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    • 1. 发明授权
    • Integrated thermal systems
    • 集成热系统
    • US07692926B2
    • 2010-04-06
    • US11932969
    • 2007-10-31
    • H. Thurman HendersonAhmed ShujaSrinivas ParimiFrank M. GernerPraveen Medis
    • H. Thurman HendersonAhmed ShujaSrinivas ParimiFrank M. GernerPraveen Medis
    • H05K7/20
    • F28D15/043H01L23/427H01L2924/0002H01L2924/09701Y10S165/218Y10T29/49396H01L2924/00
    • The present invention is a MEMS-based two-phase LHP (loop heat pipe) and CPL (capillary pumped loop) using semiconductor grade silicon and microlithographic/anisotropic etching techniques to achieve a planar configuration. The principal working material is silicon (and compatible borosilicate glass where necessary), particularly compatible with the cooling needs for electronic and computer chips and package cooling. The microloop heat pipes (μLHP™) utilize cutting edge microfabrication techniques. The device has no pump or moving parts, and is capable of moving heat at high power densities, using revolutionary coherent porous silicon (CPS) wicks. The CPS wicks minimize packaging thermal mismatch stress and improves strength-to-weight ratio. Also burst-through pressures can be controlled as the diameter of the coherent pores can be controlled on a sub-micron scale. The two phase planar operation provides extremely low specific thermal resistance (20-60 w/cm2). The operation is dependent upon a unique micropatterened CPS wick which contains up to millions per square centimeter of stacked uniform micro-through-capillaries in semiconductor-grade silicon, which serve as the capillary “engine,” as opposed to the stochastic distribution of pores in the typical heat pipe wick. As with all heat pipes, cooling occurs by virtue of the extraction of heat by the latent heat of phase change of the operating fluid into vapor.
    • 本发明是使用半导体级硅和微光刻/各向异性蚀刻技术的基于MEMS的两相LHP(环路热管)和CPL(毛细管泵浦环路)来实现平面配置。 主要的工作材料是硅(和必要时兼容的硼硅酸盐玻璃),特别与电子和计算机芯片和封装冷却的冷却需求相兼容。 微循环热管(μLHP™)利用尖端微加工技术。 该设备没有泵或运动部件,并且能够使用革命性的相干多孔硅(CPS)灯芯以高功率密度移动热量。 CPS灯芯将封装热失配应力最小化,并提高强度重量比。 当连续孔的直径可以亚微米级控制时,也可以控制爆破压力。 两相平面操作提供极低的比热阻(20-60w / cm2)。 该操作取决于独特的微电极CPS灯芯,其包含高达数百万个每平方厘米的半导体级硅中的堆叠的均匀微通毛细管,其用作毛细管“发动机”,与毛细管的随机分布相反 典型的热管灯芯。 与所有热管一样,由于通过工作流体相变的潜热进入蒸气而将热量提取出来,发生冷却。
    • 2. 发明授权
    • Semiconductor-based porous structure enabled by capillary force
    • 通过毛细管力实现基于半导体的多孔结构
    • US07723760B2
    • 2010-05-25
    • US11932951
    • 2007-10-31
    • H. Thurman HendersonAhmed ShujaSrinivas ParimiFrank M. GernerPraveen Medis
    • H. Thurman HendersonAhmed ShujaSrinivas ParimiFrank M. GernerPraveen Medis
    • H01L31/028
    • F28D15/043H01L23/427H01L2924/0002H01L2924/09701Y10S165/218Y10T29/49396H01L2924/00
    • The present invention is a MEMS-based two-phase LHP (loop heat pipe) and CPL (capillary pumped loop) using semiconductor grade silicon and microlithographic/anisotrophic etching techniques to achieve a planar configuration. The principal working material is silicon (and compatible borosilicate glass where necessary), particularly compatible with the cooling needs for electronic and computer chips and package cooling. The microloop heat pipes (μLHP™) utilize cutting edge microfabrication techniques. The device has no pump or moving parts, and is capable of moving heat at high power densities, using revolutionary coherent porous silicon (CPS) wicks. The CPS wicks minimize packaging thermal mismatch stress and improves strength-to-weight ratio. Also burst-through pressures can be controlled as the diameter of the coherent pores can be controlled on a sub-micron scale. The two phase planar operation provides extremely low specific thermal resistance (20-60 w/cm2). The operation is dependent upon a unique micropatterened CPS wick which contains up to millions per square centimeter of stacked uniform micro-through-capillaries in semiconductor-grade silicon, which serve as the capillary “engine,” as opposed to the stochastic distribution of pores in the typical heat pipe wick. As with all heat pipes, cooling occurs by virtue of the extraction of heat by the latent heat of phase change of the operating fluid into vapor.
