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1. 发明授权

US6444028B2 Charging material and holding system for the charging material 失效
标题翻译：充电材料的充电材料和保持系统
公开(公告)号：US6444028B2
公开(公告)日：2002-09-03
申请号：US85122901
申请日：2001-05-08
申请人： WACKER CHEMIE GMBH
发明人： FRAUENKNECHT AXEL , SCHANTZ MATTHAEUS , BEER VIKTOR
IPC分类号： C30B29/06 , C30B13/08 , C30B13/28 , C30B15/02 , C30B15/36 , C30B35/00
CPC分类号： C30B15/02 , C30B13/08 , C30B13/285 , Y10S117/911 , Y10T117/1032 , Y10T117/1072
摘要： A charging material made from semiconductor material, is used for charging or recharging a melting crucible during the Czochralski crucible-pulling process. This charging material has a polycrystalline semiconductor rod, which at one end has a groove, and a monocrystalline semiconductor rod, which at one end has a tongue, which rods are coupled by means of a tongue-and-groove connection. There is also a holding system for holding a polycrystalline silicon rod during the Czochralski crucible-pulling process or the float zone process, which has a tongue-and-groove connection between the polycrystalline semiconductor rod, which at one end has a groove, and a monocrystalline semiconductor rod, which at one end has a tongue.
摘要翻译：由半导体材料制成的充电材料用于在切克劳斯基坩埚拉拔过程中对熔化坩埚进行充电或再充电。该充电材料具有一端具有凹槽的多晶硅半导体棒和一端具有舌状物的单晶半导体棒，这些棒通过榫槽连接而联接。还有一种在切克劳斯基坩埚拉拔过程或浮区过程中保持多晶硅棒的保持系统，其在一端具有凹槽的多晶半导体棒之间具有榫槽连接，单晶半导体棒，其一端具有舌头。

2. 再颁专利

USRE30863E Method for crucible-free zone meeting of semiconductor crystal rods 失效
标题翻译：半导体晶体棒无坩埚区会议的方法
公开(公告)号：USRE30863E
公开(公告)日：1982-02-09
申请号：US778587
申请日：1977-03-17
申请人： Wolfgang Keller
发明人： Wolfgang Keller
IPC分类号： C30B13/00 , C30B13/28 , C30B29/06 , H01L21/208
CPC分类号： C30B13/285 , Y10T117/1084
摘要： Polycrystalline semiconductor rods are converted to dislocation-free monocrystal rods by positioning a polycrystalline rod within a crucible-free zone melt environment with a seed crystal attached to one end thereof, generating a melt zone at the juncture of the seed crystal and the polycrystalline rod, controllably moving the melt zone away from the juncture and through the polycrystalline rod to a select point thereon, uniformly supporting the cone-shaped lower portion of the rod being processed so as to prevent oscillations and the like at the juncture of the rod in the seed crystal and controllably moving the melt zone from the select point to the remainder of the rod. A uniform support is preferably provided by an axially movable funnel-shaped casing which is attached to the seed crystal holding member and which, when moved into its operating position, is filled with a self-adjusting oscillation or vibration dampening means, such as molten metal, metal spheroids, quartz particles, sand, etc.

