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1. 发明申请

US20160187376A1 PROBE AND SAMPLE EXCHANGE MECHANISM 有权
标题翻译：探索和样本交换机制
公开(公告)号：US20160187376A1
公开(公告)日：2016-06-30
申请号：US14910780
申请日：2014-08-06
申请人： INFINITESIMA LIMITED
发明人： Andrew HUMPHRIS
IPC分类号： G01Q30/20
CPC分类号： G01Q30/20 , B82Y35/00 , G01Q70/02
摘要： A scanning probe microscope system. A sample stage is provided along with a microscope arranged to collect data with a probe carried by the microscope from a sample carried by the sample stage. A probe/sample exchange mechanism is arranged to exchange the probe carried by the microscope with a new probe, and is also arranged to exchange the sample carried by the sample stage with a new sample. The probe/sample exchange mechanism comprises a transport structure which can move relative to the microscope and the sample stage; a probe carrier carried by the transport structure and adapted to carry the probe or the new probe when the probe is exchanged with the new probe; a sample carrier carried by the transport structure, wherein the sample carrier is adapted differently from the probe carrier to carry the sample or the new sample when the sample is exchanged with the new sample; and a drive system arranged to move the transport structure relative to the microscope and the sample stage when the probe is exchanged with the new probe and the sample is exchanged with the new sample.
摘要翻译：扫描探针显微镜系统。提供样品台以及显微镜，布置成用由样品载带的样品用显微镜携带的探针收集数据。布置探针/样品交换机构以用新的探针交换由显微镜携带的探针，并且还布置成用样品交换样品载带的样品。探针/样品交换机构包括可相对于显微镜和样品台移动的传送结构; 探针载体由传输结构承载并且当探头与新探针交换时适于携带探针或新探针; 由所述传送结构承载的样品载体，其中当所述样品与所述新样品交换时，所述样品载体与所述探针载体不同，以携带所述样品或所述新样品; 以及驱动系统，其布置成当探针与新探针交换时，相对于显微镜和样品台移动输送结构，并且样品与新样品交换。

2. 发明申请

US20170074901A1 PROBE ACTUATION SYSTEM WITH FEEDBACK CONTROLLER 有权
标题翻译：具有反馈控制器的探头启动系统
公开(公告)号：US20170074901A1
公开(公告)日：2017-03-16
申请号：US15122100
申请日：2015-02-27
申请人： INFINITESIMA LIMITED
发明人： Andrew HUMPHRIS
IPC分类号： G01Q10/06 , G01B11/06 , G01Q70/10
CPC分类号： G01Q10/065 , G01B11/0608 , G01Q10/045 , G01Q70/10
摘要： A probe actuation system has a detection system arranged to measure a position or angle of a probe to generate a detection signal. An illumination system is arranged to illuminate the probe. Varying the illumination of the probe causes the probe to deform which in turn causes the detection signal to vary. A probe controller is arranged to generate a desired value which varies with time. A feedback controller is arranged to vary the illumination of the probe according to the detection signal and the desired value so that the detection signal is driven towards the desired value. The probe controller receives as its inputs a detection signal and a desired value, but unlike conventional feedback systems this desired value varies with time. Such a time-varying desired value enables the probe to be driven so that it follows a trajectory with a predetermined speed. A position or angle of the probe is measured to generate the detection signal and the desired value represents a desired position or angle of the probe.
摘要翻译：探针致动系统具有被布置成测量探针的位置或角度以产生检测信号的检测系统。布置照明系统照亮探头。改变探头的照明会导致探头变形，从而导致检测信号变化。探针控制器被布置成产生随时间变化的期望值。反馈控制器被布置成根据检测信号和期望值来改变探头的照明，使得检测信号被驱动到期望值。探头控制器接收检测信号和期望值作为其输入，但是与常规反馈系统不同，该期望值随时间而变化。这种随时间变化的期望值使得能够驱动探针，使得其以预定速度跟随轨迹。测量探针的位置或角度以产生检测信号，并且期望值表示探针的期望位置或角度。

3. 发明申请

US20170016932A1 PROBE SYSTEM WITH MULTIPLE ACTUATION LOCATIONS 有权
标题翻译：具有多个启动位置的探测系统
公开(公告)号：US20170016932A1
公开(公告)日：2017-01-19
申请号：US15122047
申请日：2015-02-27
申请人： INFINITESIMA LIMITED
发明人： Andrew HUMPHRIS
IPC分类号： G01Q10/04 , G01Q70/10
CPC分类号： G01Q10/045 , G01Q10/065 , G01Q70/10
摘要： A probe system comprising a probe with first and second arms and a probe tip carried by the first and second arms. An illumination system is arranged to deform the probe by illuminating the first arm at a first actuation location and the second arm at a second actuation location each with a respective illumination power. An actuation controller is arranged to independently control the illumination power at each actuation location in order to control the height and tilt angle of the probe and thus height and lateral position of the tip. The first and second arms are mirror images of each other on opposite sides of a plane of symmetry passing through the probe tip. A detection system is provided which not only measures a height of the probe tip to generate a height signal, but also measures a tilt angle of the probe to generate a tilt signal from which the lateral position of the tip can be determined.
摘要翻译：一种探针系统，包括具有第一和第二臂的探针和由第一和第二臂承载的探针尖端。照明系统被布置成通过在第一致动位置处照亮第一臂而使探针变形，并且第二臂在第二致动位置处各自具有相应的照明功率。致动控制器被布置成独立地控制每个致动位置处的照明功率，以便控制探头的高度和倾斜角以及因此来控制尖端的高度和横向位置。第一和第二臂是通过探针尖端的对称平面的相对侧上的彼此的镜像。提供一种检测系统，其不仅测量探针尖端的高度以产生高度信号，而且还测量探针的倾斜角以产生倾斜信号，从而可以确定尖端的横向位置。

4. 发明申请

US20160154022A1 PROBE MICROSCOPE 有权
标题翻译：探针显微镜
公开(公告)号：US20160154022A1
公开(公告)日：2016-06-02
申请号：US14905378
申请日：2014-07-18
申请人： INFINITESIMA LIMITED
发明人： Andrew HUMPHRIS
IPC分类号： G01Q10/00 , G01Q20/00
CPC分类号： G01Q10/00 , G01Q10/065 , G01Q20/00
摘要： A scanning probe microscope comprising: a signal generator providing a drive signal for an actuator to move a probe repeatedly towards and away from a sample. In response to the detection of an interaction of the probe with the sample the drive signal is modified to cause the probe to move away from the sample. The drive signal comprises an approach phase in which an intensity of the drive signal increases to a maximum value; and a retract phase in which the intensity of the drive signal reduces from the maximum value to a minimum value in response to the detection of the surface position. The intensity of the drive signal is held at the minimum value during the retract phase and then increased at the end of the retract phase. The duration of the retract phase is dependent on the maximum value in the approach phase.
摘要翻译：一种扫描探针显微镜，包括：信号发生器，用于为致动器提供驱动信号，以使样本重复地朝向和远离样品移动。响应于探测器与样品的相互作用的检测，驱动信号被修改以使探针远离样品。驱动信号包括其中驱动信号的强度增加到最大值的接近阶段; 以及回缩阶段，其中响应于表面位置的检测，驱动信号的强度从最大值减小到最小值。在退回阶段，驱动信号的强度保持在最小值，然后在收回阶段结束时增加。缩回阶段的持续时间取决于接近阶段的最大值。

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