    • 本发明是使用半导体级硅和微光刻/各向异性蚀刻技术的基于MEMS的两相LHP(环形热管)和CPL(毛细管泵浦环),以实现平面配置。 主要的工作材料是硅(和必要时兼容的硼硅酸盐玻璃),特别与电子和计算机芯片和封装冷却的冷却需求相兼容。 微循环热管(μLHP™)利用尖端微加工技术。 该设备没有泵或运动部件,并且能够使用革命性的相干多孔硅(CPS)灯芯以高功率密度移动热量。 CPS灯芯将封装热失配应力最小化,并提高强度重量比。 当连续孔的直径可以亚微米级控制时,也可以控制爆破压力。 两相平面操作提供极低的比热阻(20-60w / cm2)。 该操作取决于独特的微电极CPS灯芯,其包含高达数百万个每平方厘米的半导体级硅中的堆叠的均匀微通毛细管,其用作毛细管“发动机”,与毛细管的随机分布相反 典型的热管灯芯。 与所有热管一样,由于通过工作流体相变的潜热进入蒸气而将热量提取出来,发生冷却。
    • 3. 发明申请
    • INTEGRATED THERMAL SYSTEMS
    • 集成热系统
    • US20080128898A1
    • 2008-06-05
    • US11932969
    • 2007-10-31
    • H. Thurman HendersonAhmed ShujaSrinivas ParimiFrank M. GernerPraveen Medis
    • H. Thurman HendersonAhmed ShujaSrinivas ParimiFrank M. GernerPraveen Medis
    • H01L23/34F28D15/00
    • F28D15/043H01L23/427H01L2924/0002H01L2924/09701Y10S165/218Y10T29/49396H01L2924/00
    • The present invention is a MEMS-based two-phase LHP (loop heat pipe) and CPL (capillary pumped loop) using semiconductor grade silicon and microlithographic/anisotropic etching techniques to achieve a planar configuration. The principal working material is silicon (and compatible borosilicate glass where necessary), particularly compatible with the cooling needs for electronic and computer chips and package cooling. The microloop heat pipes (μLHP™) utilize cutting edge microfabrication techniques. The device has no pump or moving parts, and is capable of moving heat at high power densities, using revolutionary coherent porous silicon (CPS) wicks. The CPS wicks minimize packaging thermal mismatch stress and improves strength-to-weight ratio. Also burst-through pressures can be controlled as the diameter of the coherent pores can be controlled on a sub-micron scale. The two phase planar operation provides extremely low specific thermal resistance (20-60 w/cm2). The operation is dependent upon a unique micropatterened CPS wick which contains up to millions per square centimeter of stacked uniform micro-through-capillaries in semiconductor-grade silicon, which serve as the capillary “engine,” as opposed to the stochastic distribution of pores in the typical heat pipe wick. As with all heat pipes, cooling occurs by virtue of the extraction of heat by the latent heat of phase change of the operating fluid into vapor.In the cooling of a laptop computer processor the device could be attached to the processor during laptop assembly. Consistent with efforts to miniaturize electronics components, the current invention can be directly integrated with a unpackaged chip. For applications requiring larger cooling surface areas, the planar evaporators can be spread out in a matrix and integrally connected through properly sized manifold systems.