3. 发明授权

US4140571A Crucible-free zone refining of semiconductor material including annular support member 失效
标题翻译：包括环形支撑构件的半导体材料的无坩埚区精炼
公开(公告)号：US4140571A
公开(公告)日：1979-02-20
申请号：US840887
申请日：1977-10-11
申请人： Heinz Herzer , Helmut Zauhar , Eberhard Mucke , Franz Kohl
发明人： Heinz Herzer , Helmut Zauhar , Eberhard Mucke , Franz Kohl
IPC分类号： C30B13/00 , C30B13/20 , C30B13/28 , H01L21/208 , B01J17/10
CPC分类号： C30B13/285 , Y10S117/90 , Y10S117/911 , Y10T117/1084
摘要： A process for the crucible-free zone pulling of a polycrystalline rod heldertically, together with a seed crystal fixed at its lower end, in which a melting zone is produced by means of an induction heating coil surrounding the rod, which zone, by means of relative movement of the coil and rod, traverses the entire length of the rod starting from the seed crystal, characterized in that after attaching the seed crystal to the rod, a support member is moved, below the induction heating coil, towards the rod, which support member rests gently against the rod and after being positioned, solidifies to form a firm support for the rod. A device for carrying out the process is also included.
摘要翻译：一种无坩埚区域牵引垂直保持的多晶棒的方法，以及固定在其下端的晶种，其中通过围绕杆的感应加热线圈产生熔融区，该区域通过装置所述线圈和所述杆的相对运动通过从所述晶种开始的所述杆的整个长度，其特征在于，在将所述晶种连接到所述杆之后，支撑构件在所述感应加热线圈下方朝向所述杆移动，该支撑构件轻轻靠在杆上并在定位之后固化以形成用于杆的坚固支撑。还包括用于执行该过程的设备。

4. 发明授权

US3996096A Method for crucible-free zone melting of semiconductor crystal rods 失效
标题翻译：半导体晶体棒无坩埚区熔化的方法
公开(公告)号：US3996096A
公开(公告)日：1976-12-07
申请号：US638261
申请日：1975-12-08
申请人： Wolfgang Keller
发明人： Wolfgang Keller
IPC分类号： C30B13/28 , B01J17/10
CPC分类号： C30B13/285 , Y10S117/90 , Y10S117/911 , Y10T117/1084
摘要： Polycrystalline semiconductor rods are converted to dislocation-free monocrystal rods by positioning a polycrystalline rod within a crucible-free zone melt environment with a seed crystal attached to one end thereof, generating a melt zone at the juncture of the seed crystal and the polycrystalline rod, controllably moving the melt zone away from the juncture and through the polycrystalline rod to a select point thereon, uniformly supporting the cone-shaped lower portion of the rod being processed so as to prevent oscillations and the like at the juncture of the rod in the seed crystal and controllably moving the melt zone from the select point to the remainder of the rod. A uniform support is preferably provided by an axially movable funnel-shaped casing which is attached to the seed crystal holding member and which, when moved into its operating position, is filled with a self-adjusting oscillation or vibration dampening means, such as molten metal, metal spheroids, quartz particles, sand, etc.
摘要翻译：将多晶半导体棒通过将多晶棒定位在无坩埚区熔融环境中而将其转化为无位错的单晶棒，其中晶种与其一端相连，在晶种和多晶棒的接合处产生熔融区，将熔体区域可控地移动离开接合点并通过多晶棒到其上的选择点，均匀地支撑被处理的杆的锥形下部，以防止在种子的杆的接合处的振荡等晶体并且可控地将熔体区域从选择点移动到杆的剩余部分。优选地，均匀的支撑件由可轴向移动的漏斗形壳体提供，所述壳体附接到晶种保持构件，并且当移动到其操作位置时，填充有自调节振动或减振装置，例如熔融金属，金属球体，石英颗粒，沙子等

5. 发明授权

US3547428A Holder for a crystalline rod in apparatus for crucible-free zone melting 失效
标题翻译：用于无腐蚀区域熔融的装置中的结晶器座
公开(公告)号：US3547428A
公开(公告)日：1970-12-15
申请号：US3547428D
申请日：1967-11-09
申请人： SIEMENS AG
发明人： VOGEL CARL-HEINZ
IPC分类号： C30B13/28 , B23K37/04
CPC分类号： C30B13/285 , Y10T403/368 , Y10T403/5781

