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1. 发明申请

US20090134522A1 Micro-Electromechanical System Memory Device and Method of Making the Same 审中-公开
标题翻译：微机电系统存储器及其制作方法
公开(公告)号：US20090134522A1
公开(公告)日：2009-05-28
申请号：US12085506
申请日：2006-11-22
申请人： Charles Gordon Smith , Robert Kazinczi , Robertus P. Van Kampen
发明人： Charles Gordon Smith , Robert Kazinczi , Robertus P. Van Kampen
IPC分类号： H01L29/45 , H01L21/441
CPC分类号： B81C1/00666 , B81B3/001 , B81B2203/0118 , B81C2201/0109 , G11C23/00
摘要： A method of manufacturing a non-volatile memory bitcell comprises the steps of depositing a first layer of conductive material on a substrate and patterning and etching the first layer of conductive material to form three non-linearly disposed electrodes. The method also comprises the steps of depositing a first layer of sacrificial material on the electrodes and the substrate and providing an elongate cantilever structure on the first layer of sacrificial material such that the cantilever structure and at least a portion of each electrode overlap each other. The method also includes the steps of depositing a second layer of sacrificial material on the cantilever structure and the first layer of sacrificial material and providing a capping layer on the second layer of sacrificial material and providing holes in the capping layer such that at least a portion of the second layer of sacrificial material is exposed. Finally, the method provides the step of removing the first and second layers of sacrificial material through the holes provided in the capping layer, thereby defining a cavity in which the cantilever structure is suspended.
摘要翻译：一种制造非易失性存储器位单元的方法包括以下步骤：将第一层导电材料沉积在衬底上，并对第一层导电材料进行图案化和蚀刻以形成三个非线性布置的电极。该方法还包括以下步骤：在电极和衬底上沉积牺牲材料的第一层，并在第一牺牲材料层上提供细长的悬臂结构，使得悬臂结构和每个电极的至少一部分彼此重叠。该方法还包括以下步骤：将第二层牺牲材料沉积在悬臂结构和第一牺牲材料层上，并在牺牲材料的第二层上提供覆盖层，并在封盖层中提供孔，使得至少一部分的第二层牺牲材料被暴露。最后，该方法提供了通过设置在覆盖层中的孔去除第一层和第二层牺牲材料的步骤，从而限定悬臂悬臂结构的空腔。

2. 发明授权

US07867886B2 Method of enclosing a micro-electromechanical element 有权
标题翻译：封闭微机电元件的方法
公开(公告)号：US07867886B2
公开(公告)日：2011-01-11
申请号：US12085428
申请日：2006-11-22
申请人： Charles Gordon Smith , Robertus P. Van Kampen
发明人： Charles Gordon Smith , Robertus P. Van Kampen
IPC分类号： H01L21/445 , B81C1/00 , H01L23/525
CPC分类号： B81C1/00333 , H01L23/5256 , H01L2924/0002 , H01L2924/00
摘要： A method, in a complementary metal oxide semiconductor fabrication process, of creating a layered housing containing a micro-electromechanical system device, the method comprising the steps of providing a cavity in at least one layer of the housing, the cavity being accessible through via holes in a layer of insulating material deposited thereon, and the layer of insulating material being covered by a thin film layer of conductive material. The method further comprises the step of hydrophobically treating at least a portion of the inner surface of the cavity. Finally the method comprises the steps of submerging the wafer in an electroplating solution and electroplating a conductive layer onto the thin film layer of conductive material such that the cavity remains free of electroplating solution.
摘要翻译：在互补金属氧化物半导体制造工艺中，制造包含微机电系统器件的分层壳体的方法，所述方法包括以下步骤：在所述壳体的至少一层中提供空腔，所述空腔可通过通孔在其上沉积的绝缘材料层中，并且绝缘材料层被导电材料的薄膜层覆盖。该方法还包括对空腔的内表面的至少一部分进行疏水处理的步骤。最后，该方法包括以下步骤：将晶片浸入电镀溶液中，并将导电层电镀到导电材料的薄膜层上，使得空腔保持不含电镀溶液。

