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1. 发明授权

US4464050A Apparatus for detecting optically defects 失效
标题翻译：用于检测光学缺陷的设备
公开(公告)号：US4464050A
公开(公告)日：1984-08-07
申请号：US345153
申请日：1982-02-02
申请人： Kiichi Kato , Masaharu Sakamoto , Shoji Yoshikawa , Kunio Yamamiya , Hiroshi Kodama , Ken Ohsima
发明人： Kiichi Kato , Masaharu Sakamoto , Shoji Yoshikawa , Kunio Yamamiya , Hiroshi Kodama , Ken Ohsima
IPC分类号： G01N21/88 , G01N21/95 , G01N21/956 , G11B7/0037 , G11B7/26 , H01L21/66
CPC分类号： G11B7/00375 , G01N21/9506
摘要： An apparatus for detecting optically defects in object such as original glass disc for use in manufacturing video and audio discs by projecting a laser light flux onto the object includes an objective lens for focussing the incident laser light flux onto the object as a small light spot, the laser light flux passing through the objective lens at only its central portion. When the object has no defect in the light spot area, the laser light flux is regularly reflected by the object surface, but when the object includes a defect in the light spot area, the light flux is scattered by the defect. The directly reflected and scattered light fluxes are collected by the objective lens and are then separated from each other by means of a small mirror arranged in an optical axis of the directly reflected light flux. The directly reflected and scattered light fluxes thus separated are received by first and second light detectors. A cylindrical lens is inserted between the small mirror and the first light detector having four divided light receiving regions. The objective lens is driven into an in-focussed position under the control of a focussing error signal which is derived by processing output signals from the four divided light receiving regions. A defect signal is derived by processing output signals supplied from the first and second light detectors.
摘要翻译：用于通过将激光光束投射到物体上来制造视频和音频盘的用于检测用于制造视频和音频盘的原始玻璃盘的物体的光学缺陷的装置包括：用于将入射的激光光束聚焦到物体上作为小光斑的物镜，激光光束仅在其中心部分通过物镜。当物体在光斑区域没有缺陷时，激光光束被物体表面规则地反射，但是当物体包含光斑区域的缺陷时，光通量被缺陷散射。直接反射和散射的光束由物镜收集，然后通过布置在直射反射光束的光轴上的小反射镜彼此分离。这样分离的直接反射和散射的光束被第一和第二光检测器接收。在具有四个分开的光接收区域的小反射镜和第一光检测器之间插入柱面透镜。在通过处理来自四个分开的光接收区域的输出信号导出的聚焦误差信号的控制下，物镜被驱动到聚焦位置。通过处理从第一和第二光检测器提供的输出信号来导出缺陷信号。

