针尖。底部涂覆有第一材料的薄膜，并且顶侧涂覆有第二材料的薄膜。第一和第二材料可以相同或可以不同。选择各个薄膜的材料和厚度以产生相反的力，以便在仅将薄膜施加到其一侧时产生这种悬臂弯曲的倾向。

76. 发明授权

US5824470A Method of preparing probes for sensing and manipulating microscopic environments and structures 失效
标题翻译：制备用于感测和操纵微观环境和结构的探针的方法
公开(公告)号：US5824470A
公开(公告)日：1998-10-20
申请号：US453958
申请日：1995-05-30
申请人： John D. Baldeschwieler , David Randall Baselt , Marc A. Unger , Stephen D. O'Connor
发明人： John D. Baldeschwieler , David Randall Baselt , Marc A. Unger , Stephen D. O'Connor
IPC分类号： C01B33/18 , C12Q1/68 , G01B21/30 , G01N33/543 , G01Q60/24 , G01Q70/16 , C01B25/00 , G01N21/00 , G01N33/53
CPC分类号： G01Q60/42 , B82Y35/00 , G01N33/54373 , Y10S977/732 , Y10S977/742 , Y10S977/842 , Y10S977/86 , Y10S977/875 , Y10S977/877 , Y10S977/881
摘要： Probes for sensing and manipulating microscopic environments and structures, their method of preparation and methods of use are disclosed.
摘要翻译：公开了用于感测和操纵微观环境和结构的探针，其制备方法和使用方法。

77. 发明授权

US5815253A Method and apparatus for estimating performance of gas tube 失效
标题翻译：用于估计气管性能的方法和装置
公开(公告)号：US5815253A
公开(公告)日：1998-09-29
申请号：US760511
申请日：1996-12-05
申请人： Jin-Sung Kim , Taek-Jin Lim , Gui-Jin Kim
发明人： Jin-Sung Kim , Taek-Jin Lim , Gui-Jin Kim
IPC分类号： G01N23/225 , F16L55/00 , F17D5/00 , G01N21/88 , G01N21/93 , G01N21/954 , G01N23/227 , G01N37/00 , G01Q60/24
CPC分类号： G01N21/88
摘要： Method and apparatus for estimating the performance of a gas tube. The method comprising the steps of: (a) preparing a sample tube to be analyzed and cutting the sample tube in a desired size and shape; (b) examining distribution of defects and surface condition of the cut sample tube with an optical microscope; (c) analyzing structure and composition of surface defects which can not be measured in the step (b), to determine type and composition of the surface defects and shape of a surface grain; (d) analyzing structure of an inner surface-treated layer of the sample tube along the thickness thereof; and (e) synthetically analyzing data for defect density and surface roughness, which are numerically expressed through the steps (a) to (d), to define a reference data which can be used in a semiconductor manufacturing process.
摘要翻译：用于估计气体管的性能的方法和装置。该方法包括以下步骤：（a）准备要分析的样品管并以期望的尺寸和形状切割样品管; （b）用光学显微镜检查切割的样品管的缺陷和表面状况的分布; （c）分析在步骤（b）中不能测量的表面缺陷的结构和组成，以确定表面缺陷的形式和组成以及表面颗粒的形状; （d）沿其厚度分析样品管的内表面处理层的结构; 和（e）综合分析通过步骤（a）至（d）数值表示的缺陷密度和表面粗糙度的数据，以定义可用于半导体制造工艺的参考数据。

78. 发明授权

US5804708A Atomic force microscope and method of analyzing frictions in atomic force microscope 失效
标题翻译：原子力显微镜和原子力显微镜摩擦分析方法
公开(公告)号：US5804708A
公开(公告)日：1998-09-08
申请号：US528956
申请日：1995-09-15
申请人： Kazushi Yamanaka , Eisuke Tomita
发明人： Kazushi Yamanaka , Eisuke Tomita
IPC分类号： G01L5/00 , G01B5/28 , G01B21/30 , G01N37/00 , G01Q60/24 , G01Q60/26
CPC分类号： G01Q60/26 , B82Y35/00 , Y10S977/733 , Y10S977/849 , Y10S977/851 , Y10S977/852 , Y10S977/863 , Y10S977/881
摘要： An atomic force microscope comprises a vibrating device for producing transverse vibrations between a sample and a probe and a vertical load-adjusting device for adjusting the vertical load between the sample and the probe. The sample is vibrated transversely, thus inducing a deflecting vibration on a cantilever. The phase and the amplitude of this deflecting vibration are simultaneously measured. The dependence of the measured value on the vertical load between the sample and the probe is measured. Thus, the friction between the sample and the probe is analyzed.
摘要翻译：原子力显微镜包括用于在样品和探针之间产生横向振动的振动装置和用于调节样品和探针之间的垂直载荷的垂直负载调节装置。样品横向振动，从而在悬臂上引起偏转振动。同时测量该偏转振动的相位和振幅。测量测量值与样品与探针之间垂直载荷的相关性。因此，分析样品和探针之间的摩擦力。

