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31. 发明授权

US08884608B2 AFM-coupled microscale radiofrequency probe for magnetic resonance imaging and spectroscopy 有权
标题翻译：用于磁共振成像和光谱的AFM耦合微型射频探头
公开(公告)号：US08884608B2
公开(公告)日：2014-11-11
申请号：US14351055
申请日：2012-10-10
申请人： Purdue Research Foundation
发明人： Corey P. Neu , Babak Ziaie , Teimour Maleki-Jafarabadi , Charilaos Mousoulis
IPC分类号： G01R33/12 , G01R33/20 , G01N24/08 , G01Q70/16 , G01Q30/02 , G01R33/48
CPC分类号： G01R33/4808 , G01N24/08 , G01Q20/04 , G01Q30/02 , G01Q60/08 , G01Q60/52 , G01Q70/16 , G01R33/341 , G01R33/46
摘要： The present disclosure is discloses the development of a new device, system, and method that combines advantages of magnetic resonance and atomic force microscopy technologies, and the utility of the new device, system, and method for a wide range of biomedical and clinical researchers. According to one aspect of the present disclosure, a device for micro-scale spectroscopy is disclosed. The micro-scale spectroscopy device includes a beam having a distal end, a proximal end, a top surface and a bottom surface, where the beam is attached to an anchor at the proximal end and further includes a tip extending substantially perpendicular from the bottom surface at or near the distal end, and a coil having at least one turn mounted to the top surface of the beam at or near the distal end opposite the tip, where the coil is capable of both transmitting and sensing electromagnetic radiation.
摘要翻译：本公开公开了一种结合磁共振和原子力显微技术的优点的新器件，系统和方法的开发，以及用于广泛的生物医学和临床研究者的新器件，系统和方法的实用性。根据本公开的一个方面，公开了一种用于微尺度光谱的装置。微型光谱装置包括具有远端，近端，顶表面和底表面的光束，其中光束附接到近端处的锚固件，并且还包括从底表面基本垂直延伸的尖端在远端处或附近，以及具有至少一个匝的线圈，其安装到梁的顶表面处，或者与尖端相对的远端附近，其中线圈能够传输和感测电磁辐射。

32. 发明申请

US20140223616A1 Apparatus of Analyzing a Sample and a Method for the Same 有权
标题翻译：分析样品的方法及其方法
公开(公告)号：US20140223616A1
公开(公告)日：2014-08-07
申请号：US13757543
申请日：2013-02-01
申请人： Taiwan Semiconductor Manufacturing Company, Ltd.
发明人： Yen-Kai Huang , Yuan-Chih Chu
IPC分类号： G01Q30/02
CPC分类号： G01N21/9501 , G01N21/35 , G01N21/94 , G01N23/2251 , G01N2021/3595 , G01N2223/611 , H01J37/20
摘要： The apparatus includes a probe tip configured to scan a substrate having a defect to attach the defect on the probe tip while scanning the substrate, a cantilever configured to integrate a holder holding at least one probe tip, a stage configured to secure the substrate, an electromagnetic radiation source configured to generate the electromagnetic radiation beam, and an electromagnetic radiation detector configured to receive the first electromagnetic radiation signal and the second electromagnetic radiation signal. A first electromagnetic radiation signal is generated while an electromagnetic radiation beam focuses on the probe tip. A second electromagnetic radiation signal is generated while the electromagnetic radiation beam focuses on the sample attached on the probe tip. A chemical analysis of the sample is executed by comparing a difference between the first electromagnetic radiation signal and the second electromagnetic radiation signal.
摘要翻译：该装置包括：探针头，被配置为扫描具有缺陷的基底，以在扫描基底时将探针末端附着在缺陷上;悬臂构造成将保持有至少一个探针尖端的保持器整合，构造成固定基底的平台被配置为产生电磁辐射束的电磁辐射源和被配置为接收第一电磁辐射信号和第二电磁辐射信号的电磁辐射检测器。当电磁辐射束聚焦在探针尖端时产生第一电磁辐射信号。当电磁辐射束聚焦在附着在探针尖端上的样品上时，产生第二电磁辐射信号。通过比较第一电磁辐射信号和第二电磁辐射信号之间的差异来执行样品的化学分析。