2. 发明授权

US4505585A System for detecting defects on an optical surface 失效
标题翻译：用于检测光学表面上的缺陷的系统
公开(公告)号：US4505585A
公开(公告)日：1985-03-19
申请号：US362680
申请日：1982-03-29
申请人： Shoji Yoshikawa , Ken Ohshima , Hiroshi Kodama , Kunio Yamamiya , Masaharu Sakamoto , Kiichi Kato
发明人： Shoji Yoshikawa , Ken Ohshima , Hiroshi Kodama , Kunio Yamamiya , Masaharu Sakamoto , Kiichi Kato
IPC分类号： G01N21/84 , G01N21/88 , G01N21/95 , G06T7/00 , G11B7/0037 , G01B11/30 , G06F15/20
CPC分类号： G01N21/9506 , G11B7/00375 , G01N2021/8864 , G01N21/9501
摘要： In a system for detecting defects on an optical surface, a disk to be inspected is mounted on a turntable, and is attracted on the surface of the turntable. On the disk is provided an optical head having an objective lens located at its focal point on the surface of the disk. A laser beam emitted from a laser unit is projected through the optical head onto the disk, is reflected on the disk, and is then directed through the optical head to a photo detector. The optical head is moved in the radial direction of the disk as the turntable is rotated, and the disk is helically scanned by the laser beam. Only a defect signal is extracted from an electrical signal generated from the photo detector in a defect signal generator. The defect signal is compared in a data processing unit, and is converted to defect information of different size. When it is judged that a prescribed region on the surface of the disk is scanned by a position signal from a position sensor for detecting the position of the optical head, the data processing unit generates an address, and the defect information is stored in each size in specific assigned locations of the RAM. The defect information thus stored is displayed on a CRT or is printed out by a printer.
摘要翻译：在用于检测光学表面上的缺陷的系统中，待检查的盘安装在转盘上，并且被吸引在转台的表面上。在光盘上设置有一个光学头，该光学头具有位于其表面上的焦点处的物镜。从激光单元发射的激光束通过光头投影到盘上，在盘上被反射，然后被引导通过光头到光检测器。当转盘旋转时，光头在盘的径向上移动，并且盘被激光束螺旋扫描。在缺陷信号发生器中仅从光电检测器产生的电信号中提取缺陷信号。在数据处理单元中比较缺陷信号，并将其转换为不同大小的缺陷信息。当通过来自用于检测光头的位置的位置传感器的位置信号来判断盘的表面上的规定区域被扫描时，数据处理单元生成地址，并且以每个尺寸存储缺陷信息在RAM的特定分配位置。由此存储的缺陷信息显示在CRT上，或由打印机打印出来。

3. 发明授权

US4499514A Disc drive apparatus 失效
标题翻译：盘驱动装置
公开(公告)号：US4499514A
公开(公告)日：1985-02-12
申请号：US362614
申请日：1982-03-29
申请人： Kunio Yamamiya , Hiroshi Kodama , Ken Ohshima , Shoji Yoshikawa , Kiichi Kato , Masaharu Sakamoto
发明人： Kunio Yamamiya , Hiroshi Kodama , Ken Ohshima , Shoji Yoshikawa , Kiichi Kato , Masaharu Sakamoto
IPC分类号： G11B17/028 , G11B19/20 , G11B23/00 , G11B25/04 , G11B5/012
CPC分类号： G11B17/0282 , G11B19/2009 , G11B23/00 , G11B25/043
摘要： A disc drive apparatus for driving a disc selected from discs of various diameters with and without a central hole comprises: a turntable with a hole at the center of rotation thereof; a turntable support for rotatably supporting the turntable; a motor for driving the turntable; a centering member to be detachably inserted in the hole of the turntable and for mounting a disc with a central hole; a plurality of elastic disc support members which are coaxial with the center of rotation of the turntable, which extend from the surface of the turntable, and which form a plurality of annular shapes; centering index marks, disposed on the turntable, for centering a disc without a central hole; a vacuum pump; and suction channels, one end of which is open to the surface of the turntable and the other end of which is connected to the vacuum pump, for fixing on some of the disc support members the disc selected from discs of various diameters with and without a central hole and placed on some of said disc support members.
摘要翻译：一种盘驱动装置，用于驱动选自具有和不具有中心孔的各种直径的盘的盘，包括：具有在其旋转中心的孔的转台; 用于可旋转地支撑转盘的转盘支撑件; 用于驱动转台的电机; 定心构件可拆卸地插入转盘的孔中并用于安装具有中心孔的盘; 与转盘的旋转中心同轴的多个弹性盘支撑构件，其从转台的表面延伸并且形成多个环形形状; 设置在转盘上的定心折痕标记，用于使没有中心孔的圆盘定心; 真空泵; 以及抽吸通道，其一端通向转台的表面，另一端连接到真空泵，用于将一些盘支撑件固定在盘片上，该碟片选自具有和不具有中心孔并放置在一些所述盘支撑构件上。