    • 本发明是使用半导体级硅和微光刻/各向异性蚀刻技术的基于MEMS的两相LHP(环路热管)和CPL(毛细管泵浦环路)来实现平面配置。 主要的工作材料是硅(和必要时兼容的硼硅酸盐玻璃),特别与电子和计算机芯片和封装冷却的冷却需求相兼容。 微循环热管(muLHP TM)利用尖端微加工技术。 该设备没有泵或运动部件,并且能够使用革命性的相干多孔硅(CPS)灯芯以高功率密度移动热量。 CPS灯芯将封装热失配应力最小化,并提高强度重量比。 当连续孔的直径可以亚微米级控制时,也可以控制爆破压力。 两相平面操作提供极低的比热阻(20-60w / cm 2)。 该操作取决于独特的微电极CPS灯芯,其包含高达数百万个每平方厘米的半导体级硅中的堆叠的均匀微通毛细管,其用作毛细管“发动机”,与毛细管的随机分布相反 典型的热管灯芯。 与所有热管一样,由于通过工作流体相变的潜热进入蒸气而将热量提取出来,发生冷却。 在笔记本电脑处理器的冷却中,该设备可以在笔记本电脑组装期间连接至处理器。 与电子元件小型化的努力一致,本发明可直接与未封装的芯片集成。 对于需要较大冷却表面积的应用,平面蒸发器可以以矩阵形式展开并通过适当尺寸的歧管系统整体连接。
    • 4. 发明授权
    • Liquid chromatograph on a chip
    • 液相色谱仪在芯片上
    • US06258263B1
    • 2001-07-10
    • US09398847
    • 1999-09-17
    • H. Thurman HendersonNeville R. deGouvea-Pinto
    • H. Thurman HendersonNeville R. deGouvea-Pinto
    • B01D1508
    • G01N30/6095G01N30/60G01N30/6043G01N30/466
    • A chromatograph fabricated using microelectromechanical techniques. The chromatograph includes a first layer superimposed over a second layer. At least one micro-channel is etched into the second layer to provide the separation column of the chromatograph. The surfaces of the micro-channel are chemically activated in order to separate the components of a sample flowing through the micro-channel by bonded phase chemistry. A third layer is placed in superimposed relationship with the second layer. At least one pair of electrodes is formed to the third layer with at least a portion of the electrodes internal to the micro-channel of the second layer. The electrodes detect separated components flowing through the micro-channel and identify them by their electrical conductivity. The depth of the micro-channel is greater than the width, thereby minimizing pressure drop across the device and allowing the chromatograph to operate with a high degree of speed, sensitivity and accuracy. Good resolution is obtained with narrow integrated electrodes for sensing the separated components of the sample.
    • 使用微机电技术制造的色谱仪。 色谱仪包括叠加在第二层上的第一层。 将至少一个微通道蚀刻到第二层中以提供色谱仪的分离柱。 微通道的表面被化学活化,以通过键合相化学分离流过微通道的样品的组分。 第三层与第二层叠加放置。 至少一对电极形成到第三层,其中至少一部分电极在第二层的微通道内部。 电极检测流过微通道的分离的组分,并通过其电导率来识别它们。 微通道的深度大于宽度,从而使器件上的压降最小化,并允许色谱仪以高度的速度,灵敏度和精度运行。 通过窄的集成电极获得良好的分辨率,用于感测样品的分离组分。
    • 5. 发明授权
    • Implantable auditory system with micromachined microsensor and
microactuator
    • 具有微加工微传感器和微型致动器的植入式听觉系统
    • US5531787A
    • 1996-07-02
    • US8663
    • 1993-01-25
    • S. George LesinskiH. Thurman Henderson
    • S. George LesinskiH. Thurman Henderson
    • A61F11/04H04R25/00A61F2/18A61N1/08
    • H04R25/606A61F2002/183
    • An implantable auditory system for a human subject includes a microsensor, a processor and a microactuator. The microsensor is implanted in the middle ear to transduce sound waves into electrical signals. The processor is implanted in a hole surgically sculpted in the skull and controls amplification and processing of the electrical signals. The microactuator is micromachined from a single crystal and acts as a parallel plate capacitor, with a diaphragm spaced from the rest of the crystal by an extremely small void therebetween. The microactuator is implanted in the middle ear, and it may extend into the inner ear through a surgically formed fenestration or be mounted to the ossicular chain. Electrical signals conveyed to the microactuator set up electric fields across the narrow void and the diaphragm to produce electrostatic forces that cause the diaphragm to vibrate, thereby directly or indirectly vibrating fluid in the inner ear. Use of electrostatic forces to vibrate inner ear fluid reduces electrical current requirements, resulting in increased battery life.