3. 发明申请

US20090298215A1 Method of Enclosing a Micro-Electromechanical Element 有权
标题翻译：封闭微机电元件的方法
公开(公告)号：US20090298215A1
公开(公告)日：2009-12-03
申请号：US12085428
申请日：2006-11-22
申请人： Charles Gordon Smith , Robertus P. Van Kampen
发明人： Charles Gordon Smith , Robertus P. Van Kampen
IPC分类号： H01L21/50
CPC分类号： B81C1/00333 , H01L23/5256 , H01L2924/0002 , H01L2924/00
摘要： A method, in a complementary metal oxide semiconductor fabrication process, of creating a layered housing containing a micro-electromechanical system device, the method comprising the steps of providing a cavity in at least one layer of the housing, the cavity being accessible through via holes in a layer of insulating material deposited thereon, and the layer of insulating material being covered by a thin film layer of conductive material. The method further comprises the step of hydrophobically treating at least a portion of the inner surface of the cavity. Finally the method comprises the steps of submerging the wafer in an electroplating solution and electroplating a conductive layer onto the thin film layer of conductive material such that the cavity remains free of electroplating solution.
摘要翻译：在互补金属氧化物半导体制造工艺中，制造包含微机电系统器件的分层壳体的方法，所述方法包括以下步骤：在所述壳体的至少一层中提供空腔，所述空腔可通过通孔在其上沉积的绝缘材料层中，并且绝缘材料层被导电材料的薄膜层覆盖。该方法还包括对空腔的内表面的至少一部分进行疏水处理的步骤。最后，该方法包括以下步骤：将晶片浸入电镀溶液中，并将导电层电镀到导电材料的薄膜层上，使得空腔保持不含电镀溶液。

4. 发明授权

US08488230B2 Fabrication of a floating rocker MEMS device for light modulation 有权
标题翻译：用于光调制的浮动摇臂MEMS装置的制造
公开(公告)号：US08488230B2
公开(公告)日：2013-07-16
申请号：US12862036
申请日：2010-08-24
申请人： Charles Gordon Smith , Richard L. Knipe
发明人： Charles Gordon Smith , Richard L. Knipe
IPC分类号： G02B26/00
CPC分类号： G02B26/0833 , B81B2201/042 , B81C1/00317 , B81C2203/0136 , B81C2203/0145 , G02B26/0841
摘要： The current disclosure shows how to make a fast switching array of mirrors for projection displays. Because the mirror does not have a via in the middle connecting to the underlying spring support, there is an improved contrast ratio that results from not having light scatter off the legs or vias like existing technologies. Because there are no supporting contacts, the mirror can be made smaller making smaller pixels that can be used to make higher density displays. In addition, because there is not restoring force from any supporting spring support, the mirror stays in place facing one or other direction due to adhesion. This means there is no need to use a voltage to hold the mirror in position. This means that less power is required to run the display.
摘要翻译：目前的公开内容显示了如何制造用于投影显示器的反射镜的快速切换阵列。因为反射镜在连接到下面的弹簧支撑件的中间没有通孔，所以具有改善的对比度，这是由于不像现有技术那样从腿部或通孔没有光散射。因为没有支撑触点，镜子可以做得更小，从而可以用较小的像素来制作更高密度的显示器。另外，由于没有来自任何支撑弹簧支撑件的恢复力，因为粘附，反射镜保持在面向一个或另一个方向的位置。这意味着不需要使用电压将镜子保持在适当的位置。这意味着运行显示器需要较少的电力。