4. 发明授权

US4495407A System for focusing an optical head onto a flat surface 失效
标题翻译：用于将光学头聚焦到平坦表面上的系统
公开(公告)号：US4495407A
公开(公告)日：1985-01-22
申请号：US362613
申请日：1982-03-29
申请人： Hiroshi Kodama , Masaharu Sakamoto , Ken Ohshima , Shoji Yoshikawa , Kunio Yamamiya , Kiichi Kato
发明人： Hiroshi Kodama , Masaharu Sakamoto , Ken Ohshima , Shoji Yoshikawa , Kunio Yamamiya , Kiichi Kato
IPC分类号： G02B7/00 , G02B7/32 , G11B7/085 , G11B7/09 , G01J1/20
CPC分类号： G11B7/08511 , G02B7/32 , G11B7/0908
摘要： A system for focusing an optical head onto a flat surface has a mechanism for moving the optical head in the direction of the optical axis of the head and a mechanism for moving an objective lens in the optical head in the direction of the optical axis of the lens. A laser beam projected from the objective lens of the optical head is reflected on the flat surface, is reflected on the beam splitter, and is introduced into a detector unit. The detector unit thus generates a focusing signal having a level responsive to the distance between the objective lens and the surface. The optical head is lowered by the mechanism for moving the optical head in accordance with the focusing signal when it passes a predetermined point, and is operated to locate the focal point of the objective lens on the surface. Thereafter, the mechanism for moving the optical head becomes inoperative, and the mechanism for moving the objective lens is operated. This mechanism operates in accordance with the focusing signal and locates the focal point of the objective lens always on the surface.
摘要翻译：用于将光学头聚焦到平坦表面上的系统具有用于沿着光头的光轴方向移动光学头的机构，以及用于沿光学头的光轴方向移动光学头中的物镜的机构镜片。从光头的物镜投射的激光束在平坦表面上反射，在分束器上被反射，并被引入到检测器单元中。因此，检测器单元产生具有响应物镜与表面之间距离的电平的聚焦信号。通过用于在通过预定点时根据聚焦信号移动光学头的机构降低光学头，并且操作以将物镜的焦点定位在表面上。此后，用于移动光学头的机构变得不起作用，并且用于移动物镜的机构被操作。该机构根据聚焦信号进行操作，并将物镜的焦点始终位于表面上。

5. 发明授权

US4577320A Light power controlling apparatus 失效
标题翻译：光功率控制装置
公开(公告)号：US4577320A
公开(公告)日：1986-03-18
申请号：US575042
申请日：1984-01-30
申请人： Shoji Yoshikawa , Masaharu Sakamoto
发明人： Shoji Yoshikawa , Masaharu Sakamoto
IPC分类号： H01L33/00 , G11B7/1263 , G11B7/1267 , H01S5/06 , H01S5/0683 , H01S3/13
CPC分类号： H01S5/06832 , G11B7/125
摘要： A light power controlling apparatus contains a semiconductor laser and a photosensor for receiving part of light emitted from the semiconductor laser to produce a corresponding electrical signal. The semiconductor laser is connected to first and second current circuits. The first current circuit averages a voltage signal based on the electrical signal of the photosensor by a first low-pass filter, thereby to have a detected voltage. The detected voltage is compared with a desired voltage by an error amplifier. The error amplifier produces a signal representing a difference between the detected voltage and the desired voltage. The difference signal is integrated by an integrator. According to the integrated signal, the first current circuit supplies a forward current to the semiconductor laser. The second current circuit is set at a peak power value in a modulating mode according to a voltage signal of a peak power setting member. The second current circuit supplies to the semiconductor laser a forward current according to a modulating signal, with superposing on the forward current of the first current circuit. The modulating signal is averaged by a second low pass filter. A voltage representing the product of the averaged value and the peak power value is added to the desired value. The sum voltage is then supplied to the error amplifier where it is compared with the detected voltage.
摘要翻译：光功率控制装置包含半导体激光器和用于接收从半导体激光器发射的一部分光以产生相应的电信号的光电传感器。半导体激光器连接到第一和第二电流电路。第一电流电路根据光传感器的电信号通过第一低通滤波器平均电压信号，从而具有检测电压。通过误差放大器将检测到的电压与期望的电压进行比较。误差放大器产生表示检测到的电压和期望电压之间的差的信号。差分信号由积分器积分。根据积分信号，第一电流电路向半导体激光器提供正向电流。根据峰值功率设定部件的电压信号，将第二电流电路设定在调制模式的峰值功率值。第二电流电路根据调制信号向半导体激光器提供正向电流，并叠加在第一电流电路的正向电流上。调制信号由第二低通滤波器平均。表示平均值和峰值功率值的乘积的电压被加到期望值。然后将和电压提供给误差放大器，在其中与检测到的电压进行比较。

