专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

31. 发明授权

US06924482B2 Method of inspecting pattern and inspecting instrument 失效
标题翻译：检查模式和检验仪器的方法
公开(公告)号：US06924482B2
公开(公告)日：2005-08-02
申请号：US10395197
申请日：2003-03-25
申请人： Mari Nozoe , Mitsuo Suga , Yoichiro Neo , Hidetoshi Nishiyama
发明人： Mari Nozoe , Mitsuo Suga , Yoichiro Neo , Hidetoshi Nishiyama
IPC分类号： G01R31/28 , G01Q10/00 , G01Q30/04 , G01R31/307 , H01L21/00 , H01L21/66 , G21K7/00
CPC分类号： H01J37/222 , G01R31/307 , H01J37/256 , H01J37/263 , H01J37/265 , H01J37/266 , H01J2237/043 , H01J2237/24564 , H01J2237/2594 , H01J2237/2813 , H01J2237/2817 , H01J2237/304
摘要： Electron beam is irradiated to a wafer in the midst of steps at predetermined intervals by a plurality of times under a condition in which a junction becomes rearward bias and a difference in characteristic of a time period of alleviating charge in the rearward bias is monitored. As a result, charge is alleviated at a location where junction leakage is caused in a time period shorter than that of a normal portion and therefore, a potential difference is produced between the normal portion and a failed portion and is observed in a potential contrast image as a difference in brightness. By consecutively repeating operation of acquiring the image, executing an image processing in real time and storing a position and brightness of the failed portion, the automatic inspection of a designated region can be executed. Information of image, brightness and distribution of the failed portion is preserved and outputted automatically after inspection.
摘要翻译：电子束在连接点成为向后偏置的状态下以预定间隔在步骤中照射到晶片，并且监视在向后偏置中减轻电荷的时间段的特性差。结果，在比正常部分短的时间段内产生结漏电的位置处的电荷被减轻，因此在正常部分和失效部分之间产生电位差，并且在潜在对比图像中观察到电荷作为亮度的差异。通过连续重复获取图像的操作，实时执行图像处理并存储失败部分的位置和亮度，可以执行指定区域的自动检查。故障部分的图像，亮度和分布信息在检查后自动保存并输出。

32. 发明申请

US20050109937A1 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US20050109937A1
公开(公告)日：2005-05-26
申请号：US10933342
申请日：2004-09-03
申请人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
发明人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
IPC分类号： H01L21/66 , G01N23/04 , G01Q10/00 , G01Q20/00 , G01Q30/02 , G01Q30/04 , G21K7/00 , H01J37/22 , H01J37/28 , G01N23/00
CPC分类号： H01J37/28 , G01N23/04 , G01N23/225 , G06T7/74 , G06T2207/10056 , G06T2207/30148 , H01J37/222 , H01J2237/2817
摘要： An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.
摘要翻译：本发明的目的是提供一种用于减少与检查定位或输入操作相关的处理的扫描电子显微镜，从而以高速度高精度地运行。为了实现上述目的，本发明提供了一种扫描电子显微镜，其具有基于预先登记的图案来识别期望位置的功能，该扫描电子显微镜包括用于设置关于图案种类的信息的装置，多个部分之间的间隔构成图案的部分，以及构成图案的部分的尺寸，以及基于由相关装置获得的信息形成由多个部分组成的图案图像的装置。

33. 发明授权

US06897444B1 Multi-pixel electron emission die-to-die inspection 有权
标题翻译：多像素电子发射模 - 模检查
公开(公告)号：US06897444B1
公开(公告)日：2005-05-24
申请号：US10702271
申请日：2003-11-06
申请人： David L. Adler
发明人： David L. Adler
IPC分类号： G01N23/225 , G01Q30/02 , G01Q30/04 , H01J37/26 , H01J37/29 , H01J37/153
CPC分类号： H01J37/26 , G01N23/225 , H01J37/29 , H01J2237/24592 , H01J2237/2538 , H01J2237/2817
摘要： One embodiment disclosed is a method of detecting defects in objects. A selected surface area of an object is inspected with a multi-pixel electron microscope, and first set of data is generated having signal values representing image content of each pixel thereof. Further selected surface area of the object is inspected with said multi-pixel electron microscope, and second set of data is generated having signal values representing image content of each pixel thereof. Corresponding portions of first and second sets of data are stored in memory. Misalignment between stored portions of the first and second sets of data is detected with resolution of a fraction of a pixel, and the stored portions of first and second sets of data are aligned using subpixel interpolation to correct the detected misalignment therebetween. Finally, corresponding subportions of the aligned portions of first and second sets of data are compared to detect differences therebetween.
摘要翻译：公开的一个实施例是检测物体中的缺陷的方法。用多像素电子显微镜检查物体的选择的表面积，并且生成具有表示其每个像素的图像内容的信号值的第一组数据。用所述多像素电子显微镜检查物体的另外选择的表面积，并且生成具有表示其每个像素的图像内容的信号值的第二组数据。第一和第二组数据的相应部分被存储在存储器中。以分辨率为单位的像素的分辨率来检测第一和第二组数据的存储部分之间的对准，并且使用子像素插值来对齐第一组数据和第二组数据的存储部分，以校正其间检测到的不对准。最后，比较第一和第二组数据的对准部分的相应子部分，以检测它们之间的差异。