5. 发明申请

US20140246740A1 IMPLANTATION OF GASEOUS CHEMICALS INTO CAVITIES FORMED IN INTERMEDIATE DIELECTRICS LAYERS FOR SUBSEQUENT THERMAL DIFFUSION RELEASE 有权
标题翻译：将气体化学物质纳入用于后续热扩散释放的中间电介质层中的CAVI
公开(公告)号：US20140246740A1
公开(公告)日：2014-09-04
申请号：US14352057
申请日：2012-04-19
申请人： Willibrordus Gerardus Van Den Hoek , Robertus Petrus Van Kampen , Richard L. Knipe , Charles Gordon Smith
发明人： Willibrordus Gerardus Van Den Hoek , Robertus Petrus Van Kampen , Richard L. Knipe , Charles Gordon Smith
IPC分类号： B81B3/00 , B81B7/00 , B81C1/00
CPC分类号： H01L29/84 , B81B3/0059 , B81B7/0035 , B81B2203/0127 , B81C1/00285 , B81C1/00293 , B81C1/00682
摘要： The present invention generally relates to methods for increasing the lifetime of MEMS devices by reducing the landing velocity on switching by introducing gas into the cavity surrounding the switching element of the MEMS device. The gas is introduced using ion implantation into a cavity close to the cavity housing the switching element and connected to that cavity by a channel through which the gas can flow from one cavity to the other. The implantation energy is chosen to implant many of the atoms close to the inside roof and floor of the cavity so that on annealing those atoms diffuse into the cavity. The gas provides gas damping which reduces the kinetic energy of the switching MEMS device which then should have a longer lifetime.
摘要翻译：本发明一般涉及通过将气体引入到围绕MEMS器件的开关元件的空腔中来降低开关时降低着陆速度来增加MEMS器件寿命的方法。使用离子注入将气体引入到容纳开关元件的腔附近的空腔中，并且通过通道将气体连接到该空腔，气体可以通过该通道从一个空腔流到另一个空腔。选择植入能量以植入靠近腔室的内部屋顶和底部的许多原子，使得在退火时，这些原子扩散到空腔中。气体提供气体阻尼，其降低开关MEMS器件的动能，然后应该具有更长的寿命。

6. 发明授权

US08861218B2 Device containing plurality of smaller MEMS devices in place of a larger MEMS device 有权
标题翻译：装置包含多个较小的MEMS器件代替较大的MEMS器件
公开(公告)号：US08861218B2
公开(公告)日：2014-10-14
申请号：US12614929
申请日：2009-11-09
申请人： Charles Gordon Smith , Richard L. Knipe , Vikram Joshi , Roberto Gaddi , Anartz Unamuno , Robertus Petrus Van Kampen
发明人： Charles Gordon Smith , Richard L. Knipe , Vikram Joshi , Roberto Gaddi , Anartz Unamuno , Robertus Petrus Van Kampen
IPC分类号： H05K1/18 , H01G5/40 , G01P15/135 , H01G5/18 , B81B7/04 , G01P15/125 , G01P15/08
CPC分类号： B81B7/04 , B81B2201/0221 , B81B2201/0235 , B81B2207/053 , G01P15/0802 , G01P15/125 , G01P15/135 , H01G5/18 , H01G5/40
摘要： Embodiments disclosed herein generally include using a large number of small MEMS devices to replace the function of an individual larger MEMS device or digital variable capacitor. The large number of smaller MEMS devices perform the same function as the larger device, but because of the smaller size, they can be encapsulated in a cavity using complementary metal oxide semiconductor (CMOS) compatible processes. Signal averaging over a large number of the smaller devices allows the accuracy of the array of smaller devices to be equivalent to the larger device. The process is exemplified by considering the use of a MEMS based accelerometer switch array with an integrated analog to digital conversion of the inertial response. The process is also exemplified by considering the use of a MEMS based device structure where the MEMS devices operate in parallel as a digital variable capacitor.
摘要翻译：本文公开的实施例通常包括使用大量的小MEMS器件来代替单个更大的MEMS器件或数字可变电容器的功能。大量较小的MEMS器件具有与较大器件相同的功能，但是由于尺寸较小，因此可以使用互补金属氧化物半导体（CMOS）兼容工艺封装在腔中。通过大量较小器件的信号平均，允许较小器件阵列的精度等同于较大的器件。通过考虑使用具有惯性响应的集成模数转换的基于MEMS的加速度计开关阵列来举例说明该过程。还通过考虑使用MEMS器件结构（其中MEMS器件并行地作为数字可变电容器）来使用该过程。

