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91. 发明授权

US08013299B2 Review method and review device 有权
标题翻译：审查方法和审查装置
公开(公告)号：US08013299B2
公开(公告)日：2011-09-06
申请号：US12366179
申请日：2009-02-05
申请人： Kenji Obara , Takehiro Hirai , Kohei Yamaguchi , Naoma Ban
发明人： Kenji Obara , Takehiro Hirai , Kohei Yamaguchi , Naoma Ban
IPC分类号： G01N23/00
CPC分类号： H01J37/21 , H01J37/28 , H01J2237/216 , H01J2237/221 , H01J2237/2817
摘要： A defect review method and a defect review device using an electron microscope, reduce the number of user processes necessary to set automatic focal adjustment of an electron beam to provide easier sample observation.The review method comprises the steps of: performing focal adjustment for a plurality of coordinate positions pre-registered on the coordinate on an object under observation; creating a criterion for focal adjustment based on a focal position at each of the plurality of coordinate positions; setting a focal probe range based on a deviation between the criterion and the focal position; and determining an automatic focal adjustment range for defect detection on the object under observation based on the set focal probe range.
摘要翻译：使用电子显微镜的缺陷检查方法和缺陷检查装置，减少设置电子束的自动聚焦调整所需的用户处理次数，以提供更容易的样品观察。检查方法包括以下步骤：对预先登记在观察对象上的坐标上的多个坐标位置执行焦点调整; 基于所述多个坐标位置中的每个坐标位置处的焦点位置创建用于焦点调整的标准; 根据标准和焦点位置之间的偏差设置焦点探测范围; 以及基于所设置的焦点探测范围确定用于观察对象的缺陷检测的自动焦点调整范围。

92. 发明申请

US20110062328A1 Defect Review Apparatus and Method of Reviewing Defects 有权
标题翻译：缺陷评估装置及缺陷检查方法
公开(公告)号：US20110062328A1
公开(公告)日：2011-03-17
申请号：US12953170
申请日：2010-11-23
申请人： Takehiro HIRAI , Kenji Obara , Kohei Yamaguchi
发明人： Takehiro HIRAI , Kenji Obara , Kohei Yamaguchi
IPC分类号： G01N23/04
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/2817 , H01J2237/2826
摘要： The present invention aims to provide a defect review apparatus capable of suppressing a reduction in throughput with a minimized deviation-amount measurement, and capable of optimizing an FOV of a monitoring image. To this end, the review apparatus for reviewing a specimen by moving the specimen to pre-calculated coordinate includes: a function to measure a deviation amount between the pre-calculated coordinates and coordinates of an actual position of the specimen; a function to optimize a coordinate correcting expression to minimize the measured deviation amount; and a function to determine that the deviation amounts have converged. When the deviation amounts have converged, the measurement for the coordinate-correcting-expression optimization is terminated. Thereby, the reduction in throughput is suppressed to the minimum level, and furthermore a FOV necessary for the specimen to be within the field of view is set according to a convergence value of the calculated deviation amount.
摘要翻译：本发明的目的在于提供一种缺陷检查装置，其能够以最小化的偏差量测量来抑制吞吐量的降低，并能够优化监视图像的FOV。为此，用于通过将样本移动到预先计算的坐标来检查样本的检查装置包括：测量预先计算的坐标与样本的实际位置的坐标之间的偏差量的函数; 优化坐标校正表达式以最小化所测量的偏差量的函数; 以及确定偏差量已经收敛的函数。当偏差量收敛时，终止坐标校正表达式优化的测量。由此，将吞吐量的降低抑制到最小水平，并且根据计算出的偏差量的收敛值来设定样本在视野范围内所需的FOV。