6. 发明申请

US20130228684A1 DETECTOR AND INSPECTING APPARATUS 有权
公开(公告)号：US20130228684A1
公开(公告)日：2013-09-05
申请号：US13853418
申请日：2013-03-29
申请人： Masahiro Hatakeyama , Shoji Yoshikawa , Kenichi Suematsu , Tsutomu Karimata , Nobuharu Noji
发明人： Masahiro Hatakeyama , Shoji Yoshikawa , Kenichi Suematsu , Tsutomu Karimata , Nobuharu Noji
IPC分类号： H01J37/26
CPC分类号： H01J37/261 , H01J37/244 , H01J37/28 , H01J2237/2441 , H01J2237/2446
摘要： An inspecting apparatus for reducing a time loss associated with a work for changing a detector is characterized by comprising a plurality of detectors 11, 12 for receiving an electron beam emitted from a sample W to capture image data representative of the sample W, and a switching mechanism M for causing the electron beam to be incident on one of the plurality of detectors 11, 12, where the plurality of detectors 11, 12 are disposed in the same chamber MC. The plurality of detectors 11, 12 can be an arbitrary combination of a detector comprising an electron sensor for converting an electron beam into an electric signal with a detector comprising an optical sensor for converting an electron beam into light and converting the light into an electric signal. The switching mechanism M may be a mechanical moving mechanism or an electron beam deflector.

7. 发明申请

US20120235036A1 INSPECTION DEVICE 有权
标题翻译：检查装置
公开(公告)号：US20120235036A1
公开(公告)日：2012-09-20
申请号：US13420731
申请日：2012-03-15
申请人： Masahiro Hatakeyama , Shoji Yoshikawa , Takeshi Murakami , Kenji Watanabe , Yoshihiko Naito , Yasushi Toma , Tsutomu Karimata , Takehide Hayashi , Kiwamu Tsukamoto , Tatsuya Kohama , Noboru Kobayashi
发明人： Masahiro Hatakeyama , Shoji Yoshikawa , Takeshi Murakami , Kenji Watanabe , Yoshihiko Naito , Yasushi Toma , Tsutomu Karimata , Takehide Hayashi , Kiwamu Tsukamoto , Tatsuya Kohama , Noboru Kobayashi
IPC分类号： G01N23/225
CPC分类号： H01J37/073 , G01N23/22 , G01N23/223 , G01N23/2251 , G01N2223/611 , H01J1/34 , H01J37/09 , H01J37/10 , H01J37/20 , H01J37/222 , H01J37/244 , H01J37/265 , H01J37/28 , H01J37/29 , H01J2237/0048 , H01J2237/022 , H01J2237/032 , H01J2237/038 , H01J2237/045 , H01J2237/0458 , H01J2237/0473 , H01J2237/0492 , H01J2237/061 , H01J2237/06333 , H01J2237/166 , H01J2237/186 , H01J2237/2002 , H01J2237/2007 , H01J2237/2008 , H01J2237/2448 , H01J2237/2482 , H01J2237/2485 , H01J2237/2817 , H01J2237/2855 , H01J2237/2857
摘要： An inspection device for inspecting a surface of an inspection object using a beam includes a beam generator capable of generating one of either charge particles or an electromagnetic wave as a beam, a primary optical system capable of guiding and irradiating the beam to the inspection object supported within a working chamber, a secondary optical system capable of including a first movable numerical aperture and a first detector which detects secondary charge particles generated from the inspection object, the secondary charge particles passing through the first movable numerical aperture, an image processing system capable of forming an image based on the secondary charge particles detected by the first detector; and a second detector arranged between the first movable numerical aperture and the first detector and which detects a location and shape at a cross over location of the secondary charge particles generated from the inspection object.
摘要翻译：用于使用光束检查检查对象的表面的检查装置包括能够产生电荷粒子或电磁波之一作为光束的光束发生器，能够将所述光束引导并照射到被检查对象的主光学系统在工作室内，能够包括第一可移动数值孔径的二次光学系统和检测从检查对象产生的二次电荷粒子的第一检测器，通过第一可移动数值孔径的二次电荷粒子，能够基于由所述第一检测器检测到的次级电荷粒子形成图像; 以及第二检测器，其布置在第一可移动数值孔径和第一检测器之间，并且检测在从检查对象生成的次级充电颗粒的交叉位置处的位置和形状。