7. 发明申请

US20110043892A1 FABRICATION OF A FLOATING ROCKER MEMS DEVICE FOR LIGHT MODULATION 有权
标题翻译：用于轻型调制的浮动式MEMS器件的制造
公开(公告)号：US20110043892A1
公开(公告)日：2011-02-24
申请号：US12862036
申请日：2010-08-24
申请人： Charles Gordon Smith , Richard L. Knipe
发明人： Charles Gordon Smith , Richard L. Knipe
IPC分类号： G02B26/00 , B05D3/10 , B05D5/12
CPC分类号： G02B26/0833 , B81B2201/042 , B81C1/00317 , B81C2203/0136 , B81C2203/0145 , G02B26/0841
摘要： The current disclosure shows how to make a fast switching array of mirrors for projection displays. Because the mirror does not have a via in the middle connecting to the underlying spring support, there is an improved contrast ratio that results from not having light scatter off the legs or vias like existing technologies. Because there are no supporting contacts, the mirror can be made smaller making smaller pixels that can be used to make higher density displays. In addition, because there is not restoring force from any supporting spring support, the mirror stays in place facing one or other direction due to adhesion. This means there is no need to use a voltage to hold the mirror in position. This means that less power is required to run the display.
摘要翻译：目前的公开内容显示了如何制造用于投影显示器的反射镜的快速切换阵列。因为反射镜在连接到下面的弹簧支撑件的中间没有通孔，所以存在改善的对比度，这是由于不像现有技术那样从腿部或通孔没有光散射。因为没有支撑触点，镜子可以做得更小，从而可以用较小的像素来制作更高密度的显示器。另外，由于没有来自任何支撑弹簧支撑件的恢复力，因为粘附，反射镜保持在面向一个或另一个方向的位置。这意味着不需要使用电压将镜子保持在适当的位置。这意味着运行显示器需要较少的电力。

8. 发明授权

US5677823A Bi-stable memory element 失效
标题翻译：双稳态存储元件
公开(公告)号：US5677823A
公开(公告)日：1997-10-14
申请号：US549697
申请日：1995-11-06
申请人： Charles Gordon Smith
发明人： Charles Gordon Smith
IPC分类号： G11C11/50 , G11C23/00 , H01H1/00 , H01H1/20 , H01H1/66 , H01H59/00 , H01L27/10 , H01L49/00
CPC分类号： H01H1/0036 , G11C11/50 , G11C23/00 , H01H59/0009 , H01H1/20 , H01H1/66 , H01H2001/0042 , H01H2059/0036 , H01H2059/0063
摘要： A bi-stable memory element (1) comprises a base contact (3), and a bridging contact (8), both made from an electrically conductive material. The bridging contact (8) is dimensioned so as to have two stable positions, in one of which the bridging contact (8) is in contact with the base contact (3), and in the other of which the bridging contact (8) is spaced apart from the base contact (3). Deflection means (4, 5) deflects the bridging contact (8) from one stable position to the other.
摘要翻译： PCT No.PCT / GB94 / 00977 Sec。 371日期：1995年11月6日 102（e）日期1995年11月6日PCT 1994年5月6日PCT PCT。公开号WO94 / 27308 日期1994年11月24日双稳态存储元件（1）包括由导电材料制成的基极触点（3）和桥接触点（8）。桥接触点（8）的尺寸设计成具有两个稳定的位置，其中桥接触点（8）中的一个与基极触点（3）接触，而另一个桥接触点（8）是与基部触点（3）间隔开。偏转装置（4,5）将桥接接触件（8）从一个稳定位置偏转到另一个。