    • 用于人类受试者的可植入听觉系统包括微传感器,处理器和微致动器。 微传感器植入中耳,将声波转换成电信号。 将处理器植入到通过外科手术雕刻在颅骨中的孔中,并控制电信号的放大和处理。 微致动器由单晶体微加工而成,并作为平行平板电容器,其隔膜与晶体的其余部分隔开极小的空隙。 微致动器植入中耳,并可通过手术形成的开窗延伸到内耳中,或者安装在小耳链上。 传送到微致动器的电信号在窄空隙和隔膜上设置电场,以产生导致隔膜振动的静电力,从而直接或间接地振动内耳中的流体。 使用静电力振动内耳液体可减少电流需求,从而延长电池寿命。
    • 6. 发明授权
    • Process of making a solid state microanemometer
    • 制作固态微量计的过程
    • US5310449A
    • 1994-05-10
    • US95948
    • 1993-07-22
    • H. Thurman Henderson
    • H. Thurman Henderson
    • G01F1/684G01P5/12G01P13/02H01L21/306B44C1/24C03C15/00C03C25/06
    • G01P5/12G01F1/6845G01P13/02G01P2015/084Y10S438/924
    • A solid state microanemometer is micromachined from a crystal to a shape with four thick external sides that define an outer rectangle, four thin sections that define an inner rectangle and four diagonally directed branches interconnecting the corners of the outer rectangle to the inner rectangle. Four semiconductor resistors located on the four inner sections form a sensing bridge. Each external side has a pair of electrical contacts that are electrically interconnected, via conductive leads that extend along the diagonal branches and partially along the inner sections, to one of the semiconductor resistors. The physically connected semiconductor resistors and external sides form a rugged solid state device, while thermal and electrical isolation of the resistors from each other permits higher operating temperatures and improved fluid flow sensing capability.
    • 固体微尺度计从晶体微加工成具有四个厚的外侧的形状,其限定外部矩形,限定内部矩形的四个薄部分和将外部矩形的角部与内部矩形互连的四个对角线指向的分支。 位于四个内部部分上的四个半导体电阻形成感测桥。 每个外侧具有一对电触头,其通过沿着对角分支延伸并且部分地沿内部部分延伸的导电引线电连接到半导体电阻器之一。 物理连接的半导体电阻器和外部侧面形成坚固的固态器件,而电阻器的热和电隔离彼此允许更高的工作温度和改善的流体流量检测能力。
    • 7. 发明授权
    • System and method of a heat transfer system with an evaporator and a condenser
    • 具有蒸发器和冷凝器的传热系统的系统和方法
    • US07723845B2
    • 2010-05-25
    • US11932911
    • 2007-10-31
    • H. Thurman HendersonAhmed ShujaSrinivas ParimiFrank M. GernerPraveen Medis
    • H. Thurman HendersonAhmed ShujaSrinivas ParimiFrank M. GernerPraveen Medis
    • H01L23/12H01L31/028
    • F28D15/043H01L23/427H01L2924/0002H01L2924/09701Y10S165/218Y10T29/49396H01L2924/00
    • The present invention is a MEMS-based two-phase LHP (loop heat pipe) and CPL (capillary pumped loop) using semiconductor grade silicon and microlithographic/anisotrophic etching techniques to achieve a planar configuration. The principal working material is silicon (and compatible borosilicate glass where necessary), particularly compatible with the cooling needs for electronic and computer chips and package cooling. The microloop heat pipes (μLHP™) utilize cutting edge microfabrication techniques. The device has no pump or moving parts, and is capable of moving heat at high power densities, using revolutionary coherent porous silicon (CPS) wicks. The CPS wicks minimize packaging thermal mismatch stress and improves strength-to-weight ratio. Also burst-through pressures can be controlled as the diameter of the coherent pores can be controlled on a sub-micron scale. The two phase planar operation provides extremely low specific thermal resistance (20-60 w/cm2). The operation is dependent upon a unique micropatterened CPS wick which contains up to millions per square centimeter of stacked uniform micro-through-capillaries in semiconductor-grade silicon, which serve as the capillary “engine,” as opposed to the stochastic distribution of pores in the typical heat pipe wick. As with all heat pipes, cooling occurs by virtue of the extraction of heat by the latent heat of phase change of the operating fluid into vapor.