33. 发明授权

US08656510B1 System, apparatus, and method for simultaneous single molecule atomic force microscopy and fluorescence measurements 有权
标题翻译：用于同时单分子原子力显微镜和荧光测量的系统，装置和方法
公开(公告)号：US08656510B1
公开(公告)日：2014-02-18
申请号：US13569927
申请日：2012-08-08
申请人： Sanjeevi Sivasankar , Hui Li
发明人： Sanjeevi Sivasankar , Hui Li
IPC分类号： G01Q30/02
CPC分类号： G01Q30/02
摘要： An apparatus, system, and method of integrating atomic force microscopy (AFM) and fluorescence microscopy (FM). One particular application is to simultaneous single molecular fluorescence with AFM force spectroscopy. Included is a methodology to align the AFM tip and a molecule or other nanoscale object with high accuracy.
摘要翻译：整合原子力显微镜（AFM）和荧光显微镜（FM）的装置，系统和方法。一个特别的应用是用AFM力谱同时进行单分子荧光。包括一种用于将AFM尖端和分子或其他纳米尺度物体对准高精度的方法。

34. 发明授权

US07770232B2 Scanning probe microscope system 有权
标题翻译：扫描探针显微镜系统
公开(公告)号：US07770232B2
公开(公告)日：2010-08-03
申请号：US11887276
申请日：2006-03-16
申请人： Akira Saito , Masakazu Aono , Yuji Kuwahara , Jyunpei Maruyama , Ken Manabe
发明人： Akira Saito , Masakazu Aono , Yuji Kuwahara , Jyunpei Maruyama , Ken Manabe
IPC分类号： G01Q30/02
CPC分类号： G01N23/225 , G01Q30/02 , G01Q60/12
摘要： A scanning probe microscope system capable of identifying an element with atomic scale spatial resolution comprises: an X-ray irradiation means for irradiating a measurement object with high-brilliance monochromatic X-rays having a beam diameter smaller than 1 mm; a probe arranged to oppose to the measurement object; a processing means for detecting and processing a tunneling current through the probe; and a scanning probe microscope having an alignment means for relatively moving the measurement object, the probe, and the incident position of the high-brilliance monochromatic X-rays to the measurement object.
摘要翻译：能够识别具有原子尺度空间分辨率的元件的扫描探针显微镜系统包括：X射线照射装置，用于用光束直径小于1mm的高亮度单色X射线照射测量对象; 设置成与测量对象相对的探针; 用于检测和处理穿过探针的隧穿电流的处理装置; 以及扫描探针显微镜，具有用于将测量对象，探针和高亮度单色X射线的入射位置相对移动到测量对象的对准装置。

35. 发明申请

US20050269495A1 Compound scanning probe microscope 有权
标题翻译：复合扫描探针显微镜
公开(公告)号：US20050269495A1
公开(公告)日：2005-12-08
申请号：US11142714
申请日：2005-06-01
申请人： Takahiko Kakemizu
发明人： Takahiko Kakemizu
IPC分类号： G01Q10/00 , G01Q30/02 , G01Q30/04 , G02B21/36 , H01J3/14
CPC分类号： G02B21/367 , G01Q30/025 , G01Q30/04
摘要： An optical observation image obtained through an objective lens is displayed on a display unit, and a marker indicating a position of a tip portion of a cantilever is displayed on the optical observation image displayed on the display unit.
摘要翻译：在显示单元上显示通过物镜获得的光学观察图像，并且在显示单元上显示的光学观察图像上显示指示悬臂的末端部分的位置的标记。

36. 发明授权

US06963067B2 Scanning electron microscope and sample observing method using it 有权
标题翻译：扫描电子显微镜和使用它的样品观察方法
公开(公告)号：US06963067B2
公开(公告)日：2005-11-08
申请号：US10750838
申请日：2004-01-05
申请人： Shuichi Takeuchi , Mine Nakagawa , Mitsugu Sato , Atsushi Takane , Kazutaka Nimura
发明人： Shuichi Takeuchi , Mine Nakagawa , Mitsugu Sato , Atsushi Takane , Kazutaka Nimura
IPC分类号： G01B15/04 , G01Q30/02 , G01Q30/04 , H01J37/21 , H01J37/22 , H01J37/244 , H01J37/28 , G21K7/00
CPC分类号： H01J37/21 , H01J37/28
摘要： The invention provides a sample observation method capable of understanding the three-dimensional shape of a sample in a wider range. The observation method of the invention calculates heights (height differences) in the whole domain of an image, from plural sheets of images of different field-of-view angles, being in focus over the whole image, attained by means of the focal depth expanding function to thereby create a map (Z map) of the height information by each pixel, and displays a three-dimensional image as a bird's-eye view. The method also displays to superpose a Z map attained from image signals reflecting the surface structure on a Z map attained from image signals reflecting the composition information with different colors, which makes it possible to clearly understand the spatial distribution of a substance of unique composition inside the sample.
摘要翻译：本发明提供一种能够更宽范围地理解样品的三维形状的样本观察方法。本发明的观察方法，通过使焦点深度扩大获得的图像的整个图像的整个区域的高度（高度差）从不同的视野角的多张图像对焦在整个图像上。功能，从而由每个像素创建高度信息的地图（Z图），并将三维图像显示为鸟瞰图。该方法还显示为从反映具有不同颜色的合成信息的图像信号获得的Z映射上反映表面结构的图像信号中叠加的Z映射，这使得可以清楚地了解内部独特成分的物质的空间分布例子。