93. 发明授权

US07869969B2 Defect review apparatus and method of reviewing defects 有权
标题翻译：缺陷检查设备和检查缺陷的方法
公开(公告)号：US07869969B2
公开(公告)日：2011-01-11
申请号：US12108068
申请日：2008-04-23
申请人： Takehiro Hirai , Kenji Obara , Kohei Yamaguchi
发明人： Takehiro Hirai , Kenji Obara , Kohei Yamaguchi
IPC分类号： G01C17/38 , G01N21/86
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/2817 , H01J2237/2826
摘要： A defect review apparatus for reviewing a specimen by moving the specimen to pre-calculated coordinate includes: a function to measure a deviation amount between the pre-calculated coordinates and coordinates of an actual position of the specimen; a function to optimize a coordinate correcting expression to minimize the measured deviation amount; and a function to determine that the deviation amounts have converged. When the deviation amounts have converged, the measurement for the coordinate-correcting-expression optimization is terminated, minimizing a reduction in throughput. field of view (FOV) necessary for the specimen to be within the FOV is set according to a convergence value of the calculated deviation amount.
摘要翻译：用于通过将样本移动到预先计算的坐标来检查样本的缺陷检查装置包括：测量预先计算的坐标和样本的实际位置的坐标之间的偏差量的函数; 优化坐标校正表达式以最小化所测量的偏差量的函数; 以及确定偏差量已经收敛的函数。当偏差量已经收敛时，终止坐标校正表达式优化的测量，从而最小化吞吐量的降低。根据计算出的偏差量的收敛值来设定样本在FOV内所必需的视场（FOV）。

94. 发明授权

US07844874B2 Semiconductor integrated circuit device and inspection method therefor 有权
标题翻译：半导体集成电路器件及其检测方法
公开(公告)号：US07844874B2
公开(公告)日：2010-11-30
申请号：US11704370
申请日：2007-02-09
申请人： Nobuyuki Moriwaki , Takehiro Hirai
发明人： Nobuyuki Moriwaki , Takehiro Hirai
IPC分类号： G06F11/00
CPC分类号： G01R31/31722
摘要： A semiconductor integrated circuit device includes: a plurality of devices under test formed on a substrate; a selection circuit formed on the substrate which selects two of the plurality of devices under test; a magnitude comparison circuit formed on the substrate which measures an electrical characteristic of the two selected devices under test and makes a magnitude comparison between values of the measured electrical characteristic; an address memory circuit formed on the substrate which stores addresses of the two devices under test between which the magnitude comparison has been made; and a control circuit formed on the substrate and connected to the selection circuit, the magnitude comparison circuit, and the address memory circuit.
摘要翻译：半导体集成电路器件包括：在基片上形成的多个被测器件; 选择电路，形成在所述基板上，所述选择电路选择所述多个被测器件中的两个; 形成在所述基板上的幅度比较电路，其测量所述被测器件的电特性，并且对所测量的电特性的值进行幅度比较; 形成在基板上的地址存储电路，其存储已经进行了大小比较的被测器件的地址; 以及形成在基板上并连接到选择电路，幅度比较电路和地址存储电路的控制电路。

95. 发明授权

US07741447B2 Antibody against tumor specific antigen as target 失效
公开(公告)号：US07741447B2
公开(公告)日：2010-06-22
申请号：US11872479
申请日：2007-10-15
申请人： Kimihasa Ichikawa , Shu Takahashi , Toshinori Agatsuma , Keisuke Fukuchi , Takehiro Hirai
发明人： Kimihasa Ichikawa , Shu Takahashi , Toshinori Agatsuma , Keisuke Fukuchi , Takehiro Hirai
IPC分类号： C07K16/30 , A61K39/395
CPC分类号： C07K16/30 , C07K2317/732 , C12Q1/6886 , C12Q2600/136 , C12Q2600/158
摘要： The present invention relates to a method of detecting cancer by use of an oncogene, a method of screening for an active compound useful to treat and/or prevent cancer, and a pharmaceutical composition for treatment and/or prevention of cancer. More specifically, the present invention provides a method of detecting cancer based on the expression of the human oculospanin gene as a marker and a pharmaceutical composition containing an antibody capable of specifically recognizing human oculospanin and having cytotoxic activity against cancer cells.