9. 发明授权

US09171966B2 Implantation of gaseous chemicals into cavities formed in intermediate dielectrics layers for subsequent thermal diffusion release 有权
标题翻译：将气态化学品植入到形成于中间介质层中的空腔中，用于随后的热扩散释放
公开(公告)号：US09171966B2
公开(公告)日：2015-10-27
申请号：US14352057
申请日：2012-04-19
申请人： Willibrordus Gerardus Van Den Hoek , Robertus Petrus Van Kampen , Richard L. Knipe , Charles Gordon Smith
发明人： Willibrordus Gerardus Van Den Hoek , Robertus Petrus Van Kampen , Richard L. Knipe , Charles Gordon Smith
IPC分类号： H01L29/84 , B81C1/00 , B81B3/00 , B81B7/00
CPC分类号： H01L29/84 , B81B3/0059 , B81B7/0035 , B81B2203/0127 , B81C1/00285 , B81C1/00293 , B81C1/00682
摘要： The present invention generally relates to methods for increasing the lifetime of MEMS devices by reducing the landing velocity on switching by introducing gas into the cavity surrounding the switching element of the MEMS device. The gas is introduced using ion implantation into a cavity close to the cavity housing the switching element and connected to that cavity by a channel through which the gas can flow from one cavity to the other. The implantation energy is chosen to implant many of the atoms close to the inside roof and floor of the cavity so that on annealing those atoms diffuse into the cavity. The gas provides gas damping which reduces the kinetic energy of the switching MEMS device which then should have a longer lifetime.
摘要翻译：本发明一般涉及通过将气体引入到围绕MEMS器件的开关元件的空腔中来降低开关时降低着陆速度来增加MEMS器件寿命的方法。使用离子注入将气体引入到容纳开关元件的腔附近的空腔中，并且通过通道将气体连接到该空腔，气体可以通过该通道从一个空腔流到另一个空腔。选择植入能量以植入靠近腔室的内部屋顶和底部的许多原子，使得在退火时，这些原子扩散到空腔中。气体提供气体阻尼，其降低开关MEMS器件的动能，然后应该具有更长的寿命。

10. 发明授权

US06300149B1 Integrated circuit device manufacture 有权
标题翻译：集成电路器件制造
公开(公告)号：US06300149B1
公开(公告)日：2001-10-09
申请号：US09242037
申请日：1999-02-05
申请人： Charles Gordon Smith
发明人： Charles Gordon Smith
IPC分类号： H01L2166
CPC分类号： H01L24/95 , H01L25/0655 , H01L25/50 , H01L29/0657 , H01L2224/95085 , H01L2224/95136 , H01L2224/95144 , H01L2224/95145 , H01L2224/95146 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2924/01047 , H01L2924/01075 , H01L2924/01078 , H01L2924/01082 , H01L2924/12042 , H01L2924/14 , H01L2924/00
摘要： A method of manufacturing an integrated circuit device from a plurality of physically separate individual electrical elements comprises manufacturing each of the plurality of elements and verifying the operability of each of the elements. Inoperable elements are discarded and he operable elements retained in a fluid. The retained elements are aligned so that each element is adjacent to at least one other element and the arrangement of elements treated to provide connections therebetween and thereby to produce a single integrated circuit device.
摘要翻译：从多个物理分离的单个电气元件制造集成电路器件的方法包括制造多个元件中的每一个并验证每个元件的可操作性。不可操作的元件被丢弃，并且可操作元件保留在流体中。保留的元件被对准，使得每个元件与至少一个其它元件相邻，并且被处理以在其间提供连接并由此产生单个集成电路器件的元件的布置。

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