79. 发明授权

US5736745A Contamination evaluating apparatus 失效
标题翻译：污染评估装置
公开(公告)号：US5736745A
公开(公告)日：1998-04-07
申请号：US627655
申请日：1996-04-04
申请人： Makiko Nagashima , Tadashi Nishioka
发明人： Makiko Nagashima , Tadashi Nishioka
IPC分类号： G01B11/30 , G01B7/34 , G01N15/10 , G01N21/88 , G01N21/94 , G01N21/95 , G01N21/956 , G01N37/00 , G01Q20/02 , G01Q30/02 , G01Q30/20 , G01Q60/24 , G01Q80/00 , G01B11/00
CPC分类号： G01Q10/02 , B82Y35/00 , G01B7/34 , G01B7/345 , G01N21/94 , G01Q20/02 , G01Q30/04 , G01Q60/30 , G01N21/9501 , Y10S977/852
摘要： A sample placement portion is fixed to a frame. A stage and a cylindrical piezoelectric element are attached to the sample placement portion, and on this piezoelectric element, a sample (i.e., a semiconductor wafer) is positioned. A light collecting portion and a light receiving portion integrated together are attached slidably to frame for detecting the number and locations of contaminants. In addition, an analyzing portion for analyzing the types of the contaminants is slidably attached to the frame. Accordingly, it is made possible to reduce the size of the apparatus and to perform a highly reliable evaluation of the contamination.
摘要翻译：样品放置部分固定在一个框架上。台架和圆柱形压电元件附接到样品放置部分，并且在该压电元件上定位样品（即，半导体晶片）。整合在一起的光收集部分和光接收部分可滑动地附接到框架上，用于检测污染物的数量和位置。此外，用于分析污染物类型的分析部分可滑动地附接到框架。因此，能够减小设备的尺寸并对污染进行高度可靠的评估。

80. 发明授权

US5730940A Scanning probe microscope and molecular processing method using the scanning probe microscope 失效
标题翻译：扫描探针显微镜和分子加工方法采用扫描探针显微镜
公开(公告)号：US5730940A
公开(公告)日：1998-03-24
申请号：US340866
申请日：1994-11-15
申请人： Tohru Nakagawa
发明人： Tohru Nakagawa
IPC分类号： C12M1/34 , C12M1/40 , C12Q1/68 , G01B7/34 , G01B21/30 , G01N27/416 , G01Q60/10 , G01Q60/24 , G01Q60/38 , G01Q60/42 , G01Q60/44 , G01Q70/00
CPC分类号： G01Q60/60 , B82Y35/00 , G01Q60/42 , B82Y30/00 , Y10S977/728 , Y10S977/849 , Y10S977/852 , Y10S977/853 , Y10S977/86 , Y10S977/877 , Y10S977/879 , Y10S977/881 , Y10S977/924 , Y10S977/958
摘要： This invention relates to a scanning probe microscope which examines or processes directly the structure of substance surfaces at the molecular or atomic level, and a method for processing molecules using a scanning probe microscope and a method for detecting DNA base arrangement. A scanning probe microscope has a probe approaching or contacting the substance surface to detect a physical quantity between the substance surface and the probe, wherein the physical quantity is what is interacted or chemically reacted between the substance surface and the molecules or atom groups which act as a sensor and are fixed on the probe, scanning at an atomic level of precision. Therefore, surface structure within a microscopic region can be examined or processed at the molecular or atomic level. A method for detecting DNA base arrangement with any one of three or four kinds of probes fixed with any one of four different kinds of molecules interacting four kinds of bases consisting of DNA, by approaching single stranded DNA fixed on a substrate, measuring the force and scanning by an atomic force microscope at an atomic level of precision.
摘要翻译：本发明涉及一种扫描探针显微镜，该扫描探针显微镜直接检查分子或原子水平的物质表面的结构，以及使用扫描探针显微镜处理分子的方法和检测DNA碱基排列的方法。扫描探针显微镜具有接近或接触物质表面的探针以检测物质表面和探针之间的物理量，其中物理量是物质表面与作为的物质表面和分子或原子团之间的相互作用或化学反应的物质传感器并固定在探头上，以原子级精度扫描。因此，微观区域内的表面结构可以在分子或原子水平进行检查或处理。用四种不同种类的分子中的任何一种分离的任何一种探针中的任何一种探测DNA的检测方法，其通过接近固定在基底上的单链DNA，测量力和与用原子力显微镜以原子精度扫描。

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