96. 发明授权

US07664562B2 Automatic defect review and classification system 有权
标题翻译：自动缺陷审查和分类系统
公开(公告)号：US07664562B2
公开(公告)日：2010-02-16
申请号：US11451330
申请日：2006-06-13
申请人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
发明人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/32218 , Y02P90/22
摘要： The invention proposes a system that interrupts a processing associated with an ADC having low priority when an ADC processing cannot catch up with ADR by an ADC alone that is not under execution but uses an ADC for an ADR having high priority. To preferentially execute ADR/ADC having high priority, the invention employs an algorithm for serially selecting ADR/ADC in the order of higher processing capacity (in the order of greater numerical values in the expression by a DPH unit) from among ADR/ADCs that have the lowest priority, no matter whether the ADR/DC is now under execution or not.
摘要翻译：本发明提出了一种系统，当ADC处理不能通过一个ADC不能跟踪ADR而不能执行但对具有高优先级的ADR使用ADC时，中断与具有低优先级的ADC相关联的处理的系统。为了优先执行具有高优先级的ADR / ADC，本发明采用一种用于从ADR / ADC中的处理能力较高（按DPH单元的表达式中的较大数值的数量级）的顺序选择ADR / ADC的算法，优先级最低，无论ADR / DC是否在执行中。

97. 发明授权

US07485858B1 Inspection method for semiconductor wafer and apparatus for reviewing defects 有权
标题翻译：半导体晶圆检查方法及缺陷检查装置
公开(公告)号：US07485858B1
公开(公告)日：2009-02-03
申请号：US11607906
申请日：2006-12-04
申请人： Kenji Obara , Takehiro Hirai
发明人： Kenji Obara , Takehiro Hirai
IPC分类号： G01N23/00 , G21K7/00 , G21K5/10 , A61N5/00 , G21G5/00
CPC分类号： G01N23/2251 , H01J37/222 , H01J37/244 , H01J37/26 , H01J37/28 , H01J2237/24475 , H01J2237/2448 , H01J2237/24592 , H01J2237/28 , H01J2237/2809 , H01J2237/2817
摘要： An object of the present invention is to provide a suitable method of observing a wafer edge by using an electron microscope. The electron microscope includes a column which can take an image in being tilted, and thus allows a wafer edge to be observed from an oblique direction.
摘要翻译：本发明的目的是提供一种使用电子显微镜观察晶片边缘的合适方法。电子显微镜包括可以使图像倾斜的列，从而允许从倾斜方向观察晶片边缘。

98. 发明授权

US07449898B2 Method and apparatus for reviewing defects by detecting images having voltage contrast 有权
标题翻译：通过检测具有电压对比度的图像来检查缺陷的方法和装置
公开(公告)号：US07449898B2
公开(公告)日：2008-11-11
申请号：US11704228
申请日：2007-02-09
申请人： Toshifumi Honda , Takehiro Hirai
发明人： Toshifumi Honda , Takehiro Hirai
IPC分类号： G01R31/00 , G01R31/305 , G01N23/00
CPC分类号： G01R31/307 , G01R31/2884 , H01J37/265 , H01J37/28 , H01J37/304 , H01J2237/221 , H01J2237/24564 , H01J2237/2487 , H01J2237/2594 , H01J2237/2817 , H01J2237/30416
摘要： In a traditional method for automatically obtaining high-magnification images of defects by using an electron microscope for defect-reviewing of a semiconductor wafer, high-magnification images of a voltage contrast changing part are obtained in the case of defects generating voltage contrast change, this made difficult to observe defects themselves generating voltage contrast change. In the present invention, based on energy of secondary electron to be detected, after obtaining two types of images, namely an image making voltage contrast conspicuous easily, and an image not making it easily, and acquiring a shape change area adjacent to a voltage contrast change area based on this area as a defect location, a high-magnification image can automatically be obtained.
摘要翻译：在通过使用电子显微镜自动获得高倍率图像的传统方法中，通过使用电子显微镜对半导体晶片进行缺陷检查，在产生电压对比度变化的缺陷的情况下，获得电压对比度变化部分的高倍率图像，难以观察缺陷本身产生电压对比度变化。在本发明中，基于被检测的二次电子的能量，在获得两种类型的图像之后，即容易形成明显的图像形成电压对比度，以及不容易进行图像的图像，并且获取与电压对比相邻的形状变化区域基于该区域的变化区域作为缺陷位置，可以自动获得高倍率图像。