8. 发明授权

US08053726B2 Inspection system by charged particle beam and method of manufacturing devices using the system 有权
标题翻译：带电粒子束的检测系统及使用该系统的制造装置的方法
公开(公告)号：US08053726B2
公开(公告)日：2011-11-08
申请号：US12216233
申请日：2008-07-01
申请人： Mamoru Nakasuji , Nobuharu Noji , Tohru Satake , Masahiro Hatakeyama , Toshifumi Kimba , Hirosi Sobukawa , Shoji Yoshikawa , Takeshi Murakami , Kenji Watanabe , Tsutomu Karimata , Shin Oowada , Mutsumi Saito , Yuichiro Yamazaki , Takamitsu Nagai , Ichirota Nagahama
发明人： Mamoru Nakasuji , Nobuharu Noji , Tohru Satake , Masahiro Hatakeyama , Toshifumi Kimba , Hirosi Sobukawa , Shoji Yoshikawa , Takeshi Murakami , Kenji Watanabe , Tsutomu Karimata , Shin Oowada , Mutsumi Saito , Yuichiro Yamazaki , Takamitsu Nagai , Ichirota Nagahama
IPC分类号： H01J37/28
CPC分类号： H01J29/70 , G01N23/225 , G01N23/2251 , G01N23/227 , H01J37/06 , H01J37/073 , H01J37/141 , H01J37/185 , H01J37/20 , H01J37/222 , H01J37/244 , H01J37/266 , H01J37/28 , H01J2237/082 , H01J2237/202 , H01J2237/20228 , H01J2237/204 , H01J2237/22 , H01J2237/24564 , H01J2237/2806 , H01J2237/2816 , H01J2237/2817 , H01L21/6719 , H01L21/67213
摘要： An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam source, and a detector for detecting the secondary electron image projected by the electron-optical system; a stage system 50 for holding and moving the object relative to the electron-optical system; a mini-environment chamber 20 for supplying a clean gas to the object to prevent dust from contacting to the object; a working chamber 31 for accommodating the stage device, the working chamber being controllable so as to have a vacuum atmosphere; at least two loading chambers 41, 42 disposed between the mini-environment chamber and the working chamber, adapted to be independently controllable so as to have a vacuum atmosphere; and a loader 60 for transferring the object to the stage system through the loading chambers.
摘要翻译：电子束检查装置包括：电子光学装置70，具有用于从电子束源向一个电子束照射物体的电子 - 光学系统;以及用于检测由电子束投射的二次电子图像的检测器，光学系统; 用于相对于电子 - 光学系统保持和移动物体的平台系统50; 微型环境室20，用于向物体供应清洁气体，以防止灰尘与物体接触; 用于容纳平台装置的工作室31，工作室可控制为具有真空气氛; 设置在迷你环境室和工作室之间的至少两个装载室41,42适于独立控制以具有真空气氛; 以及用于通过装载室将物体传送到舞台系统的装载器60。