34. 发明授权

US06894790B2 Micropattern shape measuring system and method 有权
标题翻译：微图形测量系统及方法
公开(公告)号：US06894790B2
公开(公告)日：2005-05-17
申请号：US10291675
申请日：2002-11-12
申请人： Yasuhiro Mitsui , Yasutsugu Usami , Isao Kawata , Yuya Toyoshima , Tadashi Otaka , Nobuyuki Iriki
发明人： Yasuhiro Mitsui , Yasutsugu Usami , Isao Kawata , Yuya Toyoshima , Tadashi Otaka , Nobuyuki Iriki
IPC分类号： G01Q30/04 , H01L23/544 , G01B11/02
CPC分类号： H01L22/34
摘要： A test pattern formed in a scribe line area of a wafer is irradiated with a light beam to measure the width thereof; the test pattern is irradiated with an electron beam so as to measure the width thereof; an amount of change in the width of the test pattern is calculated; a dummy pattern having the same width as that of a semiconductor device of the wafer is irradiated with an electron beam to measure the width thereof; and the width of a pattern is estimated by the use of the calculated amount of width change so as to determine the shape of the pattern. Thus, a shape measuring system and method capable of determining the shape of a micropattern in a semiconductor device without changing the dimensions of the micropattern can be provided.
摘要翻译：用光束照射在晶片的划线区域中形成的测试图案，以测量其宽度; 用电子束照射测试图案以测量其宽度; 计算测试图案的宽度的变化量; 用电子束照射具有与晶片的半导体器件相同的宽度的虚拟图案，以测量其宽度; 并且通过使用计算出的宽度变化量来估计图案的宽度，以便确定图案的形状。因此，可以提供能够在不改变微图案的尺寸的情况下确定半导体器件中的微图案的形状的形状测量系统和方法。

35. 发明授权

US06888137B1 Instrument and method for observing selected stored images acquired from a scanning charged-particle beam 有权
标题翻译：用于观察从扫描带电粒子束获取的选定存储图像的仪器和方法
公开(公告)号：US06888137B1
公开(公告)日：2005-05-03
申请号：US09593867
申请日：2000-06-14
申请人： Atsushi Yamada , Tsutomu Negishi , Toshiharu Kobayashi , Norio Watanabe
发明人： Atsushi Yamada , Tsutomu Negishi , Toshiharu Kobayashi , Norio Watanabe
IPC分类号： H01J37/20 , G01B15/00 , G01B15/08 , G01N23/225 , G01Q10/00 , G01Q30/04 , H01J37/22 , H01J37/28 , H01J37/00
CPC分类号： H01J37/28 , H01J37/22
摘要： There is disclosed a scanning electron charged-particle beam instrument facilitating a search for a desired field of view on a specimen. Also, a method of observing a specimen image with this instrument is disclosed. In field of view search mode, low-magnification images are gained from plural regions on the specimen. The image signals gained from the regions are sent to corresponding image memories and stored there. At the same time, the X and Y coordinates of the specimen at the low magnification are stored. If the image is rotated, the angular position and the direction are simultaneously stored. The image signals stored in the image memories are supplied to a CRT, and plural specimen images are displayed on the CRT. If a human operator selects a desired one out of the displayed images, a control unit controls a stage control unit according to coordinates read out, driving an X-Y translation stage. The stage is moved to bring a specimen position corresponding to the selected image onto the optical axis of the electron beam.
摘要翻译：公开了一种扫描电子带电粒子束仪器，便于在样本上搜索期望的视场。另外，公开了利用该仪器观察标本图像的方法。在视野搜索模式下，从样本上的多个区域获得低倍率图像。从这些区域获得的图像信号被发送到相应的图像存储器并存储在那里。同时，存储低倍率下的样品的X和Y坐标。如果图像旋转，则同时存储角位置和方向。存储在图像存储器中的图像信号被提供给CRT，并且在CRT上显示多个标本图像。如果人类操作者从所显示的图像中选择期望的一个，则控制单元根据读出的坐标来控制舞台控制单元，驱动X-Y平移舞台。移动台以使与所选图像相对应的样本位置到电子束的光轴上。