    • 本发明是使用半导体级硅和微光刻/各向异性蚀刻技术的基于MEMS的两相LHP(环形热管)和CPL(毛细管泵浦环),以实现平面配置。 主要的工作材料是硅(和必要时兼容的硼硅酸盐玻璃),特别与电子和计算机芯片和封装冷却的冷却需求相兼容。 微循环热管(μLHP™)利用尖端微加工技术。 该设备没有泵或运动部件,并且能够使用革命性的相干多孔硅(CPS)灯芯以高功率密度移动热量。 CPS灯芯将封装热失配应力最小化,并提高强度重量比。 当连续孔的直径可以亚微米级控制时,也可以控制爆破压力。 两相平面操作提供极低的比热阻(20-60w / cm2)。 该操作取决于独特的微电极CPS灯芯,其包含高达数百万个每平方厘米的半导体级硅中的堆叠的均匀微通毛细管,其用作毛细管“发动机”,与毛细管的随机分布相反 典型的热管灯芯。 与所有热管一样,由于通过工作流体相变的潜热进入蒸气而将热量提取出来,发生冷却。
    • 9. 发明申请
    • SEMICONDUCTOR-BASED POROUS STRUCTURE
    • 基于半导体的多孔结构
    • US20080115912A1
    • 2008-05-22
    • US11932951
    • 2007-10-31
    • H. Thurman HENDERSONAhmed ShujaSrinivas ParimiFrank M. GernerPraveen Medis
    • H. Thurman HENDERSONAhmed ShujaSrinivas ParimiFrank M. GernerPraveen Medis
    • F28D15/00
    • F28D15/043H01L23/427H01L2924/0002H01L2924/09701Y10S165/218Y10T29/49396H01L2924/00
    • The present invention is a MEMS-based two-phase LHP (loop heat pipe) and CPL (capillary pumped loop) using semiconductor grade silicon and microlithographic/anisotrophic etching techniques to achieve a planar configuration. The principal working material is silicon (and compatible borosilicate glass where necessary), particularly compatible with the cooling needs for electronic and computer chips and package cooling. The microloop heat pipes (μLHP™) utilize cutting edge microfabrication techniques. The device has no pump or moving parts, and is capable of moving heat at high power densities, using revolutionary coherent porous silicon (CPS) wicks. The CPS wicks minimize packaging thermal mismatch stress and improves strength-to-weight ratio. Also burst-through pressures can be controlled as the diameter of the coherent pores can be controlled on a sub-micron scale. The two phase planar operation provides extremely low specific thermal resistance (20-60 w/cm2). The operation is dependent upon a unique micropatterened CPS wick which contains up to millions per square centimeter of stacked uniform micro-through-capillaries in semiconductor-grade silicon, which serve as the capillary “engine,” as opposed to the stochastic distribution of pores in the typical heat pipe wick. As with all heat pipes, cooling occurs by virtue of the extraction of heat by the latent heat of phase change of the operating fluid into vapor.In the cooling of a laptop computer processor the device could be attached to the processor during laptop assembly. Consistent with efforts to miniaturize electronics components, the current invention can be directly integrated with a unpackaged chip. For applications requiring larger cooling surface areas, the planar evaporators can be spread out in a matrix and integrally connected through properly sized manifold systems.