6. 发明授权

US09657407B2 Cantilever device for extending capacity of a scale used in a crystal growth apparatus 有权
公开(公告)号：US09657407B2
公开(公告)日：2017-05-23
申请号：US14522640
申请日：2014-10-24
申请人： Siemens Medical Solutions USA, Inc.
发明人： Mark S. Andreaco , James L. Corbeil , Brant Quinton , Troy Marlar , Ronald Nutt
IPC分类号： C30B15/30 , C30B15/00 , C30B15/32 , C30B35/00 , C30B15/28 , C30B13/28 , C30B29/34
CPC分类号： C30B15/00 , C30B13/285 , C30B15/28 , C30B15/30 , C30B15/32 , C30B29/34 , C30B35/00 , Y10T117/1004
摘要： A cantilever device for extending capacity of a scale used in a crystal growth apparatus having a pulling head wherein upward movement of a support column in the pulling head decreases a weight measured by the scale. The device includes a horizontal arm having first and second brackets, wherein the first bracket is attached to the pulling head. The device also includes a plate that extends through openings in the first and second brackets, wherein the plate includes a contact end and a free end. Further, the device includes a flexible element attached between the arm and the plate to form a pivot to enable rotation of the plate. A load is positioned on the plate wherein the load causes rotation of the plate about the pivot to cause upward movement of the contact end to move the support column upward to decrease weight measured by the scale.

7. 发明申请

US20150114286A1 Pulling Head Having a Magnetic Drive 有权
标题翻译：具有磁力驱动的拉头
公开(公告)号：US20150114286A1
公开(公告)日：2015-04-30
申请号：US14519159
申请日：2014-10-21
申请人： Siemens Medical Solutions USA, Inc.
发明人： Mark S. Andreaco , Troy Marlar , Brant Quinton
IPC分类号： C30B15/30
CPC分类号： C30B15/30 , C30B13/285 , C30B15/32 , C30B29/06 , C30B35/00 , Y10T117/1032 , Y10T117/1072
摘要： A pulling head for a crystal growth furnace. The pulling head includes a servomotor and a rotatable housing attached to the servomotor, wherein the housing includes first, second, third and fourth housing magnets. The pulling head also includes a shaft attached to a scale and a connection device having first and second connection magnets. The first connection magnet is arranged between the first and second housing magnets to generate first and second magnetic repulsion forces and the second connection magnet is arranged between the third and fourth housing magnets to generate third and fourth magnetic repulsion forces. A rotation coupling is attached between the shaft and the connection device wherein the scale weighs the shaft, rotation coupling and the connection device. The servomotor rotates the housing and rotation of the housing is transmitted by the magnetic repulsion forces to the connection device to rotate the connection device.
摘要翻译：用于晶体生长炉的拉头。牵引头包括伺服电动机和连接到伺服电动机的可旋转壳体，其中壳体包括第一，第二，第三和第四壳体磁体。牵引头还包括附接到秤的轴和具有第一和第二连接磁体的连接装置。第一连接磁体布置在第一和第二壳体磁体之间以产生第一和第二磁性排斥力，并且第二连接磁体布置在第三和第四壳体磁体之间以产生第三和第四磁性排斥力。旋转联轴器安装在轴和连接装置之间，其中秤称重轴，旋转联接器和连接装置。伺服电动机旋转壳体并且壳体的旋转通过磁力排斥力传递到连接装置以旋转连接装置。

8. 发明申请

US20150114283A1 Cantilever Device For Extending Capacity Of A Scale Used In A Crystal Growth Apparatus 有权
标题翻译：用于扩展水晶生长装置中使用的秤的悬臂装置
公开(公告)号：US20150114283A1
公开(公告)日：2015-04-30
申请号：US14522640
申请日：2014-10-24
申请人： Siemens Medical Solutions USA, Inc.
发明人： Mark S. Andreaco , James L. Corbeil , Brant Quinton , Troy Marlar , Ronald Nutt
IPC分类号： C30B15/00 , C30B15/30
CPC分类号： C30B15/00 , C30B13/285 , C30B15/28 , C30B15/30 , C30B15/32 , C30B29/34 , C30B35/00 , Y10T117/1004
摘要： A cantilever device for extending capacity of a scale used in a crystal growth apparatus having a pulling head wherein upward movement of a support column in the pulling head decreases a weight measured by the scale. The device includes a horizontal arm having first and second brackets, wherein the first bracket is attached to the pulling head. The device also includes a plate that extends through openings in the first and second brackets, wherein the plate includes a contact end and a free end. Further, the device includes a flexible element attached between the arm and the plate to form a pivot to enable rotation of the plate. A load is positioned on the plate wherein the load causes rotation of the plate about the pivot to cause upward movement of the contact end to move the support column upward to decrease weight measured by the scale.
摘要翻译：一种悬臂装置，用于扩展在具有拉头的晶体生长装置中使用的刻度尺的容量，其中支撑柱在拉头中的向上运动降低了由刻度测量的重量。该装置包括具有第一和第二支架的水平臂，其中第一支架附接到拉头。该装置还包括延伸穿过第一和第二支架中的开口的板，其中板包括接触端和自由端。此外，该装置包括附接在臂和板之间的柔性元件，以形成能够使板旋转的枢轴。负载定位在板上，其中负载引起板绕枢轴的旋转，以引起接触端的向上运动，以向上移动支撑柱，以减小由刻度尺测量的重量。