36. 发明授权

US06878935B2 Method of measuring sizes in scan microscopes 失效
标题翻译：测量扫描显微镜尺寸的方法
公开(公告)号：US06878935B2
公开(公告)日：2005-04-12
申请号：US10115376
申请日：2002-04-03
申请人： Arkady Nikitin
发明人： Arkady Nikitin
IPC分类号： G01Q30/02 , G01Q30/04 , G01Q40/00 , G21K7/00 , G01N23/00
CPC分类号： H01J37/265 , H01J2237/2817 , H01J2237/2826
摘要： For measuring sizes in a scanning measuring microscope a nominal magnification is selected so that an object image occupies a substantial part of a field of view, an actual magnification is calculated depending on a coordinate on a screen along the direction of measurement, the object is positioned on a microscope table so that a line of scanning coincides with a direction of measurement and scanned by an electron beam to obtain a function of a video signal, points are localized which correspond to left and right edges of the object on a curve, and a size of the object is determined from the coordinates of the left and right edges and the magnification of the microscope changing from one point to the other.
摘要翻译：为了在扫描测量显微镜中测量尺寸，选择标称倍率，使得对象图像占据视场的很大一部分，实际倍率根据沿着测量方向的屏幕上的坐标来计算，对象被定位在显微镜台上，使得扫描线与测量方向一致，并通过电子束扫描以获得视频信号的功能，对应于曲线上的对象的左边缘和右边缘的点被定位，并且物体的大小根据左右边缘的坐标和显微镜从一个点到另一个点的放大倍率来确定。

37. 发明授权

US06864479B1 High dynamic range mass spectrometer 有权
标题翻译：高动态范围质谱仪
公开(公告)号：US06864479B1
公开(公告)日：2005-03-08
申请号：US10070118
申请日：2000-08-31
申请人： Stephen Davis , Alexander A. Makarov , Jonathan Hughes
发明人： Stephen Davis , Alexander A. Makarov , Jonathan Hughes
IPC分类号： G01N27/62 , G01Q30/04 , G01Q60/00 , H01J49/02 , H01J49/06 , H01J49/40 , H01J49/04
CPC分类号： H01J49/025
摘要： A mass spectrometer comprises an ion source which produces an ion beam from a substance to be analysed and a detector to detect a quantity of ions incident thereon. The detector includes two elements (16, 18) each of which detect a part of the quantity of ions and an attenuation device attenuates the quantity of ions reaching one of the detector elements. At least one of the detector elements (16, 18) is connected to a time to digital converter (TDC) to allow counting of the ions and at least one of the detector elements is connected in parallel to both a time to digital converter (TDC) and an analogue to digital converter (ADC).
摘要翻译：质谱仪包括从待分析的物质产生离子束的离子源和检测入射在其上的离子的量的检测器。检测器包括两个元件（16,18），每个元件检测一部分离子量，并且衰减器件衰减到达其中一个检测器元件的离子量。检测器元件（16,18）中的至少一个被连接到时间到数字转换器（TDC）以允许对离子的计数，并且至少一个检测器元件与时间数字转换器（TDC）并联连接）和模数转换器（ADC）。

38. 发明授权

US06862924B2 Augmenting reality system for real-time nanomanipulation using atomic force microscopy 失效
标题翻译：使用原子力显微镜增强现实系统的实时纳米操纵
公开(公告)号：US06862924B2
公开(公告)日：2005-03-08
申请号：US10428578
申请日：2003-05-02
申请人： Ning Xi , Wai Keung Fung , Mengmeng Yu , Guangyong Li
发明人： Ning Xi , Wai Keung Fung , Mengmeng Yu , Guangyong Li
IPC分类号： G01Q30/04 , G01Q40/00 , G01Q60/24 , G01B5/28 , G01B7/34
CPC分类号： G01Q30/04 , Y10S977/85 , Y10S977/855
摘要： An improved method is provided for performing nanomanipulations using an atomic force microscope. The method includes: performing a nanomanipulation operation on a sample surface using an atomic force microscope; determining force data for forces that are being applied to the tip of the cantilever during the nanomanipulation operation, where the force data is derived along at least two perpendicularly arranged axis; and updating a model which represents the topography of the sample surface using the force data.
摘要翻译：提供了一种使用原子力显微镜进行纳米操作的改进方法。该方法包括：使用原子力显微镜对样品表面进行纳米操作操作; 确定在纳米操纵操作期间施加到悬臂的尖端的力的力数据，其中力数据沿着至少两个垂直布置的轴被导出; 以及使用力数据更新表示样品表面的形貌的模型。