37. 发明授权

US06960766B2 Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method 有权
标题翻译：摆动目标延迟浸没透镜电子光学聚焦，偏转和信号采集系统及方法
公开(公告)号：US06960766B2
公开(公告)日：2005-11-01
申请号：US10601124
申请日：2003-06-20
申请人： Zhong-Wei Chen
发明人： Zhong-Wei Chen
IPC分类号： G01Q10/00 , G01Q30/02 , H01J37/141 , H01J37/28 , H01J37/147
CPC分类号： H01J37/28 , H01J37/141 , H01J2237/04756 , H01J2237/1035
摘要： A swinging objective retarding immersion lens system and method therefore which provide a low voltage electron beam with high beam current, relatively high spatial resolution, a relative large scan field, and high signal collection efficiency. The objective lens includes a magnetic lens for generating a magnetic field in the vicinity of the specimen to focus the particles of the particle beam on the specimen, an electrode having a potential for providing a retarding field to the particle beam near the specimen to reduce the energy of the particle beam when the beam collides with the specimen; a deflection system including a plurality of deflection units situated along the beam axis for deflecting the particle beam to allow scanning on the specimen with large area, at least one of the deflection units located in the retarding field of the beam, the remainder of the deflection units located within the central bore of the magnetic lens; and a annular detection unit with a relatively small aperture, located underneath the primary beam define aperture, to capture secondary electron (SE) and backscattered electrons (BSE).
摘要翻译：一种摆动物镜延迟浸没透镜系统及其方法，其提供具有高光束电流的低电压电子束，相对高的空间分辨率，相对大的扫描场和高的信号收集效率。物镜包括用于在样本附近产生磁场以将粒子束的粒子聚焦在样本上的磁性透镜，具有向样本附近的粒子束提供延迟场的电位的电极，以减少当光束与样品碰撞时，粒子束的能量; 偏转系统包括沿着光束轴线设置的多个偏转单元，用于偏转粒子束以允许对具有大面积的样本进行扫描，位于光束的延迟场中的至少一个偏转单元，偏转的剩余部分位于磁性透镜的中心孔内的单元; 和具有相对较小孔径的环形检测单元，位于主光束下方限定孔，以捕获二次电子（SE）和反向散射电子（BSE）。

38. 发明授权

US06956211B2 Charged particle beam apparatus and charged particle beam irradiation method 有权
标题翻译：带电粒子束装置和带电粒子束照射法
公开(公告)号：US06956211B2
公开(公告)日：2005-10-18
申请号：US10656166
申请日：2003-09-08
申请人： Mitsugu Sato , Hideo Todokoro , Yoichi Ose , Makoto Ezumi , Noriaki Arai , Takashi Doi
发明人： Mitsugu Sato , Hideo Todokoro , Yoichi Ose , Makoto Ezumi , Noriaki Arai , Takashi Doi
IPC分类号： G01Q10/00 , G01Q20/02 , G01Q30/02 , H01J3/14 , H01J29/70 , H01J37/153 , H01J37/28
CPC分类号： H01J37/153 , H01J2237/1506 , H01J2237/1534 , H01J2237/28
摘要： A charged particle beam apparatus produces little reduction in resolution when the beam is inclined with respect to a sample. The trajectory of a primary beam 4 is deflected by a deflector or changed by a movable aperture such that the beam is incident on a plurality of lenses 6 and 7 off the axes thereof. A means is provided to control the off-axis trajectory of the beam such that an aberration produced by the objective lens 7 when the beam is inclined can be canceled by an aberration produced by the other lens 6.
摘要翻译：当束相对于样品倾斜时，带电粒子束装置的分辨率几乎不降低。主光束4的轨迹被偏转器偏转或者被可动孔径改变，使得光束入射到多个透镜6和7的轴线上。提供了一种用于控制光束的离轴轨迹的装置，使得当光束倾斜时由物镜7产生的像差可以被另一透镜6产生的像差消除。