9. 发明授权

US5427057A Self-clamping holder for polysilicon rod used in floating-zone single-crystal growth method 失效
标题翻译：用于多晶硅棒的自夹持器用于浮区单晶生长法
公开(公告)号：US5427057A
公开(公告)日：1995-06-27
申请号：US282420
申请日：1994-07-29
申请人： Michiaki Hattori , Keiichi Nakazawa
发明人： Michiaki Hattori , Keiichi Nakazawa
IPC分类号： C30B13/28 , C30B13/32 , C30B29/06 , C30B13/14
CPC分类号： C30B13/285 , C30B13/32 , Y10T117/108 , Y10T117/1084
摘要： A self-clamping holder capable of holding a polysilicon rod using the weight of the polysilicon rod is disclosed. The holder includes a generally cup-shaped adapter having an open end facing downward, and at least three clamp jaws rotatably mounted on the adapter adjacent to the open end and circumferentially spaced at equal angular intervals for clamping or gripping an end of the polysilicon rod received in the adapter. The clamp jaws have arcuate cam surfaces disposed interiorly of the adapter and profiled such that a radius of curvature of the cam surfaces gradually increases as the clamp jaws turn in a downward direction of the adapter. With this construction, the polysilicon rod is firmly gripped by the clamp jaws against detachment from the holder. The clamp jaws produces a clamping force acting on the peripheral surface of the polysilicon rod and distributed uniformly in the circumferential direction of the polysilicon rod. With this clamping force, the polysilicon rod is held in such a vertical position that a longitudinal central axis of the polysilicon rod is aligned with an axis of rotation of the adapter while the polysilicon rod is rotating.
摘要翻译：公开了一种能够使用多晶硅棒的重量来保持多晶硅棒的自夹持夹持器。保持器包括具有面向下的开口端的大致杯状适配器，以及至少三个夹紧爪，其可旋转地安装在适配器上，邻近开口端并以相等的角度间隔周向间隔开，以夹紧或夹持接收的多晶硅棒的端部在适配器中。夹爪具有设置在适配器内部的弧形凸轮表面，并且成形为使得当夹钳沿适配器的向下方向转动时，凸轮表面的曲率半径逐渐增加。通过这种结构，多晶硅棒被夹爪牢固地夹紧，从而从支架脱离。夹爪产生作用在多晶硅棒的周面上的夹紧力，并且在多晶硅棒的圆周方向上均匀分布。利用该夹紧力，多晶硅棒保持在垂直位置，使多晶硅棒的纵向中心轴与多晶硅棒旋转时的适配器的旋转轴对准。

10. 发明授权

US3191924A Device for mounting semiconductor rods in apparatus for crucible-free zone melting 失效
标题翻译：用于将半导体棒安装在无坩埚区熔化设备中的装置
公开(公告)号：US3191924A
公开(公告)日：1965-06-29
申请号：US7890460
申请日：1960-12-28
申请人： SIEMENS AG
发明人： JOACHIM HAUS
IPC分类号： C30B13/28
CPC分类号： C30B13/285 , C30B13/28 , Y10S117/911 , Y10T117/1076 , Y10T279/17222 , Y10T279/18 , Y10T279/26

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