99. 发明申请

US20080146785A1 ANTIBODY AGAINST TUMOR SPECIFIC ANTIGEN AS TARGET 失效
标题翻译：抗肿瘤抗体作为目标的抗体
公开(公告)号：US20080146785A1
公开(公告)日：2008-06-19
申请号：US11872479
申请日：2007-10-15
申请人： Kimihasa Ichikawa , Shu Takahashi , Toshinori Agatsuma , Keisuke Fukuchi , Takehiro Hirai
发明人： Kimihasa Ichikawa , Shu Takahashi , Toshinori Agatsuma , Keisuke Fukuchi , Takehiro Hirai
IPC分类号： C07K16/00
CPC分类号： C07K16/30 , C07K2317/732 , C12Q1/6886 , C12Q2600/136 , C12Q2600/158
摘要： The present invention relates to a method of detecting cancer by use of an oncogene, a method of screening for an active compound useful to treat and/or prevent cancer, and a pharmaceutical composition for treatment and/or prevention of cancer. More specifically, the present invention provides a method of detecting cancer based on the expression of the human oculospanin gene as a marker and a pharmaceutical composition containing an antibody capable of specifically recognizing human oculospanin and having cytotoxic activity against cancer cells.
摘要翻译：本发明涉及通过使用癌基因检测癌症的方法，筛选用于治疗和/或预防癌症的活性化合物的方法和用于治疗和/或预防癌症的药物组合物。更具体地，本发明提供了一种基于人oculospanin基因作为标记物的表达和含有能够特异性识别人oculospanin并对癌细胞具有细胞毒性活性的抗体的药物组合物来检测癌症的方法。

100. 发明申请

US20070226634A1 Report format setting method and apparatus, and defect review system 有权
标题翻译：报告格式设定方法和设备，缺陷审查系统
公开(公告)号：US20070226634A1
公开(公告)日：2007-09-27
申请号：US11699063
申请日：2007-01-29
申请人： Takehiro Hirai
发明人： Takehiro Hirai
IPC分类号： G06F3/00
CPC分类号： G06F8/10
摘要： Generated is a template edition screen on which to display components of a report as modules by OSD by use of icons. One of the icons is selected by use of a pointing device including a mouse. By a drag-and-drop operation, the icon is placed at a desired position in an output format setup area formed in the same screen. The icon is set in a desired size by another drag-and-drop operation. Details of a module shown by the icon thus placed can be set up in a detail setup area in the same screen. Information on a format thus set up is retained as a template through a retention function, and accordingly can be used easily by simply calling the information. Moreover, the retained template can be edited as well. This makes it possible not only to create a new template, but also to modify an existing template.
摘要翻译：生成的是一个模板编辑屏幕，通过使用图标，通过OSD显示报告的组件作为模块。通过使用包括鼠标的指示设备来选择其中一个图标。通过拖放操作，将图标放置在同一屏幕中形成的输出格式设置区域中的所需位置。通过另一个拖放操作将图标设置为所需的大小。由此放置的图标所示的模块的细节可以在同一屏幕的详细设置区域中设置。关于通过保留功能将由此设置的格式的信息作为模板保留，因此可以通过简单地调用信息来容易地使用。此外，还可以编辑保留的模板。这样做不仅可以创建新的模板，还可以修改现有的模板。

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