39. 发明申请

US20050223785A1 Scanning probe device and processing method by scanning probe 有权
标题翻译：通过扫描探头扫描探针装置和处理方法
公开(公告)号：US20050223785A1
公开(公告)日：2005-10-13
申请号：US11096875
申请日：2005-04-01
申请人： Naoya Watanabe , Osamu Takaoka
发明人： Naoya Watanabe , Osamu Takaoka
IPC分类号： G01B21/30 , B82B3/00 , B82Y10/00 , B82Y35/00 , B82Y40/00 , G01B5/28 , G01Q30/02 , G01Q60/34 , G01Q80/00 , G03F1/72 , H01L21/027
CPC分类号： G01Q60/32 , G01Q80/00 , G03F1/72
摘要： There is provided a device in which a probe can be used for both of observation and correction, and which can, even if a next generation photomask of ultra minute structure is made an object, perform a desired processing without injuring a normal portion in a process of obtaining information of a position and a shape of a defect part, and without impairing the probe also at a processing time. It has been adapted such that, at an observation time, a contact pressure between a probe and a mask is reduced to 0.1 nN by applying a vibration of 1 kHz to 1 MHz to the probe. It has been adapted such that a cantilever used in the present invention is formed by a silicon material of 100-600 μm in length and 5-50 μm in thickness and, at the observation time, the probe contacts with the mask at the contact pressure of 0.1 nN and, at the processing time, a defect correction can be performed by causing the probe to contact with the mask at the contact pressure of 10 nN to 1 mN.
摘要翻译：提供了一种可以将探头用于观察和校正的装置，并且即使下一代超微小结构的光掩模被制成物体也可以进行所需的处理而不损害处理中的正常部分获得缺陷部分的位置和形状的信息，并且在处理时间也不损害探针。已经适应使得在观察时间，通过向探针施加1kHz至1MHz的振动，将探针和掩模之间的接触压力降低至0.1nN。已经适应使得本发明中使用的悬臂由长度为100〜600μm，厚度为5-50μm的硅材料形成，并且在观察时刻，探针以接触压力与掩模接触 0.1nN，并且在处理时间，可以通过使探针以10nN至1mN的接触压力与掩模接触来进行缺陷校正。

40. 发明授权

US06953927B2 Method and system for scanning apertureless fluorescence microscope 失效
标题翻译：扫描无孔荧光显微镜的方法和系统
公开(公告)号：US06953927B2
公开(公告)日：2005-10-11
申请号：US10616896
申请日：2003-07-09
申请人： Stephen R. Quake , Guillaume Lessard , Lawrence A. Wade , Jordan M. Gerton
发明人： Stephen R. Quake , Guillaume Lessard , Lawrence A. Wade , Jordan M. Gerton
IPC分类号： G01B11/30 , G01Q30/02 , G01Q30/04 , G01Q30/18 , G01Q40/00 , G01Q60/06 , G01Q60/20 , G01Q70/12 , G02B21/00 , G02B21/16 , H01J3/14 , H01J5/16 , H01J40/14
CPC分类号： G01Q60/20 , G01Q30/025 , G01Q30/04 , G01Q30/18 , G01Q40/00 , G01Q60/06 , G01Q70/12 , G02B21/16 , Y10S977/862
摘要： Methods and systems for operating an apertureless microscope for observing one or more features to a molecular sensitivity on objects are described. More particularly, the method includes moving a tip of a probe coupled to a cantilever in a vicinity of a feature of a sample, which emits one or more photons at a detected rate relative to a background rate of the sample based upon the presence of the tip of the probe in the vicinity of the feature. The method modifies the detected rate of the feature of the sample, whereupon the modifying of the detected rate causes the feature of the sample to enhance relative to background rate of the feature.
摘要翻译：描述了用于操作无孔显微镜以观察一个或多个特征以使物体上的分子灵敏度的方法和系统。更具体地，该方法包括将耦合到悬臂的探针的尖端移动到样品特征附近，基于样品的存在以相对于样品的背景速率以检测的速率发射一个或多个光子探头尖端附近的特征。该方法修改检测到的样本特征的速率，因此修改检测到的速率导致样本的特征相对于特征的背景速率增强。

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