    • 本发明是使用半导体级硅和微光刻/各向异性蚀刻技术的基于MEMS的两相LHP(环形热管)和CPL(毛细管泵浦环),以实现平面配置。 主要的工作材料是硅(和必要时兼容的硼硅酸盐玻璃),特别与电子和计算机芯片和封装冷却的冷却需求相兼容。 微循环热管(muLHP TM)利用尖端微加工技术。 该设备没有泵或运动部件,并且能够使用革命性的相干多孔硅(CPS)灯芯以高功率密度移动热量。 CPS灯芯将封装热失配应力最小化,并提高强度重量比。 当连续孔的直径可以亚微米级控制时,也可以控制爆破压力。 两相平面操作提供极低的比热阻(20-60w / cm 2)。 该操作取决于独特的微电极CPS灯芯,其包含高达数百万个每平方厘米的半导体级硅中的堆叠的均匀微通毛细管,其用作毛细管“发动机”,与毛细管的随机分布相反 典型的热管灯芯。 与所有热管一样,由于通过工作流体相变的潜热进入蒸气而将热量提取出来,发生冷却。 在笔记本电脑处理器的冷却中,该设备可以在笔记本电脑组装期间连接至处理器。 与电子元件小型化的努力一致,本发明可直接与未封装的芯片集成。 对于需要较大冷却表面积的应用,平面蒸发器可以以矩阵形式展开并通过适当尺寸的歧管系统整体连接。
    • 10. 发明授权
    • Transintegumental power transformers with high permeability cores
    • 具有高磁导率核心的电力变压器
    • US6032076A
    • 2000-02-29
    • US045432
    • 1998-03-20
    • David MelvinH. Thurman HendersonArthur J. Helmicki
    • David MelvinH. Thurman HendersonArthur J. Helmicki
    • A61F2/02A61N1/08A61N1/378A61N2/04A61N1/00
    • A61N1/08A61F2250/0001A61N1/3787
    • Extra- to intra-corporeal power is provided by a transformer implanted at least partially within a defunctionalized intestinal pouch (or sack), such as an ileal pouch. The transformer includes a continuous loop magnetic core which is implanted within the pouch. The pouch itself includes a passageway permitting the secondary wiring to extend around the and through the magnetic core and through its central opening without entering the pouch providing intracorporeal current. Wire providing the primary windings extend from outside the body in through a stoma into the pouch and surround portions of the magnetic core within the pouch. Because of the use of a generally continuous loop magnetic core of high permeability, there is little or virtually no magnetic flux leakage. A solid circular core of a high permeability material may be used. In an alternate embodiment of the present invention the magnetic core can be divided into two separate portions, one implanted within the pouch and one implanted within the peritoneum adjacent the pouch so that the two core portions combine to form a generally continuous loop magnetic path, separated only by the intestinal wall of the pouch.
    • 通过植入至少部分在功能化的肠袋(或袋)(例如回肠袋)内的变压器来提供额外的体内功率。 变压器包括植入袋内的连续环形磁芯。 袋本身包括通道,允许二次布线围绕并通过磁芯延伸并穿过其中心开口而不进入提供体内电流的袋。 提供初级绕组的线从身体外部通过造口延伸到袋中并且围绕袋内的磁芯的部分。 由于使用高磁导率的通常连续的环形磁芯,因此几乎没有或几乎没有磁通泄漏。 可以使用高磁导率材料的实心圆芯。 在本发明的替代实施例中,磁芯可以分为两个分开的部分,一个植入在囊内,一个植入在邻近袋的腹膜内,使得两个核心部分组合形成大致连续的环路径,分离 只能通过肠壁的肠壁。