9. 发明授权

US07741601B2 Testing apparatus using charged particles and device manufacturing method using the testing apparatus 有权
标题翻译：使用带电粒子的测试装置和使用该测试装置的装置制造方法
公开(公告)号：US07741601B2
公开(公告)日：2010-06-22
申请号：US12073892
申请日：2008-03-11
申请人： Nobuharu Noji , Tohru Satake , Hirosi Sobukawa , Toshifumi Kimba , Masahiro Hatakeyama , Shoji Yoshikawa , Takeshi Murakami , Kenji Watanabe , Tsutomu Karimata , Kenichi Suematsu , Yutaka Tabe , Ryo Tajima , Keiichi Tohyama
发明人： Nobuharu Noji , Tohru Satake , Hirosi Sobukawa , Toshifumi Kimba , Masahiro Hatakeyama , Shoji Yoshikawa , Takeshi Murakami , Kenji Watanabe , Tsutomu Karimata , Kenichi Suematsu , Yutaka Tabe , Ryo Tajima , Keiichi Tohyama
IPC分类号： G01N23/225 , G01N23/00 , A61N5/00
CPC分类号： H01J37/20 , G01N23/2204 , G01N23/225 , H01J37/05 , H01J37/28 , H01J2237/202 , H01J2237/2441 , H01J2237/2446 , H01J2237/2801 , H01J2237/2817 , H01L21/6833 , H01L2223/54466
摘要： A system for further enhancing speed, i.e. improving throughput in a SEM-type inspection apparatus is provided. An inspection apparatus for inspecting a surface of a substrate produces a crossover from electrons emitted from an electron beam source 25•1, then forms an image under a desired magnification in the direction of a sample W to produce a crossover. When the crossover is passed, electrons as noises are removed from the crossover with an aperture, an adjustment is made so that the crossover becomes a parallel electron beam to irradiate the substrate in a desired sectional form. The electron beam is produced such that the unevenness of illuminance is 10% or less. Electrons emitted from the sample W are detected by a detector 25•11.
摘要翻译：提供了一种用于进一步提高速度的系统，即提高SEM型检查装置中的生产量。用于检查基板的表面的检查装置产生从电子束源25·1发射的电子的交叉，然后在样品W的方向上以期望的倍率形成图像以产生交叉。当交叉通过时，作为噪声的电子从具有孔的交叉点移除，进行调整，使得交叉成为平行电子束以以期望的分段形式照射基板。产生电子束，使照度不均匀为10％以下。从样品W发射的电子被检测器25·11检测。

10. 发明申请

US20090050822A1 Electron beam apparatus and method of manufacturing semiconductor device using the apparatus 有权
公开(公告)号：US20090050822A1
公开(公告)日：2009-02-26
申请号：US11819026
申请日：2007-06-25
申请人： Mamoru Nakasuji , Tohru Satake , Kenji Watanabe , Takeshi Murakami , Nobuharu Noji , Hirosi Sobukawa , Tsutomu Karimata , Shoji Yoshikawa , Toshifumi Kimba , Shin Oowada , Mutsumi Saito , Muneki Hamashima , Toru Takagi , Naoto Kihara , Hiroshi Nishimura
发明人： Mamoru Nakasuji , Tohru Satake , Kenji Watanabe , Takeshi Murakami , Nobuharu Noji , Hirosi Sobukawa , Tsutomu Karimata , Shoji Yoshikawa , Toshifumi Kimba , Shin Oowada , Mutsumi Saito , Muneki Hamashima , Toru Takagi , Naoto Kihara , Hiroshi Nishimura
IPC分类号： A61N5/00
CPC分类号： H01J37/185 , G01N23/225 , G01N23/2251 , H01J37/06 , H01J37/073 , H01J37/20 , H01J37/222 , H01J37/244 , H01J37/28 , H01J2237/082 , H01J2237/202 , H01J2237/20228 , H01J2237/204 , H01J2237/22 , H01J2237/24564 , H01J2237/2806 , H01J2237/2816 , H01J2237/2817
摘要： The present invention provides an electron beam apparatus for evaluating a sample surface, which has a primary electro-optical system for irradiating a sample with a primary electron beam, a detecting system, and a secondary electro-optical system for directing secondary electron beams emitted from the sample surface by the irradiation of the primary electron beam to the detecting system.

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