39. 发明授权

US06855974B2 Ferroelectric capacitor, process for production thereof and semiconductor device using the same 失效
标题翻译：铁电电容器，其制造方法和使用其的半导体器件
公开(公告)号：US06855974B2
公开(公告)日：2005-02-15
申请号：US10743814
申请日：2003-12-24
申请人： Osamu Matsuura , Kenji Maruyama , Kazuaki Takai
发明人： Osamu Matsuura , Kenji Maruyama , Kazuaki Takai
IPC分类号： C23C14/08 , C23C16/40 , G01Q30/04 , G01Q30/10 , G01Q70/04 , G01Q70/14 , H01L21/02 , H01L21/316 , H01L21/8246 , H01L27/105 , H01L27/115 , H01L31/062
CPC分类号： H01L27/11502 , H01L27/11507 , H01L28/56
摘要： A ferroelectric capacitor includes a pair of electrodes, and at least one ferroelectric held between the pair of electrodes, in which the ferroelectric includes a first ferroelectric layer having a surface roughness (RMS) determined with an atomic force microscope of 10 nm or more; and a second ferroelectric layer being arranged adjacent to the first ferroelectric layer and having an RMS of 5 nm or less. A process produces such a ferroelectric capacitor by forming a first ferroelectric layer on or above one of a pair of electrodes at a temperature equal to or higher than a crystallization temperature at which the first ferroelectric layer takes on a ferroelectric crystalline structure, and forming a second ferroelectric layer on the first ferroelectric layer at a temperature lower than a crystallization temperature at which the second ferroelectric layer takes on a ferroelectric crystalline structure.
摘要翻译：铁电电容器包括一对电极，并且至少一个铁电体保持在该对电极之间，其中铁电体包括由原子力显微镜确定的表面粗糙度（RMS）为10nm以上的第一铁电层; 并且第二铁电层被布置为与第一铁电层相邻并且具有5nm或更小的RMS。一种工艺通过在等于或高于第一铁电层承受铁电晶体结构的结晶温度的温度下，在一对电极中的一个或其上方形成第一铁电层来制造这种铁电电容器，并且形成第二铁电层铁电层在第一铁电体层上的温度低于第二铁电层呈铁电晶体结构的结晶温度。

40. 发明申请

US20050029450A1 Sensing mode atomic force microscope 失效
标题翻译：感应模式原子力显微镜
公开(公告)号：US20050029450A1
公开(公告)日：2005-02-10
申请号：US10933591
申请日：2004-09-03
申请人： Paul Hough , Chengpu Wang
发明人： Paul Hough , Chengpu Wang
IPC分类号： G01Q10/04 , G01Q10/06 , G01Q30/04 , G01Q60/24 , G01Q60/28 , G01Q60/38 , G01N23/00 , G01B5/28 , G21K7/00
CPC分类号： G01Q60/38 , G01Q10/06 , Y10S977/851 , Y10S977/852 , Y10S977/863 , Y10S977/869 , Y10S977/875
摘要： An atomic force microscope is described having a cantilever comprising a base and a probe tip on an end opposite the base; a cantilever drive device connected to the base; a magnetic material coupled to the probe tip, such that when an incrementally increasing magnetic field is applied to the magnetic material an incrementally increasing force will be applied to the probe tip; a moveable specimen base; and a controller constructed to obtain a profile height of a specimen at a point based upon a contact between the probe tip and a specimen, and measure an adhesion force between the probe tip and the specimen by, under control of a program, incrementally increasing an amount of a magnetic field until a release force, sufficient to break the contact, is applied. An imaging method for atomic force microscopy involving measuring a specimen profile height and adhesion force at multiple points within an area and concurrently displaying the profile and adhesion force for each of the points is also described. A microscope controller is also described and is constructed to, for a group of points, calculate a specimen height at a point based upon a cantilever deflection, a cantilever base position and a specimen piezo position; calculate an adhesion force between a probe tip and a specimen at the point by causing an incrementally increasing force to be applied to the probe tip until the probe tip separates from a specimen; and move the probe tip to a new point in the group.
摘要翻译：描述了一种具有悬臂的原子力显微镜，该悬臂包括在与基座相对的端部上的基部和探针尖端; 连接到基座的悬臂驱动装置; 耦合到探针尖端的磁性材料，使得当向磁性材料施加递增增加的磁场时，递增增加的力将被施加到探针尖端; 可动标本基地以及控制器，其被构造成在基于所述探针针尖和样本之间的接触的点处获得样本的轮廓高度，并且在程序的控制下通过程序的控制来测量所述探针针尖和所述样本之间的粘附力，施加足以破坏接触的释放力的磁场的量。还描述了用于原子力显微镜的成像方法，其涉及测量区域内的多个点处的样本轮廓高度和粘附力，并且同时显示每个点的轮廓和附着力。还描述了一种显微镜控制器，并被构造成针对一组点，在基于悬臂偏转，悬臂底座位置和样本压电位置的点处计算样本高度; 通过对探针尖端施加递增增加的力直到探针尖端与试样分离来计算探针尖端和样品之间的粘附力; 并将探针尖端移动到组中的新点。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式