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    • 3. 发明授权
    • Deposition method and method for manufacturing light-emitting device
    • 沉积方法和制造发光器件的方法
    • US08802185B2
    • 2014-08-12
    • US12472562
    • 2009-05-27
    • Shunpei YamazakiKoichiro TanakaHisao IkedaSatoshi Seo
    • Shunpei YamazakiKoichiro TanakaHisao IkedaSatoshi Seo
    • B05D5/12
    • H01L51/0005H01L27/3211H01L51/56
    • An object is to provide a deposition method for smoothly obtaining desired pattern shapes of material layers and a method for manufacturing a light-emitting device while throughput is improved when a plurality of different material layers is stacked on a substrate. A material layer is selectively formed in advance in a position overlapped with a light absorption layer over a first substrate by pump feeding. Three kinds of light-emitting layers are deposited on one deposition substrate. This first substrate and a second substrate that is to be a deposition target substrate are arranged to face each other, and the light absorption layer is heated by being irradiated with light, whereby a film is deposited on the second substrate. Three kinds of light-emitting layers can be deposited with positional accuracy by performing only one position alignment before light irradiation.
    • 本发明的目的是提供一种用于平滑地获得材料层的期望图案形状的沉积方法,以及当多个不同的材料层堆叠在基底上时,提高生产能力的方法。 预先在与第一基板上的光吸收层重叠的位置通过泵送来选择性地形成材料层。 在一个沉积衬底上沉积三种发光层。 该第一基板和作为沉积靶基板的第二基板被布置为彼此面对,并且通过照射光来加热光吸收层,由此在第二基板上沉积膜。 可以通过在光照射之前仅进行一个位置对准来以位置精度沉积三种发光层。
    • 6. 发明申请
    • Method for Fabricating Light Emitting Device
    • 制造发光装置的方法
    • US20100035371A1
    • 2010-02-11
    • US12536069
    • 2009-08-05
    • Shunpei YamazakiKoichiro TanakaHisao IkedaSatoshi Seo
    • Shunpei YamazakiKoichiro TanakaHisao IkedaSatoshi Seo
    • H01L21/26
    • H01L51/0009C23C14/048C23C14/12C23C14/28H01L51/0013H01L51/56
    • By using a first substrate which has a light-transmitting property and whose first face is provided with a light-absorbing layer, a mixture including an organic compound and an inorganic material is irradiated with light having a wavelength, which is absorbed by the inorganic material to heat the mixture, and thereby a film of the organic compound included in the mixture is formed on the first face of the first substrate. Then, the first face of the first substrate and a deposition surface of a second substrate are arranged to be adjacent to or in contact with each other, irradiation with light having a wavelength, which is absorbed by the light-absorbing layer is conducted from a second face side of the first substrate, to heat the organic compound, and thereby at least part of the organic compound is formed as a film on the deposition surface of the second substrate.
    • 通过使用具有透光性的第一基板,其第一面设置有光吸收层,将由有机化合物和无机材料构成的混合物照射由无机材料吸收的波长的光 加热混合物,由此在第一基板的第一面上形成包含在混合物中的有机化合物的膜。 然后,第一基板的第一面和第二基板的沉积表面被布置成彼此相邻或彼此接触,用由光吸收层吸收的具有波长的光的照射从 第一基板的第二面侧,以加热有机化合物,由此至少部分有机化合物在第二基板的沉积表面上形成为膜。
    • 7. 发明申请
    • Deposition Method and Method for Manufacturing Light-Emitting Device
    • 制造发光装置的沉积方法和方法
    • US20090297694A1
    • 2009-12-03
    • US12472562
    • 2009-05-27
    • Shunpei YamazakiKoichiro TanakaHisao IkedaSatoshi Seo
    • Shunpei YamazakiKoichiro TanakaHisao IkedaSatoshi Seo
    • B05D5/12
    • H01L51/0005H01L27/3211H01L51/56
    • An object is to provide a deposition method for smoothly obtaining desired pattern shapes of material layers and a method for manufacturing a light-emitting device while throughput is improved when a plurality of different material layers is stacked on a substrate. A material layer is selectively formed in advance in a position overlapped with a light absorption layer over a first substrate by pump feeding. Three kinds of light-emitting layers are deposited on one deposition substrate. This first substrate and a second substrate that is to be a deposition target substrate are arranged to face each other, and the light absorption layer is heated by being irradiated with light, whereby a film is deposited on the second substrate. Three kinds of light-emitting layers can be deposited with positional accuracy by performing only one position alignment before light irradiation.
    • 本发明的目的是提供一种用于平滑地获得材料层的期望图案形状的沉积方法,以及当多个不同的材料层堆叠在基底上时,提高生产能力的方法。 预先在与第一基板上的光吸收层重叠的位置通过泵送来选择性地形成材料层。 在一个沉积衬底上沉积三种发光层。 该第一基板和作为沉积靶基板的第二基板被布置为彼此面对,并且通过照射光来加热光吸收层,由此在第二基板上沉积膜。 可以通过在光照射之前仅进行一个位置对准来以位置精度沉积三种发光层。
    • 8. 发明授权
    • Method for fabricating light emitting device
    • 制造发光器件的方法
    • US08071404B2
    • 2011-12-06
    • US12536069
    • 2009-08-05
    • Shunpei YamazakiKoichiro TanakaHisao IkedaSatoshi Seo
    • Shunpei YamazakiKoichiro TanakaHisao IkedaSatoshi Seo
    • H01L21/00
    • H01L51/0009C23C14/048C23C14/12C23C14/28H01L51/0013H01L51/56
    • By using a first substrate which has a light-transmitting property and whose first face is provided with a light-absorbing layer, a mixture including an organic compound and an inorganic material is irradiated with light having a wavelength, which is absorbed by the inorganic material to heat the mixture, and thereby a film of the organic compound included in the mixture is formed on the first face of the first substrate. Then, the first face of the first substrate and a deposition surface of a second substrate are arranged to be adjacent to or in contact with each other, irradiation with light having a wavelength, which is absorbed by the light-absorbing layer is conducted from a second face side of the first substrate, to heat the organic compound, and thereby at least part of the organic compound is formed as a film on the deposition surface of the second substrate.
    • 通过使用具有透光性的第一基板,其第一面设置有光吸收层,将由有机化合物和无机材料构成的混合物照射由无机材料吸收的波长的光 加热混合物,由此在第一基板的第一面上形成包含在混合物中的有机化合物的膜。 然后,第一基板的第一面和第二基板的沉积表面被布置成彼此相邻或彼此接触,用由光吸收层吸收的具有波长的光的照射从 第一基板的第二面侧,以加热有机化合物,由此至少部分有机化合物在第二基板的沉积表面上形成为膜。